JPH0221742B2 - - Google Patents
Info
- Publication number
- JPH0221742B2 JPH0221742B2 JP57095142A JP9514282A JPH0221742B2 JP H0221742 B2 JPH0221742 B2 JP H0221742B2 JP 57095142 A JP57095142 A JP 57095142A JP 9514282 A JP9514282 A JP 9514282A JP H0221742 B2 JPH0221742 B2 JP H0221742B2
- Authority
- JP
- Japan
- Prior art keywords
- aerosol
- filter
- air filter
- test
- leak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000443 aerosol Substances 0.000 claims description 41
- 238000012360 testing method Methods 0.000 claims description 29
- 239000006185 dispersion Substances 0.000 claims description 14
- 238000011144 upstream manufacturing Methods 0.000 claims description 9
- 239000000523 sample Substances 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010998 test method Methods 0.000 claims description 3
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Chemical compound CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/18—Testing of filters, filter elements, sealings
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
【発明の詳細な説明】
本発明は、エアフイルタを各種のクリーンルー
ムや空調システムに取り付けた後、その安全性を
チエツクするためのリーク試験方法、及びそのリ
ーク試験を実施するために使用する装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a leak test method for checking the safety of air filters after they are installed in various clean rooms and air conditioning systems, and an apparatus used to perform the leak test. It is.
従来から、空気中の塵埃が問題となる電子工
業、精密機械工業などクリーンルームや空気中の
細菌、微生物が問題となる手術室、ICU（集中治
療室）などのバイオクリーンルーム、並びにバイ
オハザード（生物災害）管理施設及び食品、医薬
品工場などの空調システムには、完全に無塵、無
菌化した空気を供給するために超高性能エアフイ
ルタ（HEPAフイルタ）を装着した吹出口が備
え付けられている。 Traditionally, airborne dust has been a problem in clean rooms such as electronics and precision machinery industries, operating rooms and ICUs (intensive care units) and other clean rooms where airborne bacteria and microorganisms have been a problem, as well as biohazard (biological disaster) ) Air conditioning systems in administrative facilities, food and pharmaceutical factories, etc. are equipped with outlets equipped with ultra-high performance air filters (HEPA filters) to supply completely dust-free and sterile air.
上記クリーンルーム、バイオクリーンルームな
どに使用されるHEPAフイルタ本体は、米国軍
事規格MIL−STD−282により規定された
Q107HotDOPテスターにより、単分散0.3μmの粒
子径を持つDOP（Di Octyl Phthalate）スモーク
をHEPAフイルタに通過させることによつて、
フイルタの効率を全数検査の後出荷されている。 The HEPA filter body used in the above clean rooms, bio-clean rooms, etc. is regulated by the U.S. military standard MIL-STD-282.
By passing DOP (Di Octyl Phthalate) smoke with a monodisperse particle size of 0.3 μm through a HEPA filter using the Q107HotDOP tester,
The filters are shipped after 100% inspection for efficiency.
しかしHEPAフイルタは、生荷後の運搬、輪
送時や吹出口に取り付ける際に、材部を損傷す
る危険もあり、又HEPAフイルタと吹出口取付
け部との間のガスケツト締め付け不均等などによ
るフイルタの取付け不具合、或いはガスケツトの
経時変化によるリーク（漏洩）の可能性があつ
た。 However, with HEPA filters, there is a risk of damage to the material when transporting raw cargo, transporting it by wheel, or when installing it at the outlet, and there is also a risk of damage to the material due to uneven tightening of the gasket between the HEPA filter and the outlet mounting part. There was a possibility of a leak due to an installation failure or a change in the gasket over time.
従つて、完成したクリーンルーム、バイオクリ
ーンルームなどの清浄空間は、現場リークテスト
を実施してリークの有無を確認後納入されてい
る。 Therefore, completed clean rooms, bio-clean rooms, and other clean spaces are delivered after conducting on-site leak tests to confirm the presence or absence of leaks.
又、米国FDA（食品医薬局）施行のGLP規則
（Good Laboratory Practice Regulations）に
よれば、バイオクリーンルームなどの施設の安全
性を確保するため定期的なリークテストが義務づ
けられており、日本でもこれが準用されている。 Additionally, according to the Good Laboratory Practice Regulations (GLP) enforced by the U.S. FDA (Food and Drug Administration), periodic leak tests are required to ensure the safety of facilities such as bioclean rooms, and this is also applied in Japan. has been done.
リークテストは、現状では第６図に示した様に
吹出口１４ａ，１４ｂ，１４ｃ……ごとのリーク
テストができる様になつておらず、送風ダクト１
５にリークテスト用のエアロゾル、例えばCold
DOP粒子をエアロゾル発生機１６で発生させ、
送風機１７により一定圧力の圧縮空気を導入して
行なつている。 Currently, it is not possible to perform a leak test for each outlet 14a, 14b, 14c, etc., as shown in Figure 6.
5. Aerosol for leak test, e.g. Cold
Generate DOP particles with an aerosol generator 16,
This is done by introducing compressed air at a constant pressure using a blower 17.
しかし、この方法では被測定吹出口たとえば図
面に示す吹出口１４ａ以外の吹出口１４ｂ，１４
ｃのフイルタにもエアロゾルが流れ、吹出口が多
数配置されたクリーンルーム、バイオクリーンル
ームなどではリークテスト済みのフイルタに何回
もエアロゾルを流すことになるので、フイルタは
Cold DOPエアロゾルなどの試験エアロゾルで汚
染され、フイルタの寿命が短縮することになる。 However, in this method, for example, the air outlets 14b and 14 other than the air outlet 14a shown in the drawings are
Aerosol also flows through the filter c, and in clean rooms and bio-clean rooms with many air outlets, aerosol is passed through the leak-tested filter many times, so the filter
Contamination with test aerosols, such as Cold DOP aerosols, will shorten filter life.
また、試験用エアロゾルの発生量も多量に必要
で、大型のエアロゾル発生機が必要となる。 Furthermore, a large amount of test aerosol is required to be generated, and a large aerosol generator is required.
そこで、本発明は上記従来例の難点を解消した
リーク試験方法及びその装置を提供するものであ
り、その目的とするところは、リークテスト用の
エアロゾル投入分散部とエアロゾル濃度測定部と
をフイルタケーシングに内蔵させることにより、
吹出口ごとに現場リークテストを行ない、容易に
目的とする試験フイルタ及び吹出口のみのリーク
テストができる様にすると共に、試験用エアロゾ
ルの発生量を低減させることにある。 Therefore, the present invention provides a leak test method and device that solve the above-mentioned problems of the conventional example.The purpose of the present invention is to combine the aerosol injection dispersion section and the aerosol concentration measurement section for leak testing into a filter casing. By incorporating it into
The purpose is to conduct an on-site leak test for each outlet, so that it is easy to perform a leak test on only the target test filter and outlet, and to reduce the amount of test aerosol generated.
以下、本発明の詳細を実施例として示した図面
に従つて説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be explained below with reference to the drawings shown as examples.
１はフイルタケーシングであり、円筒形状その
他適宜形状としたエアフイルタ２が内蔵されてお
り、その上流側にはエアロゾル投入分散部３及び
エアロゾル濃度測定部４が設けられている。 Reference numeral 1 denotes a filter casing, which houses an air filter 2 having a cylindrical shape or other appropriate shape, and an aerosol input dispersion section 3 and an aerosol concentration measuring section 4 are provided on the upstream side thereof.
エアロゾル投入分散部３は、多孔分散パイプ５
を垂直管６に連結し、ソケツト７を介してフイル
タ支持枠８に設置したものであり、フイルタケー
シング１内部のダクトロ９直近部に取り付けられ
る。 The aerosol input dispersion section 3 includes a porous dispersion pipe 5
is connected to a vertical pipe 6 and installed on a filter support frame 8 via a socket 7, and is attached to a portion immediately adjacent to a duct 9 inside the filter casing 1.
尚、実施例では多孔分散パイプ５を二列平行に
配し、多孔分散パイプ５に孔１０を直線状に点在
させているが、多孔分散パイプ５の孔１０の大き
さ、向き、数、配列などは、エアロゾルが均等に
分散する様に適宜仕様のものとすればよい。 In the embodiment, the porous dispersion pipes 5 are arranged in two parallel rows, and the holes 10 are scattered linearly in the porous dispersion pipes 5, but the size, direction, number, etc. of the holes 10 of the porous dispersion pipes 5 The arrangement may be appropriately designed so that the aerosol is evenly dispersed.
エアロゾル濃度測定部４は、多孔パイプ１１を
ベンド管１２に連結し、ソケツト１３を介してフ
イルタ支持枠８に設置したものであり、フイルタ
ケーシング１内部のエアフイルタ２の上流直前部
に取り付けられている。 The aerosol concentration measurement unit 4 is a porous pipe 11 connected to a bend pipe 12 and installed in the filter support frame 8 via a socket 13, and is installed just before the upstream side of the air filter 2 inside the filter casing 1. .
そこで、上記エアロゾル投入分散部３のソケツ
ト７に試験用エアロゾル発生機（図示せず）を、
エアロゾル濃度測定部４のソケツト１３にリーク
テスターのプローブ（図示せず）を連結させる。 Therefore, a test aerosol generator (not shown) was installed in the socket 7 of the aerosol injection and dispersion section 3.
A probe (not shown) of a leak tester is connected to the socket 13 of the aerosol concentration measuring section 4.
そして、試験用エアロゾル発生機として、例え
ばラスキンノズルタイプの多分散DOP粒子発生
機を使用し、一定圧力の空気を送つて発生させた
試験用DOPエアロゾルをフイルタケーシング１
内に導入し、エアフイルタ２の上流直前部に設け
たエアロゾル濃度測定部４のソケツト１３にリー
クテスターのプローブを連結させて、エアフイル
タ上流側のエアロゾル濃度を測定し、これを基準
（100％）に設定した後、エアフイルタ２の流出側
全面にわたつてテストプローブにより、DOPエ
アロゾルのリーク度を測定し、0.01％以下のリー
クであるか否かを調べる。 Then, for example, a Ruskin nozzle type polydisperse DOP particle generator is used as a test aerosol generator, and the test DOP aerosol generated by sending air at a constant pressure is applied to the filter casing 1.
Connect the probe of the leak tester to the socket 13 of the aerosol concentration measuring section 4 provided immediately before the upstream of the air filter 2, measure the aerosol concentration on the upstream side of the air filter, and use this as the reference (100%). After setting, the degree of leakage of the DOP aerosol is measured using a test probe over the entire surface of the outflow side of the air filter 2, and it is determined whether the leakage is 0.01% or less.
リークテスターは、通常のフオトメータ（ハロ
ゲンランプ又はタングステンランプから発生する
散乱光の量が、エアロゾルの質量濃度に比例する
という原理を利用したもの）で市販のものが利用
される。 As the leak tester, a commercially available normal photometer (which utilizes the principle that the amount of scattered light generated from a halogen lamp or tungsten lamp is proportional to the mass concentration of aerosol) is used.
本発明は以上に示した様に構成されており、フ
イルタケーシングの吹出口ごとに現場リークテス
トが行なえ、容易に目的とする試験フイルタ及び
吹出口のみのリークテストが実施でき、しかも試
験用エアロゾルの発生量を大巾に低減させること
ができるので、エアフイルタの寿命を延長させる
という効果がある。 The present invention is configured as described above, and allows on-site leak tests to be performed for each outlet of the filter casing, making it easy to perform leak tests on only the target test filter and outlet, and moreover, for testing aerosols. Since the amount generated can be greatly reduced, it has the effect of extending the life of the air filter.
さらに、エアロゾル濃度測定部のソケツト１３
に差圧計を連結することにより、エアフイルタの
圧力損失も測定することができるのでエアフイル
タの寿命が推定できるという特徴をも有するもの
である。 Furthermore, the socket 13 of the aerosol concentration measuring section
By connecting a differential pressure gauge to the air filter, the pressure loss of the air filter can also be measured, so the service life of the air filter can be estimated.
第１図は本発明の試験装置の要部説明図、第２
図は本発明の試験装置の底面図、第３図はダクト
口側から見たエアロゾル投入分散部の説明図、第
４図は多孔分散パイプの拡大図、第５図は多孔パ
イプの拡大図、第６図は従来のリークテストのダ
イヤグラムを示す。
１……フイルタケーシング、２……エアフイル
タ、３……エアロゾル投入分散部、４……エアロ
ゾル濃度測定部、７，１３……ソケツト、１６…
…試験用エアロゾル発生機。
Figure 1 is an explanatory diagram of the main parts of the test device of the present invention, Figure 2
The figure is a bottom view of the test device of the present invention, Figure 3 is an explanatory diagram of the aerosol input and dispersion section seen from the duct mouth side, Figure 4 is an enlarged view of the porous dispersion pipe, Figure 5 is an enlarged view of the porous pipe, FIG. 6 shows a diagram of a conventional leak test. DESCRIPTION OF SYMBOLS 1... Filter casing, 2... Air filter, 3... Aerosol input dispersion part, 4... Aerosol concentration measuring part, 7, 13... Socket, 16...
...Test aerosol generator.
Claims (1)
の上流側に設けたエアロゾル投入分散部３のソケ
ツト７から試験用エアロゾルをフイルタケーシン
グ１内へ導入し、かつフイルタケーシング１内部
のエアフイルタ２の上流直前部に設けたエアロゾ
ル濃度測定部４のソケツト１３にリークテスター
のプローブを連結させてエアフイルタ２の上流側
エアロゾル濃度を測定し、これを基準に設定した
後エアフイルタ２の流出側全面にわたつてテスト
プローブにより試験用エアロゾルのリーク度を測
定することを特徴としたエアフイルタリーク試験
方法。 ２ エアロゾル投入分散部３をフイルタケーシン
グ１内部のエアフイルタ２の上流側に設け、該エ
アロゾル投入分散部３のソケツト７に試験用エア
ロゾル発生機１６を連結させ、エアロゾル濃度測
定部４をフイルタケーシング１内部のエアフイル
タ２の上流直前部に設け、該エアロゾル濃度測定
部４のソケツト１３にリークテスターのプローブ
を連結させ得ることを特徴とするエアフイルタリ
ーク試験装置。[Claims] 1. Air filter 2 inside filter casing 1
The test aerosol is introduced into the filter casing 1 from the socket 7 of the aerosol input and dispersion section 3 provided upstream of the filter casing 1, and the socket 13 of the aerosol concentration measurement section 4 provided immediately before the upstream of the air filter 2 inside the filter casing 1. The aerosol concentration on the upstream side of the air filter 2 is measured by connecting the probe of the leak tester to the air filter 2, and after setting this as a reference, the degree of leakage of the test aerosol is measured with the test probe over the entire outflow side of the air filter 2. Featured air filter leak test method. 2. The aerosol injection and dispersion section 3 is provided on the upstream side of the air filter 2 inside the filter casing 1, the test aerosol generator 16 is connected to the socket 7 of the aerosol injection and dispersion section 3, and the aerosol concentration measurement section 4 is installed inside the filter casing 1. An air filter leak testing device characterized in that it is provided immediately before the upstream of the air filter 2, and a probe of a leak tester can be connected to the socket 13 of the aerosol concentration measuring section 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57095142A JPS58210819A (en) | 1982-06-02 | 1982-06-02 | Method for testing leakage of air filter and its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57095142A JPS58210819A (en) | 1982-06-02 | 1982-06-02 | Method for testing leakage of air filter and its device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58210819A JPS58210819A (en) | 1983-12-08 |
| JPH0221742B2 true JPH0221742B2 (en) | 1990-05-16 |
Family
ID=14129546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57095142A Granted JPS58210819A (en) | 1982-06-02 | 1982-06-02 | Method for testing leakage of air filter and its device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58210819A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1949065B1 (en) * | 2005-10-24 | 2019-05-29 | Camfil USA, Inc. | Method and apparatus for v-bank filter bed scanning |
| DE102009000948A1 (en) * | 2009-02-18 | 2010-08-26 | Caverion Gmbh | Feeding device and method for the task of a test aerosol and device for filtering a loaded with aerosols and / or dusts gas flow |
| JP6259607B2 (en) * | 2013-08-09 | 2018-01-10 | 日本エアーテック株式会社 | Filter inspection jig |
| US10151679B2 (en) | 2015-04-08 | 2018-12-11 | Emd Millipore Corporation | Enhanced aerosol test for assessing filter integrity |
| BE1023000B1 (en) | 2015-09-11 | 2016-10-31 | Manoha Sprl | Dryer, especially for drying clothes and clean room accessories |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4977690A (en) * | 1972-10-30 | 1974-07-26 | ||
| JPS52126278A (en) * | 1976-04-08 | 1977-10-22 | Flanders Filters | Method of and apparatus for testing leakage in filter |
-
1982
- 1982-06-02 JP JP57095142A patent/JPS58210819A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4977690A (en) * | 1972-10-30 | 1974-07-26 | ||
| JPS52126278A (en) * | 1976-04-08 | 1977-10-22 | Flanders Filters | Method of and apparatus for testing leakage in filter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58210819A (en) | 1983-12-08 |
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