JPH0224084U - - Google Patents

Info

Publication number
JPH0224084U
JPH0224084U JP10247588U JP10247588U JPH0224084U JP H0224084 U JPH0224084 U JP H0224084U JP 10247588 U JP10247588 U JP 10247588U JP 10247588 U JP10247588 U JP 10247588U JP H0224084 U JPH0224084 U JP H0224084U
Authority
JP
Japan
Prior art keywords
pressure
section
pressure side
way valve
side pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10247588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10247588U priority Critical patent/JPH0224084U/ja
Publication of JPH0224084U publication Critical patent/JPH0224084U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
JP10247588U 1988-08-02 1988-08-02 Pending JPH0224084U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10247588U JPH0224084U (it) 1988-08-02 1988-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10247588U JPH0224084U (it) 1988-08-02 1988-08-02

Publications (1)

Publication Number Publication Date
JPH0224084U true JPH0224084U (it) 1990-02-16

Family

ID=31332418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10247588U Pending JPH0224084U (it) 1988-08-02 1988-08-02

Country Status (1)

Country Link
JP (1) JPH0224084U (it)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179186A (ja) * 1988-01-09 1989-07-17 Mita Ind Co Ltd プロセスユニットにおけるクリーニング部の検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179186A (ja) * 1988-01-09 1989-07-17 Mita Ind Co Ltd プロセスユニットにおけるクリーニング部の検査装置

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