JPH02234391A - Distributed el element - Google Patents

Distributed el element

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Publication number
JPH02234391A
JPH02234391A JP1055728A JP5572889A JPH02234391A JP H02234391 A JPH02234391 A JP H02234391A JP 1055728 A JP1055728 A JP 1055728A JP 5572889 A JP5572889 A JP 5572889A JP H02234391 A JPH02234391 A JP H02234391A
Authority
JP
Japan
Prior art keywords
transparent
lead
transparent electrode
sealing member
back electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1055728A
Other languages
Japanese (ja)
Inventor
Osamu Ishida
修 石田
Tsunemi Oiwa
大岩 恒美
Yoji Takeuchi
要二 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP1055728A priority Critical patent/JPH02234391A/en
Publication of JPH02234391A publication Critical patent/JPH02234391A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent the infiltration of moisture and extend the life by guiding one end of a transparent electrode from a sealing member as a lead on the transparent electrode side, and guiding the other end of the same transparent conducting film noncontinuous with the transparent electrode from the sealing member as a lead on the back electrode side. CONSTITUTION:One end of a transparent electrode 2 is guided from a sealing member 9 as a lead 21 on the transparent electrode side, and the other end of the same transparent conducting film 3 noncontinuous with the transparent electrode 2 is guided from the sealing member 9 as a lead 31 on the back electrode side. The lead 31 on the back electrode side is formed by guiding the other end of the transparent conducting film 3 stuck with a back electrode 6 by a conducting adhesive 7 from the sealing member 9, thus the adhesion of the sealing member 9 is made firm, and the infiltration of moisture from a lead guide section is effectively suppressed. The infiltration of moisture from the lead guide section is effectively suppressed, the moisture from a sealing section is prevented from infiltrating into a luminous layer from a back portion, and the life of an EL element can be extended.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は分散型EL素子に関し、さらに詳しくは、寿
命が長くて耐久性に優れた分散型EL素子に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a dispersion type EL device, and more particularly to a dispersion type EL device having a long life and excellent durability.

〔従来の技術〕[Conventional technology]

一般に、分散型EL素子は、透明基板上に形成されたイ
ンジウムースズ酸化物等からなる透明電極上に、蛍光体
を高誘電率結合剤樹脂中に分散した発光層と、チタン酸
バリウム等の高誘電率無機物を高誘電率結合剤樹脂中に
分散した誘電層とを順次に積層して形成し、誘電層上に
さらにAI箔あるいはAI蒸着による背面電極を設けて
、これらを封止部材で封止してつくられ、電極のリード
導出構造としては、透明電極および背面電極に金属製リ
ード端子を接合して構成されている。(特開昭59−2
2.1991号、実開昭62−157096号) 〔発明が解決しようとする課題〕 ところが、透明電極および背面電極に金属製リード端子
を接合して、電極のリードを導出したものは、金属製リ
ード端子と封止部材との接着性が悪いため、両者の界面
から水分が浸入してEL素子の寿命を短くするという難
点があり、また背面電極をAI蒸着によって形成したも
のは、ポーラスな蒸着膜しか得られないため、封止部か
らの水分が背面部分から発光層に達し、EL素子の寿命
を短くするという難点がある。
In general, a dispersion type EL element has a light-emitting layer made of a transparent electrode made of indium-tin oxide or the like formed on a transparent substrate, a light emitting layer in which a phosphor is dispersed in a high dielectric constant binder resin, and a high dielectric material such as barium titanate. A dielectric layer in which a dielectric constant inorganic substance is dispersed in a high-permittivity binder resin is sequentially laminated, and a back electrode made of AI foil or AI vapor deposition is further provided on the dielectric layer, and these are sealed with a sealing member. The electrode lead lead-out structure is constructed by bonding metal lead terminals to a transparent electrode and a back electrode. (Unexamined Japanese Patent Publication No. 59-2
(No. 2.1991, Utility Model Application Publication No. 62-157096) [Problems to be Solved by the Invention] However, when a metal lead terminal is connected to a transparent electrode and a back electrode to derive an electrode lead, Since the adhesion between the lead terminal and the sealing member is poor, moisture infiltrates from the interface between the two, shortening the life of the EL element.Also, when the back electrode is formed by AI vapor deposition, the back electrode is formed by porous vapor deposition. Since only a film can be obtained, there is a drawback that moisture from the sealing part reaches the light emitting layer from the back side, shortening the life of the EL element.

〔課題を解決するための手段〕[Means to solve the problem]

この発明はかかる現状に鑑み種々検討を行った結果なさ
れたもので、透明電極と背面電極間に少なくとも発光層
を設け、これらを封止部材で封止した分散型EL素子に
おいて、透明電極の一端を封止部材から導出して透明電
極側のリードとし、透明電極と不連続にした透明!極と
同じ透明導電膜に、金属箔または金属箔とプラスチック
フィルムとの複合フィルムで形成した背面電極を導電性
接着剤で接合するとともに、透明導電膜の他端を封止部
材から導出して背面電極側のリードとすることによって
、リード導出部からの水分の浸入を効果的に抑制し、さ
らに封止部からの水分が背面部分から発光層に浸入する
のを防止して、分散型EL素子の寿命を長くし、耐久性
を充分に向上させたものである。
This invention was made as a result of various studies in view of the current situation, and provides a dispersion type EL element in which at least a light-emitting layer is provided between a transparent electrode and a back electrode, and these are sealed with a sealing member, at one end of the transparent electrode. Transparent! is led out from the sealing member and used as a lead on the transparent electrode side, making it discontinuous with the transparent electrode! A back electrode made of metal foil or a composite film of metal foil and plastic film is bonded to the same transparent conductive film as the electrode using a conductive adhesive, and the other end of the transparent conductive film is led out from the sealing member to connect the back electrode. By forming the leads on the electrode side, it is possible to effectively suppress the infiltration of moisture from the lead lead-out part, and further prevent the intrusion of moisture from the sealing part into the light emitting layer from the back side, thereby improving the dispersion type EL element. It has a long service life and sufficiently improved durability.

以下、この発明の分散型EL素子の一例を示す図面を参
照しながら説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an explanation will be given with reference to drawings showing an example of a distributed EL element of the present invention.

第1図はこの発明の分散型EL素子の一例を断面図で示
したものであり、1は透明なガラス板であって、このガ
ラス板1上にインジウムースズ酸化物などからなる透明
電極2が形成されている。
FIG. 1 shows a cross-sectional view of an example of the dispersion type EL element of the present invention, in which 1 is a transparent glass plate, and a transparent electrode 2 made of indium-tin oxide or the like is formed on this glass plate 1. has been done.

またガラス板l上の端部に透明電極2と不連続にして透
明電極2と同じインジウムースズ酸化物などからなる透
明導電膜3が形成されている。
Further, a transparent conductive film 3 made of the same indium-tin oxide as the transparent electrode 2 is formed discontinuously with the transparent electrode 2 at an end portion of the glass plate l.

4は透明電極2上に蛍光体と高誘電率結合剤樹脂と存機
溶剤とを混合分散して調製された発光塗料を塗布、乾燥
して形成された発光層で、この発光層4上に、さらにチ
タン酸バリウムなどの高誘電率無機物と高誘電率結合剤
樹脂と有機溶剤とを混合分散して調製された誘電塗料を
塗布、乾燥して、誘電層5が積層形成されている。
Reference numeral 4 denotes a luminescent layer formed by coating a luminescent paint prepared by mixing and dispersing a phosphor, a high dielectric constant binder resin, and a solvent on the transparent electrode 2 and drying it. Further, a dielectric coating prepared by mixing and dispersing a high dielectric constant inorganic material such as barium titanate, a high dielectric constant binder resin, and an organic solvent is applied and dried to form a dielectric layer 5.

6はこの誘電層5上に形成されたアルミニウム箔からな
る背面電極で、この背面電極6は端部がガラス板1上の
端部に形成された透明導電膜3に導電性接着剤7で接合
されている。
Reference numeral 6 denotes a back electrode made of aluminum foil formed on this dielectric layer 5, and the end of this back electrode 6 is bonded to the transparent conductive film 3 formed on the end of the glass plate 1 with a conductive adhesive 7. has been done.

8は背面電極6上に積層したガラス板で、透明電極2上
に形成された発光N4、誘電層5および背面電極6は、
このガラス板8とエボキシ樹脂などからなる封止剤9で
封止されている。そして、この封止剤9から透明電極2
の一端が導出されて透明電極側のリード2lが形成され
、透明導電膜3の他端が導出されて、背面電極側のりー
ド31が形成されている。
8 is a glass plate laminated on the back electrode 6, and the light emitting layer N4 formed on the transparent electrode 2, the dielectric layer 5 and the back electrode 6 are
This glass plate 8 is sealed with a sealant 9 made of epoxy resin or the like. Then, from this sealant 9, the transparent electrode 2
One end of the transparent conductive film 3 is led out to form a lead 2l on the transparent electrode side, and the other end of the transparent conductive film 3 is led out to form a lead 31 on the back electrode side.

10は交流電源であり、分散型EL素子Aは、透明電極
側のりード21と背面電極側のリード31がこの交流電
源10に接続されて駆動される。
10 is an AC power source, and the distributed EL element A is driven by connecting the lead 21 on the transparent electrode side and the lead 31 on the back electrode side to this AC power source 10.

このように、透明電極側のリード2lは透明電極2の一
端を封止剤9から導出して形成され、また背面電極側の
り一ド31は背面電極6が導電性接着剤7で接合された
透明導電膜3の他端を封止剤9から導出して形成されて
いるため、封止剤9との接着性が強固になり、リード導
出部からの水分の浸入が効果的に抑制される。また背面
電極6は緻密なアルミニウム箔で構成されているため、
封止部からの水分の浸入がこの背面電極6で防止され、
発光層4に達することもない。従って、分散型EL素子
の寿命が長くなり、耐久性に優れた分散型EL素子Aが
得られる。
In this way, the lead 2l on the transparent electrode side is formed by leading out one end of the transparent electrode 2 from the sealant 9, and the glue 31 on the back electrode side is formed by bonding the back electrode 6 with the conductive adhesive 7. Since the other end of the transparent conductive film 3 is formed by leading out from the sealant 9, the adhesiveness with the sealant 9 is strong, and moisture infiltration from the lead lead-out part is effectively suppressed. . In addition, since the back electrode 6 is made of dense aluminum foil,
This back electrode 6 prevents moisture from entering from the sealing part,
It does not even reach the light emitting layer 4. Therefore, the life of the dispersion type EL element is extended, and the dispersion type EL element A having excellent durability can be obtained.

ここで、透明電極2および透明導電膜3は、インジウム
ースズ酸化物の他、Ing o:l 、SnOz、Au
などからなる透明電極2や透明導電膜3が、電子ビーム
蒸着法やスパッタリング法によって形成される。
Here, the transparent electrode 2 and the transparent conductive film 3 are made of Ingo:l, SnOz, Au, in addition to indium-tin oxide.
The transparent electrode 2 and the transparent conductive film 3 are formed by electron beam evaporation or sputtering.

また、発光層4で使用される蛍光体としては、たとえば
、ZnS,ZnSe..ZnS−Se..CdSSCd
Se,CdSSeなどからなる母材に、Cu,Cl、B
r,Mnなどの1種または2種以上の元素を発光中心と
して付活したものが好適なものとして使用され、高誘電
率結合剤樹脂としては、たとえば、シアノエチル化セル
ロース、シアノエチル化プルラン、シアノエチル化サツ
力ロース、シアノエチル化ヒドロキシセルロース、シア
ノエチル化ポリビニルアルコール、シアノエチル化フエ
ノキシ樹脂などが好適なものとして使用される。また、
有機溶剤としては、ジメチルホルムアミド、ノルマルメ
チル2−ビロリドンなど一般に分散型EL素子の発光層
に使用される有機溶剤がいずれも好ましく使用される。
Furthermore, examples of the phosphor used in the light emitting layer 4 include ZnS, ZnSe. .. ZnS-Se. .. CdSSCd
Cu, Cl, B are added to the base material consisting of Se, CdSSe, etc.
Those activated with one or more elements such as r, Mn, etc. as luminescent centers are preferably used, and examples of high dielectric constant binder resins include cyanoethylated cellulose, cyanoethylated pullulan, cyanoethylated Suitable examples include satin loin, cyanoethylated hydroxycellulose, cyanoethylated polyvinyl alcohol, and cyanoethylated phenoxy resin. Also,
As the organic solvent, any organic solvent generally used in the light emitting layer of a dispersed EL device, such as dimethylformamide and n-methyl 2-pyrrolidone, is preferably used.

さらに、誘電屡5で使用される高誘電率無機化合物とし
ては、たとえば、チタン酸バリウム、チタン酸鉛、二酸
化チタンなどが好ましく使用され、高誘電率結合剤樹脂
および有機溶剤等は発光層4で使用するものと同じもの
がいずれも好適なものとして使用される。
Further, as the high dielectric constant inorganic compound used in the dielectric layer 5, for example, barium titanate, lead titanate, titanium dioxide, etc. are preferably used, and the high dielectric constant binder resin and organic solvent are used in the light emitting layer 4. Any of the same ones used are preferred.

また、誘電層5上に形成される背面電極6は、アルミニ
ウム箔の他、たとえば、Au,Mo,Cr等の金属箔、
さらにこれらの金属箔とプラスチックフィルムとの複合
フィルムで形成したものが、熱圧着などにより貼着して
形成される。
In addition to aluminum foil, the back electrode 6 formed on the dielectric layer 5 may be made of metal foil such as Au, Mo, or Cr.
Further, a composite film of these metal foils and a plastic film is bonded by thermocompression bonding or the like.

さらに、封止剤9としては、エポキシ樹脂の他3フッ化
塩化エチレンなどが使用される。
Furthermore, as the sealant 9, trifluorochloroethylene or the like is used in addition to epoxy resin.

なお、透明電極2を形成する透明基板は、ガラス板1に
限らず、透明なプラスチック板であってもよい。また、
封止部材として使用されるガラス板8も特に限定されず
、プラスチック板であってもよい. 〔実施例〕 次に、この発明の実施例について説明する。
Note that the transparent substrate forming the transparent electrode 2 is not limited to the glass plate 1, and may be a transparent plastic plate. Also,
The glass plate 8 used as the sealing member is not particularly limited either, and may be a plastic plate. [Example] Next, an example of the present invention will be described.

実施例l 第1図に示すように、透明なガラス板1上にインジウム
ースズ酸化物からなる透明電極2を蒸着によって形成し
、同時に透明なガラス板1上の端部に透明電極2とは不
連続にして、インジウムースズ酸化物からなる透明導電
膜3を蒸着によって形成した。
Example 1 As shown in FIG. 1, a transparent electrode 2 made of indium-tin oxide is formed on a transparent glass plate 1 by vapor deposition, and at the same time, a transparent electrode 2 is formed discontinuously with the transparent electrode 2 on the edge of the transparent glass plate 1. Then, a transparent conductive film 3 made of indium-tin oxide was formed by vapor deposition.

次いで、ZnS:Cu,CIからなる蛍光体30重量部
を、シアノエチル化プルラン10重量部およびジメチル
ホルムアミド100重量部とともに混合分散して発光塗
料を調製し、この発光塗料を透明電極2上に塗布し、1
00゜Cで2時間乾燥して、厚さ50μmの発光層4を
形成した。
Next, 30 parts by weight of a phosphor made of ZnS:Cu,CI was mixed and dispersed with 10 parts by weight of cyanoethylated pullulan and 100 parts by weight of dimethylformamide to prepare a luminescent paint, and this luminescent paint was applied onto the transparent electrode 2. ,1
It was dried at 00°C for 2 hours to form a light emitting layer 4 with a thickness of 50 μm.

次に、チタン酸バリウム50重量部を、シアノエチル化
ブルラン10重量部およびジメチルホルムアミド100
重量部とともに混合分散して誘電塗料を調製し、この誘
電塗料を発光層4上に塗布し、100゜Cで4時間乾燥
して、厚さ20μmの誘電層5を形成した。
Next, 50 parts by weight of barium titanate was mixed with 10 parts by weight of cyanoethylated bulluran and 100 parts by weight of dimethylformamide.
A dielectric paint was prepared by mixing and dispersing the dielectric paint with parts by weight, and this dielectric paint was applied onto the light emitting layer 4 and dried at 100°C for 4 hours to form a dielectric layer 5 having a thickness of 20 μm.

次いで、この誘電層5上に厚さ50μmのアルミニウム
箔を、110’C、5kg/cfflの条件で加熱圧着
して背面電極6を形成し、背面電極6の端部を透明導電
膜3に導電性接着剤7で接合した。
Next, a back electrode 6 is formed by heat-pressing an aluminum foil with a thickness of 50 μm on the dielectric layer 5 under the conditions of 110'C and 5 kg/cffl, and the end of the back electrode 6 is electrically connected to the transparent conductive film 3. They were joined using adhesive 7.

しかる後、これらをガラス板8とエポキシ樹脂からなる
封止剤9とで封止し、透明電極2の一端を封止剤9から
導出して、透明電極2側のり一ド2lとするとともに、
透明導電膜3の他端を封止剤9から導出して、背面電極
6側のリード31とし、第1図に示すような分散型EL
素子Aを作製した。
Thereafter, these are sealed with a glass plate 8 and a sealant 9 made of epoxy resin, and one end of the transparent electrode 2 is led out from the sealant 9 to form a glue 2l on the transparent electrode 2 side.
The other end of the transparent conductive film 3 is led out from the sealant 9 and used as a lead 31 on the back electrode 6 side to form a distributed EL as shown in FIG.
Element A was produced.

比較例1 実施例1において、透明電掻2側のり一ド21の形成を
省くとともに、透明導電膜3および背面電極6側のりー
ド31の形成を省き、第2図に示すように透明電極2に
金属製リード端子22を接合して封止剤9から導出し、
背面電極6に導電性接着剤7で金属製リード端子32を
接合して封止剤9から導出した以外は、実施例1と同様
にして第2図に示すような分散型EL素子を作製した。
Comparative Example 1 In Example 1, the formation of the glue 21 on the side of the transparent electrode 2 and the formation of the glue 31 on the side of the transparent conductive film 3 and the back electrode 6 were omitted, and as shown in FIG. A metal lead terminal 22 is joined to 2 and led out from the sealant 9,
A distributed EL element as shown in FIG. 2 was fabricated in the same manner as in Example 1, except that metal lead terminals 32 were bonded to the back electrode 6 with a conductive adhesive 7 and led out from the sealant 9. .

比較例2 実施例1において、誘電層5上にアルミニウムを蒸着し
て、第3図に示すように厚さ2000人のアルミニウム
からなる背面電極61を形成し、アルミニウムからなる
背面電極61の端部を透明導電膜3に直接接合した以外
は、実施例lと同様にして第3図に示すような分散型E
L素子を作製した。
Comparative Example 2 In Example 1, aluminum was deposited on the dielectric layer 5 to form a back electrode 61 made of aluminum with a thickness of 2000 mm as shown in FIG. A dispersion type E as shown in FIG.
An L element was manufactured.

各実施例および比較例で得られた分散型EL素子の透明
電極側のリードと背面電極側のリードを交流電源ioに
接続し、100■、400HZのパルス波で、20゜C
、60%RHの条件下で駆動させて、輝度が初期の輝度
の50%になるまでの時間を測定し、分散型EL素子の
寿命を調べた。
The leads on the transparent electrode side and the leads on the back electrode side of the dispersed EL elements obtained in each example and comparative example were connected to an AC power source io, and heated at 20°C with a pulse wave of 100 cm and 400 Hz.
The life of the dispersion type EL element was investigated by driving it under conditions of , 60% RH and measuring the time until the luminance reached 50% of the initial luminance.

下記第1表はその結果である。Table 1 below shows the results.

第1表 〔発明の効果〕 上記第1表から明らかなように、この発明で得られた分
散型EL素子(実施例1)は、従来の分散型EL素子(
比較例1および2)に比し、いずれも寿命が長く、この
ことからこの発明で得られる分散型EL素子は、寿命が
長くて耐久性に優れていることがわかる。
Table 1 [Effects of the Invention] As is clear from Table 1 above, the dispersion type EL element (Example 1) obtained by the present invention is different from the conventional dispersion type EL element (
Compared to Comparative Examples 1 and 2), both have a longer lifespan, and this shows that the dispersion type EL element obtained by the present invention has a longer lifespan and excellent durability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の分散型EL素子の一実施例を示す断
面図、第2図および第3図は従来の分散型EL素子の断
面図である。 1・・・ガラス板(透明基板)、2・・・透明電極、3
・・・透明導電膜、4・・・発光層、5・・・誘電層、
6・・・背面電極、7・・・導電性接着剤、8・・・ガ
ラス板(封止部材)、9・・・封止剤(封止部材)、2
1・・・透明電極側のリード、31・・・背面電極側の
リード、A・・・分散型EL素子 特許出願人  日立マクセル株式会社
FIG. 1 is a cross-sectional view showing one embodiment of the dispersion type EL element of the present invention, and FIGS. 2 and 3 are cross-sectional views of a conventional dispersion type EL element. 1...Glass plate (transparent substrate), 2...Transparent electrode, 3
...Transparent conductive film, 4...Light emitting layer, 5...Dielectric layer,
6... Back electrode, 7... Conductive adhesive, 8... Glass plate (sealing member), 9... Sealing agent (sealing member), 2
1... Lead on the transparent electrode side, 31... Lead on the back electrode side, A... Distributed EL element patent applicant Hitachi Maxell, Ltd.

Claims (1)

【特許請求の範囲】[Claims] 1. 透明電極と背面電極間に少なくとも発光層を設け
、これらを封止部材で封止した分散型EL素子において
、透明電極の一端を封止部材から導出して透明電極側の
リードとし、透明電極と不連続にした透明電極と同じ透
明導電膜に、金属箔または金属箔とプラスチックフィル
ムとの複合フィルムで形成した背面電極を導電性接着剤
で接合するとともに、透明導電膜の他端を封止部材から
導出して背面電極側のリードとしたことを特徴とする分
散型EL素子
1. In a distributed EL element in which at least a light-emitting layer is provided between a transparent electrode and a back electrode, and these are sealed with a sealing member, one end of the transparent electrode is led out from the sealing member to serve as a lead on the transparent electrode side, and the transparent electrode and A back electrode made of metal foil or a composite film of metal foil and plastic film is bonded to the same transparent conductive film as the discontinuous transparent electrode using a conductive adhesive, and the other end of the transparent conductive film is attached to a sealing member. A distributed EL element characterized in that the leads on the back electrode side are derived from
JP1055728A 1989-03-07 1989-03-07 Distributed el element Pending JPH02234391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1055728A JPH02234391A (en) 1989-03-07 1989-03-07 Distributed el element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1055728A JPH02234391A (en) 1989-03-07 1989-03-07 Distributed el element

Publications (1)

Publication Number Publication Date
JPH02234391A true JPH02234391A (en) 1990-09-17

Family

ID=13006916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1055728A Pending JPH02234391A (en) 1989-03-07 1989-03-07 Distributed el element

Country Status (1)

Country Link
JP (1) JPH02234391A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006272876A (en) * 2005-03-30 2006-10-12 Takiron Co Ltd Electroconductive element
JP2011253198A (en) * 2002-06-07 2011-12-15 Seiko Epson Corp Electro-optical device and electronic apparatus
US8253320B2 (en) 2002-04-18 2012-08-28 Seiko Epson Corporation Method of manufacturing an electric optical device in which external connection terminals are formed

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8253320B2 (en) 2002-04-18 2012-08-28 Seiko Epson Corporation Method of manufacturing an electric optical device in which external connection terminals are formed
US8339030B2 (en) 2002-04-18 2012-12-25 Seiko Epson Corporation Method of manufacturing an electric optical device in which external connection terminals are formed
US8796913B2 (en) 2002-04-18 2014-08-05 Seiko Epson Corporation Method of manufacturing an electric optical device in which external connection terminals are formed
JP2011253198A (en) * 2002-06-07 2011-12-15 Seiko Epson Corp Electro-optical device and electronic apparatus
JP2006272876A (en) * 2005-03-30 2006-10-12 Takiron Co Ltd Electroconductive element

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