JPH02261074A - Oscillatory wave motor - Google Patents
Oscillatory wave motorInfo
- Publication number
- JPH02261074A JPH02261074A JP1078099A JP7809989A JPH02261074A JP H02261074 A JPH02261074 A JP H02261074A JP 1078099 A JP1078099 A JP 1078099A JP 7809989 A JP7809989 A JP 7809989A JP H02261074 A JPH02261074 A JP H02261074A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating body
- vibration wave
- wave motor
- movable body
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003534 oscillatory effect Effects 0.000 title 1
- 229920005989 resin Polymers 0.000 claims abstract description 11
- 239000011347 resin Substances 0.000 claims abstract description 11
- 239000000314 lubricant Substances 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 7
- 238000000576 coating method Methods 0.000 claims abstract description 7
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 4
- 238000007743 anodising Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 150000003949 imides Chemical group 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は振動波モータに係り、特に、振動体に固着され
た圧電素子に交流電圧を印加して振動波を発生させ、振
動体に加圧接触された移動体を振動波によって回転させ
るに好適な振動波モータに関する。Detailed Description of the Invention "Field of Industrial Application" The present invention relates to a vibration wave motor, and in particular to a vibration wave motor that generates vibration waves by applying an alternating current voltage to a piezoelectric element fixed to a vibrating body. The present invention relates to a vibration wave motor suitable for rotating a moving body in pressure contact using vibration waves.
「従来の技術」
振動波モータ（超音波モータ）は移動体が回転する際、
振動体との摩擦力によって駆動するので、移動体と振動
体の耐久性及び信頼性の高いものが必要とされている。"Conventional technology" When a moving object rotates, a vibration wave motor (ultrasonic motor)
Since the moving body and the vibrating body are driven by frictional force with the vibrating body, the movable body and the vibrating body are required to have high durability and reliability.
このため、この種のモータにおいては各種の改良がなさ
れている。For this reason, various improvements have been made to this type of motor.
例えば、特開昭６２−１００１７８号公報に記載されて
いるように、振動体を超硬材料でコーティング処理し、
移動体を硬質アルマイト材料でコーティング処理するも
のが知られている。また、移動体にグラファイト入りポ
リアミドイミド樹脂を固着したものとして、特開昭６２
−７７０６９号公報に記載されているものが、移動体に
芳香族ポリエステル樹脂を固着したものとして、特開昭
６３−６４５８２号公報があり、さらに、イミド構造を
有する高分子を主成分とする樹脂に短繊維を混合したシ
ート状成形物を移動体に固着したものとして、特開昭６
２−１４．７９７８号公報に記載されているものが知ら
れている。For example, as described in JP-A-62-100178, the vibrating body is coated with a superhard material,
It is known that a moving body is coated with a hard alumite material. In addition, as a moving body fixed with graphite-containing polyamide-imide resin, JP-A-62
JP-A No. 63-64582 describes a product in which an aromatic polyester resin is fixed to a moving body, and a resin mainly composed of a polymer having an imide structure A sheet-like molded product made of a mixture of short fibers and short fibers was fixed to a moving body, and
The one described in Japanese Patent No. 2-14.7978 is known.
「発明が解決しようとする課題」
しかしながら、耐摩耗樹脂を使用した場合、耐久性は高
くなるが、環境特性に不具合が生ずる。``Problems to be Solved by the Invention'' However, when a wear-resistant resin is used, although durability is increased, problems occur in environmental characteristics.
例えば、回転むらの発生や起動不安定を生じたり、多湿
時に加水分解を生じたりする場合がある。For example, uneven rotation or unstable startup may occur, or hydrolysis may occur in high humidity.
また、樹脂層を形成した場合には硬度と厚さが重要なフ
ァクタとなり、適用範囲が狭くなる恐れがある。Furthermore, when a resin layer is formed, hardness and thickness are important factors, and the range of application may be narrowed.
すなわち、適正領域外になると極めて粘弾性損失が大き
くなる。In other words, when it is outside the appropriate range, the viscoelastic loss becomes extremely large.
本発明の目的は、摩擦力による摩耗を抑制することがで
きる振動波モータを提供することにある。An object of the present invention is to provide a vibration wave motor that can suppress wear caused by frictional force.
「課題を解決するための手段」
前記目的を達成するために、本発明は、略環状の振動波
進行路を形成する振動体と、振動体に固着され、交流源
より給電されて振動体に振動波を発生させる圧電素子と
、回転軸に回転可能に軸支され、振動体に加圧接触され
ている移動体とを備え、振動体と移動体とが互いに接触
する各摺動面のうち少なくとも一方の摺動面に、耐摩耗
性材の多孔質皮膜を形成し、この多孔質皮膜に四弗化樹
脂または二硫化モリブデンなどの潤滑物を含浸してなる
ことを特徴とする振動波モータを提案する。"Means for Solving the Problems" In order to achieve the above object, the present invention includes a vibrating body forming a substantially annular vibration wave path, and a vibrating body fixed to the vibrating body and supplied with power from an alternating current source to the vibrating body. It is equipped with a piezoelectric element that generates vibration waves, and a moving body that is rotatably supported on a rotating shaft and is in pressurized contact with the vibrating body. A vibration wave motor characterized in that a porous coating of a wear-resistant material is formed on at least one sliding surface, and this porous coating is impregnated with a lubricant such as tetrafluoride resin or molybdenum disulfide. propose.
「作 用」
振動体と移動体の少なくとも一方の摺動面に多孔質皮膜
が形成され、この多孔質皮膜に潤滑物が含浸されている
ため、振動体に加圧接触されている移動体が回転する際
、潤滑性に優れかつ皮膜層によって摩擦力が抑制され、
耐久性の向上が図れる。"Function" A porous coating is formed on the sliding surface of at least one of the vibrating body and the moving body, and this porous coating is impregnated with a lubricant, so that the moving body that is in pressure contact with the vibrating body When rotating, it has excellent lubricity and the film layer suppresses frictional force.
Durability can be improved.
「実施例」
以下、本発明の一実施例について図面に沿って説明する
。``Example'' An example of the present invention will be described below with reference to the drawings.
図面において、振動波モータ本体１０の中央に穿設され
た貫通孔１２内には回転軸１４が挿入されており、この
回転軸１４はスラストベアリング１６により回転可能に
軸支されている。In the drawing, a rotating shaft 14 is inserted into a through hole 12 formed in the center of a vibration wave motor main body 10, and this rotating shaft 14 is rotatably supported by a thrust bearing 16.
本体１０の上部側には段部１８が形成されており、段部
１８には円環状の振動体２０がねじ２１により固定され
ている。A step portion 18 is formed on the upper side of the main body 10 , and an annular vibrating body 20 is fixed to the step portion 18 with screws 21 .
振動体２０の頂部側には円環状の振動波進行路２２が形
成されており、この振動波進行路２２には複数の溝２４
が円環状に沿って放射状に形成されている。さらに、振
動体２０の裏面側には圧電素子２６．２７が固着されて
いる。An annular vibration wave traveling path 22 is formed on the top side of the vibrating body 20, and a plurality of grooves 24 are formed in this vibration wave traveling path 22.
are formed radially along the annular shape. Furthermore, piezoelectric elements 26 and 27 are fixed to the back side of the vibrating body 20.
また、回転軸１４の頂部側には段部２８が形成されてお
り、段部２８には支持部材３ｏが固着されている。この
支持部材３０の周囲には円環状の移動体３２が嵌入され
、ばね３４が固着されており、ばね３４の先端側がゴム
板３６を介して移動体３２に圧接されている。移動体３
２はばね３４のばね力により振動体２０に加圧接触され
ている。Further, a step portion 28 is formed on the top side of the rotating shaft 14, and a support member 3o is fixed to the step portion 28. An annular movable body 32 is fitted around the support member 30, and a spring 34 is fixed thereto, and the tip side of the spring 34 is pressed against the movable body 32 via a rubber plate 36. Mobile object 3
2 is pressed into contact with the vibrating body 20 by the spring force of the spring 34.
振動体２０及び移動体３２を構成するに際しては、純粋
のアルミニウムまたはアルミ合金で移動体３２を構成し
、この移動体３２に硬質陽極酸化処理を施してその表面
に多孔質皮膜を形成する。When constructing the vibrating body 20 and the movable body 32, the movable body 32 is made of pure aluminum or an aluminum alloy, and the movable body 32 is subjected to a hard anodizing treatment to form a porous film on its surface.
この多孔質皮膜を形成した後熱処理により皮膜の硬度を
向上させ、その後、多孔質皮膜に四弗化樹脂または二硫
化モリブデンを含浸させる。After this porous film is formed, the hardness of the film is improved by heat treatment, and then the porous film is impregnated with a tetrafluoride resin or molybdenum disulfide.
一方、振動体２０は鉄鋼、ステンレス、銅合金、ニッケ
ル合金、ジュラルミンなどで構成し、その表面に多孔質
のニッケル・リン皮膜またはニッケル・ホーソ皮膜層を
生成し、その後熱処理により多孔質皮膜の硬度を向上さ
せてから多孔質皮膜に四弗化樹脂または二硫化モリブデ
ンを含浸させる。On the other hand, the vibrating body 20 is made of steel, stainless steel, copper alloy, nickel alloy, duralumin, etc., and a porous nickel-phosphorus film or nickel-horosho film layer is formed on the surface of the vibrating body 20, and then heat treatment is performed to increase the hardness of the porous film. After improving the porous film, the porous film is impregnated with tetrafluoride resin or molybdenum disulfide.
なお、振動体２ｏ及び移動体３２に皮膜層を形成する場
合、皮膜層の厚さは５〜７０μｍ程度とすることが好ま
しい。In addition, when forming a film layer on the vibrating body 2o and the movable body 32, it is preferable that the thickness of the film layer is about 5 to 70 μm.
また、この皮膜には、素地金属表面の微小ポケットに起
因するピンホールが発生したり、膨張係数の差によるヘ
アクラックが発生したりするが、ピンホール及びヘアク
ラックには、二次電解等の処理によって四弗化樹脂また
は二硫化モリブデン等の潤滑物を含浸せることができる
。In addition, pinholes occur in this film due to minute pockets on the surface of the base metal, and hair cracks occur due to differences in expansion coefficients, but pinholes and hair cracks occur due to secondary electrolysis etc. By treatment, it can be impregnated with lubricants such as tetrafluoride resin or molybdenum disulfide.
また、皮膜生成後少なくとも２００℃以上で熱処理を行
なえば、水素脆性を防止して皮膜の密着性を増すと共に
硬度を高めてから潤滑物を二次電解等で含浸させること
が望ましい。Furthermore, it is desirable to perform heat treatment at at least 200° C. or higher after film formation to prevent hydrogen embrittlement, increase the adhesion of the film, and increase hardness before impregnating it with a lubricant by secondary electrolysis or the like.
以上の構成において、圧電素子２６．２７に位相の９０
度異なる高周波電圧を印加すると、圧電素子２６．２７
の歪により振動体２０に振動波が発生し、この振動波が
振動波進行路２２に沿って伝搬する。そしてこの振動波
による原動力が移動体３２に伝達され、移動体３２が回
転する。このとき、移動体３２と振動体２０との摩擦力
は潤滑物を含浸させた多孔質皮膜によって抑制されるた
め、摩擦力によって移動体３２及び振動体２０の摩耗が
抑制され、耐久性の向上を図ることができる。In the above configuration, the piezoelectric elements 26 and 27 have a phase of 90
When high frequency voltages of different degrees are applied, the piezoelectric element 26.27
A vibration wave is generated in the vibrating body 20 due to the strain, and this vibration wave propagates along the vibration wave traveling path 22. The motive force generated by this vibration wave is transmitted to the movable body 32, and the movable body 32 rotates. At this time, the frictional force between the movable body 32 and the vibrating body 20 is suppressed by the porous film impregnated with lubricant, so the frictional force suppresses wear of the movable body 32 and the vibrating body 20, improving durability. can be achieved.
また、振動体２０及び移動体３２の表面に多孔質皮膜が
形成されているため、これらの腐食が防止され、長時間
放置しても起動を安定に行なうことができる。Furthermore, since a porous film is formed on the surfaces of the vibrating body 20 and the movable body 32, corrosion thereof is prevented, and stable startup can be performed even if the vibrating body 20 and the movable body 32 are left unused for a long time.
さらに、移動体３２の摺動面に高分子樹脂等の弾性材を
使わなくても構成できるため、粘弾性損失がなく効率の
向上を図ることができる。Furthermore, since the sliding surface of the movable body 32 can be constructed without using an elastic material such as a polymer resin, there is no viscoelastic loss and efficiency can be improved.
また、前記実施例においては、振動体２０及び移動体３
２に多孔質皮膜を形成するものについて述べたが、振動
体２０と移動体３２とが互いに接触する各摺動面のうち
一方の摺動面に多孔質皮膜を形成し、この多孔質皮膜に
四弗化樹脂または二硫化モリブデンによる潤滑物を含浸
する構成によっても耐久性の向上を図ることができる。Further, in the embodiment, the vibrating body 20 and the movable body 3
2, a porous film is formed on one of the sliding surfaces where the vibrating body 20 and the movable body 32 contact each other, and a porous film is formed on this porous film. Durability can also be improved by impregnating a lubricant with a tetrafluoride resin or molybdenum disulfide.
「発明の効果」
上記した通り、本発明に係る振動波モータによれば、耐
久性に優れた円滑回転のモータとなると共に、起動性に
優れた粘弾性損失の少ないモータとなる。"Effects of the Invention" As described above, the vibration wave motor according to the present invention provides a smooth rotation motor with excellent durability, and a motor with excellent starting performance and low viscoelastic loss.
図面は本発明の一実施例を示す振動波モータの縦断面図
である。
１０・・本体
１４・回転軸
２０・・・振動体
２２・・・振動波進行路
２４・・・溝
２６．２７・・・圧電素子
３２・・・移動体
３４・・・ばねThe drawing is a longitudinal sectional view of a vibration wave motor showing an embodiment of the present invention. 10... Main body 14... Rotating shaft 20... Vibrating body 22... Vibration wave path 24... Groove 26.27... Piezoelectric element 32... Moving body 34... Spring
Claims (1)
固着され、交流源より給電されて振動体に振動波を発生
させる圧電素子と、回転軸に回転可能に軸支され、振動
体に加圧接触されている移動体とを備え、振動体と移動
体とが互いに接触する各摺動面のうち少なくとも一方の
摺動面に、耐摩耗性材の多孔質皮膜を形成し、この多孔
質皮膜に四弗化樹脂または二硫化モリブデンなどの潤滑
物を含浸してなることを特徴とする振動波モータ。A vibrating body that forms a substantially annular vibration wave traveling path, a piezoelectric element that is fixed to the vibrating body and is supplied with power from an AC source to generate vibration waves in the vibrating body, and a piezoelectric element that is rotatably supported on a rotating shaft and that is a movable body that is in pressure contact with the vibrating body, a porous coating of a wear-resistant material is formed on at least one of the sliding surfaces where the vibrating body and the movable body come into contact with each other; A vibration wave motor characterized by having a porous film impregnated with a lubricant such as tetrafluoride resin or molybdenum disulfide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1078099A JPH02261074A (en) | 1989-03-31 | 1989-03-31 | Oscillatory wave motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1078099A JPH02261074A (en) | 1989-03-31 | 1989-03-31 | Oscillatory wave motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02261074A true JPH02261074A (en) | 1990-10-23 |
Family
ID=13652426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1078099A Pending JPH02261074A (en) | 1989-03-31 | 1989-03-31 | Oscillatory wave motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02261074A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02136492U (en) * | 1989-04-18 | 1990-11-14 | ||
| CN102843062A (en) * | 2011-06-22 | 2012-12-26 | 株式会社尼康 | Vibration actuator, lens barrel, and camera |
| JP2013153629A (en) * | 2012-01-26 | 2013-08-08 | Toyota Industries Corp | Vibration actuator |
-
1989
- 1989-03-31 JP JP1078099A patent/JPH02261074A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02136492U (en) * | 1989-04-18 | 1990-11-14 | ||
| CN102843062A (en) * | 2011-06-22 | 2012-12-26 | 株式会社尼康 | Vibration actuator, lens barrel, and camera |
| JP2013009448A (en) * | 2011-06-22 | 2013-01-10 | Nikon Corp | Vibration actuator, lens barrel, and camera |
| US9417424B2 (en) | 2011-06-22 | 2016-08-16 | Nikon Corporation | Vibration actuator, lens barrel, and camera |
| CN102843062B (en) * | 2011-06-22 | 2016-12-07 | 株式会社尼康 | Vibration actuator, lens barrel and photographing unit |
| JP2013153629A (en) * | 2012-01-26 | 2013-08-08 | Toyota Industries Corp | Vibration actuator |
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