JPH02261925A - Dynamic pressure bearing device - Google Patents

Dynamic pressure bearing device

Info

Publication number
JPH02261925A
JPH02261925A JP8155189A JP8155189A JPH02261925A JP H02261925 A JPH02261925 A JP H02261925A JP 8155189 A JP8155189 A JP 8155189A JP 8155189 A JP8155189 A JP 8155189A JP H02261925 A JPH02261925 A JP H02261925A
Authority
JP
Japan
Prior art keywords
thrust plate
thrust
plate
fixed plate
bearing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8155189A
Other languages
Japanese (ja)
Inventor
Mikio Nakasugi
幹夫 中杉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8155189A priority Critical patent/JPH02261925A/en
Priority to DE69025485T priority patent/DE69025485T2/en
Priority to EP90303503A priority patent/EP0391640B1/en
Publication of JPH02261925A publication Critical patent/JPH02261925A/en
Priority to US07/735,172 priority patent/US5096309A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To raised the bearing assembly accuracy, and maintain the high accuracy, and obtain the stable and fine characteristic by pressing-in a fixed plate between thick parts of a thrust plate to joint them, and making a top surface of the fixed plate abut to the inner surface of a thin part of the thrust plate. CONSTITUTION:A thrust plate 3 and a fixed plate 2b are formed so that a step part where a thickness of the inner periphery of the thrust plate 3 is thinner than a thickness of the periphery is jointed with a peripheral surface of a projecting part 2c of the fixed plate 2b and that the inner periphery of the thrust plate 3 abuts on the projecting part 2c of the fixed plate 2b. The projecting part 2c of the fixed plate 2 is thereby fitted in a lower recessed part of the thrust plate 3, and the two 2b, 3 are jointed. The step where a thickness of the inner periphery is thinner than a thickness of the periphery is provided opposite to a thrust bearing surface of the thrust plate 3, and the thin inner periphery abuts on the fixed plate 2b. The form accuracy of the thrust plate 3 is thereby facilitated, and the accuracy at the time of assembly is also facilitated, while a cost is made inexpensive.

Description

【発明の詳細な説明】 [a業上の利用分野] 本発明は動圧軸受装置に関する。この装置は例えばレー
ザービームプリンタ等に使用される偏向走査装置に使用
される回転ユニット用軸受として好適なものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application in Industry] The present invention relates to a hydrodynamic bearing device. This device is suitable as a bearing for a rotating unit used in a deflection scanning device used, for example, in a laser beam printer.

[従来の技術] 従来の動圧軸受装置の構成を第6図に示す、ラジアル面
にヘリングボーン状の浅漬10が刻まれた軸1と、この
軸1と回転可能に嵌合しているスリーブ2と、軸1の端
面とスリーブ2に結合されたスラスト方向に保持するス
ラスト板3にスパイラル状の浅溝が刻まれ、軸1とスリ
ーブ2およびスラスト板3との間に潤滑流体が満たされ
ている。軸1が回転すると潤滑流体はこれらの間隙を流
れる。従って、ラジアル面ではへリングボーン状の浅溝
10によりラジアル方向に圧力を発生し、非接触状態と
なる。またスラスト面においても同様にスパイラル状の
浅溝11によって圧力を発生し、軸を非接触に支持する
。また、スラスト板3には、中央に穴7が設けられ、周
辺部に穴8が設けられ、穴7と穴8が連通する溝9が設
けられる。これにより潤滑流体がスラスト板周囲の循環
する。このためスラスト軸受形成部分の外周側の負圧発
生の防止、また熱の拡散が可能になる。
[Prior Art] The configuration of a conventional hydrodynamic bearing device is shown in FIG. 6, which includes a shaft 1 having a herringbone-shaped dip 10 carved on its radial surface, and a sleeve rotatably fitted to the shaft 1. 2 and a thrust plate 3 which is connected to the end face of the shaft 1 and the sleeve 2 and is held in the thrust direction, a shallow spiral groove is carved, and a lubricating fluid is filled between the shaft 1, the sleeve 2, and the thrust plate 3. ing. When the shaft 1 rotates, lubricating fluid flows through these gaps. Therefore, on the radial surface, pressure is generated in the radial direction by the herringbone-shaped shallow groove 10, resulting in a non-contact state. Similarly, pressure is generated on the thrust surface by the spiral shallow groove 11, and the shaft is supported without contact. Further, the thrust plate 3 is provided with a hole 7 at the center, a hole 8 at the periphery, and a groove 9 through which the holes 7 and 8 communicate. This causes the lubricating fluid to circulate around the thrust plate. This makes it possible to prevent the generation of negative pressure on the outer peripheral side of the thrust bearing forming portion and to diffuse heat.

なお、スリーブ2の開放端側(図の上端側)に凹部5を
設ぽ、凹部5のさらに開放側の位置において、回転軸1
にはスラスト軸受方向に流体が流れこむような浅溝6が
設けられ、潤滑流体の飛散を防止する構造である。
Note that a recess 5 is provided on the open end side of the sleeve 2 (upper end side in the figure), and at a position further on the open side of the recess 5, the rotating shaft 1
A shallow groove 6 is provided in which fluid flows in the direction of the thrust bearing, and the structure prevents lubricating fluid from scattering.

さらに、浮上特性を安定させるために前記凹部(浅溝1
0と浅溝6の間に相当する位置)近傍に小径穴を設ける
場合もある。
Furthermore, in order to stabilize the floating characteristics, the recess (shallow groove 1)
In some cases, a small diameter hole is provided near the position corresponding to the position between the shallow groove 6 and the shallow groove 6.

[発明が解決しようとする課題] しかしながら、上記従来例ではスラスト板3を形成する
にあたりて、材質が金属である場合には、切削等の機械
加工が必要となり、精度的には充分に溝足できるが、コ
ストが高くなる。また、樹脂材料(ポリアセタール、ポ
リカーボネイト、PPS等)を用いて成形加工を行なっ
た場合には、成形後の樹脂の収縮によってスラスト圧力
発生部の形状が波形や凹形になりスラスト板3自体の精
度保証が困難となる。さらに組立時の精度保証も困難と
なり、静止時における接触点が不安定で起動時に摩擦ト
ルクが大きくなる可能性があり、また片当りなどにより
摩耗を生じる可能性が大きい。さらに、回転時において
も、スラスト圧力発生の能力が小さくなり不安定な軸受
特性となる。
[Problems to be Solved by the Invention] However, in the conventional example described above, when the thrust plate 3 is made of metal, machining such as cutting is required, and the groove footing is insufficient in terms of accuracy. It is possible, but the cost will be high. In addition, when molding is performed using a resin material (polyacetal, polycarbonate, PPS, etc.), the shape of the thrust pressure generating part becomes wavy or concave due to contraction of the resin after molding, resulting in the accuracy of the thrust plate 3 itself. Guarantees become difficult. Furthermore, it is difficult to guarantee precision during assembly, the contact points are unstable when the system is stationary, the friction torque may increase during startup, and there is a high possibility that wear will occur due to uneven contact. Furthermore, even during rotation, the ability to generate thrust pressure is reduced, resulting in unstable bearing characteristics.

本発明は上記従来技術の欠点に鑑みなされたものであっ
て、軸受組立精度を高めかつ高精度を保つとともに安定
した良好な特性が得られる動圧軸受装置の提供を目的を
する。
The present invention has been made in view of the above-mentioned drawbacks of the prior art, and it is an object of the present invention to provide a hydrodynamic bearing device that can improve bearing assembly accuracy, maintain high precision, and provide stable and good characteristics.

[課題を解決するための手段および作用]本発明によれ
ば、スラスト板のスラスト軸受面と反対側に内周部の肉
厚が外周部の肉厚より薄くなるような段差を設け、肉厚
の薄い内周部を固定板に突当てる構成にすることにより
、スラスト板の形状精度を出しやすくし、組立時の精度
も出しやすくするとともに、コスト的にも安価になる様
にしたものである。
[Means and effects for solving the problem] According to the present invention, a step is provided on the side opposite to the thrust bearing surface of the thrust plate such that the wall thickness of the inner circumference is thinner than the wall thickness of the outer circumference. By configuring the thin inner periphery of the thrust plate to abut against the fixed plate, it is easier to achieve shape accuracy of the thrust plate, it is easier to achieve accuracy during assembly, and the cost is also lower. .

[実施例] ′s1図は本発明の一実施例を表わす図面である。第6
図と同一部材は同一番号を符す。回転軸1はスリーブ2
に対し、回転可能に嵌合されており、ヘリングボーン状
の浅溝10(溝深さ2〜20um程度)が刻まれている
。また、スリーブ2には固定板2bを介して樹脂材料(
例えばポリアセタール、ポリカーボネイト、PPS等)
を成形加工したスラスト板3が固定される。スラスト板
3はスラスト方向に回転軸を支持する浅漬11(溝深さ
2〜20um程度)が刻まれており、中央部に穴7が設
けられる。浅溝11が刻まれた反対面(図の下面側)に
は内周部の肉厚が外周部の肉厚より薄くなる様な段差が
設けられており、また外周部の肉厚が厚い部分の下面に
は、複数個の溝9が刻まれている。一方面定板2bには
前記スラスト板3を取付けるための凸部2cが設けられ
ている。この凸部2Cには、溝9aが設けられ組立後に
穴7、溝9、溝9aが連結するように構成される。
[Embodiment] Figure 's1 is a drawing showing an embodiment of the present invention. 6th
Components that are the same as those in the figures are designated by the same numbers. Rotating shaft 1 is sleeve 2
It is rotatably fitted to the other end, and a herringbone-shaped shallow groove 10 (groove depth of about 2 to 20 um) is cut therein. In addition, the sleeve 2 is provided with a resin material (
(e.g. polyacetal, polycarbonate, PPS, etc.)
The thrust plate 3 formed by molding is fixed. The thrust plate 3 has a shallow groove 11 (groove depth of about 2 to 20 um) carved therein to support the rotating shaft in the thrust direction, and a hole 7 is provided in the center. On the opposite surface (bottom side in the figure) where the shallow groove 11 is carved, there is a step such that the wall thickness of the inner circumference is thinner than that of the outer circumference, and there is also a part where the wall thickness of the outer circumference is thicker. A plurality of grooves 9 are cut into the lower surface of the . On the other hand, a convex portion 2c for attaching the thrust plate 3 is provided on the flat surface plate 2b. This convex portion 2C is provided with a groove 9a so that the hole 7, groove 9, and groove 9a are connected to each other after assembly.

次に上記構成の動圧軸受の作用を説明する。回転軸1が
回転を始めるとスリーブ2とスラスI・板3との間1a
20に介在する流体は浅溝11により中央に圧送され、
圧力が高まり回転軸1を浮上させる。圧送された流体は
相互に連通ずる中央部の穴7、溝9a、溝9を経て再び
間隙20に戻り循環する。
Next, the operation of the hydrodynamic bearing having the above configuration will be explained. When the rotating shaft 1 starts rotating, the space 1a between the sleeve 2 and the slab I/plate 3
The fluid interposed in 20 is forced into the center by the shallow groove 11,
The pressure increases, causing the rotating shaft 1 to float. The pumped fluid passes through the central hole 7, groove 9a, and groove 9 that communicate with each other, returns to the gap 20, and circulates.

ここで、スラスト板3と固定板2bとは、スラスト板3
における内周部の肉厚が外周部の肉厚より薄くなる様な
段差部と、固定板2bの凸部2cの外周面とが圧入等に
より接合され、スラスト板3の内周部と固定板2bの凸
部±Cとが突当る様な構成となっている。これにより、
固定板2bの凸部2Cをスラスト板3の下面凹所内に嵌
入し、両者が結合される。
Here, the thrust plate 3 and the fixed plate 2b are the thrust plate 3 and the fixed plate 2b.
A stepped portion such that the thickness of the inner circumferential portion is thinner than that of the outer circumferential portion and the outer circumferential surface of the convex portion 2c of the fixed plate 2b are joined by press fitting or the like, and the inner circumferential portion of the thrust plate 3 and the fixed plate The structure is such that the convex portions ±C of 2b abut against each other. This results in
The convex portion 2C of the fixed plate 2b is fitted into the recess on the lower surface of the thrust plate 3, and the two are combined.

次に本発明におけるスラスト板3の形状精度について、
第2図を用いて説明する。第2図(a)は本発明による
樹脂材料を成形加工したスラスト板3を示す図であり、
スラスト軸受用の浅溝11が刻まれた面(上面)と反対
面に内周部の肉厚が外周部の肉厚より薄くなる様な段差
が設けられている。これにより下面に凹所が形成され、
ここにスラスト板搭載保持用の凸部2Cが圧入される。
Next, regarding the shape accuracy of the thrust plate 3 in the present invention,
This will be explained using FIG. FIG. 2(a) is a diagram showing a thrust plate 3 molded from a resin material according to the present invention.
A step is provided on the surface opposite to the surface (top surface) in which the shallow groove 11 for the thrust bearing is carved so that the thickness of the inner circumference is thinner than the thickness of the outer circumference. This creates a recess on the bottom surface,
A protrusion 2C for mounting and holding the thrust plate is press-fitted here.

成形加工による樹脂材料の収縮は一般的に成形加工後の
冷却過程において発生し、収縮量は肉厚に比例して決ま
るとともに、冷却過程が最も遅い方向に向かって収縮す
ると考えてよい。
Shrinkage of the resin material due to molding generally occurs during the cooling process after molding, and the amount of shrinkage is determined in proportion to the wall thickness, and it can be considered that the shrinkage occurs in the direction where the cooling process is slowest.

したがって、本発明の形状において図中x印の部分の冷
却が遅いため、x印に向かって収縮が発生し、外周部と
内周部の肉厚の違いから収縮後の形状は点線で示す様な
形状となる。尚、従来形状を樹脂材料で成形加工を行な
りな場合には第2図(b)に示す如く形状となる。
Therefore, in the shape of the present invention, cooling of the part marked x in the figure is slow, so shrinkage occurs toward the x mark, and due to the difference in wall thickness between the outer and inner circumferences, the shape after shrinkage is as shown by the dotted line. It becomes a shape. Incidentally, when the conventional shape is not molded using a resin material, the shape becomes as shown in FIG. 2(b).

ここで、軸受面における形状精度に注目すると成形後の
形状が凸形状に安定し、その精度も平面度で数μm以下
(浅漬10の成分を除く)にすることが可能になり、静
止時において回転軸1とスラスト板3とは中央部の穴フ
近傍において接触するため起動時の摩擦トルクが小さく
なるとともに、摩耗等が生じにくい。
Here, if we focus on the shape accuracy of the bearing surface, the shape after molding will be stable in a convex shape, and the flatness of the shape will also be less than a few μm (excluding the component of Shallow Pickling 10), and when it is stationary, Since the rotating shaft 1 and the thrust plate 3 are in contact with each other near the hole in the center, the friction torque at the time of starting is reduced and wear and the like are less likely to occur.

一方、内周部の肉厚は外周部の肉厚より薄いために内周
部は変形量が小さいので、取付時の基準として好適であ
る。したがって、固定板2bの凸部2cの外周面とスラ
スト板3における内周部の肉厚が外周部の肉厚より薄く
なる様な段差とが圧入等により接合されスラスト板3の
内周部と固定板2bの凸部2cとが突当る様な構成にす
ることにより、スラスト板3のスラスト軸受面の組込後
の精度(例えばラジアル軸受面との直角度)が出しやす
くなる。
On the other hand, since the thickness of the inner circumferential portion is thinner than that of the outer circumferential portion, the amount of deformation of the inner circumferential portion is small, so that it is suitable as a reference during installation. Therefore, the outer peripheral surface of the convex portion 2c of the fixed plate 2b and the step such that the thickness of the inner peripheral part of the thrust plate 3 is thinner than that of the outer peripheral part are joined by press fitting or the like, and the inner peripheral part of the thrust plate 3 and By configuring the fixing plate 2b so that the protrusions 2c collide with each other, the accuracy of the thrust bearing surface of the thrust plate 3 after assembly (for example, the perpendicularity with the radial bearing surface) can be easily achieved.

第3図は本発明に係る動圧軸受の他の実施例を示す図で
ある。スラスト板3の外周部の肉厚が内周部の肉厚より
厚くなっている部分において、さらに外周部はどテーバ
状に厚くなっている。この様な構成にすることによって
圧入等の組立時において内周部は固定板2bの凸部2c
と突当てられる際に、外周部は固定板2bと当りにくい
ために、挿入しやすく、組立後の精度を劣化させること
なく軸受面の形状精度を向上させることが可能となる。
FIG. 3 is a diagram showing another embodiment of the hydrodynamic bearing according to the present invention. In the portion where the thickness of the outer circumference of the thrust plate 3 is thicker than the thickness of the inner circumference, the outer circumference is further thickened in a tapered shape. With such a configuration, during assembly such as press-fitting, the inner circumference is located at the convex portion 2c of the fixing plate 2b.
Since the outer circumferential portion is hard to come into contact with the fixing plate 2b when abutting against the bearing surface, it is easy to insert the bearing surface, and it is possible to improve the shape accuracy of the bearing surface without deteriorating the accuracy after assembly.

第4図は本発明に係るさらに他の実施例を示す図である
。回転軸1には軸端の中央部に穴21と、前記穴21と
連通する穴22が複数個設けられており、流体が循環す
る構成である。スラスト板3は平板形状であるが、その
肉厚は外周部より内周部の方が薄くなるような段差が設
けられており、この段差と固定板2bの凸部2cの外周
面が圧入等により接合され、スラスト板3の内周部と固
定板2bの凸部2cが突当るような構成になっている。
FIG. 4 is a diagram showing still another embodiment according to the present invention. The rotary shaft 1 is provided with a hole 21 at the center of the shaft end and a plurality of holes 22 communicating with the hole 21, so that fluid circulates therethrough. The thrust plate 3 has a flat plate shape, but is provided with a step such that its wall thickness is thinner at the inner circumference than at the outer circumference. The structure is such that the inner circumference of the thrust plate 3 and the protrusion 2c of the fixed plate 2b abut against each other.

この場合における樹脂材料を成形加工した場合のスラス
ト板3の収縮後の形状は第5図(a)の点線に示すよう
な形状で、中央部が数μm程度凸形状となるようになり
、また内面部の変形も小さくなる。このため、前述の実
施例と同様の効果を得ることができる。尚、従来形状の
場合は第5図(a)の如く形状となる。
In this case, the shape of the thrust plate 3 after shrinkage when molded from the resin material is as shown by the dotted line in FIG. Deformation of the inner surface is also reduced. Therefore, it is possible to obtain the same effects as in the above-mentioned embodiments. In the case of the conventional shape, the shape is as shown in FIG. 5(a).

尚、外周部より内周部め肉厚を薄くする段差の形状とし
ては、テーバ状等その他の形状でも可能である。
Note that other shapes such as a tapered shape may be used as the shape of the step that makes the inner circumferential portion thinner than the outer circumferential portion.

[発明の効果] 以上説明したように、スラスト板3に樹脂材料を用い成
形加工により形状を形成し、スラスト軸受面との反対面
に内周部の肉厚が外周部の肉厚より薄くなるような段差
を設け、肉厚の薄い内周部と固定板2bの凸部2Cを突
当てるような構成にすることにより、スラスト板3の軸
受面の形状精度が出しやすくなり、組立時の精度も出し
やすくなるとともに、コスト的にも安価になるという効
果がある。
[Effects of the Invention] As explained above, the shape of the thrust plate 3 is formed by molding using a resin material, and the thickness of the inner circumference is thinner than the thickness of the outer circumference on the surface opposite to the thrust bearing surface. By providing a step such that the thin inner circumferential portion and the convex portion 2C of the fixed plate 2b butt against each other, it becomes easier to achieve the shape accuracy of the bearing surface of the thrust plate 3, and the accuracy during assembly is improved. This has the effect of making it easier to produce, as well as lowering the cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る動圧軸受装置の要部構成図、第2
図(a)は本発明に係るスラスト板の変形説明図、第2
図(b)は従来のスラスト板の変形説明図、第3図は本
発明に係るスラスト板の別の例の側面図、第4図は本発
明に係る勲圧軸受装置の別の実施例の要部構成図、第5
図(a)は第4図のスラスト板の変形説明図、′js5
図(b)は従来のスラスト板の変形説明図、第6図は従
来の動圧軸受装置の要部構成図である。 第 1:回転軸 2ニスリーブ 2b:固定板 2C:凸部 3ニスラスト板。 第
Fig. 1 is a configuration diagram of main parts of a hydrodynamic bearing device according to the present invention, Fig. 2
Figure (a) is an explanatory diagram of the modification of the thrust plate according to the present invention, the second
FIG. 3 is a side view of another example of the thrust plate according to the present invention, and FIG. 4 is a diagram illustrating another example of the thrust plate according to the present invention. Main part configuration diagram, 5th
Figure (a) is an explanatory diagram of the modification of the thrust plate in Figure 4, 'js5
FIG. 6B is a diagram illustrating a modification of a conventional thrust plate, and FIG. 6 is a diagram illustrating a main part configuration of a conventional hydrodynamic bearing device. 1st: rotating shaft 2 sleeve 2b: fixed plate 2C: convex portion 3 nislast plate. No.

Claims (5)

【特許請求の範囲】[Claims] (1)軸と、該軸のラジアル方向を回転可能に支持する
スリーブと、該スリーブの端部に固定された固定板と、
前記軸をスラスト方向に支持するための該固定板に装着
されたスラスト板とを具備し、前記スラスト板はスラス
ト方向の外側部分が厚肉状に形成され、前記固定板を該
スラスト板の厚肉部分間に圧入により接合するとともに
固定板上面をスラスト板の薄肉内面部に当接させたこと
を特徴とする動圧軸受装置。
(1) a shaft, a sleeve that rotatably supports the shaft in the radial direction, and a fixed plate fixed to the end of the sleeve;
a thrust plate attached to the fixed plate for supporting the shaft in the thrust direction; the thrust plate has a thick outer portion in the thrust direction; A dynamic pressure bearing device characterized in that the solid parts are joined by press-fitting, and the upper surface of the fixed plate is brought into contact with the thin inner surface of the thrust plate.
(2)前記スラスト板または軸のスラスト面の少なくと
も一方および前記スリーブまたは軸のラジアル面の少な
くとも一方に浅溝が形成されたことを特徴とする特許請
求の範囲第1項記載の動圧軸受装置。
(2) A hydrodynamic bearing device according to claim 1, characterized in that a shallow groove is formed in at least one of the thrust surface of the thrust plate or the shaft and at least one of the radial surface of the sleeve or the shaft. .
(3)前記スラスト板には、前記薄肉内面部の中央部を
貫通する流体循環用の穴が形成され、スラスト板の外周
部とスリーブ間に隙間が設けられ、該隙間と前記スラス
ト板の穴とが連通するように構成したことを特徴とする
特許請求の範囲第1項記載の動圧軸受装置。
(3) The thrust plate has a hole for fluid circulation passing through the center of the thin inner surface, and a gap is provided between the outer periphery of the thrust plate and the sleeve, and the gap and the hole in the thrust plate are formed. The dynamic pressure bearing device according to claim 1, characterized in that the dynamic pressure bearing device is configured such that the two are in communication with each other.
(4)前記スラスト板は、樹脂材料からなることを特徴
とする特許請求の範囲第1項記載の動圧軸受装置。
(4) The dynamic pressure bearing device according to claim 1, wherein the thrust plate is made of a resin material.
(5)前記スラスト板の外側厚肉部は外側に向って厚く
なるように形成されたことを特徴とする特許請求の範囲
第1項記載の動圧軸受装置。
(5) The dynamic pressure bearing device according to claim 1, wherein the outer thick portion of the thrust plate is formed so as to become thicker toward the outside.
JP8155189A 1989-04-03 1989-04-03 Dynamic pressure bearing device Pending JPH02261925A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8155189A JPH02261925A (en) 1989-04-03 1989-04-03 Dynamic pressure bearing device
DE69025485T DE69025485T2 (en) 1989-04-03 1990-04-02 Hydrodynamic storage facility
EP90303503A EP0391640B1 (en) 1989-04-03 1990-04-02 Hydrodynamic bearing system
US07/735,172 US5096309A (en) 1989-04-03 1991-07-23 Hydrodynamic bearing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8155189A JPH02261925A (en) 1989-04-03 1989-04-03 Dynamic pressure bearing device

Publications (1)

Publication Number Publication Date
JPH02261925A true JPH02261925A (en) 1990-10-24

Family

ID=13749430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8155189A Pending JPH02261925A (en) 1989-04-03 1989-04-03 Dynamic pressure bearing device

Country Status (1)

Country Link
JP (1) JPH02261925A (en)

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