JPH02257051A - Production of oxygen concentration sensor - Google Patents
Production of oxygen concentration sensorInfo
- Publication number
- JPH02257051A JPH02257051A JP1079782A JP7978289A JPH02257051A JP H02257051 A JPH02257051 A JP H02257051A JP 1079782 A JP1079782 A JP 1079782A JP 7978289 A JP7978289 A JP 7978289A JP H02257051 A JPH02257051 A JP H02257051A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- sheet
- porous
- layer
- porous sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000001301 oxygen Substances 0.000 title claims description 29
- 229910052760 oxygen Inorganic materials 0.000 title claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 28
- 238000009792 diffusion process Methods 0.000 claims abstract description 19
- 238000005245 sintering Methods 0.000 claims abstract description 9
- 239000011148 porous material Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 19
- 229910052596 spinel Inorganic materials 0.000 abstract description 13
- 239000011029 spinel Substances 0.000 abstract description 13
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052593 corundum Inorganic materials 0.000 abstract description 5
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 5
- 238000003825 pressing Methods 0.000 abstract description 4
- 229920000609 methyl cellulose Polymers 0.000 abstract description 2
- 239000001923 methylcellulose Substances 0.000 abstract description 2
- 239000003792 electrolyte Substances 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000005507 spraying Methods 0.000 description 5
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000007784 solid electrolyte Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 150000002926 oxygen Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、酸素濃度センサの製造方法に係り、特に拡散
律速層を有する限界電流式の酸素濃度センサに係る。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing an oxygen concentration sensor, and particularly to a limiting current type oxygen concentration sensor having a diffusion control layer.
［従来の技術］
内燃機関の排気通路に於ける如きガス雰囲気中に於ける
酸素濃度を測定する装置として、ジルコニア等の酸素イ
オン伝導固体電解質より構成された限界電流式の酸素濃
度センサが知られており、これは、例えば、特開昭５２
−６９６９０号、特開昭５３−１１６８９６号の各公報
に示されている。[Prior Art] As a device for measuring the oxygen concentration in a gas atmosphere such as in the exhaust passage of an internal combustion engine, a limiting current type oxygen concentration sensor made of an oxygen ion-conducting solid electrolyte such as zirconia is known. This is, for example, published in Japanese Unexamined Patent Application Publication No. 1983
-69690 and JP-A-53-116896.
限界電流式の酸素濃度センサは、センサ素子である固体
電解質に対するガス成分の供給を拡散律速するために、
前記固体電解質を有する酸素濃度測定室のガス入口部を
ピンホール律速層をなす小孔或いは多孔質律速層をなす
多孔質材料により構成され、いずれのものも拡散律速層
を有している。The limiting current type oxygen concentration sensor uses a diffusion control method to control the supply of gas components to the solid electrolyte, which is the sensor element.
The gas inlet portion of the oxygen concentration measurement chamber having the solid electrolyte is made of small pores forming a pinhole rate-controlling layer or a porous material forming a porous rate-controlling layer, both of which have a diffusion rate-controlling layer.
内燃機関の排気ガス中の酸素濃度を検出するに好適な限
界電流式の酸素濃度センサとして、前記酸素濃度測定室
の入口部壁をなすプレートにピンホール律速層としての
小孔と該小孔を覆うように該小孔の周辺部に多孔質律速
層としての多孔質層が設けられた酸素濃度センサが本願
出願人と同一の出願人による実願昭６３−３３５１０号
及び特願平１−９４９７号に於て既に提案されている。As a limiting current type oxygen concentration sensor suitable for detecting the oxygen concentration in the exhaust gas of an internal combustion engine, a small hole as a pinhole rate controlling layer is provided in the plate forming the entrance wall of the oxygen concentration measurement chamber. An oxygen concentration sensor in which a porous layer as a porous rate controlling layer is provided around the small pores so as to cover the pores is disclosed in Utility Model Application No. 33510/1983 and Japanese Patent Application No. 1/9497 filed by the same applicant as the present applicant. It has already been proposed in the issue.
多孔質律速層は、スピネル溶射によるものが一般的であ
るが、溶射面にピンホール律速層としての小孔が存在す
ると、溶射技術上これを覆うようには、スピネルを直接
溶射することはできない。The porous control layer is generally formed by spinel spraying, but if there are small pores as a pinhole control layer on the sprayed surface, it is not possible to directly spray spinel to cover them due to thermal spraying technology. .
このため、ガスの流通を妨げることなく小孔を覆う下地
層を形成すべく、プレートの小孔周辺部にＺｒ０２（ジ
ルコニア）の如きセラミックスの多孔質シートを圧着し
てこれを焼成し、この焼成多孔質層、即ち下地層の外表
面にスピネルを溶射することが考えられている。Therefore, in order to form a base layer that covers the small holes without interfering with gas flow, a porous sheet of ceramic such as Zr02 (zirconia) is pressed around the small holes of the plate and fired. It has been considered to thermally spray spinel onto the outer surface of a porous layer, ie, an underlayer.
［発明が解決しようとする課題］
上述の如き構造の拡散律速層を有する酸素濃度センサに
於ては、前記プレートの全面に亘って前記下地層となる
多孔質シートが圧着されれば、該多孔質シートの脱脂及
び焼成時に亘ってウエートがプレート全面に均一に作用
し、プレートに反りが生じることはない。しかし焼成多
孔質層のうち前記小孔に対応する部分の外周面にのみ多
孔質律速層としてのスピネル溶射層が設けられると、前
記焼成多孔質層のうちスピネル溶射層が設けられていな
い部分の外表面より内部にガスが侵入し、所定の拡散律
速か行われなくなる。これは、多孔質律速層の下地とな
る焼成多孔質層はこれ自身が酸素分子の拡散を生ぜせし
めないほどに充分に大きい通気孔による多孔質層である
からである。[Problems to be Solved by the Invention] In an oxygen concentration sensor having a diffusion control layer having the structure as described above, if a porous sheet serving as the base layer is pressed over the entire surface of the plate, the porous During degreasing and firing of the quality sheet, the weight acts uniformly over the entire surface of the plate, and the plate does not warp. However, if a spinel sprayed layer as a porous rate controlling layer is provided only on the outer circumferential surface of the portion of the fired porous layer that corresponds to the small pores, the portions of the fired porous layer where the spinel sprayed layer is not provided. Gas enters the interior from the outer surface, and the prescribed rate of diffusion is no longer controlled. This is because the fired porous layer underlying the porous rate controlling layer is a porous layer with sufficiently large ventilation pores so as not to cause the diffusion of oxygen molecules.
これに対し焼成多孔質層の全面に亘って、換言すれば前
記プレートの全面に亘ってスピネル溶射層が設けられる
と、大量のスピネルが必要になり、これは経済的でなく
、またスピネル溶射に多くの時間を要し、良好な生産性
を得ることができなくなる。On the other hand, if a spinel spray layer is applied over the entire surface of the fired porous layer, in other words over the entire surface of the plate, a large amount of spinel would be required, which would be uneconomical and would require less spinel spraying. This takes a lot of time and makes it impossible to obtain good productivity.
焼成多孔質層が小孔の周辺部にのみ設けられれば、上述
の如き不具合は生じないが、しかし、この場合には焼成
多孔質層の素材である多孔質シートをプレートに圧着す
る際に圧着荷重がプレートに不均一に作用するようにな
り、プレートに反りが生じる。このためプレートの歩留
りが悪化し、また酸素濃度センサの組付性及び性能安定
性が悪化するようになる。If the fired porous layer is provided only around the small holes, the above problems will not occur, but in this case, when the porous sheet, which is the material of the fired porous layer, is pressed onto the plate, The load acts on the plate unevenly, causing the plate to warp. As a result, the yield of plates deteriorates, and the ease of assembly and performance stability of the oxygen concentration sensor also deteriorates.
本発明は、上述の如き不具合に鑑み、酸素濃度センサに
於て所要の拡散律速作用を行う拡散律速層を構成するプ
レートを反りが生じることなく生産性よく製造する製造
方法を提供することを目的としている。SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to provide a manufacturing method for manufacturing a plate constituting a diffusion-limiting layer that performs the required diffusion-limiting action in an oxygen concentration sensor with high productivity without warping. It is said that
［課題を解決するための手段］
上述の目的は、本発明によれば、拡散律速のためにプレ
ートに小孔と該小孔を覆うように該小孔の周辺部に多孔
質層が設けられた酸素濃度センサの製造方法に於て、前
記プレートの小孔部分に多孔質拡散律速層の下地層とな
る第一の多孔質シートを載置し、前記プレートの残りの
部分に前記第一の多孔質シートより焼結温度が高い材質
よりなる第二の多孔質シートを載置し、前記第一の多孔
質シートと前記第二の多孔質シートとを前記プレートに
同時に圧着し、その後に前記第二の多孔質シートの焼結
温度より低い温度にて前記第一の多孔質シートを焼成し
、前記第二の多孔質シートを前記プレートより除去し、
前記第一の多孔質シートよりなる焼成多孔質層の外表面
に拡散律速用多孔質材料を溶射して該外表面に拡散律速
用多孔質層を形成することを特徴とする酸素濃度センサ
の製造方法によって達成される。[Means for Solving the Problems] According to the present invention, the above object is achieved by providing a plate with small holes and a porous layer around the small holes so as to cover the small holes for diffusion control. In the method for manufacturing an oxygen concentration sensor, a first porous sheet serving as a base layer of a porous diffusion control layer is placed in the small hole portion of the plate, and the first porous sheet is placed in the remaining portion of the plate. A second porous sheet made of a material having a higher sintering temperature than the porous sheet is placed, the first porous sheet and the second porous sheet are simultaneously pressed onto the plate, and then the firing the first porous sheet at a temperature lower than the sintering temperature of the second porous sheet, and removing the second porous sheet from the plate;
Production of an oxygen concentration sensor, characterized in that a diffusion-controlling porous material is thermally sprayed on the outer surface of the fired porous layer made of the first porous sheet to form a diffusion-controlling porous layer on the outer surface. achieved by the method.
［発明の作用及び効果コ
本発明による製造方法に於ては、多孔質拡散律速層の下
地層となる第一の多孔質シートはプレートの小孔部分に
しか設けられないが、残りの部分には第二の多孔質シー
トが設けられることから、これら多孔質シートを前記プ
レートに圧着する際には、その圧着力がプレートの全面
に均一に作用するようになる。これによりプレートに反
りが発生することが回避される。[Operations and Effects of the Invention] In the manufacturing method according to the present invention, the first porous sheet, which serves as the base layer of the porous diffusion-controlling layer, is provided only in the small hole portion of the plate, but in the remaining portion. Since the second porous sheet is provided, when these porous sheets are pressed onto the plate, the pressing force acts uniformly on the entire surface of the plate. This prevents the plate from warping.
第二の多孔質シートは焼成されずにその後にプレートよ
り除去され、前記第一の多孔質シートのみが焼成され、
この焼成多孔質層の外表面に拡散律速用多孔質材料が溶
射されるので、所要の拡散律速作用が安定して得られる
ようになる。このことから酸素濃度センサの出力特性が
安定する。The second porous sheet is then removed from the plate without being fired, and only the first porous sheet is fired;
Since the diffusion controlling porous material is thermally sprayed on the outer surface of this fired porous layer, the required diffusion controlling effect can be stably obtained. This stabilizes the output characteristics of the oxygen concentration sensor.
［実施例］
以下に添付の図を参照して本発明を実施例について詳細
に説明する。[Example] The present invention will be described in detail below with reference to the accompanying drawings.
第１図及び第２図は本発明による製造方法により製造さ
れる拡散律速プレートを含む積層型の限界電流式酸素濃
度センサの一例を示している。第１図に於て１０はジル
コニア等の固定電解質により構成されたセンサ素子をな
す電解質シートを示しており、電解質シート１０の図に
て上下両面には白金電極１２と１４とが各々スクリーン
印刷されている。FIGS. 1 and 2 show an example of a laminated limiting current type oxygen concentration sensor including a diffusion control plate manufactured by the manufacturing method according to the present invention. In FIG. 1, numeral 10 indicates an electrolyte sheet forming a sensor element made of a fixed electrolyte such as zirconia, and platinum electrodes 12 and 14 are screen-printed on both upper and lower surfaces of the electrolyte sheet 10, respectively. ing.
電解質シート１０の一方の側には測定室構成用の開口２
２を有する測定室構成用プレート２０と拡散律速層を構
成するプレート３０とが順に積層されており、開口２２
は、第２図によく示されている如く、電解質シート１０
とプレート３０との間に酸素測定室２４を構成するよう
になっている。On one side of the electrolyte sheet 10 there is an opening 2 for configuring a measurement chamber.
A plate 20 for configuring a measurement chamber having an opening 22 and a plate 30 constituting a diffusion control layer are stacked in this order.
As best shown in FIG. 2, the electrolyte sheet 10
An oxygen measurement chamber 24 is configured between the plate 30 and the plate 30.
電解質シート１０の他方の側には大気導入用フレーム４
０と底プレート５０とが順に積層されており、フレーム
４０は電解質シート１０と底プレート５０との間に大気
導入ダクト４２を構成している。On the other side of the electrolyte sheet 10, there is a frame 4 for introducing the atmosphere.
0 and a bottom plate 50 are stacked in this order, and the frame 40 constitutes an atmosphere introduction duct 42 between the electrolyte sheet 10 and the bottom plate 50.
プレート３０には反応質２４に連通する拡散律速用の小
孔３２が穿設されている。The plate 30 is provided with a diffusion-limiting small hole 32 that communicates with the reactant 24 .
プレート３０の小孔３２の周辺部には焼成多孔質層３４
が設けられており、これにより小孔３２の部分が通気性
を阻害されることなく覆われている。焼成多孔質層３４
の外表面にはその全体に亘ってスピネル溶射等による拡
散律速層３６が形成されている。A fired porous layer 34 is formed around the small holes 32 of the plate 30.
is provided, so that the small hole 32 is covered without impeding air permeability. Fired porous layer 34
A diffusion control layer 36 is formed by spinel spraying or the like over the entire outer surface.
次に第３図（Ａ）〜（Ｄ）を用いて本発明による酸素濃
度センサ、特に小孔３２と拡散律速層３４とを有するプ
レート３０の製造方法について説明する。Next, a method for manufacturing an oxygen concentration sensor according to the present invention, particularly a plate 30 having small holes 32 and a diffusion control layer 34, will be explained using FIGS. 3(A) to 3(D).
（Ａ）図に於て、１００はプレート３０となるＺｒＯ２
グリーンシート（Ｚｒ ０２粉末１００部、結合剤１１
部、溶媒７０部、解膠剤３部）を示しており、該グリー
ンシート１００には予め小孔３２が形成されている。小
孔３２は直径０．５ｍｍ程度のものであってよく、これ
は電動ドリルにより穿孔されてよい。(A) In the figure, 100 is ZrO2 which becomes plate 30.
Green sheet (100 parts of Zr 02 powder, 11 parts of binder
3 parts, 70 parts of solvent, and 3 parts of deflocculant), and the green sheet 100 has small holes 32 formed in advance. The small hole 32 may have a diameter of about 0.5 mm, and may be drilled with an electric drill.
（Ｂ）図に示されている如く、グリーンシート１００の
一方の面の小孔３２の部分に第一の多孔質シートとして
ＺｒＯ２多孔質シート１１０を載置し、また他の残りの
部分に第二の多孔質シートとしてＡｌ２Ｏ３多孔質シー
ト１２０を載置する。(B) As shown in the figure, a ZrO2 porous sheet 110 is placed as a first porous sheet in the small hole 32 portion of one side of the green sheet 100, and a second porous sheet is placed on the other remaining portion. An Al2O3 porous sheet 120 is placed as the second porous sheet.
Ｚｒ ０２多孔質シート１１０とＡｌ ２０３多孔質シ
ート１２０は、各々、Ｚｒ ０２或いは高純度ＡＩ ２
０３粉末１００部に対し同バインダ（溶媒１００部、結
合剤１５部、可塑剤７部、解膠剤４部）で同時間（４０
分）に亘ってボールミルによって撹拌し、ドクタプレー
ト装置（ブレードスリット０．９ｍｍ、キャスティング
フィルムスピード０．３ｍ／分、常温乾燥５時間）を用
いて製造されたものであってよい。The Zr 02 porous sheet 110 and the Al 203 porous sheet 120 are each made of Zr 02 or high purity AI 2
03 powder for the same time (40 parts) with the same binder (100 parts of solvent, 15 parts of binder, 7 parts of plasticizer, 4 parts of deflocculant).
It may be produced using a doctor plate apparatus (blade slit 0.9 mm, casting film speed 0.3 m/min, drying at room temperature for 5 hours).
次にＺｒＯ２多孔質シート１１０とＡＩ ２０３多孔質
シート１２０を各々１シｔ％メチルセルロース水溶液を
もって圧着荷重５ｋｇ／ａｎ’にてプレート３０の表面
に同時に圧着する。尚、これら多孔質シートは焼成後に
於ては気孔率が約３ＱＯＯＸであり、表面粗さＲｚが４
０μｍ以上となる同質のものとする。Next, the ZrO2 porous sheet 110 and the AI 203 porous sheet 120 are simultaneously pressed onto the surface of the plate 30 using a 1% methyl cellulose aqueous solution at a pressing load of 5 kg/an'. These porous sheets have a porosity of about 3QOOX and a surface roughness Rz of 4 after firing.
It should be of the same quality and have a diameter of 0 μm or more.
上述の如く多孔質シート１１０及び１２０を圧着された
グリーンシート１００を２０℃／時間、最高温度４２０
℃で脱脂し、１４００℃にて１時間焼成する。これによ
りグリーンシート１００とＺｒ ０２多孔質シート１１
０は各々焼成されてプレート３０と焼成多孔質層３４と
なるが、Ａｌ２Ｏ３多孔質シート１２０は焼結温度には
達していないので、プレート３０より容易に剥がれる状
態になっている。この焼結後にＡｌ２Ｏ３多孔質シート
１２０はプレート３０より除去する。この時の状態は（
Ｃ）図に示されている。The green sheet 100 with the porous sheets 110 and 120 bonded together as described above is heated at 20° C./hour at a maximum temperature of 420° C.
Degrease at 1400°C and bake for 1 hour. As a result, the green sheet 100 and the Zr 02 porous sheet 11
The Al2O3 porous sheet 120 is fired to form the plate 30 and the fired porous layer 34, but the Al2O3 porous sheet 120 has not reached the sintering temperature, so it is in a state where it can be easily peeled off from the plate 30. After this sintering, the Al2O3 porous sheet 120 is removed from the plate 30. The state at this time is (
C) As shown in the figure.
次に（Ｄ）に示されている如く、焼成多孔質層３４の外
表面全体にスピネルを溶射し、厚さ約５００μｍ程度の
拡散律速層３４を成形する。Next, as shown in (D), spinel is thermally sprayed onto the entire outer surface of the fired porous layer 34 to form a diffusion control layer 34 with a thickness of approximately 500 μm.
尚、スピネル溶射はプレート３０の正面から行われるこ
とから、前記焼成多孔質層３４の外周縁部はプレート表
面に対し４５度或いはそれより挟角をなす角度にて面取
り研削しておき、この面にもスピネル溶射が良好に行わ
れて焼成多孔質３４の全面が拡散律速層３６により確実
に覆われるようにする。Since spinel spraying is performed from the front of the plate 30, the outer peripheral edge of the fired porous layer 34 is chamfered and ground at an angle of 45 degrees or more to the plate surface. Also, the spinel spraying is performed well so that the entire surface of the fired porous material 34 is reliably covered with the diffusion control layer 36.
上述の如き製造方法にて製造された拡散律速層を有する
プレートを備えた酸素濃度センサに於ては、拡散律速か
安定的に行われ、Ｖ−Ｉ特性の限界電流も安定的に出力
されるようになる。これに従ってこの酸素濃度センサが
内燃機関の排気通路中に設けられれば、空燃比が信頼性
よく測定されるようになる。In an oxygen concentration sensor equipped with a plate having a diffusion-limiting layer manufactured by the above-mentioned manufacturing method, diffusion-limiting is performed stably, and the limiting current of the V-I characteristic is also output stably. It becomes like this. Accordingly, if this oxygen concentration sensor is installed in the exhaust passage of an internal combustion engine, the air-fuel ratio can be measured reliably.
ＡＩ ２０３多孔質シートはＺｒＯ２多孔質シートと同
程度に多孔質であるため、脱脂後のウェイトのかかり方
も均一になり、プレート３０に製造過程にて反りが生じ
ることがない。Since the AI 203 porous sheet is as porous as the ZrO2 porous sheet, the weight is evenly applied after degreasing, and the plate 30 does not warp during the manufacturing process.
以上に於ては、本発明を特定の実施例について詳細に説
明したが、本発明はこれに限定されるものではなく、本
発明の範囲内にて種々の実施例が可能であることは当業
者にとって明らかであろう。Although the present invention has been described in detail above with reference to specific embodiments, it is understood that the present invention is not limited thereto and that various embodiments are possible within the scope of the present invention. This will be obvious to businesses.
第１図は本発明により製造されるプレートに組込まれる
積層型の酸素濃度センサの一例を示す分解斜視図、第２
図は第１図に示された酸素濃度センサの縦断面図、第３
図（Ａ）〜（Ｄ）は本発明による酸素濃度センサのプレ
ートの製造過程を示す工程図である。
１０・・・固定電解質シート、１２．１４・・・白金電
極、２０・・・測定室構成プレート、２２・・・開口、
２４・・・酸素測定室、３０・・・プレート、３２・・
・小孔。
３４・・・焼成多孔質層、３６・・・拡散律速層、４０
・・・フレーム、４２・・・大気導入用ダクト ５０・
・・底プレー）、１００・・・グリーンシート、］１０
・・・ＺｒＯ２多孔質シート、］２０・・・ＡｌＯ３多
孔質シート
特 許 出 願 人 トヨタ自動車株式会社代
理 人 弁理士 明石 昌毅（Ｄ）
３０プレート
＝３５５−FIG. 1 is an exploded perspective view showing an example of a laminated oxygen concentration sensor incorporated into a plate manufactured according to the present invention;
The figure is a vertical cross-sectional view of the oxygen concentration sensor shown in Figure 1,
Figures (A) to (D) are process diagrams showing the manufacturing process of a plate for an oxygen concentration sensor according to the present invention. DESCRIPTION OF SYMBOLS 10... Fixed electrolyte sheet, 12.14... Platinum electrode, 20... Measurement chamber configuration plate, 22... Opening,
24...Oxygen measurement room, 30...Plate, 32...
・Small hole. 34...Calcined porous layer, 36...Diffusion controlling layer, 40
... Frame, 42... Atmosphere introduction duct 50.
...bottom play), 100...green sheet, ]10
...ZrO2 porous sheet,]20...AlO3 porous sheet Patent applicant Toyota Motor Corporation representative
Attorney Masaki Akashi (D) 30 plates = 355-
Claims (1)
該小孔の周辺部に多孔質層が設けられた酸素濃度センサ
の製造方法に於て、前記プレートの小孔部分に多孔質拡
散律速層の下地層となる第一の多孔質シートを載置し、
前記プレートの残りの部分に前記第一の多孔質シートよ
り焼結温度が高い材質よりなる第二の多孔質シートを載
置し、前記第一の多孔質シートと前記第二の多孔質シー
トとを前記プレートに同時に圧着し、その後に前記第二
の多孔質シートの焼結温度より低い温度にて前記第一の
多孔質シートを焼成し、前記第二の多孔質シートを前記
プレートより除去し、前記第一の多孔質シートよりなる
焼成多孔質層の外表面に拡散律速用多孔質材料を溶射し
て該外表面に拡散律速用多孔質層を形成することを特徴
とする酸素濃度センサの製造方法。In a method for manufacturing an oxygen concentration sensor in which a plate is provided with a small hole and a porous layer is provided around the small hole to cover the small hole for diffusion control, the small hole portion of the plate is provided with a porous layer. Place the first porous sheet that will become the base layer of the diffusion-controlling layer,
A second porous sheet made of a material having a higher sintering temperature than the first porous sheet is placed on the remaining portion of the plate, and the first porous sheet and the second porous sheet are bonded together. is simultaneously pressed onto the plate, and then the first porous sheet is fired at a temperature lower than the sintering temperature of the second porous sheet, and the second porous sheet is removed from the plate. , an oxygen concentration sensor characterized in that a diffusion-controlling porous material is thermally sprayed on the outer surface of the fired porous layer made of the first porous sheet to form a diffusion-controlling porous layer on the outer surface. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1079782A JP2737997B2 (en) | 1989-03-30 | 1989-03-30 | Manufacturing method of oxygen concentration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1079782A JP2737997B2 (en) | 1989-03-30 | 1989-03-30 | Manufacturing method of oxygen concentration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02257051A true JPH02257051A (en) | 1990-10-17 |
| JP2737997B2 JP2737997B2 (en) | 1998-04-08 |
Family
ID=13699778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1079782A Expired - Lifetime JP2737997B2 (en) | 1989-03-30 | 1989-03-30 | Manufacturing method of oxygen concentration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2737997B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286680A (en) * | 2001-03-27 | 2002-10-03 | Ngk Spark Plug Co Ltd | Lamination type gas sensor element and its manufacturing method |
| JP2015230178A (en) * | 2014-06-03 | 2015-12-21 | 株式会社デンソー | Gas sensor element |
-
1989
- 1989-03-30 JP JP1079782A patent/JP2737997B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002286680A (en) * | 2001-03-27 | 2002-10-03 | Ngk Spark Plug Co Ltd | Lamination type gas sensor element and its manufacturing method |
| JP4730722B2 (en) * | 2001-03-27 | 2011-07-20 | 日本特殊陶業株式会社 | Method for manufacturing laminated gas sensor element and laminated gas sensor element |
| JP2015230178A (en) * | 2014-06-03 | 2015-12-21 | 株式会社デンソー | Gas sensor element |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2737997B2 (en) | 1998-04-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4407057A (en) | Method of producing a flat thin film type oxygen sensor | |
| JPS6252450A (en) | Electrochemical element and its manufacture | |
| JP3597234B2 (en) | Planar type electrochemical sensor for measuring gas component in gas mixture and method of manufacturing the same | |
| JPH0221545B2 (en) | ||
| JP2007139749A (en) | Gas sensor element and gas sensor | |
| JPH0437944B2 (en) | ||
| WO1983000739A1 (en) | Oxygen sensor | |
| JP2000180410A (en) | Lamination-type ceramic gas sensor | |
| GB2081908A (en) | Method of producing solid electrolyte oxygen-sensing element of laminated structure with measuring electrode partially deposited from vapor phase | |
| JPH02257051A (en) | Production of oxygen concentration sensor | |
| JPH106324A (en) | Preparation of ceramic structure | |
| JP4603757B2 (en) | Sensor element | |
| JPS62222159A (en) | Oxygen sensor | |
| JPH0516543B2 (en) | ||
| US20040217000A1 (en) | Gas sensor element and manufacturing the same | |
| JP2612584B2 (en) | Manufacturing method of oxygen detection element | |
| JP2584881B2 (en) | Ceramic green sheet and method for producing electrochemical element using the same | |
| JP4588853B2 (en) | Manufacturing method of laminated gas sensor element | |
| JP4520648B2 (en) | Gas sensor and manufacturing method thereof | |
| JPH01232252A (en) | Oxygen sensor element | |
| JP2003240750A (en) | Gas sensor element | |
| JPS6052762A (en) | Sensor element of solid electrolyte type oxygen sensor and its production | |
| JP3752452B2 (en) | Flat plate oxygen sensor and manufacturing method thereof | |
| JPH11337517A (en) | Gas sensor and manufacture thereof | |
| JPH09170999A (en) | Manufacture of oxygen sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080116 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090116 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090116 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100116 Year of fee payment: 12 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100116 Year of fee payment: 12 |