JPH0222371U - - Google Patents

Info

Publication number
JPH0222371U
JPH0222371U JP3379188U JP3379188U JPH0222371U JP H0222371 U JPH0222371 U JP H0222371U JP 3379188 U JP3379188 U JP 3379188U JP 3379188 U JP3379188 U JP 3379188U JP H0222371 U JPH0222371 U JP H0222371U
Authority
JP
Japan
Prior art keywords
molecular beam
growth apparatus
epitaxial growth
heating
beam sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3379188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057251Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3379188U priority Critical patent/JPH057251Y2/ja
Publication of JPH0222371U publication Critical patent/JPH0222371U/ja
Application granted granted Critical
Publication of JPH057251Y2 publication Critical patent/JPH057251Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP3379188U 1988-03-16 1988-03-16 Expired - Lifetime JPH057251Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3379188U JPH057251Y2 (cg-RX-API-DMAC7.html) 1988-03-16 1988-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3379188U JPH057251Y2 (cg-RX-API-DMAC7.html) 1988-03-16 1988-03-16

Publications (2)

Publication Number Publication Date
JPH0222371U true JPH0222371U (cg-RX-API-DMAC7.html) 1990-02-14
JPH057251Y2 JPH057251Y2 (cg-RX-API-DMAC7.html) 1993-02-24

Family

ID=31260496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3379188U Expired - Lifetime JPH057251Y2 (cg-RX-API-DMAC7.html) 1988-03-16 1988-03-16

Country Status (1)

Country Link
JP (1) JPH057251Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH057251Y2 (cg-RX-API-DMAC7.html) 1993-02-24

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