JPH02212805A - Method for coupling and fixing optical fiber and waveguide type optical parts - Google Patents

Method for coupling and fixing optical fiber and waveguide type optical parts

Info

Publication number
JPH02212805A
JPH02212805A JP3278189A JP3278189A JPH02212805A JP H02212805 A JPH02212805 A JP H02212805A JP 3278189 A JP3278189 A JP 3278189A JP 3278189 A JP3278189 A JP 3278189A JP H02212805 A JPH02212805 A JP H02212805A
Authority
JP
Japan
Prior art keywords
waveguide
ferrule
type optical
optical fiber
waveguide type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3278189A
Other languages
Japanese (ja)
Inventor
Hiroshi Nakamoto
洋 中元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3278189A priority Critical patent/JPH02212805A/en
Publication of JPH02212805A publication Critical patent/JPH02212805A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To stably maintain high optical coupling efficiency without using a matching wave by cooling a waveguide type optical part, a ferrule and a coupling member and obtaining the adhesive strength between an optical fiber and the exposed end face of the waveguide by utilizing the differences in the rate of shrinkage between these parts. CONSTITUTION:The waveguide type optical part 3 and the ferrule 2 are so held that the end face of the optical fiber 1 comes into tight contact with the exposed end face of the waveguide 4 of the waveguide type optical part 3. The coupling member 5 having the coefft. of linear thermal expansion larger than the coefft. of linear thermal expansion of the waveguide type optical part 3 and the ferrule 2 as well as the waveguide type optical part 3 and the ferrule 3 are heated to fix both ends of the coupling member 5 to the side faces of the waveguide type optical part 3 and the ferrule 2. The waveguide type optical part 3, the ferrule 2 and the coupling member 5 are cooled to obtain the adhesive strength between the optical fiber 1 and the exposed end face of the waveguide 4 by utilizing the differences in the rate of shrinkage between these members. The high optical coupling efficiency is stably maintained in this way without using the matching liquid.

Description

【発明の詳細な説明】 概要 光ファイバと導波路型光部品の結合固定方法に関し、 マツチング液を用いることなしに高い光結合効率を安定
に維持することができる光ファイバと導波路型光部品の
結合固定方法の提供を目的とし、光ファイバが挿入固定
されたフェルールの端面を球状に研磨し、上記光ファイ
バの端面が導波路型光部品の導波路露出端面に密着する
ように該導波路型光部品及び上記フェルールを保持し、
該導波路型光部品及びフェルールの線熱膨張係数よりも
大きな線熱膨張係数を有する結合部材と上記導波路型光
部品及びフェルールとを加熱した状態で上記結合部材の
両端部を上記導波路型光部品及びフェルールの側面に固
定し、上記導波路型光部品、フェルール及び結合部材を
冷却しこれらの収縮量の差を利用して上記光ファイバと
上記導波路露出端面との密着力を得るようにして構成す
る。
[Detailed Description of the Invention] Summary Regarding a method for coupling and fixing optical fibers and waveguide type optical components, the present invention relates to a method for coupling and fixing optical fibers and waveguide type optical components, which can stably maintain high optical coupling efficiency without using a matching liquid. For the purpose of providing a coupling and fixing method, the end face of a ferrule into which an optical fiber is inserted and fixed is polished into a spherical shape, and the waveguide type optical component is polished so that the end face of the optical fiber is in close contact with the exposed end face of the waveguide of the waveguide type optical component. Holds the optical component and the above ferrule,
While heating the coupling member having a linear thermal expansion coefficient larger than that of the waveguide-type optical component and the ferrule, and the waveguide-type optical component and the ferrule, both ends of the coupling member are connected to the waveguide-type optical component and the ferrule. It is fixed to the side surface of the optical component and the ferrule, cools the waveguide-type optical component, the ferrule, and the coupling member, and uses the difference in the amount of contraction of these components to obtain adhesion between the optical fiber and the exposed end surface of the waveguide. and configure it.

産業上の利用分野 本発明は光ファイバと導波路型光部品の結合固定方法に
関する。
INDUSTRIAL APPLICATION FIELD The present invention relates to a method for coupling and fixing an optical fiber and a waveguide type optical component.

光通信又は光伝送の分野においては、レンズ等の光学系
構成部品を盤上に固定保持してなるバルク型光部品のほ
かに、導波路型光部品が使用される。導波路型光部品は
、導波路基板上にそれよりも屈折率の高い先導波路を形
成し、この先導波路内に光ビームを閉じ込めた状態で制
御するように構成されており、構造上小型化が容易で、
量産が可能であるという利点のほか、電界や磁界を効果
的に印加することができるので、消費電力の飛躍的が低
減が可能であるという利点を存している。
In the field of optical communication or optical transmission, waveguide type optical components are used in addition to bulk type optical components in which optical system components such as lenses are fixedly held on a board. Waveguide-type optical components are structured so that a guiding waveguide with a higher refractive index is formed on the waveguide substrate, and the light beam is controlled while being confined within this guiding waveguide, making it possible to reduce the size of the structure. is easy,
In addition to the advantage that mass production is possible, it has the advantage that electric and magnetic fields can be effectively applied, so power consumption can be dramatically reduced.

このような導波路型光部品を実用するに際して、光ファ
イバとの結合固定方法の最適化が模索されている。
When putting such waveguide-type optical components into practical use, optimization of the method for coupling and fixing them with optical fibers is being sought.

従来の技術 光ファイバと導波路型光部品を光学的に結合する場合、
光フアイバ端面と導波路端面とを単に接近させただけで
は高屈折率な光ファイバ及び導波路間に低屈折率な空気
層が介在するので、フレネル反射損により損失が増大す
るとともに、キャビティ効果により間隙の微小変動に応
じて上記損失が安定しない。このため、従来は、第5図
に示すように、基板31上に載置固定された導波路型光
部品32の導波路32a端面と光ファイバ33端面とを
対向させ、これらの間に光学接着剤等の光ファイバ及び
導波路の屈折率とほぼ等しい屈折率を有するマツチング
液34を介在させ、上記損失の増大及び変動を防止する
ようにしていた。なお、図において、36は基板31上
に固定されたブロック、35は表面に図示しない金属薄
膜が形成された光ファイバ33をブロック36に固定し
ている半田である。
Conventional technology When optically coupling an optical fiber and a waveguide type optical component,
If the end face of the optical fiber and the end face of the waveguide are simply brought close to each other, an air layer with a low refractive index will exist between the high refractive index optical fiber and the waveguide, which will increase the loss due to Fresnel reflection loss and cause the cavity effect. The above loss is not stable depending on minute fluctuations in the gap. For this reason, conventionally, as shown in FIG. 5, the end face of the waveguide 32a of the waveguide type optical component 32 mounted and fixed on the substrate 31 and the end face of the optical fiber 33 are made to face each other, and optical adhesive is bonded between them. A matching liquid 34 having a refractive index substantially equal to that of the optical fiber and waveguide is interposed to prevent the increase and fluctuation of the loss. In the figure, 36 is a block fixed on the substrate 31, and 35 is solder for fixing the optical fiber 33 on the surface of which a metal thin film (not shown) is formed to the block 36.

発明が解決しようとする課題 このように従来技術であると、高い光結合効率を安定に
維持するためにマツチング液を使用する必要があったが
、マツチング液の信頼性が必ずしも高くないという問題
があった。例えば、マツチング液をLD(半導体レーザ
)等の光半導体素子と同一気密ブロック内に入れておく
と、マツチング液から蒸発等したガスが光半導体素子に
悪影響を与えることがある。
Problems to be Solved by the Invention As described above, in the conventional technology, it was necessary to use a matching liquid in order to stably maintain high optical coupling efficiency, but there was a problem that the reliability of the matching liquid was not necessarily high. there were. For example, if a matching liquid is placed in the same airtight block as an optical semiconductor element such as an LD (semiconductor laser), gas evaporated from the matching liquid may have an adverse effect on the optical semiconductor element.

本発明はこのような事情に鑑みて創作されたもので、マ
ツチング液を用いることなしに高い米結合効率を安定に
維持することができる光ファイバと導波路型光部品の結
合固定方法の提供を目的としている。
The present invention was created in view of the above circumstances, and it is an object of the present invention to provide a method for coupling and fixing optical fibers and waveguide type optical components, which can stably maintain high coupling efficiency without using a matching liquid. The purpose is

課題を解決するための手段 第1図は本発明の原理図である。Means to solve problems FIG. 1 is a diagram showing the principle of the present invention.

2は光ファイバ1が挿入固定されたフェルールであり、
その端面は球面に研磨されている。4は光ファイバ1と
光学的に結合すべき導波路型光部品3の導波路である。
2 is a ferrule into which the optical fiber 1 is inserted and fixed;
Its end face is polished into a spherical surface. Reference numeral 4 denotes a waveguide of a waveguide type optical component 3 to be optically coupled to the optical fiber 1.

5は導波路型光部品3及びフェルール20線熱膨張係数
よりも大きな(第一の方法)あるいは小さな(第二の方
法)線熱膨張係数を有する結合部材である。
5 is a coupling member having a linear thermal expansion coefficient larger (first method) or smaller (second method) than the waveguide type optical component 3 and the ferrule 20.

本発明第一の方法では、光ファイバ1の端面が導波路型
光部品3の導波路4露出端面に密着するように導波路型
光部品3及びフェルール2を保持し、導波路型光部品3
及びフェルール20線熱膨張係数よりも大きな線熱膨張
係数を有する結合部材5と導波路型光部品3及びフェル
ール2とを加熱して結合お材5の両端部を導波路型光部
品3及びフェルール2の側面に固定し、導波路型光部品
3、フェルール2及び結合部材5を冷却しこれらの収縮
量の差を利用して光ファイバ1と導波路4露出端面との
密着力を得るようにしている。
In the first method of the present invention, the waveguide type optical component 3 and the ferrule 2 are held so that the end surface of the optical fiber 1 is in close contact with the exposed end surface of the waveguide 4 of the waveguide type optical component 3, and the waveguide type optical component 3
The coupling member 5 having a linear thermal expansion coefficient larger than the linear thermal expansion coefficient of the ferrule 20, the waveguide type optical component 3, and the ferrule 2 are heated to connect both ends of the bonding material 5 to the waveguide type optical component 3 and the ferrule. The waveguide-type optical component 3, ferrule 2, and coupling member 5 are fixed to the side surface of the optical fiber 1 and the exposed end surface of the waveguide 4 is cooled, and the difference in the amount of contraction of these components is utilized to obtain adhesion between the optical fiber 1 and the exposed end surface of the waveguide 4. ing.

また、本発明第二の方法では、光ファイバ1の端面が導
波路型光部品3の導波路4露出端面に密着するように導
波路型光部品3及びフェルール2を保持し、導波路型光
部品3及びフェルール2の線熱膨張係数よりも小さな線
熱膨張係数を有する結合部材5と導波路型光部品3及び
フェルール2とを冷却して結合部材5の両端部を導波路
型光部品3及びフェルール2の側面に固定し、導波路型
光部品3、フェルール2及び結合部材5を加熱しこれら
の膨張量の差を利用して光ファイバlと導波路4露出端
面との密着力を得るようにしている。
In addition, in the second method of the present invention, the waveguide type optical component 3 and the ferrule 2 are held so that the end surface of the optical fiber 1 is in close contact with the exposed end surface of the waveguide 4 of the waveguide type optical component 3, The coupling member 5 having a linear thermal expansion coefficient smaller than that of the component 3 and the ferrule 2, the waveguide-type optical component 3, and the ferrule 2 are cooled, and both ends of the coupling member 5 are connected to the waveguide-type optical component 3. and fixed to the side surface of the ferrule 2, and heats the waveguide-type optical component 3, the ferrule 2, and the coupling member 5, and uses the difference in the amount of expansion of these components to obtain adhesion between the optical fiber l and the exposed end surface of the waveguide 4. That's what I do.

作   用 導波路型光部品30線熱膨張係数をα4、フェルール2
0線熱膨張係数をα2、導波路型光部品3と結合部材5
の固定部分から導波路4と光ファイバ1の密着部分まで
の距離を!9、導波路4と光ファイバ2の密着部分から
フェルール2と結合部材5の固定部分までの距離を12
、結合部材50線熱膨張係数をαとすると、本発明第一
の方法において、結合部材50線熱膨張係数が導波路型
光部品3及びフェルール20線熱膨張係数よりも大きい
、というのは、 it  +Ilt の式を満足していることであると定義する。この条件を
満足していることにより、結合部材5、導波路型光部品
3及びフェルール2を加熱して結合部材50両端部を導
波路型光部品3及びフェルール2の側面に固定した後、
これらを適当な光部品の使用温度(例えば室温)にまで
冷却することによって、光ファイバ1と導波路4i1出
端面との間に適当な密着力を得ることができる。光ファ
イバ1と導波路4露出端面とが密着すると、これらの間
には空気層が介在しないから、損失の増大及び変動が防
止され、マツチング液を用いることなしに高い光結合効
率を安定に維持することができる。
Working waveguide type optical component 30 linear thermal expansion coefficient α4, ferrule 2
The zero-line thermal expansion coefficient is α2, the waveguide type optical component 3 and the coupling member 5
The distance from the fixed part to the close contact part of waveguide 4 and optical fiber 1! 9. The distance from the close contact part of the waveguide 4 and optical fiber 2 to the fixed part of the ferrule 2 and coupling member 5 is 12
, when the linear thermal expansion coefficient of the coupling member 50 is α, in the first method of the present invention, the linear thermal expansion coefficient of the coupling member 50 is larger than the linear thermal expansion coefficient of the waveguide type optical component 3 and the ferrule 20. It is defined as satisfying the expression it +Ilt. By satisfying this condition, after heating the coupling member 5, waveguide type optical component 3, and ferrule 2 and fixing both ends of the coupling member 50 to the side surfaces of the waveguide type optical component 3 and ferrule 2,
By cooling these to an appropriate operating temperature of the optical component (for example, room temperature), an appropriate adhesion force can be obtained between the optical fiber 1 and the exit end surface of the waveguide 4i1. When the optical fiber 1 and the exposed end face of the waveguide 4 are in close contact, there is no air layer between them, which prevents loss increase and fluctuation, and maintains high optical coupling efficiency stably without using a matching liquid. can do.

また、本発明第二の方法において、結合部材5の線熱膨
張係数が導波路型光部品3及びフェルール2の線熱膨張
係数よりも小さい、というのは、の式を満足しているこ
とであると定義する。この条件を満足していると、結合
部材5、導波路型光部品3及びフェルール2を冷却して
結合部材50両端部を導波路型光部品3及びフェルール
2の側面に固定した後、これらを適当な光部品の使用温
度(例えば室温)まで加熱することによって、光ファイ
バ1と導波路4露出端面との間に適当な密着力を得るこ
とができ、本発明第一の方法と同様の原理により目的が
達成される。
Furthermore, in the second method of the present invention, the linear thermal expansion coefficient of the coupling member 5 is smaller than the linear thermal expansion coefficients of the waveguide type optical component 3 and the ferrule 2 because the following equation is satisfied. Define that there is. If this condition is satisfied, after cooling the coupling member 5, waveguide-type optical component 3, and ferrule 2 and fixing both ends of the coupling member 50 to the sides of the waveguide-type optical component 3 and ferrule 2, By heating the optical component to an appropriate operating temperature (for example, room temperature), an appropriate adhesion force can be obtained between the optical fiber 1 and the exposed end surface of the waveguide 4, which is based on the same principle as the first method of the present invention. The purpose is achieved.

」L」1−男 以下本発明の実施例を図面に基づいて説明する。"L" 1-Male Embodiments of the present invention will be described below based on the drawings.

第2図は本発明の実施例図であって、本発明方法により
結合固定される光ファイバ及び導波路型光部品の平面図
、第3図はその側面図である。12はその中心細孔に光
ファイバ11が挿入固定されたフェルールであり、フェ
ルール12の端面ば球面に研暦されている。光ファイバ
11をフェルール12に固定するには、例えばSUS材
からなるフェルール12の表面及び光ファイバ11の先
端近傍の表面に例えば蒸着によりAu等の半田付は可能
な金属を膜形成し、半田付けにより行うことができる。
FIG. 2 is a diagram showing an embodiment of the present invention, and is a plan view of an optical fiber and a waveguide type optical component that are coupled and fixed by the method of the present invention, and FIG. 3 is a side view thereof. Reference numeral 12 denotes a ferrule in which the optical fiber 11 is inserted and fixed in its central pore, and the end surface of the ferrule 12 is polished into a spherical surface. In order to fix the optical fiber 11 to the ferrule 12, a film of a solderable metal such as Au is formed by vapor deposition on the surface of the ferrule 12 made of, for example, SUS material and the surface near the tip of the optical fiber 11, and then soldered. This can be done by

導波路型光部品13は、導波路14が形成された導波路
基板15を例えばSUS材、コバール等の金属からなる
キャリア16上に密着固定して構成されている。17は
その両端がそれぞれキャリア16及びフェルール12の
側面に例えばレーザ溶接により固定される結合部材であ
り、18は結合部材17により結合を行うのに先立ちフ
ェルール12をキャリア16に仮止めするための仮止め
部材である。
The waveguide type optical component 13 is constructed by closely fixing a waveguide substrate 15 on which a waveguide 14 is formed onto a carrier 16 made of metal such as SUS material or Kovar. Reference numeral 17 indicates a coupling member whose both ends are fixed to the side surfaces of the carrier 16 and the ferrule 12, respectively, by laser welding, and 18 indicates a temporary fixing member for temporarily fixing the ferrule 12 to the carrier 16 before the coupling member 17 performs the coupling. It is a stop member.

第一の方法による場合には、結合部材17の材質として
、線熱膨張係数がキャリア16及びフェルール120線
熱膨張係数よりも大きいものを選ぶ。キャリア16及び
フェルール12がSUS材から形成されている場合には
、SUS材の線熱膨張係数は16,4XIO−”である
から、これよりも大きい線熱膨張係数を有するしんちゅ
う(18゜8 X 10−@)から結合部材17を形成
することができる。そして、全体加熱に先立ち、フェル
ール12を例えば図示しない微動台に固定し、光ファイ
バ11の端面が導波路14の露出端面に密着するように
位置調整して、キャリア16とフェルール12を仮止め
部材18により仮止めする。この場合、全体加熱を行っ
たときにフェルール12とキャリア16の相対位置が変
動しないように、仮止め部材18の線熱膨張係数はフェ
ルール12及びキャリア16の線熱膨張係数とほぼ等し
いものであることが望ましい。次に、例えば加熱炉内で
全体加熱を行って、結合部材170両端をそれぞれキャ
リア16及びフェルール12の側面にレーザ溶接等で固
定した後、通常使用温度(例えば室温)まで冷却する。
In the case of the first method, the material for the coupling member 17 is selected to have a linear thermal expansion coefficient larger than that of the carrier 16 and the ferrule 120. When the carrier 16 and the ferrule 12 are made of SUS material, since the linear thermal expansion coefficient of the SUS material is 16.4 A coupling member 17 can be formed from X 10-@). Then, prior to heating the entire ferrule 12, the ferrule 12 is fixed to, for example, a fine movement table (not shown), and the end surface of the optical fiber 11 is brought into close contact with the exposed end surface of the waveguide 14. The carrier 16 and the ferrule 12 are temporarily fixed by the temporary fixing member 18. In this case, the temporary fixing member 18 It is desirable that the linear thermal expansion coefficient of the ferrule 12 and the carrier 16 be approximately equal to that of the ferrule 12 and the carrier 16.Next, the entire body is heated, for example, in a heating furnace, and both ends of the coupling member 170 are bonded to the carrier 16 and the ferrule, respectively. After it is fixed to the side surface of 12 by laser welding or the like, it is cooled to a normal use temperature (for example, room temperature).

このとき、冷却にともなう結合部材17の収縮量は、結
合部材17との固定部分間におけるフェルール12及び
キャリア16の収縮量よりも大きいので、光ファイバ1
1と導波路14の端面間には適当な密着力が生じること
になる。従って、加熱温度を光部品の使用温度範囲の上
限以上の温度に設定しておけば、使用温度範囲に゛おい
て常に光ファイバ11と導波路14の端面同士を密着さ
せることができるので、これらの間には空隙が生じるこ
とはなく、高い光結合効率を安定に維持することができ
る。端面同士の密着力については、この圧力をPとする
と、P=E1ΔT(αJ×αS)/S と表すことができる。ここに、Sはフェルールと導波路
の接触面積(ファイバの断面1) 、Eはフェルール(
SUS材)のヤング率、!は溶接点間の距fi(5+a
+s)、ΔTは温度差(50℃)、αノは結合部材(し
んちゅう)の線熱膨張係数、α。
At this time, the amount of contraction of the coupling member 17 due to cooling is larger than the amount of contraction of the ferrule 12 and the carrier 16 between the fixed parts with the coupling member 17, so the optical fiber 1
An appropriate adhesion force is generated between the end faces of the waveguide 1 and the waveguide 14. Therefore, if the heating temperature is set to a temperature higher than the upper limit of the operating temperature range of the optical component, the end faces of the optical fiber 11 and the waveguide 14 can be brought into close contact with each other at all times within the operating temperature range. No voids are created between them, and high optical coupling efficiency can be stably maintained. The adhesion force between the end surfaces can be expressed as P=E1ΔT(αJ×αS)/S, where this pressure is P. Here, S is the contact area between the ferrule and the waveguide (fiber cross section 1), and E is the ferrule (
Young's modulus of SUS material)! is the distance between welding points fi(5+a
+s), ΔT is the temperature difference (50°C), α is the coefficient of linear thermal expansion of the joining member (brass), α.

はキャリア16 (SUS材)及びフェルール12(S
US材)の線熱膨張係数であり、それぞれについて例示
された値を用いてPを求めると、P=1.2X10’ 
 (N/rn’)となる。
is carrier 16 (SUS material) and ferrule 12 (SUS material)
This is the linear thermal expansion coefficient of the US material), and when P is calculated using the values exemplified for each, P = 1.2X10'
(N/rn').

なお、光ファイバ11の端面と導波路14の露出端面と
を密着させた状態で全体加熱を行うことができる場合に
は仮止め部材18による仮止めは不要である。
Note that if the entire heating can be performed with the end face of the optical fiber 11 and the exposed end face of the waveguide 14 in close contact with each other, temporary fixing by the temporary fixing member 18 is not necessary.

第二の方法では、結合部材17の材質として、線熱膨張
係数がフェルール12及びキャリア16の線熱膨張係数
よりも小さいものを使用する。そして、第一の方法にお
いて、加熱すべきところを冷却し、冷却すべきところを
加熱し、収縮させるべきところを膨張させることによっ
て、この光部品の使用温度において光ファイバ11と導
波路14の端面同士を良好に密着させることができ、高
い光結合効率を安定に維持することができる。
In the second method, a material having a linear thermal expansion coefficient smaller than that of the ferrule 12 and the carrier 16 is used as the material for the coupling member 17 . In the first method, the end faces of the optical fiber 11 and the waveguide 14 are cooled at the parts to be heated, heated at the parts to be cooled, and expanded at the parts to be contracted at the working temperature of the optical component. They can be brought into good contact with each other, and high optical coupling efficiency can be stably maintained.

ところで、上記実施例において、フェルール12とキャ
リア16を高い結合力で結合させるためにヤング率が大
きな結合部材を使用した場合に、光ファイバ11と導波
路14の端面間の密着力が著しく大きくなり、密着部分
に破損の右それが生じることがある。このような場合に
は、第4図に示すように、湾曲させた形状の結合部材2
1を使用することによって、結合部材21に光軸方向の
バネ性を付与し、つまり、結合部材21の光軸方向の実
質的なりフグ率を低下させ、上記破損を防止するように
しても良い。
By the way, in the above embodiment, when a coupling member having a large Young's modulus is used to couple the ferrule 12 and the carrier 16 with a high coupling force, the adhesion force between the end faces of the optical fiber 11 and the waveguide 14 becomes significantly large. , it may cause damage right to the close contact part. In such a case, as shown in FIG.
1 may be used to impart spring properties to the coupling member 21 in the optical axis direction, that is, to substantially reduce the bending ratio of the coupling member 21 in the optical axis direction, thereby preventing the above-mentioned damage. .

発明の効果 以上説明したように、本発明によれば、マツチング液を
用いることなしに高い光結合効率を安定に維持すること
ができるようになるという効果を奏する。
Effects of the Invention As explained above, according to the present invention, it is possible to stably maintain high optical coupling efficiency without using a matching liquid.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の原理図、 第2図は本発明の実施例図であって、本発明第一の方法
により結合固定された光ファイバ及び導波路型光部品の
平面図、 第3図はその側面図、 第4図は本発明の他の実施例であって、本発明第二の方
法により結合固定された光ファイバ及び導波路型光部品
の平面図、 第5図は従来技術の説明図である。 1.1 2、 1 3.1 4、 1 5.1 1・・・光ファイバ、 2・・・フェルール、 3・・・導波路型光部品、 4・・・導波路、 7.21・・・結合部材。
FIG. 1 is a diagram of the principle of the present invention, FIG. 2 is a diagram of an embodiment of the present invention, and is a plan view of an optical fiber and a waveguide-type optical component coupled and fixed by the first method of the present invention. 4 is a side view of the same, FIG. 4 is a plan view of an optical fiber and waveguide type optical component coupled and fixed by the second method of the present invention, and FIG. 5 is a plan view of a conventional optical component. It is an explanatory diagram. 1.1 2, 1 3.1 4, 1 5.1 1... Optical fiber, 2... Ferrule, 3... Waveguide type optical component, 4... Waveguide, 7.21...・Connection member.

Claims (2)

【特許請求の範囲】[Claims] (1)光ファイバ(1)が挿入固定されたフェルール(
2)の端面を球状に研磨し、 上記光ファイバ(1)の端面が導波路型光部品(3)の
導波路(4)露出端面に密着するように該導波路型光部
品(3)及び上記フェルール(2)を保持し、該導波路
型光部品(3)及びフェルール(2)の線熱膨張係数よ
りも大きな線熱膨張係数を有する結合部材(5)と上記
導波路型光部品(3)及びフェルール(2)とを加熱し
た状態で上記結合部材(2)の両端部を上記導波路型光
部品(3)及びフェルール(2)の側面に固定し、 上記導波路型光部品(3)、フェルール(2)及び結合
部材(5)を冷却しこれらの収縮量の差を利用して上記
光ファイバ(1)と上記導波路(4)露出端面との密着
力を得るようにしたことを特徴とする光ファイバと導波
路型光部品の結合固定方法。
(1) Ferrule into which the optical fiber (1) is inserted and fixed (
The end face of the optical fiber (2) is polished into a spherical shape, and the end face of the optical fiber (1) is brought into close contact with the exposed end face of the waveguide (4) of the waveguide type optical component (3). A coupling member (5) that holds the ferrule (2) and has a linear thermal expansion coefficient larger than that of the waveguide type optical component (3) and the ferrule (2) and the waveguide type optical component ( 3) and the ferrule (2) are heated, both ends of the coupling member (2) are fixed to the side surfaces of the waveguide type optical component (3) and the ferrule (2), and the waveguide type optical component ( 3) The ferrule (2) and the coupling member (5) are cooled, and the difference in the amount of contraction thereof is used to obtain adhesion between the optical fiber (1) and the exposed end surface of the waveguide (4). A method for coupling and fixing an optical fiber and a waveguide type optical component, characterized by the following.
(2)光ファイバ(1)が挿入固定されたフェルール(
2)の端面を球状に研磨し、 上記光ファイバ(1)の端面が導波路型光部品(3)の
導波路(4)露出端面に密着するように該導波路型光部
品(3)及び上記フェルール(2)を保持し、該導波路
型光部品(3)及びフェルール(2)の線熱膨張係数よ
りも小さな線熱膨張係数を有する結合部材(5)と上記
導波路型光部品(3)及びフェルール(2)とを冷却し
た状態で上記結合部材(5)の両端部を上記導波路型光
部品(3)及びフェルール(2)の側面に固定し、 上記導波路型光部品(3)、フェルール(2)及び結合
部材(5)を加熱しこれらの膨張量の差を利用して上記
光ファイバ(1)と上記導波路(4)露出端面との密着
力を得るようにしたことを特徴とする光ファイバと導波
路型光部品の結合固定方法。
(2) Ferrule into which the optical fiber (1) is inserted and fixed (
The end face of the optical fiber (2) is polished into a spherical shape, and the end face of the optical fiber (1) is brought into close contact with the exposed end face of the waveguide (4) of the waveguide type optical component (3). A coupling member (5) that holds the ferrule (2) and has a linear thermal expansion coefficient smaller than that of the waveguide-type optical component (3) and the ferrule (2) and the waveguide-type optical component ( 3) and the ferrule (2) are cooled, both ends of the coupling member (5) are fixed to the side surfaces of the waveguide type optical component (3) and the ferrule (2), and the waveguide type optical component ( 3) The ferrule (2) and the coupling member (5) are heated to utilize the difference in the amount of expansion of these to obtain adhesion between the optical fiber (1) and the exposed end surface of the waveguide (4). A method for coupling and fixing an optical fiber and a waveguide type optical component, characterized by the following.
JP3278189A 1989-02-14 1989-02-14 Method for coupling and fixing optical fiber and waveguide type optical parts Pending JPH02212805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3278189A JPH02212805A (en) 1989-02-14 1989-02-14 Method for coupling and fixing optical fiber and waveguide type optical parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3278189A JPH02212805A (en) 1989-02-14 1989-02-14 Method for coupling and fixing optical fiber and waveguide type optical parts

Publications (1)

Publication Number Publication Date
JPH02212805A true JPH02212805A (en) 1990-08-24

Family

ID=12368395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3278189A Pending JPH02212805A (en) 1989-02-14 1989-02-14 Method for coupling and fixing optical fiber and waveguide type optical parts

Country Status (1)

Country Link
JP (1) JPH02212805A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110807A (en) * 1990-08-31 1992-04-13 Nec Corp Waveguide type optical device
US10444115B1 (en) * 2018-04-06 2019-10-15 Fujitsu Component Limited Testing method and testing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110807A (en) * 1990-08-31 1992-04-13 Nec Corp Waveguide type optical device
US10444115B1 (en) * 2018-04-06 2019-10-15 Fujitsu Component Limited Testing method and testing device

Similar Documents

Publication Publication Date Title
US5293438A (en) Microlensed optical terminals and optical system equipped therewith, and methods for their manufacture, especially an optical coupling method and optical coupler for use therewith
JPH02256007A (en) Junction of optical fiber to light port of optical integrated device
JPH06202010A (en) Optical element
CN113467111A (en) Optical waveguide element
Shiraishi et al. A new lensed-fiber configuration employing cascaded GI-fiber chips
JPH02212805A (en) Method for coupling and fixing optical fiber and waveguide type optical parts
EP0846966A2 (en) Optical waveguide
JP2007271674A (en) Optical device
JP3135979B2 (en) Optical fiber terminal optical device with micro lens
JPH0534543A (en) Waveguide type optical parts
US6775436B1 (en) Optical fiber U-turn apparatus and method
JP3588392B2 (en) Optical component comprising optical fiber and optical waveguide
JP3313208B2 (en) Substrate type optical waveguide device and manufacturing method thereof
JP3758762B2 (en) Optical connection parts
JPH07120639A (en) Manufacture of waveguide module, and optical waveguide module
JPH05288963A (en) Waveguide device
JP4227558B2 (en) Inline type optical component and method for manufacturing the same
US6652162B1 (en) Stand-off fusion-terminated optical waveguide interface
JPH02210406A (en) Optical coupling circuit
JPS582469B2 (en) Manufacturing method of semiconductor laser device with lens
WO2020255379A1 (en) Optical connection structure
JP2703916B2 (en) Optical coupler
JP2880618B2 (en) Broadband fiber optic coupler
JPH04178604A (en) Connector of optical waveguide and optical fiber
JPH05142441A (en) Method for connecting optical waveguides using chemical vapor deposition method