JPH0221328U - - Google Patents
Info
- Publication number
- JPH0221328U JPH0221328U JP10023988U JP10023988U JPH0221328U JP H0221328 U JPH0221328 U JP H0221328U JP 10023988 U JP10023988 U JP 10023988U JP 10023988 U JP10023988 U JP 10023988U JP H0221328 U JPH0221328 U JP H0221328U
- Authority
- JP
- Japan
- Prior art keywords
- side member
- slider
- guide shaft
- air slide
- static pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10023988U JPH0221328U (fr) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10023988U JPH0221328U (fr) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221328U true JPH0221328U (fr) | 1990-02-13 |
Family
ID=31328142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10023988U Pending JPH0221328U (fr) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221328U (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001057409A1 (fr) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Palier a gaz hydrostatique, dispositif de palier a gaz hydrostatique s'utilisant dans un environnement sous vide, et procede de recuperation de gaz pour le dispositif de palier a gaz hydrostatique |
| JP2002188631A (ja) * | 2000-12-22 | 2002-07-05 | Toto Ltd | 真空環境下で使用する静圧気体軸受、および、その静圧気体軸受の気体回収方法 |
| KR100419378B1 (ko) * | 2000-11-29 | 2004-02-19 | 주식회사 에스에프에이 | 디바이더 장치 |
| WO2016158381A1 (fr) * | 2015-03-31 | 2016-10-06 | 住友重機械工業株式会社 | Palier à gaz à pression statique |
-
1988
- 1988-07-28 JP JP10023988U patent/JPH0221328U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001057409A1 (fr) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Palier a gaz hydrostatique, dispositif de palier a gaz hydrostatique s'utilisant dans un environnement sous vide, et procede de recuperation de gaz pour le dispositif de palier a gaz hydrostatique |
| US7052182B2 (en) | 2000-02-01 | 2006-05-30 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| US7189002B2 (en) | 2000-02-01 | 2007-03-13 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device |
| KR100419378B1 (ko) * | 2000-11-29 | 2004-02-19 | 주식회사 에스에프에이 | 디바이더 장치 |
| JP2002188631A (ja) * | 2000-12-22 | 2002-07-05 | Toto Ltd | 真空環境下で使用する静圧気体軸受、および、その静圧気体軸受の気体回収方法 |
| WO2016158381A1 (fr) * | 2015-03-31 | 2016-10-06 | 住友重機械工業株式会社 | Palier à gaz à pression statique |
| JP2016191434A (ja) * | 2015-03-31 | 2016-11-10 | 住友重機械工業株式会社 | 静圧気体軸受 |
| CN107429742A (zh) * | 2015-03-31 | 2017-12-01 | 住友重机械工业株式会社 | 静压气体轴承 |