JPH02243934A - Vacuum leak tester - Google Patents

Abstract

PURPOSE:To easily detect a vacuum leak by providing a means which stores a position on the outer peripheral surface of a vacuum container and leak data at the position and a means which changes the position. CONSTITUTION:The vacuum container 1 is evacuated by a vacuum pump 11 and a microcomputer 9 controls a helium gas supply device 17 to blow helium gas out of a nozzle 4 to the container 1. Then a stepping motor 3 or driver 8 is rotated through a motor driver 8 by a specific quantity to move a turntable 2 or slider 6 by a specific quantity. Further, while the helium gas is blown out of the nozzle 4, the signal from a helium detection sensor 12 is inputted to a helium detector 13, whose signal is inputted and stored. The signal of the rotation quantity given to the motor 3 and the outer peripheral surface position of the container 1 that the nozzle 4 faces are also stored. Thus, the automatic scanning of the nozzle 4 is performed and leak data on the outer peripheral surface of the container 1 can be stored, so the vacuum leak is easily detected.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum leak tester, and particularly to a vacuum leak tester suitable for detecting leaks in relatively large vacuum containers.

[Conventional technology]

Previously, for example, September 1982! rQ&A vacuum 50 minutes published by Kyoritsu Publishing Co., Ltd. on the 5th.

■Looking for leaks”, pages 91 to 111,
Inspections were performed by manually scanning the helium gas nozzle or detector using the probe method or unifer method, and visually checking the helium detector's meter.

[Problem to be solved by the invention]

The above-mentioned conventional technology does not take into account the ease of leak detection in a relatively large vacuum container, and has the problem that detection work requires skill and takes a lot of time.

SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum leak tester that can easily detect vacuum leaks without any manual effort.

[Means to solve the problem]

In order to achieve the above purpose, A'JI! The apparatus is provided with means for storing the position of the outer peripheral surface of the container and leak data at the position, and means for changing the position of the outer peripheral surface of the vacuum container.

[For production]

A leak detection section is disposed on a part of the outer peripheral surface of the vacuum container, and the leak data from this leak detection section is stored in correspondence with the leak detection position.Then, the position of the leak detection section is changed, and the leak data at the leak detection section is stored in correspondence with the leak detection position. Then, store the leak data again and perform these steps one after another to perform a vacuum leak test for the entire container. Thereby, a vacuum leak test can be easily performed without any manual effort.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

A vacuum container l, which is an object to be inspected, is placed on the rotary table 2 in an airtight manner. In this case, the vacuum device 1 is cylindrical. The rotary table 2 is provided with an exhaust port (not shown),
It opens into the vacuum container l. The exhaust port is connected to a vacuum pump 11 via a hose 10. The rotary table 2 is rotatable by a pulse motor 3 via deceleration means and transmission means (not shown), in this case.

On the outer periphery of the vacuum container 1, there is a nozzle 4 for the vacuum container l.
is placed. The nozzle 4 is vertically movably supported by a slider 6, and is movable by a screw shaft 5 rotated by a pulse motor 7. In this case, the nozzle 4 is connected to a helium gas supply bag H17 that supplies helium gas as a test gas.

A helium detection sensor is provided in the middle of the hose IO. The helium detection sensor 12 is connected to a control device, such as a microcomputer 9, via a helium detector 13 and an A/D converter 14. Pulse motor 3
and 7 are connected to the microcomputer 9 via the motor driver 8.

Vacuum pump 11 and helium gas supply device 17 are connected to microcomputer 9 . A CRT 15 and a keyboard 16 are connected to the microcomputer 9.

In the apparatus configured as described above, first, the inside of the vacuum container l is depressurized and evacuated by the vacuum pump 11. In this case, the operation of the vacuum pump 11 is controlled by the microcomputer 9, but it is also possible to operate the drive/stop switch using only the empty pump 11. Next, the helium gas supply bag 5i17 is
is controlled to blow out helium gas from the nozzle 4 toward the vacuum container l. Next, the microcomputer 9 turns the step motor 3 or 8 by a predetermined amount via the motor driver 8 to move the table 2 or the slider 6 by a predetermined amount. The method of movement at this time is to keep the slider 6 at a fixed position and move the rotary table 2 by a predetermined amount, and after the rotary table 2 has gone around once, move the slide 6 by a predetermined amount, and then move the rotary table 2 again.
There are two methods: one is to move the rotary table 2 at a fixed position, the slider 6 is moved by a predetermined amount, and when the slider 6 has moved, the rotary table is moved by a predetermined amount.

In addition, there are 4 nozzles that blow out helium gas,
The microcomputer 9 takes in a part of the signal from the helium detection sensor into the helium detector 13, inputs the signal from the helium detector 13 via the A/D converter, and records the signal f1. On the other hand, the signals of the rotary heron applied to the pulse motor 3 and lO are also kept, and the position of the outer peripheral surface of the vacuum vessel l that the nozzle 4 faces is also memorized.

As described above, according to this embodiment, the microcomputer 9 can automatically scan the nozzle 4 and store leakage data at each position on the outer circumferential surface of the vacuum container l, so that the vacuum can be easily League detection can be performed.

Next, another embodiment of the present invention will be explained with reference to the second diagram.

In this figure, the same reference numerals as in FIG. 1 indicate the same members, and the explanation will be omitted. This figure differs from Figure 1 in that the object to be inspected, for example, a vacuum vessel l, is airtightly placed directly on the table 2a, and a guide vibrator 8 is placed around the outer periphery of the vacuum volume it. The point is that a plurality of nozzles 4a are arranged. Although not shown, each nozzle 4m is provided with a valve. The opening and closing of each valve is controlled by the microcomputer 9I.

According to the apparatus configured in this way, the same operation as in the above embodiment is performed, but here, instead of operating the rotary table, scanning in the circumferential direction is performed using the nozzle 4a that blows out helium gas. That's what I do. In this case, helium gas flows from the helium gas supply device 17 to the nozzle 4a via the guide vibe 18.

According to this other embodiment, similarly to the first embodiment, vacuum leak detection can be easily performed without any manual effort.

Furthermore, in this other embodiment, if the shape of the guide pipe 18 is changed, for example, by making it square, the vacuum vessel 1 can be inspected even if it is a square prism.

Note that although these embodiments used the probe method, conversely, the vacuum pump 11 and the helium gas supply device 17 were used.
It is also possible to use a unifer method by replacing the above and arranging a helium detection sensor in place of the nozzle 4 or 4a.

Also, the nozzles 4 and 4a are in vacuum containers! It may be possible to extend or contract the vacuum container 1 so that the same vacuum container 1 can be used even if the size of the vacuum container 1 changes.

In addition, there are various possible ways to output the leak data input and stored in the micro bomb computer 9, and the present invention is not limited thereto. For example, changes over time in the amount of leak due to scanning may be displayed on a CRT, a buzzer may sound when a leak is detected, output may be output to a printer, scanning may be stopped at the time of leak, etc.

[Three Bright Effects] According to the present invention, there is an effect that vacuum leak detection can be easily performed without any manual effort.

[Brief explanation of drawings]

FIG. 181 is a perspective view showing a vacuum leak tester which is one embodiment of the present invention, and FIG. 2 is a perspective view showing another embodiment of the present invention. 1... Vacuum container, 2... Rotating table, 4.4a... Nozzle, 6... Slider, 9... Microcomputer, 11・・・・・・
・・Vacuum pump, ・・・Helium detection sensor,
17...Helium gas supply device representative Patent attorney Katsuo Ogawa

Claims (1)

[Claims] 1. A vacuum leak tester for detecting a leak part of a vacuum container, comprising means for storing the position of the outer peripheral surface of the vacuum container and leak data at the position, and means for changing the position. A vacuum leak tester characterized by: 2. The vacuum leak tester according to claim 1, wherein the detection position on the outer peripheral surface of the vacuum container is changed by rotating the vacuum container. 3. The vacuum leak tester according to claim 1, wherein the detection position on the outer peripheral surface of the vacuum container is changed by switching a plurality of detection means provided on the outer periphery of the vacuum container.