JPH0224622U - - Google Patents
Info
- Publication number
- JPH0224622U JPH0224622U JP10286388U JP10286388U JPH0224622U JP H0224622 U JPH0224622 U JP H0224622U JP 10286388 U JP10286388 U JP 10286388U JP 10286388 U JP10286388 U JP 10286388U JP H0224622 U JPH0224622 U JP H0224622U
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- photomask
- manufacturing
- interdigital
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
第１図及び第２図は本考案の実施例を示す構成
図、第３図、第４図および第５図は従来例を示す
構成図である。
９，１１…交叉指状電極、１０，１２…グレー
テイング反射器。
1 and 2 are block diagrams showing an embodiment of the present invention, and FIGS. 3, 4, and 5 are block diagrams showing a conventional example. 9, 11... interdigital electrodes, 10, 12... grating reflectors.
Claims (1)
上に形成された弾性表面波共振子の交叉指状電極
と前記交叉指状電極の両側にそれぞれ配置された
前記共振子のグレーテイング反射器とを備え、前
記グレーテイング反射器の電極幅が前記交叉指状
電極の電極幅に対し５〜３０％異なることを特徴
とする弾性表面波装置製造用フオトマスク。 comprising interdigital electrodes of a surface acoustic wave resonator formed on a photomask for manufacturing a surface acoustic wave device, and grating reflectors of the resonator disposed on both sides of the interdigital electrodes, A photomask for manufacturing a surface acoustic wave device, wherein the electrode width of the grating reflector is different from the electrode width of the interdigital electrode by 5 to 30%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286388U JPH0224622U (en) | 1988-08-02 | 1988-08-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286388U JPH0224622U (en) | 1988-08-02 | 1988-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224622U true JPH0224622U (en) | 1990-02-19 |
Family
ID=31333165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10286388U Pending JPH0224622U (en) | 1988-08-02 | 1988-08-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224622U (en) |
-
1988
- 1988-08-02 JP JP10286388U patent/JPH0224622U/ja active Pending