JPH0226231U - - Google Patents

Info

Publication number
JPH0226231U
JPH0226231U JP10428088U JP10428088U JPH0226231U JP H0226231 U JPH0226231 U JP H0226231U JP 10428088 U JP10428088 U JP 10428088U JP 10428088 U JP10428088 U JP 10428088U JP H0226231 U JPH0226231 U JP H0226231U
Authority
JP
Japan
Prior art keywords
micropatterns
densely arranged
dummy
areas
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10428088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10428088U priority Critical patent/JPH0226231U/ja
Publication of JPH0226231U publication Critical patent/JPH0226231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10428088U 1988-08-05 1988-08-05 Pending JPH0226231U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10428088U JPH0226231U (it) 1988-08-05 1988-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10428088U JPH0226231U (it) 1988-08-05 1988-08-05

Publications (1)

Publication Number Publication Date
JPH0226231U true JPH0226231U (it) 1990-02-21

Family

ID=31335857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10428088U Pending JPH0226231U (it) 1988-08-05 1988-08-05

Country Status (1)

Country Link
JP (1) JPH0226231U (it)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196424A (ja) * 1989-01-25 1990-08-03 Rohm Co Ltd 半導体装置の製造方法
JPH0669214A (ja) * 1991-03-01 1994-03-11 Nec Corp 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196424A (ja) * 1989-01-25 1990-08-03 Rohm Co Ltd 半導体装置の製造方法
JPH0669214A (ja) * 1991-03-01 1994-03-11 Nec Corp 半導体装置

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