JPH0224534U - - Google Patents
Info
- Publication number
- JPH0224534U JPH0224534U JP10241788U JP10241788U JPH0224534U JP H0224534 U JPH0224534 U JP H0224534U JP 10241788 U JP10241788 U JP 10241788U JP 10241788 U JP10241788 U JP 10241788U JP H0224534 U JPH0224534 U JP H0224534U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixing device
- dry etching
- lower electrode
- guide hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10241788U JPH0224534U (,) | 1988-08-03 | 1988-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10241788U JPH0224534U (,) | 1988-08-03 | 1988-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224534U true JPH0224534U (,) | 1990-02-19 |
Family
ID=31332310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10241788U Pending JPH0224534U (,) | 1988-08-03 | 1988-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224534U (,) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05140771A (ja) * | 1991-11-15 | 1993-06-08 | Nissin Electric Co Ltd | エツチング装置 |
| JP2018121091A (ja) * | 2018-05-15 | 2018-08-02 | パナソニックＩｐマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
| US10744693B2 (en) | 2017-10-23 | 2020-08-18 | Fanuc Corporation | Control device for injection molding machine and control method for injection molding machine |
-
1988
- 1988-08-03 JP JP10241788U patent/JPH0224534U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05140771A (ja) * | 1991-11-15 | 1993-06-08 | Nissin Electric Co Ltd | エツチング装置 |
| US10744693B2 (en) | 2017-10-23 | 2020-08-18 | Fanuc Corporation | Control device for injection molding machine and control method for injection molding machine |
| JP2018121091A (ja) * | 2018-05-15 | 2018-08-02 | パナソニックＩｐマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
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