JPH02220404A - Manufacture of laminated ceramic varistor - Google Patents
Manufacture of laminated ceramic varistorInfo
- Publication number
- JPH02220404A JPH02220404A JP1039450A JP3945089A JPH02220404A JP H02220404 A JPH02220404 A JP H02220404A JP 1039450 A JP1039450 A JP 1039450A JP 3945089 A JP3945089 A JP 3945089A JP H02220404 A JPH02220404 A JP H02220404A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- varistor
- thin film
- laminated
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000843 powder Substances 0.000 claims abstract description 21
- 239000010409 thin film Substances 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 239000011230 binding agent Substances 0.000 claims abstract description 6
- 239000002002 slurry Substances 0.000 claims abstract description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052709 silver Inorganic materials 0.000 abstract description 5
- 239000004332 silver Substances 0.000 abstract description 5
- 238000010030 laminating Methods 0.000 abstract 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical group [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 229910000416 bismuth oxide Inorganic materials 0.000 description 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical group [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical class [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical class O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical class [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、積層方法を改良した積層セラミックバリスタ
の製造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a multilayer ceramic varistor using an improved lamination method.
酸化亜鉛を主成分とするセラミックバリスタは、その抵
抗値が印加電圧によって著しく変化し、良好な電流−電
圧非直線性を示す、このため、従来より、各種電子機器
のサージ吸収用、電圧の安定化素子として幅広く使用さ
れてきた。Ceramic varistors, whose main component is zinc oxide, have a resistance value that changes significantly depending on the applied voltage and exhibit good current-voltage nonlinearity.For this reason, they have traditionally been used for surge absorption and voltage stabilization in various electronic devices. It has been widely used as a chemical element.
最近では、機器の小型化、及び低電圧化が進み、これに
対応して小型で、低バリスタ電圧、高サージ耐量の特性
を有する積層セラミックバリスタが注目され、種々検討
されている。In recent years, devices have become smaller and lower in voltage, and in response to this trend, multilayer ceramic varistors that are compact, have low varistor voltage, and high surge resistance have attracted attention, and various studies have been conducted.
従来の積層セラミックバリスタは、例えば特開昭54−
106894号公報に記載されているように、焼結後に
焼結体を切断し、更に研磨して得られる素子は、もれ電
流の増加やαの低下がみられることから、以下のような
方法により製造されている。すなわち、焼結することに
より電圧非直線性を示す組成からなる仮焼粉末をドクタ
ーブレード法によりシート化し、この生シートに白金、
パラジウムなどの高融点金属からなる内部電極をスクリ
ーン印刷し、ついでこれを積層し、熱圧着後、所定形状
に切断する。これを空気中で焼結し、この焼結体の両端
に外部電極を焼き付けて積層セラミックバリスタを得て
いる。Conventional multilayer ceramic varistors are known, for example, from Japanese Patent Application Laid-Open No. 1986-
As described in Publication No. 106894, elements obtained by cutting the sintered body after sintering and further polishing exhibit an increase in leakage current and a decrease in α, so the following method is used: Manufactured by. That is, calcined powder having a composition that exhibits voltage nonlinearity when sintered is made into a sheet by the doctor blade method, and platinum, platinum,
Internal electrodes made of a high-melting point metal such as palladium are screen printed, then laminated, thermocompressed, and cut into a predetermined shape. This is sintered in air, and external electrodes are baked on both ends of this sintered body to obtain a multilayer ceramic varistor.
このように公知の積層セラミックバリスタの製法におい
ては内部電極を生シートの焼結と同時に形成するため、
焼結時に生シートが収縮し内部電極との間にひずみを生
じ、積層シート間でデラミネーシぢンが発生し、得られ
た素子は十分な性能を果たすことができないことがあっ
た。特に低バリスタ電圧を実現するためには、薄膜シー
トの成形が必須となるが、このシート成形体の収縮が問
題であった。また内部電極材料としては、高い焼結温度
で電極を焼付けるため高価な金、白金、パラジウムとい
った高融点金属を主成分とする必要があり積層セラミッ
クバリスタの製造コストを大幅に上げることになり、実
用化の上で大きな問題になっていた。In this way, in the known manufacturing method of multilayer ceramic varistors, the internal electrodes are formed at the same time as the raw sheet is sintered.
During sintering, the raw sheet shrinks, creating strain between the sheets and the internal electrodes, causing delamination between the laminated sheets, and the resulting device may not be able to provide sufficient performance. In particular, in order to achieve a low varistor voltage, it is essential to form a thin film sheet, but shrinkage of this sheet form has been a problem. Furthermore, as the internal electrode material is baked at a high sintering temperature, it is necessary to use expensive high-melting point metals such as gold, platinum, and palladium as the main component, which significantly increases the manufacturing cost of multilayer ceramic varistors. This was a major problem in practical application.
本発明者らは以上の如き従来技術の問題点を解決するた
めに鋭意研究を行った結果、本発明に到った。The present inventors conducted extensive research to solve the problems of the prior art as described above, and as a result, they arrived at the present invention.
本発明は、バリスタ特性を有する焼結セラミック微粉末
、ガラス粉末及び有機バインダーからなるスラリーをシ
ート状に成形した後、該シートと金属薄膜とを交互に積
層し、ついで熱処理することにより一体的に接合するこ
とを特徴とする積層セラミックバリスタの製造法に関す
る。In the present invention, a slurry made of sintered ceramic fine powder having varistor properties, glass powder, and an organic binder is formed into a sheet shape, and then the sheet and a metal thin film are alternately laminated and then heat-treated to form an integral structure. The present invention relates to a method for manufacturing a multilayer ceramic varistor characterized by bonding.
本発明に使用するバリスタ特性を有する焼結セラミック
微粉末は、例えば特開昭62−190801号公報に記
載されているような方法により製造されるものが好適に
使用される。すなわち酸化亜鉛の微粒子を700〜13
00°Cで焼成した後、焼結した酸化亜鉛を0.5〜5
0μmの粒子径に粉砕し、その酸化亜鉛微粉末に、酸化
マンガン等の添加物を0.0001〜10mo1χ添加
し、600〜1400°Cで焼成した後、粉砕分級して
得られる。その粒径は必要とするバリスタ電圧に応じて
適宜選択することができ、通常的1200°C度のもの
が好適に使用される。The sintered ceramic fine powder having varistor properties used in the present invention is preferably produced by the method described in, for example, Japanese Patent Application Laid-open No. 190801/1983. That is, fine particles of zinc oxide are 700 to 13
After firing at 00°C, the sintered zinc oxide
It is obtained by grinding to a particle size of 0 μm, adding 0.0001 to 10 mo1× of additives such as manganese oxide to the zinc oxide fine powder, baking at 600 to 1400° C., and then crushing and classifying. The particle size can be appropriately selected depending on the required varistor voltage, and a particle size of 1200° C. is preferably used.
ガラス粉末としては、シートと金属薄膜とを接合できる
ようなガラス組成であればよく、具体例としては、酸化
ビスマス、酸化ケイ素、酸化ホウ素からなるような組成
のガラスフリフトを挙げることができる。The glass powder may have any glass composition as long as it can bond the sheet and the metal thin film, and specific examples thereof include glass drift having a composition of bismuth oxide, silicon oxide, and boron oxide.
有機バインダーとしては、特に限定されないが、メチル
セルロース、エチルセルロース、ポリビニールアルコー
ル等を好適に挙げることができる。The organic binder is not particularly limited, but suitable examples include methylcellulose, ethylcellulose, and polyvinyl alcohol.
またバリスタ特性を有する焼結セラミック微粉末と、ガ
ラス粉末及び有機バインダーの使用割合は、特に限定さ
れないが焼結セラミック微粉末100重量部当たり一般
には10〜100重量部である。The proportion of the sintered ceramic fine powder having varistor properties, the glass powder, and the organic binder used is not particularly limited, but is generally 10 to 100 parts by weight per 100 parts by weight of the sintered ceramic fine powder.
金属薄膜としては、アルミニウム薄膜、銀薄膜w4薄膜
等を挙げることができる。金属薄膜の厚みは、特に限定
されないが10〜50μm###−1牛程度が好適であ
る。Examples of the metal thin film include an aluminum thin film, a silver thin film, and a w4 thin film. The thickness of the metal thin film is not particularly limited, but is preferably about 10 to 50 μm ###-1 mm.
本発明の製造法の一態様はつぎのとおりである。One embodiment of the production method of the present invention is as follows.
まず、バリスタ特性を有する焼結セラミック微粉末を調
製し、これにガラス粉末と有機バインダーとを加えペー
スト状とし、これをシート状に成形する。このシートと
金属薄膜とを交互に複数枚積層し、350〜600℃の
温度で熱処理を行うことにより接着する。ついで積層体
の端面に銀ペースト等の外部電極を塗布し、500〜6
00°C程度の温度で熱処理することにより容易に積層
セラミックバリスタを製造できる。First, sintered ceramic fine powder having varistor properties is prepared, glass powder and an organic binder are added to it to form a paste, and this is formed into a sheet. A plurality of these sheets and metal thin films are alternately laminated and bonded by heat treatment at a temperature of 350 to 600°C. Next, external electrodes such as silver paste are applied to the end faces of the laminate, and
A multilayer ceramic varistor can be easily manufactured by heat treatment at a temperature of about 0.000°C.
以下、第1図に示す一実施例を用いて本発明の積層セラ
ミックバリスタの製造法を詳述する。Hereinafter, a method for manufacturing a multilayer ceramic varistor of the present invention will be described in detail using an example shown in FIG.
第1図において、1はバリスタ特性を有する焼結セラミ
ック微粉末からなるシートである。2は内部電極の役割
をする金属薄膜である。3は積層化した時、内部電極2
の一端部と接続している外部電極である。In FIG. 1, 1 is a sheet made of sintered ceramic fine powder having varistor properties. 2 is a metal thin film that serves as an internal electrode. 3 is the internal electrode 2 when laminated.
This is an external electrode connected to one end of the .
実施例1
粒子径0.05〜1μmの酸化亜鉛粉末をペレットに成
形後、1200°Cで2時間焼成を行った後、粉砕、分
級し、粒子径1〜20μmの粒子を得た。Example 1 Zinc oxide powder with a particle size of 0.05 to 1 μm was molded into pellets, fired at 1200°C for 2 hours, and then crushed and classified to obtain particles with a particle size of 1 to 20 μm.
この酸化亜鉛粉末に、酸化ビスマス、酸化マンガン、酸
化コバルト、酸化アンチモン、酸化アルミニウムをそれ
ぞれ、0.0001〜10+solχ添加、混合し、こ
れを800〜1400 ’Cで焼成した後、軽く粉砕し
て、2〜20μmの粒径となるように分級し、バリスタ
特性を有する焼結セラミック微粉末を得た。To this zinc oxide powder, bismuth oxide, manganese oxide, cobalt oxide, antimony oxide, and aluminum oxide are added and mixed at 0.0001 to 10+solχ, respectively, and after firing at 800 to 1400'C, it is lightly pulverized. The particles were classified to have a particle size of 2 to 20 μm to obtain a sintered ceramic fine powder having varistor properties.
この焼結セラミック微粉末100重量部に対してガラス
フリット50mf部、エチルセルロース5重量部、ブチ
ルカルピトール40重量部をそれぞれ加えて混合しスラ
リー状としシート状に成形した。To 100 parts by weight of this sintered ceramic fine powder, 50 mf parts of glass frit, 5 parts by weight of ethyl cellulose, and 40 parts by weight of butyl calpitol were added and mixed to form a slurry and formed into a sheet.
そして、このシート1と15μmのアルミニウム薄膜2
とを交互に複数枚積層したのち圧着し、450°Cの温
度で熱処理を行った0次に第2図の示すように積層体の
端面に銀ペーストを塗布し、外部電極3を形成後、大気
中、500°Cの温度熱処理して積層セラミックバリス
タを得た。このバリスタ特性を有する焼結セラミック微
粒子のシートlのINの厚みは20μmであった。Then, this sheet 1 and a 15 μm aluminum thin film 2
A plurality of layers were alternately laminated and then crimped and heat treated at a temperature of 450°C. Next, as shown in FIG. 2, silver paste was applied to the end face of the laminate to form external electrodes 3. A multilayer ceramic varistor was obtained by heat treatment at a temperature of 500°C in the atmosphere. The IN thickness of the sheet 1 of sintered ceramic fine particles having varistor properties was 20 μm.
このようにして製造した3層構造の積層セラミックバリ
スタのバリスタ電圧(1mAの電流が流れる電圧値、V
1 mA)は、IOVであり、またこのときの非直線
係数は20であった。Varistor voltage (voltage value at which 1 mA of current flows, V
1 mA) was the IOV, and the nonlinear coefficient at this time was 20.
本発明によると、バリスタ特性を示す焼結セラミック微
粉末を使用し、低い熱処理温度で積層セラミンクバリス
タを製造するため、従来の製造法におけるような内部電
極と生シートとを同時に焼成することによるひずみが生
じることがなく、十分な性能を有する素子を得ることが
でき、特に薄膜シートの場合のような低バリスタ電圧を
有する積層セラミックバリスタを好適に製造することが
できる。また内部電極材料としてアルミニウムや銀のよ
うな材料が使用可能であり、低コスト化に大いに貢献で
きる。According to the present invention, in order to manufacture a laminated ceramic varistor using a sintered ceramic fine powder exhibiting varistor properties and at a low heat treatment temperature, it is possible to manufacture a laminated ceramic varistor at a low heat treatment temperature by simultaneously firing the inner electrode and the green sheet as in the conventional manufacturing method. It is possible to obtain an element with sufficient performance without causing distortion, and in particular, it is possible to suitably manufacture a multilayer ceramic varistor having a low varistor voltage as in the case of a thin film sheet. Furthermore, materials such as aluminum and silver can be used as internal electrode materials, which can greatly contribute to cost reduction.
第1図は本発明に係るバリスタ特性を有する焼結セラミ
ック微粉末のシートと金属薄膜とを積層化し、その端面
に外部電極を塗布したときの積層セラミックバリスタの
断面図である。
1:バリスタ特性を有する焼結セラミック微粉末のシー
ト、2:金属薄膜、3:外部電極特許出願人 宇部興
産株式会社FIG. 1 is a sectional view of a laminated ceramic varistor according to the present invention, in which a sheet of fine sintered ceramic powder having varistor properties and a thin metal film are laminated, and an external electrode is applied to the end face of the laminated sheet. 1: Sheet of sintered ceramic fine powder with varistor properties, 2: Metal thin film, 3: External electrode patent applicant Ube Industries, Ltd.
Claims (1)
粉末及び有機バインダーからなるスラリーをシート状に
成形した後、該シートと金属薄膜とを交互に積層し、つ
いで熱処理することにより一体的に接合することを特徴
とする積層セラミックバリスタの製造法。After forming a slurry consisting of a sintered ceramic fine powder having varistor properties, a glass powder, and an organic binder into a sheet shape, the sheet and a metal thin film are alternately laminated and then integrally bonded by heat treatment. Characteristic manufacturing method for multilayer ceramic varistors.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1039450A JPH02220404A (en) | 1989-02-21 | 1989-02-21 | Manufacture of laminated ceramic varistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1039450A JPH02220404A (en) | 1989-02-21 | 1989-02-21 | Manufacture of laminated ceramic varistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02220404A true JPH02220404A (en) | 1990-09-03 |
Family
ID=12553370
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1039450A Pending JPH02220404A (en) | 1989-02-21 | 1989-02-21 | Manufacture of laminated ceramic varistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02220404A (en) |
-
1989
- 1989-02-21 JP JP1039450A patent/JPH02220404A/en active Pending
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