JPH02260500A - Electromagnetic wave shielding tape - Google Patents

Electromagnetic wave shielding tape

Info

Publication number
JPH02260500A
JPH02260500A JP7802089A JP7802089A JPH02260500A JP H02260500 A JPH02260500 A JP H02260500A JP 7802089 A JP7802089 A JP 7802089A JP 7802089 A JP7802089 A JP 7802089A JP H02260500 A JPH02260500 A JP H02260500A
Authority
JP
Japan
Prior art keywords
amorphous alloy
foil
shielding
plating
metal foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7802089A
Other languages
Japanese (ja)
Inventor
Hidehiko Ohashi
英彦 大橋
Masaharu Oda
雅春 小田
Takemoto Kamata
健資 鎌田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Rayon Co Ltd
Original Assignee
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Rayon Co Ltd
Priority to JP7802089A priority Critical patent/JPH02260500A/en
Publication of JPH02260500A publication Critical patent/JPH02260500A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve permeability and to obtain high shielding effect for both an electric field and a magnetic field by forming a high permeability amorphous alloy layer at least on one side face of a conductive metal foil tape by at least one layer electric plating method. CONSTITUTION:A conductive metal foil 4 is dipped in a plating bath 6 including amorphous alloy thin film forming metal ions, a voltage is applied with the foil 4 as a cathode and with platinum, etc., as an anode 5 to electrolytically precipitate amorphous alloy in the foil 4. Thus, the surface of the foil 4 is covered with the amorphous alloy having high permeability by a plating method to obtain an electromagnetic wave shielding material having excellent electric field and magnetic field shielding effects.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 電子機器などより放射される電磁波など、特に磁場に起
因して生ずる電磁波障害をシールドすることができる電
磁波しゃへい構造物を提供することにある。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] An object of the present invention is to provide an electromagnetic shielding structure capable of shielding electromagnetic interference caused by magnetic fields, such as electromagnetic waves radiated from electronic devices and the like.

〔従来の技術〕[Conventional technology]

電子機器の応用拡大にともない、これら機器より発生す
る電磁波の障害対策をたてることが必要となってきた。
As the applications of electronic devices expand, it has become necessary to take measures against interference with electromagnetic waves generated by these devices.

このため電子機器あるいはその周辺機器部品などに対す
る電磁波しゃへい対策として、銅やアルミニウムまたは
ニッケル、鉄、しんちゅうなどの粉末や短繊維、フレー
クなどを合成樹脂に混和したものを所要の形状に形成し
て電子機器を覆い、電磁波をしゃへいする方法が考案さ
れ、応用されている。しかし銅やアルミニウムは電場を
しゃへいする効果はあるが、透磁率が低く、磁場じゃへ
い効果はない。
Therefore, as a measure against electromagnetic waves for electronic devices and their peripheral equipment parts, powders, short fibers, flakes, etc. of copper, aluminum, nickel, iron, brass, etc. are mixed with synthetic resin and formed into the desired shape. Methods have been devised and applied to cover electronic equipment and shield it from electromagnetic waves. However, although copper and aluminum have the effect of shielding electric fields, they have low magnetic permeability and have no magnetic field shielding effect.

これに対し、ニッケルや鉄などは磁性体であるため磁場
しゃへい効果はあるが、電場じゃへい効果は低い。
On the other hand, since nickel and iron are magnetic materials, they have a magnetic field shielding effect, but have a low electric field shielding effect.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

本発明は電磁波じゃへい効果に対して銅、アルミニウム
などの欠点である透磁率が小さいという点に改良を施す
と共に、電場、磁場のいずれに対しても高いしゃへい効
果を有する電磁波じゃへい材を提供するものである。
The present invention improves the low magnetic permeability, which is a drawback of copper and aluminum, and provides an electromagnetic shielding material that has a high shielding effect against both electric and magnetic fields. It is something to do.

〔問題点を解決するための手段〕[Means for solving problems]

現在種々の電磁波しゃへい材料が開発され応用されてい
るが、電場、磁場の両方を広い周波数帯域でじゃへいす
る有効な方法は少ない。
Currently, various electromagnetic wave shielding materials are being developed and applied, but there are few effective methods for blocking both electric and magnetic fields over a wide frequency band.

銅、アルミニウム、銀などは良導体であり、すなわち電
磁波特に電界波のしゃへい効果が掻めて高い材料である
ことは以前から注目されており、実際に電磁波シールド
材料として実用化されているが、磁界波のしゃへい効果
は殆どない。これは磁性材料としての特性である透磁率
、飽和磁化などがないためである。
It has long been noted that copper, aluminum, silver, etc. are good conductors, that is, they are highly effective materials for shielding electromagnetic waves, especially electric field waves, and have actually been put into practical use as electromagnetic shielding materials. There is almost no wave shielding effect. This is because it does not have magnetic permeability, saturation magnetization, etc., which are characteristics of magnetic materials.

本発明者らは銅箔などの良導体に軟磁性特性を付与する
ことを目的として検討中のところ、透磁率の高い非晶質
合金を銅箔などの表面にめっきなどの方法を用いて被覆
することにより電場および磁場のしゃへい効果が共に優
れた電磁波じゃへい材を得ることに成功した。
The present inventors are currently investigating the possibility of imparting soft magnetic properties to good conductors such as copper foil, and are considering coating the surface of copper foil with an amorphous alloy with high magnetic permeability using a method such as plating. As a result, we succeeded in obtaining an electromagnetic shielding material with excellent shielding effects for both electric and magnetic fields.

本発明は銅、アルミニウムなどの良導電体に磁気特性に
優れる非晶質合金薄膜を電気めっき法にて形成すること
により特に磁気遮へい効果の高い電磁波シールド材料を
提供することにある。
The object of the present invention is to provide an electromagnetic shielding material that has a particularly high magnetic shielding effect by forming an amorphous alloy thin film with excellent magnetic properties on a good conductor such as copper or aluminum by electroplating.

本発明による非晶質合金の形成はめっき法によるもので
ある。めっきは導電性材料表面ならばいかなる場所にも
施すことができる。
Formation of the amorphous alloy according to the present invention is by a plating method. Plating can be applied to any surface of a conductive material.

本発明のテープを構成する非晶質合金層を形成せしめる
金属としては、鉄、コバルト、ニッケル、クロム、金、
銅、アルミニウム、チタン、テルル、銀、白金、亜鉛、
錫、鉛といったものが挙げられ、電析可能なものならば
何でも用いることができる。また単独では電析できない
とされるタングステンやニオブも、鉄族元素との誘起共
析により導体として用いることができる。
The metals forming the amorphous alloy layer constituting the tape of the present invention include iron, cobalt, nickel, chromium, gold,
Copper, aluminum, titanium, tellurium, silver, platinum, zinc,
Examples include tin and lead, and anything that can be electrolytically deposited can be used. Furthermore, tungsten and niobium, which cannot be deposited alone, can also be used as conductors by induced eutectoid deposition with iron group elements.

これらの金属成分のうち鉄族元素を主成分とする非晶質
合金は高透磁率、高磁束密度、低保磁力といった優れた
軟磁性的性質を示し、磁気遮へい材料としての特性を効
果的に発揮しうるので好しいものである。
Among these metal components, amorphous alloys mainly composed of iron group elements exhibit excellent soft magnetic properties such as high magnetic permeability, high magnetic flux density, and low coercive force, and have effective properties as magnetic shielding materials. This is preferable because it can be used effectively.

本発明において、特に磁気シールド特性に注目する場合
には非晶質合金薄膜被覆材としては鉄またはコバルト基
系が好ましい。
In the present invention, particularly when attention is paid to magnetic shielding properties, iron or cobalt-based materials are preferred as the amorphous alloy thin film coating material.

良導電性金属箔を浸漬し、該金属箔を陰極とし、白金な
どを陽極として電圧を印加することにより金属箔上に非
晶質合金を電析することができる。非晶化のためにはめ
っき浴中に次亜りん酸ナトリウムなどの次亜りん酸塩を
0.02〜0.5moljl!/l加え電析を行うこと
が好ましい。これにより例えばCo/Fe系の電析膜中
にりんが5〜20at%混入し、非晶質化する。
An amorphous alloy can be electrodeposited onto the metal foil by dipping a highly conductive metal foil and applying a voltage using the metal foil as a cathode and platinum or the like as an anode. For amorphization, add 0.02 to 0.5 moljl of hypophosphite such as sodium hypophosphite in the plating bath! It is preferable to perform electrodeposition by adding /l. As a result, for example, 5 to 20 at % of phosphorus is mixed into the Co/Fe-based deposited film, making it amorphous.

金属箔を陰極として電気めっきを行った場合、原理的に
箔の両面にめっき層が形成されるが、対極である陽極を
片面に接近して配置すると、金属箔の片面(陽極と対待
している面)に選択的に非晶質合金を電析させることが
てきる。完全に片面だけに電析させるためには、金属箔
の片面を絶縁体(プラスティックフィルムや紙など)で
保護してやればよい。また、めっき中に磁場を印加して
磁気特性を改善することもできる。このようにしてめっ
きされたテープ状物は熱処理を施すことによって非晶質
合金層の磁気特性を改善することができる。また、場合
によっては磁場中で熱処理することも有効である。
When electroplating is performed using metal foil as a cathode, in principle a plating layer is formed on both sides of the foil, but if the anode, which is the counter electrode, is placed close to one side, a plating layer is formed on one side of the metal foil (facing the anode). It is possible to selectively deposit an amorphous alloy on the surface of the surface. To ensure complete electrodeposition on only one side, protect one side of the metal foil with an insulator (plastic film, paper, etc.). Additionally, magnetic properties can be improved by applying a magnetic field during plating. The magnetic properties of the amorphous alloy layer can be improved by subjecting the thus plated tape-like material to heat treatment. In some cases, heat treatment in a magnetic field is also effective.

非晶質合金層の膜厚は、数十人から数百−まで変化させ
ることができるが、これはめっき時間に依存する。磁気
シールド効果はめっき合金層の厚みに比例するが、本発
明の場合20−以下が望ましい。20751以上になる
とめっき合金層が曲げ応力に対して割れ易くなり好まし
くない、また、めっき時間も長くなり、生産性が悪くな
る。本発明の場合合金層の比透磁率は1kHz、100
0Gの磁束密度で少なくとも104、好ましくは2X1
0’の特性を有するため、20−以下の膜厚で十分であ
る。高度な磁気シールドを要請される用途には本発明の
テープを2枚以上積層して用いればよい。
The thickness of the amorphous alloy layer can vary from tens to hundreds of layers, depending on the plating time. The magnetic shielding effect is proportional to the thickness of the plating alloy layer, and in the case of the present invention, the thickness is preferably 20 or less. If it exceeds 20751, the plating alloy layer tends to crack under bending stress, which is undesirable, and the plating time also increases, resulting in poor productivity. In the case of the present invention, the relative magnetic permeability of the alloy layer is 1kHz, 100
At least 104, preferably 2X1 at 0G flux density
Since the film has a characteristic of 0', a film thickness of 20 or less is sufficient. For applications requiring a high degree of magnetic shielding, two or more tapes of the present invention may be used in a stacked manner.

次に被めっき体である良導電性金属箔テープについて述
べる。被めっき体は、導電性を有するものであれば何で
も用いることができるが、100μΩ1以上の比抵抗体
ではめっきの膜厚に場所むらが生じたり、電析速度が遅
くなるなど問題点が起こる場合がある。良導電性金属箔
テープの比抵抗は10μΩ1以下であることが望ましい
。さらに好ましくは5μΩC1であることが望ましい。
Next, the highly conductive metal foil tape to be plated will be described. Any material to be plated can be used as long as it has conductivity; however, a resistivity material of 100μΩ1 or more may cause problems such as uneven plating thickness or slow deposition rate. There is. It is desirable that the specific resistance of the highly conductive metal foil tape is 10 μΩ1 or less. More preferably, it is 5 μΩC1.

また、十分な導電性を保持するためには3〇−以上さら
には5〇−以上の厚さの良導電性金属箔を用いることが
望ましい。このように低抵抗の金属箔、例えば銀および
銅箔上に非晶質合金をめっきした場合には均一膜厚の非
晶質合金層を速やかに得ることができる。
Further, in order to maintain sufficient conductivity, it is desirable to use a highly conductive metal foil having a thickness of 30 mm or more, and even 50 mm or more. In this way, when an amorphous alloy is plated on a low-resistance metal foil, such as a silver or copper foil, an amorphous alloy layer with a uniform thickness can be quickly obtained.

非晶質合金を被覆した良導電性金属箔テープの片面また
は両面に粘着剤を塗布しであると、必要な部分にこれを
張り付けることにより容易に電磁波シールドを施すこと
ができる。
By applying an adhesive to one or both sides of a highly conductive metal foil tape coated with an amorphous alloy, it is possible to easily provide electromagnetic shielding by applying the adhesive to the required area.

以下実施例を用いて説明する。This will be explained below using examples.

(実施例1) 第1図に示した如き構造のめっき装置のめっき浴槽6中
に塩化鉄(I[) 11.9 g/l、硫酸コバルト(
■)264.3g/j!、次亜リン酸ナトリウム21.
2g/f、はう酸6.2g/lなる組成のめっき浴をp
H1,3に調製して満たし、50°Cに保持した。コバ
ルトからなる対重5と作用極である5〇−厚の銅箔4の
間に電流密度0.05A /cjに相当する電圧を印加
して銅箔上に鉄−コバルト−りん非晶質合金層を析出さ
せた。を源としては北斗電工社製HCP−3018を使
用した。めっき浴中の銅箔の滞在時間を3分とすること
により銅箔上に3−のPe:Co:P=6:84 : 
10の組成の非晶質合金層を形成した。
(Example 1) Iron chloride (I [) 11.9 g/l, cobalt sulfate (
■) 264.3g/j! , sodium hypophosphite21.
A plating bath with a composition of 2g/f, 6.2g/l
It was prepared and filled to H1,3 and kept at 50°C. A voltage corresponding to a current density of 0.05 A/cj is applied between the counterweight 5 made of cobalt and the 50-thick copper foil 4 serving as the working electrode to form an iron-cobalt-phosphorus amorphous alloy on the copper foil. A layer was deposited. As a source, HCP-3018 manufactured by Hokuto Denko Co., Ltd. was used. By setting the residence time of the copper foil in the plating bath to 3 minutes, 3-Pe:Co:P=6:84 on the copper foil:
An amorphous alloy layer having a composition of 10 was formed.

非晶質合金層表面は鏡面光沢を有し、柔軟性に優れてい
た。
The surface of the amorphous alloy layer had specular luster and was excellent in flexibility.

この合金層を銅箔より剥離し、X線回折チャートを取っ
た結果を第2図に示す。第2図において横軸は試料から
のX線散乱角であり、縦軸は散乱強度である。金属特有
の結晶に基づ(ピークはみられず、完全に非晶化してい
ることを確めた。このテープの電磁じゃへい効果は極め
て良好なものであった。
This alloy layer was peeled off from the copper foil and an X-ray diffraction chart was taken, and the results are shown in FIG. In FIG. 2, the horizontal axis is the X-ray scattering angle from the sample, and the vertical axis is the scattering intensity. Based on the crystal characteristic of metals (no peaks were observed, it was confirmed that the tape was completely amorphous).The electromagnetic interference effect of this tape was extremely good.

(実施例2) w4箔の裏面に粘着剤を塗布しであるテープ(3M社製
 製品Nal 245)上に実施例1と同様の方法で非
晶質合金層を5−形成した。さらにその上に銅めっき層
及び非晶質合金層を各々5−ずつ形成し、これを5回繰
り返して積層した。この電磁じゃへいテープの断面概略
図を第3図に示した。このテープの電磁しやへい効果は
穫めて良好であった。
(Example 2) An amorphous alloy layer was formed in the same manner as in Example 1 on a tape (product Nal 245, manufactured by 3M) by applying an adhesive to the back side of W4 foil. Further, five copper plating layers and five amorphous alloy layers were formed thereon, and this was repeated five times to stack them. A schematic cross-sectional view of this electromagnetic tape is shown in FIG. The electromagnetic shielding effect of this tape was very good.

〔発明の効果〕〔Effect of the invention〕

本発明の高透磁率非晶質合金をめっきした良導電性金属
箔は磁気遮へい効果に優れ、成形性にとみかつ加工性に
優れた電磁波遮へい材料として用いることができる。
The highly conductive metal foil plated with the high magnetic permeability amorphous alloy of the present invention has an excellent magnetic shielding effect, and can be used as an electromagnetic shielding material with excellent formability and workability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、本発明の電磁じゃへいテープを作るに際して
用いためっき装置の概略図であり、第2図は、実施例1
の非晶質合金のX線回折チャート図を、第3図は実施例
2によって得た非晶質合金層と銅層の積層構造を有する
本発明の電磁じゃへいテープの断面概略図である。 特許出願人 三菱レイヨン株式会社
FIG. 1 is a schematic diagram of a plating apparatus used in producing the electromagnetic barrier tape of the present invention, and FIG.
FIG. 3 is a schematic cross-sectional view of an electromagnetic barrier tape of the present invention having a laminated structure of an amorphous alloy layer and a copper layer obtained in Example 2. Patent applicant Mitsubishi Rayon Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] (1)良導電性金属箔テープの少なくとも片面に高透磁
性非晶質合金層を少なくとも一層電気めっき法にて形成
したことを特徴とする電磁波しゃへいテープ。
(1) An electromagnetic shielding tape characterized in that at least one highly permeable amorphous alloy layer is formed on at least one side of a highly conductive metal foil tape by electroplating.
JP7802089A 1989-03-31 1989-03-31 Electromagnetic wave shielding tape Pending JPH02260500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7802089A JPH02260500A (en) 1989-03-31 1989-03-31 Electromagnetic wave shielding tape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7802089A JPH02260500A (en) 1989-03-31 1989-03-31 Electromagnetic wave shielding tape

Publications (1)

Publication Number Publication Date
JPH02260500A true JPH02260500A (en) 1990-10-23

Family

ID=13650121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7802089A Pending JPH02260500A (en) 1989-03-31 1989-03-31 Electromagnetic wave shielding tape

Country Status (1)

Country Link
JP (1) JPH02260500A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003059030A1 (en) * 2002-01-08 2003-07-17 4-D Neuroimaging Oy Wall element for magnetically shielded room and magnetically shielded room
WO2016092692A1 (en) * 2014-12-12 2016-06-16 株式会社メイコー Moulded circuit module, and production method therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003059030A1 (en) * 2002-01-08 2003-07-17 4-D Neuroimaging Oy Wall element for magnetically shielded room and magnetically shielded room
US7335838B2 (en) 2002-01-08 2008-02-26 Elekta Ab (Publ) Wall element for magnetically shielded room and magnetically shielded room
EP1470746B1 (en) * 2002-01-08 2013-05-22 Elekta AB (publ) Wall element for magnetically shielded room and magnetically shielded room
WO2016092692A1 (en) * 2014-12-12 2016-06-16 株式会社メイコー Moulded circuit module, and production method therefor

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