JPH0222910U - - Google Patents

Info

Publication number
JPH0222910U
JPH0222910U JP9903288U JP9903288U JPH0222910U JP H0222910 U JPH0222910 U JP H0222910U JP 9903288 U JP9903288 U JP 9903288U JP 9903288 U JP9903288 U JP 9903288U JP H0222910 U JPH0222910 U JP H0222910U
Authority
JP
Japan
Prior art keywords
wafer
pulley
transfer belt
tension
belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9903288U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9903288U priority Critical patent/JPH0222910U/ja
Publication of JPH0222910U publication Critical patent/JPH0222910U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drives For Endless Conveyors (AREA)
  • Structure Of Belt Conveyors (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例を示す構成図、第
２図はこの考案の要部拡大図、第３図はこの考案
の他の実施例を示す要部拡大図、第４図は従来の
ウエハベルト搬送装置を示す構成図である。 図において、１はウエハ搬送ベルト、２はプー
リ、３はベルト駆動用モータ、７はテンシヨンプ
ーリである。なお、図中、同一符号は同一、又は
相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハ搬送ベルトと、プーリと、上記ウエハ搬
    送ベルトを駆動するモータと、上記ウエハ搬送ベ
    ルトの張力を調節するテンシヨンプーリと、上記
    テンシヨンプーリを脱着できる機構とを備えたウ
    エハベルト搬送装置。
JP9903288U 1988-07-25 1988-07-25 Pending JPH0222910U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9903288U JPH0222910U (ja) 1988-07-25 1988-07-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9903288U JPH0222910U (ja) 1988-07-25 1988-07-25

Publications (1)

Publication Number Publication Date
JPH0222910U true JPH0222910U (ja) 1990-02-15

Family

ID=31325820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9903288U Pending JPH0222910U (ja) 1988-07-25 1988-07-25

Country Status (1)

Country Link
JP (1) JPH0222910U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013094372A (ja) * 2011-10-31 2013-05-20 Jetter Co Ltd メダル搬送ベルトコンベヤのベルト緊張装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013094372A (ja) * 2011-10-31 2013-05-20 Jetter Co Ltd メダル搬送ベルトコンベヤのベルト緊張装置

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