JPH02251717A - Surface-roughness measuring apparatus - Google Patents

Abstract

PURPOSE:To make it possible to measure surface roughness in a short time by a simple operation by making a detecting means scan by a specified distance, and thereafter operating an operating means. CONSTITUTION:At first a driving motor 9 is operated, and a detecting means 4 is slidden downward when a sliding means 12 is slid by the output power of the motor. When the tip contact part of a probe comes to contact with a material to be measured (a) when the means 4 is slid, the means 4 sends the data signal indicating the contact with the material to be measured into a signal inspecting part 31. Meanwhile, the material to be measured is scanned with the means 4 by a specified distance. The electric signal indicating the obtained data is sent into an operating part 32 through the signal inspecting part 31. The average locus of the surface roughness at the specified distance of the surface of the material to be measured is computed in the operating part 32. Namely, the angle of the average locus is computed. The signal of the computed angle is outputted into a system control part 33. The control part 33 receives the signal from the operating part 32. When the angle is outside of an allowance range, an attitude correcting means 36 is actuated so that the angle is corrected to satisfy the allowance range, and the average locus is made parallel with the sliding direction of the means 12.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a surface roughness measuring device, and more specifically, the present invention relates to a surface roughness measuring device, and more specifically, a device for measuring surface roughness in which the surface of the object to be measured and the sliding direction in which the detection means scans are set in a predetermined state. This invention relates to a surface roughness measuring device.

[Prior Art] A conventional surface roughness measuring device that can bring the surface of the object to be measured and the scanning direction of the detection means into a predetermined state is disclosed in Utility Model Application No. 62-52472. There is something.

[Problems to be Solved by the Invention] In the surface roughness measuring device disclosed in Utility Application No. 62-52472, the surface for which the surface roughness of the object to be measured is to be determined and the sliding direction in which the detection means scans are set in a predetermined state. In order to do this, before measurement, the attitude and inclination state of the object to be measured is determined by scanning the object to be measured with a stylus, which is a detection means, and based on the result, the attitude and inclination state of the object to be measured is determined as a predetermined one. Adjust so that Next, the stylus is returned to the initial position before the attitude adjustment with respect to the object to be measured after the attitude adjustment, and then the surface roughness is measured again.

Therefore, the surface roughness measuring apparatus shown in Utility Model Application No. 62-52472 requires the stylus to scan at least twice, which poses a problem in that handling is complicated and takes a lot of time during measurement. In addition, if the detection means is a contact type stylus, it will damage the object to be measured, but if the object to be measured does not have sufficient hardness, the measurement result obtained by the -th scan may be different from the measurement result obtained by the -th scan. The problem is that the measurement results obtained by scanning the trace of the first scan a second time are significantly different, and the measurement results obtained from the second scan, which should be obtained as data, may be unreliable. there were.

This invention was made in view of the above circumstances, and is easy to handle, allows surface roughness measurement to be completed in a short time, and is suitable for measuring objects with insufficient hardness. An object of the present invention is to provide a surface roughness measuring device that ensures the reliability of measurement results even if there is a problem.

[Means for Solving the Problems] The present invention first scans the detection means by a predetermined distance, adjusts the posture state of the object based on the data obtained by this scanning, and This is a surface roughness measuring device configured to determine the surface roughness of a portion of an object to be measured and further to continuously measure the surface roughness after scanning a predetermined distance.

Its detailed configuration consists of a table on which the object to be measured is placed and supported, a detection means for detecting the roughness of the surface of the object to be measured that is placed and supported on the table, and a detection means that is placed on the table. A sliding means for relatively sliding a detector and a table in a parallel state in order to scan the surface of a supported object to be measured and detect its surface roughness, and a sliding means for relatively sliding a detector and a table in a parallel state, and Calculating and displaying means for calculating and displaying the surface roughness of the object to be measured is provided, and in addition, the detecting means scans a predetermined distance and detects the surface roughness of the object to be measured, which is placed and supported on the table. an average trajectory calculation means for detecting and calculating an average trajectory of the surface roughness over a certain distance scanned from the detection result; and the sliding means slides the average trajectory of the surface roughness obtained by the average trajectory calculation means. An inclination detection means for detecting inclination with respect to a direction, and a posture for correcting the inclination attitude of the table so that the average trajectory of the surface roughness and the direction in which the slide means is slid are parallel to each other based on the detection result from the inclination detection means. This is a surface roughness measuring device equipped with a correction means.

Further, the surface roughness measuring device stores the detection result of the surface roughness of the object to be measured obtained by scanning a predetermined distance by the detection means, and stores the stored detection result.
Based on the detection result of the inclination detection means, the average trajectory of the surface roughness obtained by scanning over a certain distance is corrected by the attitude correction means so that the average locus of surface roughness obtained by scanning a certain distance is parallel to the direction in which the slide means slides. It is possible to include a conversion means for converting into a value in a state in which the object to be measured is placed.

Furthermore, the surface roughness measuring device has an upper limit and a lower limit that the detection means can detect when detecting the surface roughness, and the detection means has an upper limit and a lower limit that can be detected when detecting the surface roughness, and the detection means can detect the surface roughness of the workpiece that is placed and supported on the table. When the detection result is a value near the upper or lower limit of detection of the detection means, the detection result of the detection means is separated from the corresponding detection limit. a limit value sliding means for sliding the relative position of the table and the detecting means, and a detection result detected by the detection means after the operation of the limit value sliding means is continuous with a detection result detected before the operation of the limit value sliding means. In this way, it is possible to provide a correction means for outputting a signal to the arithmetic display means for correcting the detection result after the operation of the limit value slide means based on the amount of slide of the limit value slide means.

Note that the detection means is specifically of a so-called contact type, which is equipped with a stylus that comes into contact with the object to be measured to detect the surface roughness. In addition, the posture correction means specifically includes one that corrects the state of the object to be measured, one that corrects the state of the detection means, and one that corrects both the state of the object to be measured and the state of the detection means. can be mentioned.

[Operation] When the calculating means is activated after scanning a certain distance with the detecting means, an average locus of the surface roughness of the object to be measured is obtained from the surface roughness of the object to be measured determined by the scanning, and the inclination detecting means calculates the obtained surface roughness. The tilt of the average locus of the surface roughness obtained with respect to the sliding direction of the sliding means is detected, and the posture correcting means corrects the tilted posture of the table based on the tilt obtained by the tilt detecting means.

[Example] This invention will be described in detail according to the embodiments shown in FIGS. 1 to 4.

However, the invention is not limited to this example.

As shown in FIG. 1, the surface roughness measuring device 1 has a support 3 vertically installed above a base 2, and a detection means 4 for measuring the roughness of the object to be measured is supported on the support 3. There is. Below the base 2, a calculation display means 5 is provided that calculates and displays the surface roughness of the object to be measured (not shown) based on the detection results detected by the detection means 4. Further, an operation panel 6 for operating the surface roughness measuring device 1 is incorporated on the front surface of the calculation display means 5, and a liquid crystal display panel 7 of the calculation display means 5 is provided. Pillar 3 and detection means 4
The surface of the object to be measured is mounted and supported on the table 10 by sliding the detection means 4 in the vertical direction (in the direction of arrow A) between the ball screw 8, the drive motor 9, etc. (not shown), and a means for adjusting the detection means 4 so that the stylus 11 of the detection means 4 slides parallel to the surface to be measured of the object to be measured which is placed and supported on the table 10. A sliding means 12 that can be slid in the horizontal direction (in the direction of arrow B) is provided.

The detection means 4 includes a stylus 11 that contacts and scans the surface to be measured, a converter (not shown) that converts the vertical movement of the contact area of the stylus 11 into an amount of electricity, and an electric signal from this converter that is calculated. It is configured to include a connector (not shown) for sending data to the display means 5, a cylindrical casing 13 whose contact portion supports the stylus 11 in a vertically movable manner, and the like. The detecting means 4 detects the upper limit of detectability and the surface roughness by converting the vertical movement of the contact portion of the stylus 11 into an amount of electricity by the converter to detect the surface roughness. It has a lower limit.

The slide means 12 includes a holder 14 that holds the detection means 4.
, a slider 15 and a guide 16 that guide the slide of the holder 14 in the horizontal front-rear direction, that is, in the direction of arrow B, and a ball screw 17 and output motor 1 that drive the slider 15.
8 and a casing 19.

The surface roughness measuring device 1 detects the surface roughness of the object to be measured, which is placed and supported on the table 10 by the detection means 4.
When the detection result of the detection means 4 is at the upper detectable limit or the lower limit, the table 10 is set so that the detection result of the detection means 4 is separated from the corresponding detectable limit.
A limit value slide means 20 is provided for moving the stylus 11 of the detection means 4 relative to the limit value slide means 20. Limit value sliding means 2
As shown in FIG. 2, the drive unit 0 is interposed between the base 2 and the table 10, and includes a base 21, pillars 22, 23, 24 erected on the base 21, and pillars 22, 2.
3. Slider 25 that can be kept in a horizontal state by 24 and guided and slid in the vertical direction, that is, in the direction of arrow A.
The cross roller guide 26 interposed between the slider 25 and the pillars 22, 23, 24 engages with the inclined bottom surface 27 of the slider 25, and moves in the horizontal longitudinal direction (direction of arrow B).
a sliding body 28 that provides force for moving the slider 25 in the vertical direction (in the six directions of arrows) by being slid thereon; an output motor 29 and a feed screw 30 that provide driving force for sliding the sliding body 28 in the direction of arrow B; It is mainly composed of.

The configuration related to the operation of the limit value slide means 20 is as shown in FIG. A signal inspection unit 31 that detects whether the upper limit or lower limit is reached, and an arithmetic processing unit 3 that performs data processing such as A/D conversion on the data signal that has passed through the signal inspection unit 31.
2, receiving a control signal from the signal inspection unit 31 based on the fact that the detection result is the detectable upper limit and lower limit, and outputting a drive and stop control signal to the output motor 29 of the limit value sliding means 20; , and a system control section 33 that outputs data processing control signals to the arithmetic processing section 32.

Further, the surface roughness measuring device 1 calculates detection results before and after the movement based on the distance traveled when the limit value sliding means 20 is activated and the table 10 is moved in the direction of arrow A relative to the detection means 4. A slide value correction means (not shown) is provided for correcting the detection results after the movement so that the values are continuous. As shown in FIG. 3 as a system, the slide value correction means includes a signal inspection section 31, a system control section 33, and a system control section 33 when the limit value slide means 20 is activated.
The arithmetic processing section 32 receives a control signal from the signal inspection section 31 and corrects the data signal that has passed through the signal inspection section 31, and the storage section 34 stores data used when the arithmetic processing section 32 performs a correction operation. has been done.

Furthermore, the surface roughness measurement device 1 measures the surface roughness when the object to be measured is mounted and supported on the table 10 and the detection means 4 scans and measures the surface roughness over a predetermined distance. means for determining whether or not the average trajectory is parallel to the sliding direction of the sliding means 12; and a means for determining whether the average trajectory is parallel to the sliding direction of the sliding means 12, and based on the result of the judgment of the sliding direction by this means, the center trajectory is made parallel to the sliding direction of the sliding means. Attitude correction means 36 is provided to correct the tilted attitude of the table 10.

The means for determining whether the average trajectory of the surface roughness and the sliding direction of the sliding means 12 are parallel to each other,
An average locus calculation means for calculating an average trajectory of the surface roughness based on the surface roughness measured by scanning a certain distance by the detection means 4, and an average trajectory from the average trajectory calculation means for the sliding direction of the sliding means 12. and tilt detection means for detecting tilt. Specifically, the average trajectory calculation means mainly includes a signal inspection section 31 and an arithmetic processing section 32. In addition, the inclination detection means mainly uses the storage section 3.
4 and an arithmetic processing section 32. As shown in FIG. 2, the posture correcting means 36 has a driving section that includes a mount member 37 fixed to the upper surface of the slider 25, and a wedge-shaped sliding body 38 that can slide on the upper surface of the slider 25 in the direction of arrow B. and the top surface places and fixes the table 10,
Also, the pin 40 connects the mount member 37 to the arrow C.
a support member 39 that is rotatably supported in the direction and that can further engage with the slope of the sliding body 38 to change the detection attitude of the table 10;
It mainly includes a drive motor 41 and a feed screw 42 that apply force to slide the sliding body 38 in the direction of arrow B. 43 and 44 are covers, each of which covers the base 2.
1 and the table 10. As shown in FIG. 3 as a system, the attitude correction means 36
, a signal inspection section 31 , an arithmetic processing section 32 , a system control section 33 , a storage section 34 , and a drive motor 41 .

In the surface roughness measuring device 1, the attitude correction means 36 is further operated based on the operation of the average trajectory calculation means and the inclination detection means, and the inclination state of the surface to be measured of the object to be measured on the table 10 is changed. The average trajectory of the surface roughness of the slide means 12
When the detection means 4 scans a predetermined distance and the average trajectory of the surface roughness of the surface to be measured becomes parallel to the sliding direction of the sliding means 12, Conversion means is provided for converting the value into the value when the The conversion means includes a signal inspection section 31, an arithmetic processing section 32,
It mainly consists of a storage section 34 and a system control section 33.

Note that 45 is a recorder for recording measurement results.

The surface roughness measuring device 1 is configured as described above. In the following, the use of the surface roughness measuring device 1 will be explained.

The measurer places the object to be measured on the table 10 and then operates the operation panel 6 to start the operation of the surface roughness measuring device 1. Here, first, the drive motor 9 outputs an output, and the slide means 12, which has been set to the highest position in advance, starts sliding downward in the direction of arrow A along the column 3. As the slide means 12 slides, the detection means 4 also slides downward, but when the detection means 4 slides, the stylus 11
When the contact portion of the tip contacts the object to be measured, the detection means 4 sends a data signal to the signal inspection section 31 indicating that the contact portion contacts the object to be measured. The signal inspection section 31 receives the data signal from the detection means 4 and outputs a control signal to the system control section 33 to stop the drive motor 9 so that the detection means 4 is located at the zero level. Upon receiving the control signal from the signal inspection unit 31, the system control unit 33 outputs a control signal for a stop command to the drive motor 9, and also outputs a control signal for causing the detection means 4 to scan the object to be measured by a predetermined distance. , is output to the slide means 12. The drive motor 9 stops upon receiving a control signal from the system control section 33, and the detection means 4 is positioned at zero level with respect to the object to be measured. On the other hand, the slide means 12 receives a control signal from the system control section 33, and
The detection means 4 is slid in the direction of arrow B by a predetermined distance. Here, the detection means 4 scans the object to be measured by a predetermined distance, and the average trajectory calculation means operates based on the data obtained by the scanning. That is, an electrical signal indicating the data is sent to the arithmetic processing section 32 via the signal inspection section 31. The arithmetic processing unit 32 calculates the average locus of surface roughness at a predetermined distance on the surface to be measured of the object to be measured based on the data signal from the detection means 4 . In other words, the angle of the average trajectory is calculated. The calculated angle is also output as a signal to the system control section 33. The signal indicating this angle essentially becomes a control signal. The system control unit 33 receives the signal from the arithmetic processing unit 32 and determines that the angle is outside the allowable range, that is, if the average trajectory is not parallel to the sliding direction of the sliding means 12 but at an angle. In this case, the posture correcting means 36 is operated so that the angle falls within the permissible range, that is, a control signal is output to the drive motor 41 for output. Upon receiving the control signal for this output, the drive motor 41 rotates the feed screw 42 to slide the sliding body 38 in the direction of arrow B, and as a result, rotates the table 10 together with the support member 39 in the direction of arrow C. The average trajectory is made parallel to the sliding direction of the sliding means 12.

Here, the conversion means is activated and the detection means 4 scans a certain distance in advance to detect the surface roughness, which is obtained when the surface to be measured of the object to be measured is parallel to the sliding direction of the slide means 12. Convert to the value of That is, the signal inspection section 31 sends the detection result obtained by scanning a certain distance in advance by the detection means 4 to the storage section 34 .

If the angle of the average trajectory is outside the allowable range, the arithmetic processing unit 32 sends a signal to this effect to the system control unit 33. The system control unit 33 controls to send the detection results of the constant distance scanning stored in the storage unit 34 to the calculation processing unit 32, and sends the detection results from the storage unit 34 to the calculation processing unit 32,
Posture correction means 3 based on the calculated average trajectory angle, etc.
Sends a signal to be converted to the value after activation of 6. Once the converted and corrected results are calculated, they are displayed on the display panel 7 and recorded on the recorder 45. Thereafter, the system M control section 33 outputs a signal to the slide means 12 for the detection means 4 to scan the object to be measured. The slide means 12 is
The output motor 18 outputs an output to slide the detection means 4 in the direction of arrow B. By this sliding, the detection means 4 causes the stylus 11 to scan the object to be measured, and sends surface roughness data to the signal inspection section 31. The data sent to the signal inspection section 31 is taken into the arithmetic processing section 32 and the storage section 34 and subjected to arithmetic processing.
The measurement results are displayed on the display panel 7 and also on the recorder 4.
Recorded in 5.

While performing this measurement, if the detection result reaches the upper limit that can be detected by the detection means 4, the signal inspection section 31 inspects the measurement data from the detection means 4 and detects that it is at the upper limit. , outputs a signal to the system control unit 33 indicating that the detection result is a detectable upper limit value. When the system control unit 33 receives this signal from the signal inspection unit 31, it outputs a stop signal to the slide means 12, and
Arrow A shows Table 10 by the difference between the zero level and the upper limit.
An activation signal is output to the limit value sliding means 20 so as to cause the limit value sliding means 20 to slide downward. The slide means 12 receives this signal from the system control section 33 and operates the output motor 18.
stops, and the scanning of the detection means 4 is temporarily stopped. On the other hand, the limit value slide means 20 receives this signal from the system control unit 33, and the output motor 29 rotates the feed screw 30 to slide the sliding body 28 to the left in the direction of arrow B, and as a result, the table 10 is moved. Slide it downward in the direction of arrow A by the difference between the zero level and the upper limit. Here, the detection means 4
The contact tip portion of the stylus 11 is at the zero level position with respect to the object to be measured. Also, at this time, the system control section 33 outputs a signal to the correction means so that the detection results are continuous before and after the slide means 12 is temporarily stopped. In other words, the calculation processing unit 3
2 and the storage unit 34, a control signal is outputted to add only the distance that the table 10 has moved to the detection results obtained after the detection of the upper limit. The storage unit 34 is the system control unit 33
Upon receiving the above-mentioned signal, the pre-stored distance of the difference between the zero level and the upper limit is sent to the arithmetic processing section 32. The arithmetic processing unit 32 receives the above signal from the system control unit 33, and
The arithmetic expressions are exchanged so that the difference distance from the storage unit 34 is added to the detected detection result obtained after the detection of the upper limit. The system control unit 33 controls the limit value sliding means 2
0 and the correction means respectively receive the above-mentioned control signals and finish their operations, they output a control signal to the slide means 12 to restart the operation. The slide means 12 receives this control signal from the system control section 33 and slides the detection means 4 in the direction of arrow B again. The detection means 4, which has started sliding again in the direction of arrow B, begins to detect the roughness of the surface of the object to be measured again so as to continue with the state before the slide stopped, but the detection is based on the zero level. Begins. However, the detection result obtained by this detection is corrected by the correction means, so that a value obtained by adding the value of the difference between the zero level and the upper limit to the value detected by the detection means 4 is displayed on the display panel 7 and the recorder 45, respectively. Displayed and recorded.

In other words, when the roughness of the surface to be measured of the object to be measured exceeds the detectable upper limit of the detection means 4, the surface roughness measuring device 1 can detect the surface to be measured by sliding the table 10 downward. It is configured to perform arithmetic processing to change the relative position with the detection means 4 and correct the data from the detection means 4 by the sliding amount. Therefore, even if the roughness of the surface to be measured exceeds the upper limit of what the detection means 4 can reliably detect, the measurement results obtained can be reliable. Further, since the stylus 11 of the detection means 4 is not strongly pressed by the surface to be measured and exceeds the permissible movement range of the stylus 11, the detection means 4 will not be damaged.

The above-mentioned operation of the surface roughness measuring device 1 occurs when the detection result of the detection means 4 reaches the upper detectable limit value, but when the detection result reaches the lower detectable limit value, the limit value slides. The means 20 operates to move the table 10 upward to slide the surface to be measured to the zero level position of the detection means 4, and the measured value obtained after sliding is the detection result of the detection means 4 by the operation of the correction means. The value obtained by subtracting only the amount of slide is displayed and recorded.

Incidentally, FIG. 4 shows a flowchart showing the operation of the surface roughness measuring device 1.

In the operation of the surface roughness measuring device 1 described above, the relationship between the sliding direction of the detection means 4 by the slide means 12 and the surface to be measured of the object to be measured is determined by the scanning of a certain distance of the detection means 4 and the operation of the attitude correction means 36. The desired state can be achieved by, for example, Moreover, since the desired state is determined by continuous scanning of a fixed distance by the detection means, the surface to be measured is not damaged by scanning it multiple times, and it is easy to handle, and in particular, the measurement can be completed in a short time. can.

Further, by providing the conversion means, the detection result obtained by scanning the detection means 4 for posture correction can also be obtained as a detection result when the surface to be measured is in a desired state.

In this embodiment, the limit value slide means 20 and the correction means operate when the detection result of the detection means 4 reaches the detectable upper limit value and lower detectable limit value. However, when the detection means 4 has a value near the upper limit and a value near the lower limit, that is, when the value is 90% of the upper limit and 90% of the lower limit, respectively, the limit value A configuration in which the slide means 20 and the correction means are operated may be used. In this case, the value for correction stored in the storage section becomes the value of the moving distance of the limit value slide means 20 in that case.

In the surface roughness measuring device 1, the limit value sliding means 20
has a structure in which the object to be measured is moved in the vertical direction, but there is also a structure in which the stylus 11 of the detection means 4 is moved in the vertical direction with respect to the slide means 12, and a structure in which the detection tip of the stylus 11 is slid. A configuration in which the detection means 4 is moved rotationally with respect to the means 12, a configuration in which the detection means 4 is moved in the vertical direction with respect to the slide means 12, a configuration in which the slide means 12 is moved in the vertical direction by the output of the drive motor 9, and any of these configurations. (It may also be configured by combining tsuka.

The surface roughness measuring device 1 operates the limit value sliding means 20 even when the stylus 11 of the detecting means 4 reaches the detectable limit value of the detecting means 4 while the posture correcting means 36 is operating. The detection means 4 may be configured to take a new zero level upon activation.

In the surface roughness measuring device 1, the detection means 4 includes a stylus 11.
Although it is a contact type, for example, an optical non-contact type may be used.

The distance over which the detection means 4 scans in advance may be appropriately selected depending on the object to be measured.

[Effects of the Invention] According to the present invention, the posture of the object to be measured is automatically corrected so that the surface to be measured becomes the same as the sliding direction of the slide means, and the surface roughness after the attitude correction is automatically corrected. By configuring the scanning to be performed continuously, it is possible to achieve the effect that scanning is simple and measurement can be completed in a short time.

In addition, if the detection means is a contact type and is equipped with a stylus,
Since the detection means only needs to be operated once, there is an advantage that the surface to be measured of the object to be measured does not need to be damaged more than necessary.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2 is a cross-sectional view taken along line I-1 in Fig. 1, Fig. 3 is an explanatory diagram showing the structure of this embodiment, and Fig. 4 is an embodiment of the present invention. 3 is a flowchart illustrating example operation. DESCRIPTION OF SYMBOLS 1; Surface roughness measuring device, base, 3; Support, detection means, 5; Calculation display means, operation panel, 7; Display panel, table, 12; Sliding means, limit value sliding means, posture correction means.

Claims (1)

[Claims] 1. A table for placing and supporting an object to be measured, a detection means for detecting the roughness of the surface of the object to be measured, which is placed and supported on the table, and the detection means is mounted on the table. A sliding means for relatively sliding a detector and a table in a parallel state in order to scan the surface of a supported object to be measured and detect its surface roughness, and a detection result detected by the detecting means. Calculation and display means is provided for calculating and displaying the surface roughness of the object to be measured based on the detection means, and in addition, the detection means scans a predetermined distance and displays the surface roughness of the object to be measured, which is placed and supported on the table. an average trajectory calculation means for detecting the surface roughness and calculating an average trajectory of the surface roughness over a certain distance scanned from the detection result; and a sliding means for the average trajectory of the surface roughness obtained by the average trajectory calculation means. an inclination detection means for detecting an inclination with respect to the sliding direction; and based on the detection result from the inclination detection means, correcting the inclination posture of the table so that the average line of surface roughness is parallel to the direction in which the sliding means is slid. A surface roughness measuring device comprising a posture correcting means. 2. The detection means stores the detection result of the surface roughness of the object to be measured obtained by scanning a predetermined distance, and the stored detection result is fixed based on the detection result of the inclination detection means. The value of the state in which the object to be measured is placed on the table when the posture is corrected by the posture correction means so that the average trajectory of surface roughness obtained by scanning the distance is parallel to the direction in which the slide means slides. 2. The surface roughness measuring device according to claim 1, further comprising a converting means for converting the surface roughness. 3. The detection means has an upper limit and a lower limit that can be detected in detecting surface roughness, and when the detection means is detecting the surface roughness of the object to be measured supported on the table. , if the detection result is a value near the upper or lower detectable limit of the detection means, the table and the detection means are arranged so that the detection result of the detection means is separated from the corresponding detectable limit. A limit value slide means for sliding the relative position, and a limit value slide means such that the detection result detected by the detection means after the operation of the limit value slide means is continuous with the detection result detected before the operation of the limit value slide means. The surface roughness measurement according to claim 1 or 2, further comprising a correction means for outputting a signal to the calculation display means for correcting the detection result after the operation of the limit value sliding means based on the sliding amount. Device.