JPH0221650U - - Google Patents

Info

Publication number

JPH0221650U

JPH0221650U JP9848288U JP9848288U JPH0221650U JP H0221650 U JPH0221650 U JP H0221650U JP 9848288 U JP9848288 U JP 9848288U JP 9848288 U JP9848288 U JP 9848288U JP H0221650 U JPH0221650 U JP H0221650U

Authority

JP

Japan

Prior art keywords

pellicle

frame

protecting

membrane

view

Prior art date

1988-07-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000012528 membrane Substances 0.000 claims description 5
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1

Cited By (1)