JPH02242102A - Apparatus for measuring probe - Google Patents

Abstract

PURPOSE: To provide a device for a unipolar electromagnetically active type for thin film measurement at no-error-occurrence level by providing a half pan type core movably in an external probe body along the axis and providing spring devices to a power line between the half pan type core and external probe body. CONSTITUTION: The measuring probe has a slide sleeve 142 outside and is coupled with the external probe body 12 in terms of operation by a spiral spring 146, and the slide sleeve 142 is relatively below the external probe body 12. In the front area of the external probe body 12, an extremely lightweight plunger 41 is provided coaxially which is much longer than the half pan type core 52 and much shorter than the external probe body 12, and the half pan type core 52 is coupled with the front area of the plunger 41 by the spring devices 99 and 101 between the plunger 41 and external probe body 12. Sapphire 41 is positioned axially in the center of the half pan type core 52 and its spherical front frame surface 64 is on a hemispherical surface 53, and its front frame surface 63 is positioned in front of an annular surface 156 in a stationary state.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a monopolar electromagnetic active measurement probe used for non-destructively measuring the thickness of a thin film such as a paint film or a metal layer on a base metal. Relating to a device for.

[Prior Art] A coaxial half-pan type core, a coaxial central core, a coaxial winding chamber surrounding the central core, an outer wall surrounding the winding chamber, and made of a wear-resistant material. comprising a coaxial spherical frontal surface made of an object, comprising a coaxial coil device in the central core, and comprising a conductor device provided in the coaxial gap of the outer body of the probe between the coil device and the end of the measurement probe, comprising a cable extending from the end of the measuring probe, comprising a coaxial annular surface disposed at a considerable radial distance from the spherical frontal surface, and comprising a spring device in the line of force between the frontal surface and the annular surface; Devices are known for monopole electromagnetic active measuring probes for thin film measurements, in which the frontal plane lies axially in front of the annular plane in the resting state, and in which a linear guide device is provided between the frontal plane and the annular plane. It is.

Applicant's order number (Bestell-Nr,) BOl
, IG, 01, this unipolar electromagnetic active type measurement probe T3.3 for thin film measurement is the closest to the object of the invention, and similar measurement probes and parts of the measurement probe are described in German publication No. 34372.
No. 53 and U.S. Patent Publications No. 2933677, 37618
04 4005360 4041378. These measurement probes can be used to measure, for example, the thickness of a paint film or the thickness of a metal layer on a base metal. The layer thickness is typically between a few hundred micrometers and a few tens of nanometers.

Such devices can undoubtedly be counted as non-destructive measuring devices.

[Problems to be Solved by the Invention] Currently, it has been noticed that unexplained measurement errors occur when measuring very thin layers using the above-mentioned apparatus. It is known that after measurements on slightly polished surfaces, gloss defects occur despite non-destructive measurements.

When examining the contact point where the spherical frontal plane was placed on the layer to be measured, it was observed that there was a considerable depression there. When placed by hand, it not only creates a dent but also creates a scar from the grounding point of the spherical frontal surface to the actual measurement point. Even if you carefully place it on top of aluminum, etc., a dent will still form after pressing. When aluminum is anodized, the outermost thin layer is
Sometimes it crumbles like permanent snow on snow that you step on. The depth of the depression after such pressing is typically 1 micrometer, for example.

Thus, for a layer having a thickness of, for example, 120 micrometers, the depth of such a recess is of course relatively insignificant, but the thinner the layer, the greater the error. If the impression is 1.5 micrometers and the layer to be measured is also 1.5 micrometers thick, 50% of the measurement error will be caused by the depression of the impression. It goes without saying that measurements in the nanometer range are concerned.

The present invention has been made in view of the above-mentioned circumstances, and provides a device for a monopolar electromagnetic active type measurement probe for thin film measurement in which errors do not occur at all or can be avoided to a negligible extent. It is intended to.

It has been shown that in the well-known measurement probe, the reason why its energy is negated by the indentation of the pressed trace is due to the mass of the measurement probe plus the mass of the cable. The negated energy is E=1/2 Xm
X f 2. As is clear from this equation, even if the user is told to place the ball carefully, the speed will increase by squared anyway. However, the mass m is influenced by the structure, and by reducing this, the energy can be reduced.

[Means and Effects for Solving the Problems] In order to achieve the above object, the device for a measuring probe according to the present invention is configured as the measuring probe T3, 3, (a) in a half-pan type. The child moves axially within the probe body, (b
) A spring device is provided in the line of force between the half-pot type core and the inside of the probe body, (c) the conductor device is a very light active circuit (akt+ve
It is characterized by containing a very light conductor skeleton with 5chatur+gl.

The measuring probe T3.3 has a sliding sleeve on the outside and is operatively connected to the probe shell by means of a thinly wound spring. However, at the first moment when the spherical frontal surface is placed, this thinly wound spring does not release the connection.

That is, at the beginning of the collision, the system can be considered as one rigid body. Furthermore, the spring force of the thinly wound spring is approximately 100 bonds, which acts on a very small spherical frontal surface.

A half-pan core can typically have an outer diameter of 3+nm and a center thickness of 13mm. Therefore, it has essentially zero mass. The same applies to coil devices.

The spring device in the invention can be very soft, for example in the lower tenths of the bond range. And it can also be lightweight itself, since the mass to be carried can be ignored. Active circuitry allows subsequent cables to be thinner and therefore lighter and more flexible. Hitherto, cables have had to be chosen such that their core wires do not cause trouble when coiled or twisted in some other way, and for this reason cables of approximately 4 m
It had a thickness of m. Active circuits, on the other hand, can emit useful signals that are already phase- and/or frequency- and/or amplitude-encoded, and especially in the case of frequency-encoding, the fact that the core is in the cable means that there is no longer any It doesn't cause any problems.

In a device for a measurement probe having the features as described in (a), (b), and (c) above, a very long A light plunger can be provided coaxially with the probe, a half-pan core can be fixedly connected to the front region of the plunger, and a spring device can be provided between the plunger and the probe outer material. In this way, the spring device does not need to grip the outer material of the probe.
A support for the half-pot core can be provided and the length of the plunger can be used for the longitudinal guideway.

By making the plunger have a passage hole and arranging the thin conducting wire of the coil device inside the plunger, one plunger becomes lighter. It is also protected against.

By making the passage hole coaxial, the formation of the passage hole is facilitated, the periphery of the conductor is protected, and the mass distribution of the plunger is symmetrical in the axial direction.

The essentially rotationally symmetrical nature of the plunger simplifies its manufacture, its mechanical properties are readily predictable, and it accommodates the coaxial structure of the measurement probe.

Furthermore, by making the plunger from a light metal, it can be further reduced in weight. Note that titanium is most preferably used as the light metal.

If the plunger has a length in the centimeter range, it will have a sufficient length as a guide path and be sufficiently short from a weight standpoint.

In the above-mentioned device for a measuring probe with a plunger, the plunger has in its front region an outwardly projecting collar which projects into a receptacle fixed to the probe outer material, and the collar and the receptacle are arranged so that the plunger At least one first stop can be formed that prevents significant movement in one direction. This prevents the spring device from being overloaded even if the plunger is pushed too far into the measuring probe. Furthermore, it limits how much the conductor wire of the conductor device can bend within the measurement probe.

In this way, the collar can be L-shaped and the receiving part can be complementary L-shaped, with the free legs of the L overlapping to provide a safety device against excessive radial displacement of the plunger. In this case, the load on the spring device is reduced by preventing the radial deviation from becoming too large. It also makes it possible to have a small gap of solder between the half-pot core and the front area of the plunger.

In addition, in the device for the above-mentioned measuring probe with a plunger, if the plunger is adapted to transition in its inner end region into a mounting flange on which a board with an active circuit is fixed, it is possible to Flexible conductive wires can be avoided between the mold core and the substrate.In principle, the substrate can be fixed to the probe outer material. However, such a method would require a film conductor. Although this film conductor is mass-produced, it poses a technical problem because it is fixed by soldering. Substrates containing active circuitry can be produced with a mass of 0.5 grams, making them much easier to hold.

In the device for the measuring probe of the invention, the spring device between the plunger and the probe outer material can be provided between the plunger and the inside of the probe outer material, so that the spring device is small and short; Spring force is directed into the plunger.

In this case, the spring arrangement is preferably arranged at least essentially radially, so that it is minimal and therefore has almost no mass. The radial arrangement also facilitates installation.

In such a device, the spring device has an outer retaining ring fixed to the inside of the probe outer material and an inner retaining ring fixed to the outside of the plunger, so that the spring device has a defined attachment. area is created. The behavior is self-explanatory and assembly is easy.

Here, by making at least one of the retaining rings general, the spring device has the same properties in all directions,
There are no areas where the company is given preferential treatment or disadvantage.

In addition, in the case of a spring device having an outer retaining ring and an inner retaining ring, both retaining rings are connected by a bridge separated from each other by a slit, so that this can be achieved despite the small size of the spring device. can be made flexible.

As mentioned above, the essentially radially arranged spring arrangement obtains radial stiffness by including spring plates, so that the spherical frontal surface is stabilized in this direction.

At this time, by arranging the small plates coaxially, it is possible to correspond to the coaxial structure of the measurement probe, and the small plates have the same characteristics in all directions.

The platelets can be formed by an etching process, in this way internal stresses in the platelets, such as those that appear during the punching process, are avoided, so that the platelets obey Hooke's law during the entire stroke.

Preferably, the spring device is axially rigid with respect to the forces generated during the measurement. In this way, the spring device can be subjected to lateral forces without friction or the appearance of longitudinal guidance mechanisms that would otherwise be required.

If the spring device comprises an outer retaining ring and an inner retaining ring, both retaining rings are preferably concentric and concentric at the outer and inner circumferences, so that the coaxial structure of the measurement probe is This makes it possible to keep an eye on the behavior of the spring device, and to make the distance from retaining ring to retaining ring the same everywhere. At the same time, the components supporting the retaining ring can be defined and easily constructed.

If a spring device is provided between the plunger and the inside of the probe shell, by placing the 29 spring devices at an axial distance, this spring device prevents any movement of the half-pan core.

In this case, if both spring devices are formed identically, it is convenient for manufacturing, stock assembly, etc., and it is possible to have a better view of their behavior characteristics.

The spring device is particularly well suited for the purpose if it is made of copper beryllium.

In the above device including a plunger, the plunger
an inner tube separated from the front region of the plunger by a step, in which a first sleeve and a second sleeve are seated;
If the inner retaining rings of both spring devices are fixedly sandwiched between the stage and the first sleeve on the one hand and between the first sleeve and the second sleeve on the other hand, the plunger It is lighter, more defined in construction, requires fewer parts, and the inner retaining ring has a much larger surface area for secure attachment.

By integrating the mounting flange described above and the second sleeve, assembly and mutual retention are facilitated.

Further, in the device having the first and second sleeves as described above, the third sleeve is accurately opposed to the first sleeve, and is fixedly connected to the outer body of the probe. By having both frontal planes hold the outer retaining rings of both spring devices together with another opposite frontal plane fixed to the transducer body, the outer retaining rings are large in area, mechanically clear, and easy to assemble. is maintained.

The spring force of the spring device is preferably set to be medium from the bottom of the deca point region when the stroke is from the bottom of the tenth of a millimeter region; Very suitable results can be obtained with a measurement probe that has been

On the other hand, the weight of the conductor skeleton plus the weight of the circuit is 10
Preferably, it is in the fraction of a gram range, but this is possible without single, integrated, and therefore not currently advantageous semiconductor circuits in terms of number, and solves the problem of the invention. do not prevent you from doing so.

The half-pot type core is preferably covered on the outside with an acid- and base-resistant and abrasion-resistant overlay to prevent liquid from leaking, so that during measurements in the appropriate environment,
There is no need to clean the measurement probe after each measurement. On the contrary, it becomes possible to measure many points one after another.

In this case, the overlay 172 may be made of PTFE (polytetrafluoroethylene), which is highly wear resistant and easy to process.

Furthermore, when the overlay 172 is made of polyimide, it not only has excellent abrasion resistance, acid resistance, and alkali resistance, but also does not allow moisture in, and as a result, the coil device is not affected by moisture. .

If the overlay covering the outside of the half-pot core also covers the periphery of the half-pot core, at least indirectly, steam or moisture may not enter the half-pot core from the side. Prevented.

The apparatus for a measurement probe having the features as described in (a), (b), and (c) above also includes a device in which at least the front region of the probe outer material is coaxially surrounded by a sliding sleeve, and the frontal surface of the sliding sleeve is It can be pushed back from the coaxial annular surface of the outer material, and when the sliding sleeve is at rest, the front frontal surface of the sliding sleeve is in front of the spherical frontal surface, and the radial play between the sliding sleeve and the probe outer hook is very large. a small helical spring between the sliding sleeve and the probe shell to force the sliding sleeve back to its original position, and a coaxial gripping sleeve surrounding the sliding sleeve tightly coupled to the probe shell; It may be separated from the sliding sleeve by a gap in the area covering it. This is particularly suitable for measurement probes that have to measure on very soft materials and/or that have to measure under current measurement technology.

By keeping the cable thin, cable characteristics that would be a hindrance to the invention are minimized.

It has actually been shown that a cable diameter of 3 mm or less is particularly suitable in terms of measurement characteristics.

[Example] The unipolar measurement probe 11 has a probe outer material 12 made of aluminum.
has. This probe outer material 12 is tubular to a large extent and is coaxial with the geometrical longitudinal axis 13 .

The measurement probe 11 is connected through a two-core cable 15 with a thickness of 2.5 mm, which is firmly fixed with a set screw 16. 29 bins 18.1 in the upper region of the coaxial cavity 17
9 sticks out, and there is a very flexible bare wire 21.2
2 are connected.

Since the upper ends of the wires 21 and 22 are soldered, a window 23 is provided above the center of the integrated probe outer member 12. The substrate 24 is also visible there.

It is 5.9mm wide and 29.3mm long.

Since FIG. 1 is a full-size drawing, dimensions of other parts can be obtained from it. The geometric longitudinal axis 13 passes through the center of the substrate 24 not only in its height but also in its lateral and shrinkage directions. The substrate 24 includes an electrical component 26 and at least one active component (B).
aueelement) 27.

However, they are only shown symbolically here; these components 26, 27 are soldered at points 28.
．． It has its outlet at 29 and generates a frequency modulated voltage corresponding to the measurement result.

The strands 21, 22 are essentially longer than the maximum distance between the pins 18.19 and the soldering points 28.29, which are arranged as curves and are practically mechanically I try not to create any resistance. The substrate 24 is not constrained within the cavity 17 and does not touch the inner wall 31.

A coaxial, cylindrical mounting flange 32 is coaxial with the longitudinal axis 13. The disk-shaped head is provided with a rib 1-34, as shown in FIG. 2, to which the lower end area of the substrate 24 is fixed with an adhesive 36. Mounting flange 32
does not touch any part of the inner wall 31, but transitions downwards into a cylindrical annular neck 37 which is also coaxial. The mounting flange 32 is made of plastic, which allows it to better adhere to the plastic substrate 24 and has a high electrical insulation resistance. The upper region of the central tube 39 of the titanium plunger 41, which is connected to the mounting flange 32, is axially fixed in the passage hole 38. The three central tubes have a passage hole 42 which transitions downward into a first cylindrical space 43 and further below into a larger cylindrical space 44 . 29 very thin conductive wires 46, 47 extend downward from the board 24. A core case 48 is immovably located in the cylindrical space 44 and occupies almost the entire cylindrical space 44, but four slits are formed as shown in FIG. It is possible to pass further down. A half-pan-shaped core 52 is placed in a housing portion 51 of the core case 48 whose front face is cylindrical. It is provided with a hemispherical surface 53 facing downwards, on which there is a frontal surface 54 of its outer wall 56 and a coronal surface 57 of its inner wall 58.

Between the outer wall 56 and the inner wall 58, five zero-turn chambers with a coaxial annular winding chamber 59 for the coil 61 are cast downward, so that the coil 61 is protected and remains in that state. The half-pan shaped core 52 has one blind hole 62 coaxial with the geometrical longitudinal axis 13, which opens downward and in which a sapphire 63 is located, and whose spherical frontal surface 64 is connected to the hemispherical surface 53.
It is above.

The conductor wires 46 and 47 pass through the four slits and enter the winding chamber 59.
Therefore, the half-pot type core 52 similarly has four consecutive slits 66, and resin is cast into the slits 49 and 66.

The plunger 41 has a lower region 67 as shown in FIG.
It has an outwardly projecting coaxial radial collar 68. It is approximately cylindrical space 43 above cylindrical space 44.
It is located at the height of The upward, coaxial, radial annular surface 69 of this collar 68 forms one surface of the stopper. The other surface of the stopper is formed by a complementary annular surface 71, which It is part of a G-shaped or G-shaped housing section 72 that is fixedly arranged. After a distance of 0.8 mm, the annular surface 69 can come into contact with the annular surface 71. A coaxial downward radial annular surface 73 also forms one half of the stop, together with a radially coaxial annular surface 74 smaller than the receiving portion 72 . After moving outward (downward) by 0.8 mm, the annular surface 73 abuts the annular surface 74 . The collar 68 has a small coaxial and downwardly pointing leg 76 that partially projects into the lower curved portion 77 of the receiving portion 72;
Therefore, the wall-to-wall distance between the leg 78 facing inward (upper side) and the leg 78 that partially overlaps in the axial direction, drawing a circular ring, and the leg 76 formed in the same way is 0.3 mm in both directions, and only this value is required. , for example, the lower region 67 can be shifted to the right or to the left before the overload protection appears. The housing portion 72 consists of 29 parts.

The seven lateral legs 81 of the inner ring have a downward annular surface 71 that does not come into contact with any part of the collar 68 during normal operation, and the lateral leg 81 has a downward beveled surface 82 on the upper side.
This allows the springs described below to bend unhindered. The L-ring 79 is protected on the outside by an inner wall 31 which has a larger diameter there due to the outward step 83 than, for example, in the area of the base plate 24 .

The protrusions 84 of the longitudinal legs 86, as shown in FIG.
Slits I~ extending in the axial and radial directions of the probe outer body 12
It curves outward so as to go into 87. Therefore, the L-ring 79 and the parts in contact with it can no longer rotate; the L-ring 79 thereby simultaneously becomes a fixed plate. The second part of the receiving part 72 consists of a C-ring 88.

It has an external thread 89 by which it is screwed into an internal thread 91 starting from the lower annular surface 92 of the probe body 12. The outer wall 93 of the C-ring 88 extends to the height of the cylindrical space 43. Its radially coaxial cylindrical transverse leg 94 is relatively thick for mechanical protection, and its outer surface 96 rests on the annular surface 92. An upwardly directed leg 78 protrudes from the side leg 94.

There is a small gap 98 between the leg 78, which is the transverse leg 94 on the surface, and the retaining wall 97 of the plunger 41 which outwardly limits the cylindrical space 44, which makes it difficult or excludes the ingress of foreign objects. As will be appreciated, the gap 98 is also the beginning of a labyrinth that prevents the intrusion of objects, which after the gap 98 is directed outwards, then downwards again, then outwards again, and then upwards. , annular surface 7
It is turned inward again under 1. When the gap 98 narrows to zero, it also acts at the same time as a radial stop that prevents overloading and excessive radial displacement of the plunger 41 and the parts connected thereto.

29 identical spring platelets 99.101 are connected to the plunger 41
and the portion connected thereto are positioned relative to the probe outer body 12. In particular, the half-pan core 52 is held very precisely coaxially with the geometrical longitudinal axis 13. The spring plates 99 are 0.05 mrn thick and made of Cu-Be2 (copper beryllium). Its outer diameter beam.

6M and the inner diameter is 2.3mm. It is the geometric vertical axis 1
3 and has an outer retaining ring 102 and an inner retaining ring 103. These are circularly general (durch)
three spring arms 104 are arranged at 120° intervals in each case, which run on a radius around the geometrical longitudinal axis 13 for most of their length and have roots 106, 107 in both their end regions. is connected to the inner retaining ring 103 on the one hand and to the outer retaining ring 102 on the other hand. The roots 106, 107 have a fully rounded transition section, so that an elongated S-shaped slit 108 results. As shown in FIG. 5, a spring plate 109 having an outer retaining ring 111 and an inner retaining ring 112 can be used as well. Here, slit group 112,1
13, 114, 116, each slit in each group having a circumferential length of slightly less than 120°. Thereby, 0.
Three bridges 117a each remain for the 4-width, 120" spacing arrangement. However, the group of 113 slits is at 60° to the group of 112 slits.
The position is shifted. 114 sleeve I group is 11
It is also shifted from that of 3, and the following is also like this. In this way, the pattern shown in FIG. 5 is created. The spring platelets 109 have a thickness of 0.2n++n.

As shown in FIG. 2, the outer retaining ring 1 of the spring platelet 99
02 is sandwiched between the radially upward facing frontal surface 118 of the lateral leg 81 and the downward facing frontal surface 119 of the sleeve 121. The sleeve 121 is cylindrical and coaxial and does not touch any part of the plunger 41. The sleeve 121 can be pushed into the inner wall 31 from below with play;
The sleeve 121 with an inwardly directed barrel 122 has an upwardly facing frontal surface 123 between which the outer retaining ring 102 of the spring leaflet 101 is sandwiched.

Here, further functions of this structure are recognized as shown below. That is, when the C-ring 88 is screwed up, it pushes the seven L-rings upward. At this time,
Due to the presence of the protrusion 84, the L-rings 7 cannot turn; the L-rings 79 push the sleeve 121 upwards, which also causes the outer retaining ring 102 of the spring platelets 99, 101 to be accurate.

shaped and angular, as well as frictional and at the same time binding (durch Kraftschlu mouth)
auch durcb FormschluQ ge
l+alten), the three central tubes have a radially coaxial upward facing frontal surface 125 at the level of the frontal surface 119, on which rests the inner retaining ring 103 of the spring platelet 99. On its upper surface rests the frontal surface of a coaxial radially downward space sleeve 126, which fits with its inner diameter into the central tube 39. Space sleeve 126 is attached to the frontal surface 123
It has an upwardly directed frontal surface 127 at a height of , which is coaxial, radial and horizontal, on which rests the lower surface of the inner retaining ring 10B of the spring platelet 101. On the upper surface of the inner retaining ring 103 rests the frontal surface 128 of the downwardly directed annular neck 37, which is coaxial, radial, and horizontal. Mounting flange 32
When the collar 68 is held firmly and pushed down, and the mounting flange 32 is fixed to the three central tubes with adhesive, the inner retaining ring 103 of the spring platelets 99, 101 is held in a frictional and cohesive manner. can be stopped.

The probe body 12 has an external thread 129 completely in the area of the upper set screw 16 . The outer surface 131 of this probe outer body 12
is cylindrical up to the outer ring 132. The outer ring 132 has a radially coaxial and upwardly facing toric frontal surface 133 and a downwardly facing radially and coaxially toroidal frontal surface 134 that cuts further inward. outer ring 1
32 has a passage hole 136 through which passive components on the board 24 can be connected.
) Tuning one of 26 with a screwdriver (abst imme
n) can.

The probe body 12 transitions below the frontal plane 134 into a coaxial cylindrical outer surface 137 . The outer diameter of the outer surface 137 is smaller than the outer diameter of the outer surface 131, as shown in FIG. External surface 137 extends 6.8 mm below frontal surface 134. A radial stop pin 138 is fixedly driven vertically into the corresponding hole. To the extent that the head 141 of the stopper bin 138 projects from the outer surface 137, this head 141 is located within the tangential rib 139. The 13 tangential slits are
As FIG. 1 shows particularly clearly, it extends in the circumferential direction of the cylindrical sliding sleeve 142. Tangent slit 139
is the upwardly directed coaxial annular frontal surface 143 of the sleeve 142.
The stopper pin 138, which has an axial width sufficient to allow the frontal surface 134 of the probe body 12 to impinge on the frontal surface 134 of the probe body 12, prevents the downward movement of the sliding sleeve 142 until the head 141 abuts the upper wall 144 of the tangential slit 139. Only forgive.

With respect to the helical spring 146, the sliding sleeve 142 is on the lower side relative to the probe shell 12. Spiral spring 14
6 is located in the cylindrical coaxial cavity 147. This gap 147 has an inner wall 148 of the sliding sleeve 142 on the outside.
The inner side is formed by the outer wall 149 of the probe outer body 12.

This outer wall 149 is created by a coaxial notch 151 extending down on the outer surface 137 and just up to the annular surface 92 . The sliding sleeve 142 has a reduced diameter 153 around the upper region of the collar 68, resulting in an upwardly directed coaxial annular frontal surface 152. The helical spring 146 is supported below by this annular frontal surface 152. The sliding sleeve 142 is guided with a coaxial cylindrical inner wall 154 which adjoins the outer wall 149 of the probe body 12 with a slight clearance. At the top, the sliding is carried out on the outer surface 13 with a small amount of play.
7 and the inner wall 148. Due to the tension of the helical spring 146, the head 141 of the stopper bottle 138 hits the upper wall 144. The force is about 60 bonds, which is much smaller than the spring force of measurement probe T33. The sliding sleeve 142 has a lower, relatively large, polished coaxial radial toroidal frontal surface 156 . This frontal face 156
As shown in FIG. 2, the height is the height of the hemispherical surface 53 *[! , and is therefore located at a lower position than the annular surface 92.

Gripping sleeve 157 consists of an upper portion 158 and a lower portion 159. The sliding sleeve 142 is made of aluminum while the gripping sleeve 157 is made of plastic, which makes it weigh only about 5 grams. The upper part 158 has an internal thread 161, which is connected to the external thread 129 of the probe body 12.
can be attached to. Coaxial downward facing frontal plane 1 of upper part 158
62 presses against the complementary downward facing frontal surface 163 of the lower portion 159 with the screw engaged. In this case, the lower part 159 is pressed against the frontal surface 133 of the probe body 12 by means of a downward notch 164 formed near the frontal surface 163, so that the gripping sleeve 157 can be tightened with zero hand fixation in all directions. For better retention, the lower part 159 has a grip ring 166. The lowermost downwardly directed frontal surface 167 of the lower part 159 opens the sliding sleeve 142 below to about the height of the cylindrical space 44 and tapers in advance thereof. Grasp sleeve 15
7 has a distance from the cylindrical outer surface 168 of the sliding sleeve 142. It also serves to cover the 13 tangential slits including the set screw 16, the window 23, the passage hole 135, and the head 141. In the assembled state, the gripping sleeve 157 cannot be twisted relative to the probe shell 12, while the sliding sleeve 142 has a
° Stopper bin 1 according to the length of tangential slit 139
It can be rotated until it hits 38.

In the second embodiment shown in FIG. 6, the sapphire 63 is missing. There is now a solid central core 170 instead of just one central core in the form of the inner wall 58 of the previous embodiment. Although the hemispherical surface 169 remains the same in terms of curvature, it is now constituted by the lower surface of the small cap 171 made of polyimide. This small cap 171 has a pan-shaped form as shown in FIG.
It covers 76. The retaining wall 178 of the collar 179 is now thinner, so that there is a place for a toroidal coaxial retaining wall 181, which extends further up into a protective slit.

The inner surface of the small cap 171 is bonded to the surface that contacts the small cap 171 with an acid- and alkali-resistant adhesive.The small cap 171 may be made of, for example, PTFE (polytetrafluoroethylene).

[Effect of the invention] According to claim 1, when the spherical frontal surface is pressed against the measurement material, the mass of the measurement probe including the mass of the cable can be significantly reduced, so no measurement errors occur. , or it can be made so small that it can be ignored.

According to claim 2, it is possible to obtain a specific configuration in which the spring device does not grip the probe outer hook, so that the action of the spring device when the spherical frontal surface is placed on the layer to be measured becomes extremely small.

According to claim 3, it becomes possible to use an extremely thin conducting wire.

According to claims 4 and 5, the plunger can be easily manufactured.

According to claim 6, the plunger is further reduced in weight.

According to claim 7, a particularly purposeful plunger is obtained.

According to claim 8, it is possible to protect the spring device from overloading and, moreover, to limit bending of the conductor wires of the conductor device.

According to claim 9, the burden on the spring device is reduced.

According to claim 10, flexible conductive wires can be used, making manufacturing easier and further reducing the weight.

According to claims 11 and 12, the spring device is miniaturized.

According to claim 13, a spring device with clear behavior and easy assembly can be obtained.

According to claim 14, a spring device having the same characteristics in all directions is obtained.

According to claim 15, the spring device can be made small and flexible.

According to claim 16, the spherical frontal surface can be stabilized in the radial direction.

According to claim 17, the small plate can have the same characteristics in all directions.

According to claim 18, it is possible to obtain a platelet which has no internal stress and as a result complies with Hooke's law in the entire stroke.

According to claim 19, the spring device does not require friction or a longitudinal guide mechanism when receiving a lateral force. According to claim 20, the behavior of the spring device can be predicted, and the structure is simple. be converted into

According to claim 21, any movement of the half-pan core can be prevented.

According to claim 22, it is convenient for manufacturing, inventory 1 assembly, etc.

According to claim 23, a particularly purposeful spring device is provided.

According to claim 24, the plunger can be made lighter and the number of parts can be reduced. Furthermore, the attachment of the inner retaining ring becomes more secure.

According to claim 25, their assembly and mutual holding are facilitated.

According to claim 26, the outer retaining ring is well retained.

According to claims 27 and 28, a suitable and practical measurement probe can be obtained.

According to claim 29, there is no need to clean the measurement probe after measurement.

According to claim 30, the top lining is highly durable and easy to process.

According to claim 31, the coil device can further be protected from moisture.

According to claim 32, it is possible to prevent moisture from entering the half-pot type core from the side.

According to claim 33, accurate measurement is possible even on very soft materials.

According to claims 34 and 35, an increase in mass due to the cable can be prevented.

[Brief explanation of drawings]

Figure 1 is a partially exploded view of the measurement probe on a scale of 1:1, Figure 2 is a constant radius cross-sectional view from the bottom to the middle area of the assembled measurement probe in Figure 1, and Figure 3 is the assembled measurement probe. Figure 1 is a constant ratio radius cross section of the measurement probe, Figure 4 is a magnification of 1:5.
5 is a plan view of another spring plate with an enlargement factor of 1:5, and FIG. 6 is a plan view of another spring plate with an enlargement factor of 1:5. FIG. FIG. 3 is a cross-sectional view of the lower region shown at double magnification.

Claims (1)

[Claims] (1) A coaxial half-pan type core 52 is provided, a coaxial central core 58 is provided, and a coaxial winding chamber 59 surrounding the central core 58 is provided.
with an outer wall 56 surrounding a winding chamber 59 and a coaxial spherical frontal surface 64 consisting of a body 63 made of a wear-resistant material.
, a coaxial coil device 61 is provided on the central core 58,
A probe outer body 1 is disposed between the coil device 61 and the measurement probe end.
conductor devices 18, 19 provided in the coaxial gap 17 of 2;
21, 22, 26, 27, 46, 47, a cable 15 exiting from the end of the measurement probe 11, and a spherical frontal surface 64.
a coaxial annular surface 156 disposed at a considerable radial distance from the annular surface 92 and a spring arrangement in the line of force between the frontal surface and the annular surface 92, such that in the resting state the frontal surface is axially A device for a monopolar electromagnetic active type measurement probe for thin film measurement, which is provided in front of the annular surface and has a linear guide device between the frontal surface and the annular surface, the device comprising: (a) a half-pan type core 52; moves axially within the probe body 12, (b) a spring device is provided in the line of force between the half-pan core 52 and the inside 31 of the probe body 12, and (c) the conductor device is a very light active Device for a measuring probe, characterized in that it comprises a very light conductor skeleton 24 with circuits 26, 27. (2) In the front region of the probe outer body 12, a very light plunger 41 is coaxially provided, which is much longer than the half-pot type core 52, but much shorter than the probe outer body 12;
2. A measuring probe according to claim 1, characterized in that the probe is fixedly connected to the front region 67 of the plunger 41, and a spring device 99, 101 is provided between the plunger 41 and the probe outer body 12. equipment. 3. Device for a measuring probe according to claim 2, characterized in that the plunger 41 has a passage hole 42 in which the thin conductor of the coil device 61 is located. (4) The device for a measurement probe according to claim 3, wherein the passage hole 42 is coaxial. (5) A device for a measuring probe according to claim 2, characterized in that the plunger (41) is essentially rotationally symmetrical. (6) The device for a measurement probe according to claim 2, wherein the plunger 41 is made of a light metal. (7) The device for a measurement probe according to claim 1, wherein the plunger 41 has a length in the centimeter range. (8) The plunger 41 has an outwardly protruding collar 6 in its front region that protrudes into the receiving part 72 fixed to the outer body of the probe.
8, the collar 68 and the housing part 72 are connected to the plunger 41.
2. Device for a measuring probe according to claim 1, characterized in that it forms at least one first stopper (69, 71) which prevents the probe from moving significantly in one direction. (9) The collar 68 is L-shaped, the accommodating part 72 is complementary L-shaped, and the free legs 76 are in L81, 86; 94, 78.
9. Device for a measuring probe as claimed in claim 8, characterized in that the overlapping portions form a safety device against excessive radial displacement of the plunger (41). 10. Claim 2, characterized in that the plunger 41 transitions in its inner end region into a mounting flange 32, to which a substrate 24 with active circuits 26, 27 is fixed.
Apparatus for the measurement probe described in . (11) The device for a measuring probe according to claim 1, characterized in that the spring devices 99, 101 are located between the plunger and the inside of the probe outer body. 12. Device for a measuring probe according to claim 11, characterized in that the spring devices 99, 101 are arranged at least essentially radially. (13) The spring devices 99, 101 are characterized in that they have an outer retaining ring 102, which is fixed to the inner side 31 of the sonde shell 12, and an inner retaining ring 103, which is fixed thereby to the outer side of the plunger 41. 13. Apparatus for a metrology probe according to claim 12. 14. A device for a metrology probe according to claim 13, characterized in that at least one of the retaining rings 102, 103 is universal. (15) Both retaining rings 102 and 103 have slit 1
14. Device for measuring probes according to claim 13, characterized in that they are connected by bridges 104 separated from each other by 08. 16. Device for a measuring probe according to claim 12, characterized in that the spring device includes spring plates 99, 101. (17) A device for a measuring probe according to claim 16, characterized in that the platelets 99, 101 are arranged coaxially. (18) The apparatus for a measuring probe according to claim 16, characterized in that the shape of the platelets 99, 101 is formed by an etching method. 19. Device for a measuring probe according to claim 1, characterized in that the spring devices 99, 100 are axially rigid with respect to the forces generated during the measurement. (20) both retaining rings 102, 103 are concentric;
14. A device for a measurement probe according to claim 13, characterized in that it is concentric at its outer and inner circumferences. (21) The device for a measurement probe according to claim 11, characterized in that the two spring devices 99, 101 are arranged at a distance in the axial direction. 22. Device for a measuring probe according to claim 21, characterized in that both spring devices 99, 101 are of identical design. (23) The device for a measurement probe according to claim 22, wherein the spring devices 99, 101 are made of copper beryllium. (24) The plunger 41 has an inner tube 39, which is connected to the stage 1
25 from the front region of the plunger 41 and an inner tube 39
, the first sleeve 126 and the second sleeve 37 are placed, and the inner retaining rings of both spring devices 99, 101 are
The measuring probe according to claim 2, characterized in that it is fixedly sandwiched between the step 125 and the first sleeve 126 on the one hand and between the first sleeve 126 and the second sleeve 37 on the other hand. equipment for. (25) A device for a measurement probe, characterized in that the mounting flange 33 of claim 10 and the second sleeve 37 of claim 24 are integrated. (26) Third sleeve 121 in first sleeve 126
are accurately opposed, it is fixedly connected to the probe shell 12, and both frontal surfaces 119, 123 of the third sleeve are
The outer retaining ring 102 of both spring devices 99, 101 together with another opposite frontal surface 83 fixed to the probe body 12
25. The device for a measurement probe according to claim 24, wherein the device holds: (21) The spring force of the spring devices 99 and 101 is 1/10
Claim 1 characterized in that when the stroke is from the bottom to the middle in the millimeter range, the stroke is from the bottom to the middle in the deca point range.
equipment for measuring probes. (28) The device for a measurement probe according to claim 1, wherein the weight of the conductor skeleton 24 plus the weight of the circuits 26 and 27 is in the 1/10 gram range. (29) The measurement probe according to claim 1, wherein the half-pot type core 52 is covered with an acid- and base-resistant and abrasion-resistant top lining 172 on the outside to prevent liquid from leaking. equipment. (30) The device for a measurement probe according to claim 29, wherein the overlay 172 is made of PTFE (polytetrafluoroethylene). (31) The device for a measurement probe according to claim 29, wherein the overlay 172 is made of polyimide. (32) Claim 2 characterized in that the overlay 172 further covers the periphery of the half-pan type core 52 at least indirectly.
9. Device for measurement probe. (33) At least the front region of the probe outer body 12 is coaxially surrounded by the sliding sleeve 142, and the sliding sleeve 1
42 can be pushed back from the coaxial annular surface 92 of the probe body 12 such that when the sliding sleeve 142 is at rest, the frontal frontal surface 156 of the sliding sleeve is in front of the spherical frontal surface 64. The radial clearance between the sliding sleeve 142 and the probe outer body 12 is very small, and there is a helical spring 146 between the sliding sleeve 142 and the probe outer body 12 to keep the sliding sleeve 142 in its original position. A coaxial gripping sleeve 157 is provided which is firmly connected to the probe body 12 and is separated from it by a gap in the region covering the sliding sleeve 142 so as to surround the sliding sleeve 142. An apparatus for a measurement probe according to claim 1. (34) Claim 1 characterized in that the cable 15 is thin.
equipment for measuring probes. (35) The device for a measurement probe according to claim 34, wherein the cable 15 has a diameter of 3 mm or less.