JPH0226247U - - Google Patents

Info

Publication number
JPH0226247U
JPH0226247U JP10363588U JP10363588U JPH0226247U JP H0226247 U JPH0226247 U JP H0226247U JP 10363588 U JP10363588 U JP 10363588U JP 10363588 U JP10363588 U JP 10363588U JP H0226247 U JPH0226247 U JP H0226247U
Authority
JP
Japan
Prior art keywords
storage container
transfer device
wafer
wafer transfer
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10363588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10363588U priority Critical patent/JPH0226247U/ja
Publication of JPH0226247U publication Critical patent/JPH0226247U/ja
Pending legal-status Critical Current

Links

JP10363588U 1988-08-04 1988-08-04 Pending JPH0226247U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10363588U JPH0226247U (US20030199744A1-20031023-C00003.png) 1988-08-04 1988-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10363588U JPH0226247U (US20030199744A1-20031023-C00003.png) 1988-08-04 1988-08-04

Publications (1)

Publication Number Publication Date
JPH0226247U true JPH0226247U (US20030199744A1-20031023-C00003.png) 1990-02-21

Family

ID=31334647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10363588U Pending JPH0226247U (US20030199744A1-20031023-C00003.png) 1988-08-04 1988-08-04

Country Status (1)

Country Link
JP (1) JPH0226247U (US20030199744A1-20031023-C00003.png)

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