JPH02223007A - Production of magnetic sensor - Google Patents

Abstract

PURPOSE:To eliminate the waste of product layout at the time of cutting by alternately arraying magnetic flux detecting means and temp. compensating means along one direction and cutting these means as a set. CONSTITUTION:The films of MR elements 2 are so formed on a nonmagnetic substrate 1 that the MR elements 2 of a magnetic sensor MR 1 and the MR elements 2 of a temp. compensating element MR 2 are alternately arrayed along one direction. After the substrate 1 is so cut along the direction where the MR elements 2 are arrayed, the magnetic sensors MR 1 and the temp. compensating elements MR 2 are cut and formed as a set according to the number of the tracks of the magnetic recording medium. The magnetic flux detecting means and the temp. compensating means are eventually alternately disposed at the time of the cutting stage, by which the elements to be wasted at the time of the cutting are eliminated even if the number of tracks of the magnetic recording medium is not the multiple of 2. The waste in product layout is thus eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a magnetic sensor that detects magnetic flux as an electrical signal.

"Prior Art" What is shown in FIG. 4 is one of the magnetic sensors used when reproducing magnetic signals recorded on a magnetic recording medium.
A magnetoresistive element whose resistance value changes in response to changes in magnetic flux (
This is an example of a device using an MR element). This involves forming a linear MR element 2 on a non-magnetic substrate l, forming an insulating layer 3 thereon, and then forming a first yoke 5 on both sides of the MR element 2 with a gap 4 between them. and a second yoke 6, and then a non-magnetic layer 7 is formed to cover the gap 4 and both yokes 5 and 6, and a third yoke 8 is formed to cover the non-magnetic layer 7. A gap 9 is formed between the first yoke 5 and the third yoke 8 by the non-magnetic wash layer 7, and the second yoke 6 and the third yoke 8 are directly connected to each other. They are joined to form a magnetic circuit. In addition, the code 10
are terminals provided at both ends of the MR element 2 to derive the change in electrical resistance therebetween.

In this magnetic sensor, a magnetic recording medium is brought into sliding contact with the surface of the gap 9, and changes in the magnetic flux are introduced into the MR element 2 through a magnetic circuit constituted by a yoke 5, 6, 8, and a change in electrical resistance value is generated. It is configured to convert and output.

This magnetic sensor is manufactured by sequentially forming each film layer on the non-magnetic substrate l by sputtering etc., forming a large number of magnetic sensors on this substrate 1, and then cutting the entire substrate l into a predetermined size. It is formed by

Furthermore, in recent years, magnetic recording media in which a plurality of tracks are recorded have been considered, and in such cases, a plurality of magnetic sensors may be arranged in a row.

"Problems to be Solved by the Invention" By the way, the magnetic sensor with such a configuration uses the MR element 2 to detect magnetic flux, and the resistance value of this MR element 2 has temperature dependence. During measurement, it is necessary to detect the magnetic flux while calibrating the drift value due to temperature changes.

As a means of calibrating the drift value of the MR element 2 due to temperature changes, a temperature compensation element is provided close to this magnetic sensor, and the detected value from the magnetic head and the detected value from the temperature compensation element are compared. A possible method is to calibrate the temperature by In this case, conventionally, as shown in FIG. 5, a symmetrical configuration has been considered in which two temperature compensation elements MR2, MR2 are arranged between adjacent magnetic sensors MRI, MRI.

However, when the magnetic sensor MRI and the temperature compensation element MR2 are arranged in such a configuration, the number of tracks recorded on the magnetic recording medium described above is not necessarily a multiple of 2. This results in wasted effort. Furthermore, since the two temperature compensation elements MR2 and MR2 are interposed between the magnetic sensors MRiMR1, there is a possibility that the distance between the magnetic sensors MRISMR1 becomes larger than the distance between the tracks, and conversely, the distance between the tracks may become larger than the distance between the tracks. When regulating the distance between magnetic sensors MRL and MR1,
Due to the presence of two temperature compensating elements MR2 and MR2 within a narrow interval, there was a risk that sufficient cutting could not be achieved.

"Means for Solving the Problem" In order to solve the problem, the invention according to the first claim provides a magnetic circuit having a magnetic gap in which a yoke made of a magnetic material is joined with a non-magnetic material layer in between. In the method of manufacturing a magnetic sensor, the magnetic sensor is provided with a magnetic flux detection means for detecting the magnetic flux in the magnetic circuit, and a temperature compensation means is attached near the magnetic flux detection means. A magnetic sensor is manufactured by forming a film on a substrate so that the temperature compensation means are arranged alternately in one direction, and then cutting the magnetic flux detection means and temperature compensation means as a set. ing.

Further, the invention according to the second claim provides the method for manufacturing a magnetic sensor according to the first claim, in which the magnetic flux detection means and the temperature compensation means are arranged in a small number (both in two rows) and in the direction in which they are arranged. The present invention is characterized in that these magnetic flux detection means and temperature compensation means are formed on a substrate so as to face each other along substantially orthogonal directions.

"Function" In the present invention, after the magnetic flux detecting means and the temperature compensating means are formed on a substrate so that they are arranged alternately in one direction, the magnetic flux detecting means and the temperature compensating means are Since the magnetic sensor is manufactured by cutting as a set, the magnetic flux detection means and the temperature compensation means are arranged alternately during this cutting process, and the temperature compensation means located between the magnetic flux detection means There is only one.

"Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 and 2 are diagrams for explaining a method of manufacturing a magnetic sensor according to a first embodiment of the present invention. In addition,
In the following description, the same reference numerals are given to the same constituent elements as in the prior art, and the description thereof will be omitted.

In this embodiment, as shown in FIG.
L... and temperature compensation elements MR2,... are arranged alternately along a direction perpendicular to the sliding direction of the magnetic recording medium (direction perpendicular to the plane of the paper in the figure). The detailed configuration of this magnetic sensor MRI is the same as that of the conventional magnetic sensor, so a description thereof will be omitted. Further, the temperature compensation element MR2 is configured to include an MR element 2 similar to the magnetic sensor MRI.

To manufacture a magnetic sensor with such a configuration, first, as shown in FIG. MR element 2,
... is formed into a film. Simply, MR along the one direction
The element 2 may be formed in a band-like manner. Further, by forming the yokes 5, 6, 8, the non-magnetic layer 7, etc. on the MR elements 2, . . . with the one direction perpendicular to the sliding direction of the magnetic recording medium, the substrate 1, magnetic sensors MRI and temperature compensation elements MR2 are alternately formed in a row. And MR element 2111. After cutting the substrate l along the direction in which the magnetic sensor MR1 and the temperature compensation element MR2 are arranged in a row, the magnetic sensor MR1 and the temperature compensation element MR2 are cut and formed as a set according to the number of tracks of the magnetic recording medium, as shown in FIG. It is possible to manufacture a magnetic sensor having a similar configuration.

Therefore, in this embodiment, since the MR elements 2, . Even when the number of tracks on the magnetic recording medium is not a multiple of 2, there are no wasted elements as in the conventional method, and there is no waste in terms of the number of products. In addition, magnetic sensor MRI
,... Since only one temperature compensation element MR2 exists between the tracks, sufficient cutting can be ensured even when the distance between tracks of the magnetic recording medium is narrow, and the cutting process is easy and reliable. Become something.

Next, FIG. 3 is a diagram for explaining a method of manufacturing a magnetic sensor according to a second embodiment of the present invention.

In the magnetic sensor according to this embodiment, as shown in FIG. 3, the direction in which the MR elements 2, . . . ), magnetic sensor MRI and temperature compensation element MR
It is characterized by the fact that the two are placed facing each other.

A magnetic sensor having such a configuration can also be manufactured by a method similar to that of the above embodiment. Therefore, this embodiment can also provide the same effects as those of the previous embodiment. In particular, in this embodiment, the step of cutting the base (slider) 11 to which the magnetic sensor is attached can be omitted, contributing to process simplification. That is, after the magnetic sensor is cut in the direction in which it is arranged, a slider with a width that matches the magnetic sensor row is pasted from the back side of the magnetic sensor. First, it is cut into magnetic sensor rows, and a slider 11 having a width that matches the two magnetic sensor rows is attached from the back side, and then the substrate 1 and the slider 11 are integrated as a set with the magnetic sensor MRI and the temperature compensation element MR2. By cutting, the step of cutting the slider can be omitted.

Note that the details of the method for manufacturing a magnetic sensor of the present invention are not limited to the above embodiments, and various modifications are possible.

"Effects of the Invention" As explained in detail above, according to the present invention, a yoke made of a magnetic material is joined with a non-magnetic material layer sandwiched therebetween to constitute a magnetic circuit having a magnetic gap, and In a method of manufacturing a magnetic sensor, the magnetic flux detecting means and the temperature compensating means are arranged in the vicinity of the magnetic flux detecting means. The magnetic sensor is manufactured by forming a film on the substrate so that these are arranged alternately along the length of the substrate, and then cutting the magnetic flux detection means and temperature compensation means as a set. The magnetic flux detection means and the temperature compensation means are arranged alternately. Therefore, even if the number of tracks of the magnetic recording medium is not a multiple of 2, there are no elements wasted during cutting (and there is no wastage in the number of products) as in the conventional method. Since there is only one, sufficient cutting can be ensured even when the distance between tracks of the magnetic recording medium is narrow, making the cutting process easy and reliable.

[Brief explanation of the drawing]

1 and 2 are diagrams for explaining a method of manufacturing a magnetic sensor according to a first embodiment of the present invention, and FIG. 3 is a diagram for explaining a method of manufacturing a magnetic sensor according to a second embodiment of the invention. FIG. 4 is a perspective view showing a schematic configuration of a conventional magnetic sensor, and FIG. 5 is a schematic diagram showing the arrangement of a conventional magnetic flux detection means and temperature compensation means. ■...Nonmagnetic substrate, 2...MR element,
5.6.8...Yoke, 7...Nonmagnetic layer, 9...Gap, MR2...Temperature compensation element.

Claims (2)

[Claims] (1) A yoke made of a magnetic material is joined with a non-magnetic material layer in between to form a magnetic circuit having a magnetic gap, and a magnetic flux detection means for detecting the magnetic flux in this magnetic circuit is provided, and this magnetic flux is A method for manufacturing a magnetic sensor comprising a temperature compensation means attached near a detection means, wherein the magnetic flux detection means and the temperature compensation means are arranged on a substrate so that they are arranged alternately along one direction. 1. A method of manufacturing a magnetic sensor, comprising: forming a film on the magnetic flux detecting means and the temperature compensating means, and then cutting the magnetic flux detecting means and the temperature compensating means as a set to manufacture a magnetic sensor. (2) In the method for manufacturing a magnetic sensor according to claim 1,
The magnetic flux detection means and the temperature compensation means are arranged in at least two rows, and the magnetic flux detection means and the temperature compensation means are arranged on the substrate so as to face each other along a direction substantially perpendicular to the arrangement direction. A method for manufacturing a magnetic sensor, characterized by forming a film on the magnetic sensor.