JPH02221960A - Photosensitive resin composition and photosensitive film - Google Patents
Photosensitive resin composition and photosensitive filmInfo
- Publication number
- JPH02221960A JPH02221960A JP4252789A JP4252789A JPH02221960A JP H02221960 A JPH02221960 A JP H02221960A JP 4252789 A JP4252789 A JP 4252789A JP 4252789 A JP4252789 A JP 4252789A JP H02221960 A JPH02221960 A JP H02221960A
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- meth
- film
- photosensitive resin
- acrylate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 28
- 150000001875 compounds Chemical class 0.000 claims abstract description 23
- 229920000642 polymer Polymers 0.000 claims abstract description 9
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 abstract description 21
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 abstract description 9
- 239000007795 chemical reaction product Substances 0.000 abstract description 4
- 239000000203 mixture Substances 0.000 abstract description 4
- 125000005442 diisocyanate group Chemical group 0.000 abstract description 3
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 abstract description 2
- 238000002156 mixing Methods 0.000 abstract description 2
- 239000003999 initiator Substances 0.000 abstract 1
- -1 methacryloyl Chemical group 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical class CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 206010034972 Photosensitivity reaction Diseases 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- 230000036211 photosensitivity Effects 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 229940107698 malachite green Drugs 0.000 description 2
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- ILBBNQMSDGAAPF-UHFFFAOYSA-N 1-(6-hydroxy-6-methylcyclohexa-2,4-dien-1-yl)propan-1-one Chemical compound CCC(=O)C1C=CC=CC1(C)O ILBBNQMSDGAAPF-UHFFFAOYSA-N 0.000 description 1
- RUFPHBVGCFYCNW-UHFFFAOYSA-N 1-naphthylamine Chemical compound C1=CC=C2C(N)=CC=CC2=C1 RUFPHBVGCFYCNW-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- CTWRMVAKUSJNBK-UHFFFAOYSA-N 2-(2,4-dimethoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 CTWRMVAKUSJNBK-UHFFFAOYSA-N 0.000 description 1
- RXAYEPUDXSKVHS-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-bis(3-methoxyphenyl)-1h-imidazole Chemical class COC1=CC=CC(C2=C(NC(=N2)C=2C(=CC=CC=2)Cl)C=2C=C(OC)C=CC=2)=C1 RXAYEPUDXSKVHS-UHFFFAOYSA-N 0.000 description 1
- NSWNXQGJAPQOID-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-diphenyl-1h-imidazole Chemical class ClC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 NSWNXQGJAPQOID-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- SNFCQJAJPFWBDJ-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 SNFCQJAJPFWBDJ-UHFFFAOYSA-N 0.000 description 1
- GZYZPHPDKCTFFH-UHFFFAOYSA-N 2-(4-methylsulfanylphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(SC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 GZYZPHPDKCTFFH-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- BJEMXPVDXFSROA-UHFFFAOYSA-N 3-butylbenzene-1,2-diol Chemical compound CCCCC1=CC=CC(O)=C1O BJEMXPVDXFSROA-UHFFFAOYSA-N 0.000 description 1
- MECNWXGGNCJFQJ-UHFFFAOYSA-N 3-piperidin-1-ylpropane-1,2-diol Chemical compound OCC(O)CN1CCCCC1 MECNWXGGNCJFQJ-UHFFFAOYSA-N 0.000 description 1
- IHZXTIBMKNSJCJ-UHFFFAOYSA-N 3-{[(4-{[4-(dimethylamino)phenyl](4-{ethyl[(3-sulfophenyl)methyl]amino}phenyl)methylidene}cyclohexa-2,5-dien-1-ylidene)(ethyl)azaniumyl]methyl}benzene-1-sulfonate Chemical compound C=1C=C(C(=C2C=CC(C=C2)=[N+](C)C)C=2C=CC(=CC=2)N(CC)CC=2C=C(C=CC=2)S([O-])(=O)=O)C=CC=1N(CC)CC1=CC=CC(S(O)(=O)=O)=C1 IHZXTIBMKNSJCJ-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- JPIYZTWMUGTEHX-UHFFFAOYSA-N auramine O free base Chemical compound C1=CC(N(C)C)=CC=C1C(=N)C1=CC=C(N(C)C)C=C1 JPIYZTWMUGTEHX-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- GPKUICFDWYEPTK-UHFFFAOYSA-N methoxycyclohexatriene Chemical group COC1=CC=C=C[CH]1 GPKUICFDWYEPTK-UHFFFAOYSA-N 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
- 229940012189 methyl orange Drugs 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920005650 polypropylene glycol diacrylate Polymers 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 150000007934 α,β-unsaturated carboxylic acids Chemical class 0.000 description 1
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は感光性樹脂組成物に関し、さらに詳しくは光硬
化部の剥離時間を短縮でき、光硬化部が剥離液に可溶で
ある新規な感光性樹脂組成物およびこれを用いた感光性
フィルムに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a photosensitive resin composition, and more specifically, to a novel photosensitive resin composition that can shorten the peeling time of a photocured part and in which the photocured part is soluble in a stripping liquid. The present invention relates to a photosensitive resin composition and a photosensitive film using the same.
従来、プリント回路板は、感光性樹脂組成物を銅基板上
にラミネートしてパターン露光した後、未露光部を現像
液で除去し、エツチングまたはメツキ処理を施してパタ
ーンを形成させた後、硬化部分を基板上から剥離除去す
る方法によって製造されている。Conventionally, printed circuit boards are produced by laminating a photosensitive resin composition onto a copper substrate, exposing it to light in a pattern, removing the unexposed areas with a developer, performing etching or plating to form a pattern, and then curing. It is manufactured by a method in which parts are peeled off and removed from the substrate.
硬化膜の剥離は、通常、自動剥離機で行われているが、
剥離片が大きいと剥離片が剥離機のロールに絡まり著し
く作業性が低下し、また微細な剥離片では剥離片を濾過
によって除去することができず、清浄な基板上に再付着
することがある。従って、剥離片は剥離液に溶解するも
のが望ましい。Peeling of the cured film is usually done using an automatic peeling machine, but
If the peeled pieces are large, they will become entangled with the roll of the peeling machine, significantly reducing work efficiency, and if the peeled pieces are too small, they may not be removed by filtration and may re-adhere to the clean substrate. . Therefore, it is desirable that the peeling piece is soluble in the peeling solution.
しかしながら、アルカリ現像型感光性樹脂組成物の場合
、組成物の親水性が高いほど剥離時間は短縮され、剥離
片が溶解され易くなるが、レジストの形状や銅スルーホ
ールを保護するためのテンティング能力は、親水性が高
いほど悪くなる傾向にある。現状では、レジスト形状、
テンティング能力は良好であるが、剥離時間が長く、剥
離片が溶解しない、作業性の悪い剥離液を使用している
。However, in the case of an alkali-developable photosensitive resin composition, the higher the hydrophilicity of the composition, the shorter the peeling time is and the easier it is for peeling pieces to dissolve. The higher the hydrophilicity, the worse the ability tends to be. Currently, the resist shape,
Although the tenting ability is good, a stripping solution is used that takes a long time to strip, does not dissolve the strips, and has poor workability.
本発明の目的は、前記従来技術の問題点を解決し、良好
なレジスト形状およびテンティング能力を保持し、硬化
膜の剥離時間が短く、かつ剥離片が剥離液に溶解する、
剥離作業性に優れた感光性樹脂組成物およびこれを用い
た感光性フィルムを提供することにある。An object of the present invention is to solve the problems of the prior art, maintain good resist shape and tenting ability, shorten the peeling time of the cured film, and dissolve peeling pieces in the stripping solution.
An object of the present invention is to provide a photosensitive resin composition with excellent peelability and a photosensitive film using the same.
本発明者らは、前記課題について、鋭意研究の結果、特
定のエチレン性不飽和化合物を、カルボキシル基含有フ
ィルム性付与ポリマおよび光開始剤または光開始剤系に
添加して得られる特定の感光性樹脂組成物は、その硬化
膜の剥離時間が短く、かつ剥離片が剥離液に溶解される
ことを見出し、本発明に到達した。As a result of intensive research on the above-mentioned problem, the present inventors have found that specific photosensitivity obtained by adding a specific ethylenically unsaturated compound to a carboxyl group-containing film-like polymer and a photoinitiator or a photoinitiator system. The inventors have discovered that the cured film of the resin composition can be peeled off in a short time, and the peelable pieces can be dissolved in a peeling liquid, and the present invention has been achieved.
すなわち、本発明は、(a)一般弐四)R1
(ただし、式中、R+ 、R2およびR8は水素原子ま
たはメチル基、mおよびnはO〜3の整数を意味する)
で表わされる化合物、(b)分子内に少なくとも1つの
ウレタン結合と重合可能な二重結合とを有する化合物、
(C)カルボキシル基含有フィルム性付与ポリマおよび
(d)光開始剤または光開始剤系を含有する感光性樹脂
組成物であって、前記(a)および(ト))の総量が、
前記感光性樹脂組成物に用いられる重合可能な二重結合
を持つ化合物の総量100MW1部に対し、30〜10
0重量部である感光性樹脂組成物およびこの感光性樹脂
組成物層を基材フィルム上に形成してなる感光性フィル
ムに関する。That is, the present invention provides (a) General 24) R1 (wherein R+, R2 and R8 are hydrogen atoms or methyl groups, m and n are integers of O to 3)
(b) a compound having at least one urethane bond and a polymerizable double bond in the molecule;
(C) A photosensitive resin composition containing a carboxyl group-containing film-like polymer and (d) a photoinitiator or photoinitiator system, wherein the total amount of (a) and (g)) is
30 to 10 parts per 1 part of 100 MW of the total amount of the compound having a polymerizable double bond used in the photosensitive resin composition.
The present invention relates to a photosensitive resin composition containing 0 parts by weight and a photosensitive film formed by forming a layer of this photosensitive resin composition on a base film.
本発明に用いられる前記一般式(I)で表わされる化合
物(成分(a))としては、例えばβ−ヒドロキシエチ
ル−β1−(メタ)アクリロイル(メタアクリロイルま
たはアクリロイルを意味する、以下同じ)オキシエチル
フタレート、β−ヒドロキシエチル−β1−(メタ)ア
クリロイルオキシイソプロピルフタレート、β−ヒドロ
キシイソプロピル−β1−(メタ)アクリロイルオキシ
エチルイソプロピルフタレート、β−ヒドロキシ−3−
オキシベンチルーβ1−(メタ)アクリロイル−3−オ
キシペンチルフタレート、β−ヒドロキシ−3,6−シ
オキシノニルーβ1−(メタ)アクリロイル−3,6−
シオキシノニルフタレート等が挙げられる。これらの化
合物は単独でまたは2種以上併用して用いることができ
る。Examples of the compound (component (a)) represented by the general formula (I) used in the present invention include β-hydroxyethyl-β1-(meth)acryloyl (meaning methacryloyl or acryloyl, the same hereinafter) oxyethyl Phthalate, β-hydroxyethyl-β1-(meth)acryloyloxyisopropyl phthalate, β-hydroxyisopropyl-β1-(meth)acryloyloxyethylisopropyl phthalate, β-hydroxy-3-
Oxybenthyl β1-(meth)acryloyl-3-oxypentyl phthalate, β-hydroxy-3,6-cyoxynonyl-β1-(meth)acryloyl-3,6-
Examples include cyoxynonyl phthalate. These compounds can be used alone or in combination of two or more.
本発明に用いられる分子内に少なくとも1つのウレタン
結合と重合可能な二重結合とを有する化合物(成分(b
))としては、例えばトリレンジイソシアネートとアク
リル酸−2−ヒドロキシエチルから得られるウレタンア
クリレートのような、ジイソシアネ−1・と(メタ)ア
クリル酸エステル(メタクリル酸エステルまたはアクリ
ル酸エステルを意味する、以下同じ)との反応生成物;
2゜2.4−)リメチルへキサメチレンジイソシアネー
トとシクロヘキサンジメタツールとアクリル酸−2−ヒ
ドロキシエチルからなるウレタンアクリレートのような
、ジイソシアネートと(メタ)アクリル酸エステルとジ
オールの反応生成物;2゜2.4−)リメチルヘキサメ
チレントリイソシアネートとアリルアルコールとの反応
生成物のような、多価イソシアネートとアリル基を持つ
化合物などが挙げられる。Compounds having at least one urethane bond and a polymerizable double bond in the molecule used in the present invention (component (b)
)) include diisocyanate-1 and (meth)acrylic esters (meaning methacrylic esters or acrylic esters, hereinafter referred to as urethane acrylates obtained from tolylene diisocyanate and 2-hydroxyethyl acrylate). reaction product with the same);
2゜2.4-) Reaction products of diisocyanates, (meth)acrylic acid esters and diols, such as urethane acrylate consisting of limethylhexamethylene diisocyanate, cyclohexane dimetatool and 2-hydroxyethyl acrylate; 2゜Examples include compounds having a polyvalent isocyanate and an allyl group, such as a reaction product of 2.4-)limethylhexamethylene triisocyanate and allyl alcohol.
重合可能な二重結合を持つ化合物として、上記した化合
物の他に、例えば多価アルコールにα。In addition to the compounds mentioned above, examples of compounds with polymerizable double bonds include polyhydric alcohols such as α.
β−不飽和カルボン酸を付加して得られる化合物、例え
ばトリメチロールプロパンジ(メタ)アクリレート、ト
リメチロールプロパントリ (メタ〉アクリレート、テ
トラメチロールメタントリ (メタ)アクリレート、テ
トラメチロールメタンテトラ(メタ)アクリレート、ジ
ペンタエリスリトールペンタ(メタ)アクリレート、ジ
ペンタエリスリトールヘキサ(メタ)アクリレート、ポ
リエチレングリコールジアクリレート、トリメチロール
プロパンエトキシテトラアクリレート等;グリシジル基
含有化合物にα、β−不飽和カルボン酸を付加して得ら
れる化合物、例えばトリメチロールプロパントリグリシ
ジルエーテルトリアクリレート、ビスフェノールAジグ
リシジルエーテルジ(メタ)アクリレート等;多価カル
ボン酸、例えば無水マレイン酸等と水酸基およびエチレ
ン性不飽和基を有する物質、例えばβ−ヒドロキシエヂ
ル(メタ)アクリレート等とのエステル化物;アクリル
酸またはメタクリル酸のアルキルエステル、例えば(メ
タ)アクリル酸メチル、(メタ)アクリル酸エチル、(
メタ)アクリル酸ブチル、(メタ)アクリル酸−2−エ
チルヘキシルなどを用いることができる。これらの化合
物は単独で用いても2種以上を併用してもよい。Compounds obtained by addition of β-unsaturated carboxylic acids, such as trimethylolpropane di(meth)acrylate, trimethylolpropane tri(meth)acrylate, tetramethylolmethanetri(meth)acrylate, tetramethylolmethanetetra(meth)acrylate , dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, polyethylene glycol diacrylate, trimethylolpropane ethoxytetraacrylate, etc.; obtained by adding α,β-unsaturated carboxylic acid to a glycidyl group-containing compound. compounds, such as trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether di(meth)acrylate, etc.; polycarboxylic acids, such as maleic anhydride, and substances having hydroxyl groups and ethylenically unsaturated groups, such as β- Esterified products with hydroxyedyl (meth)acrylate, etc.; alkyl esters of acrylic acid or methacrylic acid, such as methyl (meth)acrylate, ethyl (meth)acrylate, (
Butyl meth)acrylate, 2-ethylhexyl (meth)acrylate, etc. can be used. These compounds may be used alone or in combination of two or more.
本発明における前記成分(a)および(b)の使用量は
、その総量が組成物に用いられる重合可能な二重結合を
持つ化合物の総1100重量部に対して30〜100重
量部、好ましくは50〜80重量部となるように用いら
れる。この量が30重量部未満では剥離時間が長く、剥
離片が剥離液に溶解しなくなる。また成分(a)と成分
(b)の使用割合は、重量比で成分(a):成分(b)
が1 : 10〜10 : 1(7)範囲が好ましい。The amount of components (a) and (b) used in the present invention is 30 to 100 parts by weight, preferably 30 to 100 parts by weight, based on a total of 1100 parts by weight of the compound having a polymerizable double bond used in the composition. It is used in an amount of 50 to 80 parts by weight. If this amount is less than 30 parts by weight, the peeling time will be long and the peeling pieces will not dissolve in the stripping solution. In addition, the usage ratio of component (a) and component (b) is component (a):component (b) in weight ratio.
is preferably in the range of 1:10 to 10:1(7).
本発明に用いられるカルボキシル基含有フィルl、性付
与ポリマ(成分(C))としては、例えば(メタ)アク
リル酸アルキルエステルと(メタ)アクリル酸との共重
合体、(メタ)アクリル酸アルキルエステルと(メタ)
アクリル酸とこれらと共重合し得るビニルモノマとの共
重合体等が挙げられる。前記(メタ)アクリル酸アルキ
ルエステルとしては、例えば(メタ)アクリル酸メチル
、(メタ)アクリル酸エチル、(メタ)アクリル酸ブチ
ル、(メタ)アクリル酸−2−エチルヘキシル等が挙げ
られる。また前記(メタ)アクリル酸アルキルエステル
および(メタ)アクリル酸と共重合し得るビニルモノマ
としては、例えば(メタ)アクリル酸テトラヒドロフル
フリル、(メタ)アクリル酸ジメチルエチル、(メタ)
アクリル酸ジエチル、メタクリル酸グリシジル、2,2
.2−トリフルオロエチル(メタ)アクリレート、2,
2゜3.3−テトラフルオロプロピル(メタ)アクリレ
ートアクリルアミド、ジアセトンアクリルアミド、スチ
レン、ビニルトルエン等が挙げられる。The carboxyl group-containing film l used in the present invention and the property-imparting polymer (component (C)) include, for example, a copolymer of a (meth)acrylic acid alkyl ester and (meth)acrylic acid, and a (meth)acrylic acid alkyl ester. and (meta)
Examples include copolymers of acrylic acid and vinyl monomers that can be copolymerized with these. Examples of the (meth)acrylic acid alkyl ester include methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, and 2-ethylhexyl (meth)acrylate. Examples of vinyl monomers copolymerizable with the (meth)acrylic acid alkyl ester and (meth)acrylic acid include tetrahydrofurfuryl (meth)acrylate, dimethylethyl (meth)acrylate, and (meth)acrylate.
Diethyl acrylate, glycidyl methacrylate, 2,2
.. 2-trifluoroethyl (meth)acrylate, 2,
Examples include 2゜3.3-tetrafluoropropyl (meth)acrylate acrylamide, diacetone acrylamide, styrene, vinyltoluene and the like.
該成分(C)の使用によって塗膜性や得られる硬化物の
膜強度が向上する。その使用量は重合可能な二重結合を
持つ化合物の総1100重量部に対し50〜300重量
部が好ましい。The use of component (C) improves coating properties and the film strength of the resulting cured product. The amount used is preferably 50 to 300 parts by weight based on a total of 1100 parts by weight of the compound having a polymerizable double bond.
本発明に用いられる光開始剤または光開始剤系化合物(
成分(d))としては、例えばベンゾフェノン、N、N
”−テトラメチル−4,41−ジアミノベンゾフェノン
(ミヒラーケトン)、N、N’−テトラエチル−4,4
′−ジアミノベンゾフェノン、4−メトキシ−4°−ジ
メチルアミノベンゾフェノン、2−エチルアントラキノ
ン、フェナントレンキノン等の芳香族ケトン、ベンゾイ
ンメチルエーテル、ベンゾインエチルエーテル、ベンゾ
インフェニルエーテル等のベンゾインエーテル、ベンジ
ルジメチルケタール、ベンジルジエチルケタール等のベ
ンジルケタール、メチルベンゾイン、エチルベンゾイン
等のベンゾイン、2−(o−クロロフェニル)−4,5
−ジフェニルイミダゾール二量体、2−(o−クロロフ
ェニル)−4,5−ジ(m−メトキシフェニル)イミダ
ゾールニ量体、2−(o−フルオロフェニル)−4,5
−ジフェニルイミダゾール二量体、2−(O−メトキシ
フェニル)−4,5−ジフェニルイミダゾール二量体、
2−(p−メトキシフェニル)−4,5−ジフェニルイ
ミダゾール二量体、2,4−ジ(P−メトキシフェニル
)−5−フヱニルイミダゾールニ量体、2−(2,4−
ジメトキシフェニル)−4,5−ジフェニルイミダゾー
ル二量体、2−(p−メチルメルカプトフェニル)−4
,5−ジフェニルイミダゾールニ量体等の2.4.5−
トリアリールイミダゾールニ量体などが挙げられる。そ
の使用量は重量比で重合可能な二重結合を持つ化合物の
総量100!it部に対し0.1〜50重量部が好まし
い。Photoinitiator or photoinitiator-based compound used in the present invention (
Component (d)) includes, for example, benzophenone, N, N
"-Tetramethyl-4,41-diaminobenzophenone (Michler's ketone), N,N'-tetraethyl-4,4
Aromatic ketones such as '-diaminobenzophenone, 4-methoxy-4°-dimethylaminobenzophenone, 2-ethylanthraquinone, and phenanthrenequinone, benzoin ethers such as benzoin methyl ether, benzoin ethyl ether, and benzoin phenyl ether, benzyl dimethyl ketal, benzyl Benzyl ketal such as diethyl ketal, benzoin such as methylbenzoin, ethylbenzoin, 2-(o-chlorophenyl)-4,5
-diphenylimidazole dimer, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl)-4,5
-diphenylimidazole dimer, 2-(O-methoxyphenyl)-4,5-diphenylimidazole dimer,
2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2,4-di(P-methoxyphenyl)-5-phenylimidazole dimer, 2-(2,4-
dimethoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methylmercaptophenyl)-4
, 5-diphenylimidazole dimer, etc.
Examples include triaryl imidazole dimer. The amount used is the total amount of compounds with polymerizable double bonds by weight: 100! It is preferably 0.1 to 50 parts by weight based on it part.
本発明における感光性樹脂組成物には、例えばp−メト
キシフェノール、ハイドロキノン、ピロガロール、ナフ
チルアミン、フェノチアジン、む−ブチルカテコール等
の熱重合抑制剤を含有させることができる。The photosensitive resin composition of the present invention can contain a thermal polymerization inhibitor such as p-methoxyphenol, hydroquinone, pyrogallol, naphthylamine, phenothiazine, and butylcatechol.
また本発明の感光性樹脂組成物には、染料、顔料等の着
色剤を含有させてもよい。着色剤としては、例えばツク
シン、オーラミン塩基、クリスタルバイオレット、ビク
トリアピュアブルー、マラカイトグリーン、メチルオレ
ンジ、アッシドバイオレットRRH等が用いられる。さ
らに可塑剤、接着促進剤、タルク等を添加することもで
きる。The photosensitive resin composition of the present invention may also contain colorants such as dyes and pigments. As the coloring agent, for example, Tsukusin, Auramine Base, Crystal Violet, Victoria Pure Blue, Malachite Green, Methyl Orange, Acid Violet RRH, etc. are used. Furthermore, plasticizers, adhesion promoters, talc, etc. can also be added.
本発明の感光性樹脂組成物は、前記各成分を、例えばア
セトン、メチルエチルケトン、メチルイソブチルケトン
、メチルセロソルブ、エチルセロソルブ、クロロホルム
、塩化メチレン、メチルアルコニル、エチルアルコール
、トルエン等を用いて溶解、混合させることによって均
一な溶液状として用いることができる。該溶液状とした
感光性樹脂組成物は、例えば銅板等の基板に塗布し、乾
燥した後、活性光で露光して光硬化させて用いることが
できる。また前記溶液状の組成物をポリエチレンテレフ
タレート等の基材フィルム上に塗布、乾燥して感光性樹
脂組成物層を形成し、得られた感光性フィルムを基板上
に積層し、光硬化させて用いることもできる。光硬化さ
せる際に用いられる活性光線の光源としては、波長30
0〜450nmの光を発するもの、例えば水銀蒸気アー
ク、カーボンアーク、キセノンアーク等が用いられる。In the photosensitive resin composition of the present invention, the above-mentioned components are dissolved and mixed using, for example, acetone, methyl ethyl ketone, methyl isobutyl ketone, methyl cellosolve, ethyl cellosolve, chloroform, methylene chloride, methylalconyl, ethyl alcohol, toluene, etc. By doing so, it can be used as a uniform solution. The photosensitive resin composition in the form of a solution can be used by applying it to a substrate such as a copper plate, drying it, and then exposing it to actinic light to photocure it. Alternatively, the composition in solution form is applied onto a base film such as polyethylene terephthalate and dried to form a photosensitive resin composition layer, and the resulting photosensitive film is laminated on a substrate and photocured for use. You can also do that. The active light source used for photocuring has a wavelength of 30
A device that emits light of 0 to 450 nm, such as a mercury vapor arc, a carbon arc, or a xenon arc, is used.
以下、本発明を実施例により説明する。 The present invention will be explained below with reference to Examples.
実施例1〜3および比較例1〜3
カルボキシル基含有フィルム性付与ポリマ(成分(C)
)として、メタクリル酸/メタクリル酸メチル/メタク
リル酸ブチル/アクリル酸−2−エチルヘキシル共重合
体(重量比2515015/20、重量平均分子量!=
i8万)の40重量%メチルセロソルブ/トルエン(重
N比6/4 ) I液150g(ポリマ成分60g)を
用い、この溶液にマラカイトグリーン0.03g、ロイ
コクリスタルバイオレット1.og、トリブロモメチル
フェニルスルホン0.5g、メチルエチルケトン10g
、)ルエン20gおよびメチルアルコール5.0gを配
合して溶液Aを得た。Examples 1 to 3 and Comparative Examples 1 to 3 Carboxyl group-containing film properties imparting polymer (component (C)
) as methacrylic acid/methyl methacrylate/butyl methacrylate/2-ethylhexyl acrylate copolymer (weight ratio 2515015/20, weight average molecular weight!=
Using 150 g (polymer component 60 g) of 40% by weight methyl cellosolve/toluene (heavy N ratio 6/4) I solution (polymer component 60 g), 0.03 g of malachite green and 1.0 g of leuco crystal violet were added to this solution. og, tribromomethylphenylsulfone 0.5g, methyl ethyl ketone 10g
,) Solution A was obtained by blending 20 g of toluene and 5.0 g of methyl alcohol.
この溶液Aに、第1表に示す配合割合(重量部)で重合
可能な二重結合を持つ化合物(成分(a)、(b)、そ
の他)および光開始剤または光開始剤系(成分(d))
を溶解させて感光性樹脂組成物の溶液* l
*2
*3
*4
*5
*6
β−ヒドロキシエチル−β1−アクリロイルオキシエチ
ルフタレート
共栄社油脂社製、一般式(I)において、m=n=L
Rt % RzおよびR,=水素原子
シクロヘキサンジメタツール/トリメチルへキサメチレ
ンジイソシアネート/アクリル酸−2−ヒドロキシエチ
ルを1/2/2のモル比で反応させたウレタンアクリレ
ート
2.2−ビス(4−メタクリロキシペンタエトキシフェ
ニル)プロパン
新中村化学工業社製
トリメチロールプロパントリアクリレート新中村化学工
業社製
ポリプロピレングリコールジアクリレート(新中村化学
工業社製)
トリメチロールプロパンエトキシトリアクリレート
二洋化成工業社製
*7 ベンジルジメチルケクール
チバガイギー社製
次いで、この溶液を25μm厚のポリエチレンテレフタ
レートフィルム上に均一に塗布L、100°Cの熱風対
流式乾燥機で約10分間乾燥し、感光性フィルムを得た
。感光性樹脂組成物量の乾燥後の膜厚は50μmであっ
た。To this solution A, compounds having a polymerizable double bond (components (a), (b), and others) and a photoinitiator or a photoinitiator system (component (component) d))
A solution of the photosensitive resin composition *l *2 *3 *4 *5 *6 β-hydroxyethyl-β1-acryloyloxyethyl phthalate manufactured by Kyoeisha Yushi Co., Ltd., in the general formula (I), m=n= L
Rt % Rz and R, = hydrogen atom Urethane acrylate 2.2-bis(4- (methacryloxypentaethoxyphenyl)propane (manufactured by Shin Nakamura Chemical Co., Ltd.) Trimethylolpropane triacrylate (manufactured by Shin Nakamura Chemical Co., Ltd.) Polypropylene glycol diacrylate (manufactured by Shin Nakamura Chemical Co., Ltd.) Trimethylolpropane ethoxy triacrylate (manufactured by Niyo Kasei Kogyo Co., Ltd.) *7 Benzyl Dimethyl Co., Ltd. (manufactured by Ciba Geigy) Next, this solution was uniformly applied onto a 25 μm thick polyethylene terephthalate film and dried for about 10 minutes in a hot air convection dryer at 100° C. to obtain a photosensitive film. The film thickness of the photosensitive resin composition after drying was 50 μm.
一方、銅はく(厚さ35μm)を両面に積層したガラス
エポキシ材である銅張積層板(日立化成工業社製、MC
L−E−61)の銅表面を、スコッチプライトバフロー
ル(住人スリーエム製、登録商標)で研磨し、水洗し、
空気流で乾燥し、得られた銅張積N仮を60°Cに加温
し、その銅面上に前記感光性樹脂組成物層を110℃に
加熱しながらラミネートした。On the other hand, a copper-clad laminate (manufactured by Hitachi Chemical Co., Ltd., MC
The copper surface of L-E-61) was polished with Scotch Prite Buff Roll (manufactured by Jujutsu 3M, registered trademark), washed with water,
The resulting copper-clad N temporary was dried with an air stream and heated to 60°C, and the photosensitive resin composition layer was laminated on the copper surface while heating to 110°C.
次いでこのようにして得られた基板にネガフィルムを使
用して3KW高圧水銀灯(オーク製作所社製、HMW−
201B)で150mJ/cdの露光を行なった。この
際光感度を評価できるように、光透過量が段階的に少な
くなるように作られたネガフィルム(光学密度0.05
を1段目とし、1段ごとに光学密度が0.15ずつ増加
するステップタブレット)を用いた。Next, using a negative film on the substrate thus obtained, a 3KW high pressure mercury lamp (manufactured by Oak Seisakusho Co., Ltd., HMW-
201B), exposure was performed at 150 mJ/cd. At this time, in order to evaluate the photosensitivity, a negative film (optical density 0.05
was used as the first step, and a step tablet in which the optical density increased by 0.15 with each step was used.
次いでポリエチレンテレフタレートフィルムを除去し、
30°Cで1uit%炭酸ナトリウム水溶液を50〜1
50秒間スプレーして未露光部を除去した。銅張積層板
上に形成された光硬化膜のステップタブレットの段数を
測定し、感光性樹脂組成物の光感度を評価し、その結果
を第2表に示した。Then remove the polyethylene terephthalate film,
At 30°C, add 1 uit% sodium carbonate aqueous solution to 50-1
The unexposed areas were removed by spraying for 50 seconds. The number of step tablets of the photocured film formed on the copper-clad laminate was measured to evaluate the photosensitivity of the photosensitive resin composition, and the results are shown in Table 2.
ステップタブレットの段数が高いほど光感度が高いこと
を示す。The higher the number of steps on the step tablet, the higher the photosensitivity.
次いで45°Cの3重量%水酸化ナトリウム水溶液で処
理し、光硬化部分を剥離してその剥離終了時間を測定し
、その結果を第2表に示した。また剥離片が3重量%水
酸化ナトリウム水溶液に0.4rrr/lとなるように
浸漬し、40℃の恒温槽に放置して12時間毎に剥離片
の様子を肉眼で観察し、剥離片が溶解した時間を求めた
。その結果を第2表に示す。またレジスト形状を走査型
電子顕微鏡(日立製作所S−500A)を用いて観察し
、レジストのサイドウオール空洞がない場合を○、ある
場合を×として評価し、その結果を第2表に示した。Next, it was treated with a 3% by weight aqueous sodium hydroxide solution at 45°C, the photocured portion was peeled off, and the time required to complete the peeling was measured.The results are shown in Table 2. In addition, the peeled piece was immersed in a 3% by weight sodium hydroxide aqueous solution at a concentration of 0.4 rrr/l, left in a constant temperature bath at 40°C, and the condition of the peeled piece was visually observed every 12 hours. The time for dissolution was determined. The results are shown in Table 2. The shape of the resist was also observed using a scanning electron microscope (Hitachi S-500A), and the case where there was no sidewall cavity in the resist was evaluated as ◯, and the case where there was sidewall cavity was evaluated as ×. The results are shown in Table 2.
またあらかじめ穴径2uuaの穴が1419穴おいてい
る銅張積層板上にも前述の方法でラミネート、露光、現
像を行ない、穴上のテント破れ数を目視〔発明の効果〕
本発明の感光性樹脂組成物およびこれより得られる感光
性フィルムによれば、良好なレジスト形状およびテンテ
ィング性を保持して硬化膜の剥離時間を短縮でき、剥離
片を剥離液に溶解させることができるため、剥離片の再
付着を防止し、作業性を改善することができる。Further, a copper clad laminate having 1,419 holes with a hole diameter of 2 uua in advance was laminated, exposed and developed using the above-described method, and the number of tent tears on the holes was visually observed. According to the resin composition and the photosensitive film obtained from the resin composition, it is possible to maintain good resist shape and tenting properties, shorten the peeling time of the cured film, and dissolve peelable pieces in the stripping liquid, so that peeling is easy. It is possible to prevent pieces from re-adhering and improve workability.
Claims (1)
子またはメチル基、mおよびnは0〜3の整数を意味す
る)で表わされる化合物、 (b)分子内に少なくとも1つのウレタン結合と重合可
能な二重結合とを有する化合物、 (c)カルボキシル基含有フィルム性付与ポリマおよび (d)光開始剤または光開始剤系を含有する感光性樹脂
組成物であって、前記(a)および(b)の総量が、前
記感光性樹脂組成物に用いられる重合可能な二重結合を
持つ化合物の総量100重量部に対し、30〜100重
量部である感光性樹脂組成物。 2、請求項1記載の感光性樹脂組成物層を基材フィルム
上に形成してなる感光性フィルム。[Claims] 1. (a) General formula (I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼(I) (However, in the formula, R_1, R_2 and R_3 are hydrogen atoms or methyl groups, m and n means an integer of 0 to 3), (b) a compound having at least one urethane bond and a polymerizable double bond in the molecule, (c) a carboxyl group-containing film-like polymer, and ( d) A photosensitive resin composition containing a photoinitiator or photoinitiator system, wherein the total amount of (a) and (b) is such that the total amount of polymerizable double bonds used in the photosensitive resin composition is The photosensitive resin composition contains 30 to 100 parts by weight based on 100 parts by weight of the total amount of compounds. 2. A photosensitive film comprising a layer of the photosensitive resin composition according to claim 1 formed on a base film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4252789A JPH02221960A (en) | 1989-02-22 | 1989-02-22 | Photosensitive resin composition and photosensitive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4252789A JPH02221960A (en) | 1989-02-22 | 1989-02-22 | Photosensitive resin composition and photosensitive film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02221960A true JPH02221960A (en) | 1990-09-04 |
Family
ID=12638550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4252789A Pending JPH02221960A (en) | 1989-02-22 | 1989-02-22 | Photosensitive resin composition and photosensitive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02221960A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010113349A (en) * | 2008-10-10 | 2010-05-20 | Asahi Kasei E-Materials Corp | Photosensitive resin composition |
-
1989
- 1989-02-22 JP JP4252789A patent/JPH02221960A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010113349A (en) * | 2008-10-10 | 2010-05-20 | Asahi Kasei E-Materials Corp | Photosensitive resin composition |
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