JPH02249910A - Measuring instrument for surface roughness - Google Patents

Abstract

PURPOSE:To improve reliability of a measurement result by correcting detection results at the time before/after the operation of a movement means with correction means which are exerted when the detection result indicates the value of upward or downward limit and making a continuation to the detection result at the time before the operation of the movement means. CONSTITUTION:A data signal from a detection means 4 is received by a signal inspection part 31 and a control signal to stop a driving motor 9 is outputted to a system control part 33 so that the means 4 are positioned at a zero level. Next, by the control part 33, the control signal making the means 4 to scan an object to be measured is outputted to a slide means 12 along with a stopping command is outputted to a motor 9. At this stage, the object to be measured is scanned with a contact probe 11 in the means 4, and data for the surface roughness are sent to an inspection part 31. The data sent to the inspection part 31 are fetched to an arithmetic process part 32 and a storage part 34 for the arithmetic process, then the measurement result is displayed on a display panel 7 and stored in a recorder 45 at the same time. When the detection result indicates the value of upward or downward limit, the data measured from the means 4 are detected by the inspection part 31 to send the detection data to the control 3, which are corrected by the correction means.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a surface roughness measuring device, and more specifically, the detection means for detecting the surface roughness of an object to be measured is of a contact type using a stylus. The present invention also relates to a surface roughness measuring device having an upper limit and a lower limit in a detectable range.

[Prior Art] The detection means for detecting the surface roughness of the object to be measured is a contact type detection using a stylus, and is a surface roughness measuring device having an upper limit and a lower limit in the detectable range. , conventionally,
There is one disclosed in Japanese Utility Model Application Publication No. 57-94804.

[Problems to be Solved by the Invention] In the measuring device disclosed in Utility Model Application No. 57-94804, the value of the surface roughness of the object to be detected exceeds the upper and lower detectable limits of the detection means. There was a problem in that the measurement results obtained were not sufficiently reliable.

Furthermore, if the stylus that constitutes the detection means is made to follow the surface to be measured beyond the detectable limit of the detection means, the stylus will receive a pressing force from the surface to be measured at a position exceeding the permissible movement range of the stylus. There is a problem in that the detection means itself is damaged due to this. In order to solve this problem of damage, it is conceivable to use a non-contact type detection means. However, if a non-contact type detection means is used, if there is minute dust or oil droplets adhering to the surface to be measured, it will be able to detect these adhering substances as well, resulting in reliable measurement results. The problem arises that it cannot be obtained.

The present invention has been made in view of the above circumstances, and provides a surface roughness measuring device in which the detection means is a contact type having a stylus, and the detection means has an upper limit and a lower limit that can be detected. Moreover, reliable measurement results can be obtained even if the value to be detected exceeds the detectable limit of the detection means, and in addition, the measurement result can be easily obtained while the detection means is tracking the surface to be measured. To provide a surface roughness measuring device in which a detection means is not damaged due to being pressed against a surface.

[Means for Solving the Problems] The present invention provides that, when detecting the surface roughness of a surface to be measured, the detection result at that time is at or near the upper limit of detectability of the detection means, or at a lower value. means capable of automatically moving the relative position of the table and the stylus of the detection means so that the detection result moves away from its corresponding detectable limit when a value at or near the limit is reached; This surface roughness measuring device is provided with a means for making measurement values continuous before and after the movement when the relative position of the surface is automatically moved.

Its detailed configuration consists of a base, a support provided on the base, a table placed on the base for mounting and supporting the object to be measured, and a stylus supported by the support. a detecting means for detecting the surface roughness of an object to be measured which is placed and supported on a table, and further has an upper limit and a lower limit that can be detected in the detection; and the detecting means is placed and supported on the table. a sliding means capable of sliding a stylus of the detection means and a table relatively parallel to each other in order to scan relative to the object to be measured and detect the surface roughness of the object;
Calculation display means is provided for calculating and displaying the surface roughness of the object to be measured based on the detection result detected by the detection means, and in addition, the detection means detects the surface roughness of the object to be measured that is placed and supported on the table. When the detection result detected by the detection means is at or near the upper limit of detection of the detection means, or at or near the lower limit of the detection means, the detection result of the detection means corresponds to the corresponding value. a moving means for moving the relative position of the table and the stylus of the detecting means away from a detectable limit, and based on the distance moved by the actuation of the moving means; outputting a signal to the calculation display means for correcting at least one of the respective detection results before and after the operation of the transportation means so that the detection results detected are continuous with the detection results detected before the operation of the transportation means; This is a surface roughness measuring device equipped with a correction means.

Further, the present invention further provides a method for determining whether or not the average trajectory of the surface roughness is parallel to the sliding direction of the sliding means when the surface roughness is measured by placing and supporting the object to be measured on the table. and an attitude correction means for correcting the tilted attitude of the table so that the average locus is parallel to the sliding direction of the slide means based on the judgment result of the judgment means.

In addition, the above-mentioned slide means may specifically include a structure in which a slide mechanism is provided that allows the stylus to slide on the detection means supported by a column. In addition, the above transportation means are specifically:
A configuration in which a slide mechanism that can slide the table in the longitudinal direction of the support is provided between the base and the table, and/or a ball screw is provided in parallel to the support and a detection means is engaged with the ball screw. Examples include a configuration in which the detection means slides toward or away from the base, and a configuration in which the detection contact portion of the stylus of the detection means rotates.

[Function] While detecting the surface roughness of the object to be measured, if the detection result reaches a value at or near the upper detectable limit of the detection means, or a value at or near the lower limit, the moving means is activated. so that the detection result is separated from its corresponding limit.
The relative positions of the table and the detection means move. Also, at this time, the correction means is activated, and the detection results before and after the operation of the moving means are corrected and continue to the detection results before the operation of the moving means.

[Example] This invention will be explained in detail according to the embodiments shown in FIGS. 1-4.

However, the invention is not limited to this example.

As shown in FIG. 1, the surface roughness measuring device 1 has a support 3 vertically installed above a base 2, and a detection means 4 for measuring the roughness of the object to be measured is supported on the support 3. There is. Below the base 2, a calculation display means 5 is provided that calculates and displays the surface roughness of the object to be measured (not shown) based on the detection results detected by the detection means 4. Further, an operation panel 6 for operating the surface roughness measuring device 1 is incorporated on the front surface of the calculation display means 5, and a liquid crystal display panel 7 of the calculation display means 5 is provided. Pillar 3 and detection means 4
The surface of the object to be measured is mounted and supported on the table 10 by sliding the detection means 4 in the vertical direction (in the direction of arrow A) between the ball screw 8, the drive motor 9, etc. (not shown), and a means for adjusting the detection means 4 so that the stylus 11 of the detection means 4 slides parallel to the surface to be measured of the object to be measured which is placed and supported on the table 10. A sliding means 12 that can be slid in the horizontal direction (in the direction of arrow B) is provided.

The detection means 4 includes a stylus 11 that contacts and scans the surface to be measured, a converter (not shown) that converts the vertical movement of the contact area of the stylus 11 into an amount of electricity, and an electric signal from this converter that is calculated. It is configured to include a connector (not shown) for sending data to the display means 5, a cylindrical casing 13 whose contact portion supports the stylus 11 in a vertically movable manner, and the like. The detecting means 4 detects the upper limit of detectability and the surface roughness by converting the vertical movement of the contact portion of the stylus 11 into an amount of electricity by the converter to detect the surface roughness. It has a lower limit.

The slide means 12 includes a holder 14 that holds the detection means 4.
, a slider 15 and a guide 16 that guide the slide of the holder 14 in the horizontal front-rear direction, that is, in the direction of arrow B, and a ball screw 17 and output motor 1 that drive the slider 15.
8 and a casing 19.

The surface roughness measuring device 1 has an upper limit at which the detection result of the detection means 4 can be detected when the detection means 4 is detecting the roughness of the two surfaces of the object to be measured mounted and supported on the table 10; Or, when the lower limit is reached, table 1 is set so that the detection result of the detection means 4 is separated from the corresponding detectable limit.
0 and the position of the stylus 11 of the detection means 4 are provided. As shown in FIG. 2, the moving means 20 has a drive section interposed between the base 2 and the table 10, and has a base 21, pillars 22, 23, 24 erected on the base 21, and pillars 22, 23, 24, A slider 25 that can be kept in a horizontal state by 23.24 and slid while being guided in the vertical direction, that is, in the direction of arrow A;
The cross roller guide 26 interposed between the pillars 22 and 23.24 engages with the inclined bottom surface 27 of the slider 25, and is slid horizontally in the front-rear direction (in the direction of arrow B), thereby causing the slider 25 to move up and down. A sliding body 28 that provides a force for movement in the direction (direction of arrow A), and an output motor 29 that provides a driving force for sliding the sliding body 28 in the direction of arrow B.
and a feed screw 30.

As shown in FIG. 3, the configuration related to the operation of the moving means 20 includes a detecting means 4 and a signal from a converter of the detecting means 4, so that the detection result of the detecting means 4 is at zero level and the upper limit of detection. and a signal inspection unit 3 that detects that the lower limit is reached.
1 and the data signal that has passed through the signal inspection section 31.
The moving means 2 receives control signals from the arithmetic processing section 32 that performs data processing such as conversion, and the signal inspection section 31 based on the fact that the detection results are at the detectable upper and lower limits.
The system controller 33 outputs drive and stop control signals to the zero output motor 29, and outputs data processing control signals to the arithmetic processing section 32.

Further, the surface roughness measuring device 1 is configured such that when the moving means 20 is activated and the table 10 is moved in the direction of arrow A with respect to the detecting means 4, the detection results are consecutive before and after the movement based on the distance moved. A correction means (not shown) is provided for correcting the detection result after movement so as to do so. As shown in FIG. 3 as a system, the correction means includes a signal inspection section 31, a system control section 33, and receives a control signal from the system control section 33 when the moving means 20 is activated, and receives a control signal from the system control section 33 through the signal inspection section 31. It is configured to include an arithmetic processing section 32 that corrects an incoming data signal, and a storage section 34 that stores data used when the arithmetic processing section 32 performs a correction operation.

Further, in the surface roughness measuring device 1, when the surface roughness is measured by placing and supporting the object to be measured on the table 10, the average locus of the surface roughness is parallel to the sliding direction of the sliding means 12. determining means (not shown) for determining whether or not the position is the same, and posture correction for correcting the tilted posture of the table 10 so that the center locus becomes parallel to the sliding direction of the sliding means based on the sliding direction determination result by the determining means. Means 3
6 is provided. Specifically, the determination means mainly includes a signal inspection section 31. Posture correction means 36
As shown in FIG. 2, the drive unit includes a mount member 37 fixed to the top surface of the slider 25, a wedge-shaped sliding body 38 that can slide on the top surface of the slider 25 in the direction of arrow B, and a top surface of the slider 25. A support member for mounting and fixing the table 10, rotatably supported by a pin 40 with respect to the mount member 37 in the direction of arrow C, and capable of changing the detection attitude of the table 10 by engaging with the slope of the sliding body 38. 39, a drive motor 41 that applies a sliding force to the sliding body 38 in the direction of arrow B, and a feed screw 42. 4
3 and 44 are covers, which are attached to the base 21 and the table 10, respectively. As shown in FIG. 3 as a system, the attitude correction means 36 includes a detection means 4, a signal inspection section 31, an arithmetic processing section 32, and a system control section 3.
3, a storage section 34, and a drive motor 41.

Note that 45 is a recorder for recording measurement results.

The surface roughness measuring device 1 is configured as described above. In the following, the use of the surface roughness measuring device 1 will be explained.

The measurer places the object to be measured on the table 10 and then operates the operation panel 6 to start the operation of the surface roughness measuring device 1. Here, first, the drive motor 9 outputs an output, and the slide means 12, which has been set to the highest position in advance, starts sliding downward in the direction of arrow A along the column 3. As the slide means 12 slides, the detection means 4 also slides downward, but when the detection means 4 slides, the stylus 11
When the contact portion of the tip contacts the object to be measured, the detection means 4 sends a data signal to the signal inspection section 31 indicating that the contact portion contacts the object to be measured. The signal inspection section 31 receives the data signal from the detection means 4 and outputs a control signal to the system control section 33 to stop the drive motor 9 so that the detection means 4 is located at the zero level. Upon receiving the control signal from the signal inspection unit 31, the system control unit 33 outputs a control signal for a stop command to the drive motor 9, and also outputs a control signal for causing the detection means 4 to scan the object to be measured by a predetermined distance. , is output to the slide means 12. The drive motor 9 stops upon receiving a control signal from the system control section 33, and the detection means 4 is positioned at zero level with respect to the object to be measured. On the other hand, the slide means 12 receives a control signal from the system control section 33, and
The detection means 4 is slid in the direction of arrow B by a predetermined distance. Here, the detection means 4 scans the object to be measured by a predetermined distance, and sends the data obtained by the scanning to the arithmetic processing section 32 via the signal inspection section 31 as an electric signal. The arithmetic processing unit 32 calculates the average trajectory of the surface roughness at a predetermined distance on the surface of the object to be measured based on the data signal from the detection means 4, that is, calculates the angle of the average trajectory, and further calculates the calculated angle. is output to the system control unit 33 as a signal. The signal indicating this angle essentially becomes a control signal. The system control unit 33 receives the signal from the arithmetic processing unit 32, and if the angle is outside the allowable range, that is, the sliding means 12
If the average locus is not parallel but at an angle with respect to the sliding direction of
A control signal for output is output to 1. Drive motor 41
receives the control signal for this output, rotates the feed screw 42 to slide the sliding body 38 in the direction of arrow B, and as a result, rotates the table 10 together with the support member 39 in the direction of arrow C to obtain the average value. Slide trajectory means 1
Parallel to the sliding direction of 2.

Thereafter, the system control section 33 outputs a signal to the slide means 12 for the detection means 4 to scan the object to be measured.

The slide means 12 slides the detection means 4 in the direction of arrow B by the output motor 18 outputting the output. By this sliding, the detection means 4 causes the stylus 11 to scan the object to be measured, and sends surface roughness data to the signal inspection section 31. The data sent to the signal inspection section 31 is taken into the arithmetic processing section 32 and the storage section 34 and subjected to arithmetic processing, and the measurement results are displayed on the display panel 7 and recorded on the recorder 45.

While performing this measurement, if the detection result reaches the upper limit that can be detected by the detection means 4, the signal inspection section 31 inspects the measurement data from the detection means 4 and detects that it is at the upper limit. , outputs a signal to the system control unit 33 indicating that the detection result is a detectable upper limit value. When the system control unit 33 receives this signal from the signal inspection unit 31, it outputs a stop signal to the slide means 12, and
Arrow A shows Table 10 by the difference between the zero level and the upper limit.
An activation signal is output to the moving means 20 so as to cause the moving means 20 to slide downward. When the slide means 12 receives this signal from the system control section 33, the output motor 18 is stopped and the scanning of the detection means 4 is temporarily stopped. On the other hand, the transportation means 20
receives this signal from the system control unit 33, and the output motor 29 rotates the feed screw 30 to slide the sliding body 28 to the left in the direction of arrow B, and as a result, the table 10 moves downward in the direction of the arrow to the zero level. and the upper limit. Here, the contact tip portion of the stylus 11 of the detection means 4 is at a zero level position with respect to the object to be measured. Also, at this time, the system control section 33 outputs a signal to the correction means so that the detection results are continuous before and after the slide means 12 is temporarily stopped. That is, a control signal is output to the arithmetic processing section 32 and the storage section 34 for adding only the distance traveled by the table 10 to the detection results obtained after the detection of the upper limit.

The storage unit 34 receives the above signal from the system control unit 33 and sends the pre-stored distance of the difference between the zero level and the upper limit to the arithmetic processing unit 32. The arithmetic processing section 32 receives the signal from the system control section 33 and exchanges the arithmetic expression so as to add the difference distance from the storage section 34 to the detected detection result obtained after the detection of the upper limit. When the moving means 20 and the correcting means each receive the above-mentioned control signals and finish their operations, the system control section 33 outputs a control signal to the slide means 12 to restart the operation. The slide means 12 receives this control signal from the system control section 33 and slides the detection means 4 in the direction of arrow B again. The detection means 4 starts sliding in the direction of arrow B again,
The roughness of the surface to be measured of the object to be measured is again started to be detected so as to continue with the state before the slide stopped, but the detection is started based on the zero level. However, the detection result obtained by this detection is corrected by the correction means, so that a value obtained by adding the value of the difference between the zero level and the upper limit to the value detected by the detection means 4 is displayed on the display panel 7 and the recorder 45, respectively. Displayed and recorded. In other words, the surface roughness measuring device 1 is
When the roughness of the surface to be measured of the object to be measured exceeds the detectable upper limit of the detection means 4, the relative position between the surface to be measured and the detection means 4 is changed by sliding the table 10 downward; In addition, it is configured to perform arithmetic processing to correct the data from the detection means 4 by the sliding amount. Therefore, even if the roughness of the surface to be measured exceeds the upper limit of what the detection means 4 can reliably detect, the measurement results obtained can be reliable. Further, since the stylus 11 of the detection means 4 is not strongly pressed by the surface to be measured and exceeds the permissible movement range of the stylus 11, the detection means 4 will not be damaged.

The above-mentioned operation of the surface roughness measuring device 1 is performed when the detection result of the detection means 4 reaches the upper detectable limit value, but when the detection result reaches the lower detectable limit value, the moving means 2o is activated to move the table 10 upward to slide the surface to be measured to the zero level position of the detection means 4, and the measured value obtained after sliding is calculated from the detection result of the detection means 4 by the operation of the correction means. The value obtained by subtracting only the amount of slide is displayed and recorded.

Incidentally, FIG. 4 shows a flowchart showing the operation of the surface roughness measuring device 1.

In this embodiment, the moving means 20 and the correcting means operate when the detection result of the detecting means 4 reaches the upper and lower detectable limits.

However, when the detection means 4 has a value near the upper limit and a value near the lower limit, that is, when the value is 90% of the upper limit and 90% of the lower limit, respectively, the moving means 20 and the correction means may be operated.

In this case, the value for correction stored in the storage section is the value of the moving distance of the moving means 20 in that case.

In the surface roughness measuring device 1, the moving means 20 is configured to move the object to be measured in the vertical direction, but it also moves the stylus 11 of the detecting means 4 in the vertical direction with respect to the sliding means 12. A configuration in which the detection tip of the stylus 11 is rotated relative to the slide means 12, a configuration in which the detection means 4 is moved vertically relative to the slide means 12,
A structure in which the slide means 12 is moved in the vertical direction by the output of the drive motor 9, or a structure in which some of these structures are combined may be used.

The surface roughness measuring device 1 operates the moving means 20 even if the stylus 11 of the detecting means 4 reaches the detectable limit value of the detecting means 4 while the posture correcting means 36 is operating. The detection means 4 may be configured to take a new zero level.

[Effects of the Invention] According to the present invention, even if the surface roughness of the surface to be measured exceeds the detectable limit of the detection means, measurement is possible, and the measurement results obtained are continuous. Moreover, an effect is obtained in that the detection means is not damaged due to pressure from the surface to be measured.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention, FIG. 2 is a sectional view taken along the line II in FIG. 1, FIG. 3 is an explanatory diagram showing the structure of this embodiment, and FIG. 3 is a flowchart illustrating example operation. 1; Surface roughness measuring device; 3; Strut; 5; Calculation display means; 7; Display panel; 12; Slide means; 36; Posture correction means. Base, detection means, operation panel, table, transportation means,

Claims (1)

[Scope of Claims] 1. A base, a column erected on the base, a table disposed on the base for mounting and supporting an object to be measured, and a table supported by the column and supporting the object to be measured. A detection means for detecting the surface roughness of an object to be measured which has a needle and is placed and supported on a table, and further has an upper limit and a lower limit that can be detected in the detection, and the detection means is placed and supported on the table. a slide means capable of sliding a stylus of the detection means and a table relatively parallel to each other in order to scan the object to be measured relative to the object to be measured and detect the surface roughness of the object; Calculation display means is provided for calculating and displaying the surface roughness of the object to be measured based on the detection result detected by the means; When the detection result detected by the detection means is a value at or near the upper limit of detection of the detection means, or a value at or near the lower limit of the detection means, the detection result of the detection means corresponds to that value. a moving means for moving the relative position of the table and the stylus of the detecting means away from the detectable limit, and detection by the detecting means after actuation of the moving means based on the distance moved by the actuation of the moving means; correction for outputting to the calculation display means a signal for correcting at least one of the respective detection results before and after the operation of the transportation means so that the detection results detected are continuous with the detection results detected before the operation of the transportation means; A surface roughness measuring device comprising means. 2. Judgment means for determining whether or not the average trajectory of the surface roughness is parallel to the sliding direction of the sliding means when the surface roughness is measured by placing and supporting the object to be measured on the table;
and a posture correction means for correcting the tilted posture of the table so that the average locus becomes parallel to the sliding direction of the sliding means based on the judgment result of the judgment means. measuring device.