JPH0224537U - - Google Patents
Info
- Publication number
- JPH0224537U JPH0224537U JP10113988U JP10113988U JPH0224537U JP H0224537 U JPH0224537 U JP H0224537U JP 10113988 U JP10113988 U JP 10113988U JP 10113988 U JP10113988 U JP 10113988U JP H0224537 U JPH0224537 U JP H0224537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- locking shoulder
- periphery
- protruded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001154 acute effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113988U JPH0224537U (el) | 1988-08-01 | 1988-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113988U JPH0224537U (el) | 1988-08-01 | 1988-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224537U true JPH0224537U (el) | 1990-02-19 |
Family
ID=31329861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10113988U Pending JPH0224537U (el) | 1988-08-01 | 1988-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224537U (el) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (ja) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | ウエハ乾燥装置 |
| JPS63178531A (ja) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | 水洗式中間ステ−ジ |
-
1988
- 1988-08-01 JP JP10113988U patent/JPH0224537U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (ja) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | ウエハ乾燥装置 |
| JPS63178531A (ja) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | 水洗式中間ステ−ジ |