JPH022122A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPH022122A
JPH022122A JP14653688A JP14653688A JPH022122A JP H022122 A JPH022122 A JP H022122A JP 14653688 A JP14653688 A JP 14653688A JP 14653688 A JP14653688 A JP 14653688A JP H022122 A JPH022122 A JP H022122A
Authority
JP
Japan
Prior art keywords
noise
power supply
gnd
slit
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14653688A
Other languages
Japanese (ja)
Inventor
Kunihiko Kawaguchi
川口 邦彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14653688A priority Critical patent/JPH022122A/en
Publication of JPH022122A publication Critical patent/JPH022122A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reduce switching noise without expanding the power-line width and power pad by forming a slit-shaped gap area in parallel to the longer direction of the power wiring between adjacent pads for power within power wiring area. CONSTITUTION:A plurality of signal pads 2 are formed at the periphery of an IC substrate 1, a GND pad 3 is formed for several of them, and a common GND line 4 is connected. Slit-shaped gap areas 5a, 5b, and 5c are formed with appropriate gap between them along the longer direction of the GND line 4 and the gap width delta is set to a size to allow insulation properties to be retained in accordance with the current capacity requested for the GND line 4. Branching wirings 4a, 4b,...4n are provided from this GND line 4 and are extended at required areas within a chip. According to the above configuration, if noise generation source is set to A, the generated noise is transmitted for example along the gap area 5b and then to the branching wirings 4a, 4b,...4n. Noise can be drastically reduced in this long transmission path.

Description

【発明の詳細な説明】 〔概要〕 本発明は、半導体集積回路装置に係り、特にIC基板上
に形成された電源ラインの配線ノ(ターンに関し、 電源ラインの幅を広げたり、電源パッドの増設をするこ
となく、スイッチングノイズの低減化を図りうる電源ラ
インを備えた半導体集積回路装置を提供することを目的
とし、 半導体集積回路基板上に設けられた複数の電源用パッド
と、該パッド間を接続する電源配線を有する半導体集積
回路装置において、該電源配線卯域内の隣接する電源用
パッド間に、該電源配線の長手方向に平行にスリット状
の間隙領域を形成するように構成する。
[Detailed Description of the Invention] [Summary] The present invention relates to a semiconductor integrated circuit device, and particularly relates to power supply line wiring (turns) formed on an IC substrate, such as widening the width of the power supply line or adding more power supply pads. The purpose of the present invention is to provide a semiconductor integrated circuit device equipped with a power supply line that can reduce switching noise without having to In a semiconductor integrated circuit device having a power supply wiring to be connected, a slit-shaped gap region is formed between adjacent power supply pads in the power supply wiring area in parallel to the longitudinal direction of the power supply wiring.

〔産業上の利用分野〕[Industrial application field]

本発明は、半導体集積回路装置(以下、ICという、)
に係り、特にIC基板上に形成された電源ラインの配線
パターンに関する。
The present invention relates to a semiconductor integrated circuit device (hereinafter referred to as IC).
In particular, the present invention relates to a wiring pattern of a power supply line formed on an IC substrate.

近年では半導体技術の進歩、情報処理量の増大等に伴な
ってICが大規模化している。かかる大規模ICでは、
入出力信号数の増大および動作速度の高速化に伴なって
内部素子のスイッチングノイズが増加し、そのスイッチ
ングノイズによる誤動作が重要な問題となっている0本
発明は、電源ラインの配線構造の面から上記スイヅチン
グノイズの低減を図ろうとするものである。
In recent years, ICs have become larger in size as semiconductor technology advances and the amount of information processed increases. In such a large-scale IC,
As the number of input/output signals increases and the operating speed increases, the switching noise of internal elements increases, and malfunctions due to the switching noise have become a serious problem. This is an attempt to reduce the above-mentioned switching noise.

〔従来の技術〕[Conventional technology]

まず、大規模ICにおけるスイッチングノイズによる誤
動作等の発生メカニズムをmeに説明する。集積密度の
向上は必然的に入出力信号数の増大を招き、したがって
、各素子のスイッチング動作による信号の変化が同時に
起こる場合を多発せしめる。特に、同期回路やパスライ
ンのレシーバおよびドライバ等では多数の信号が同時に
変化することか起こる。動作速度の高速化はこの信号変
化の発生頻度をさらに助長する。多数の信号の同時変化
は電源電圧に動揺をきたし、一定レベルの電圧を維持で
きなくなる。この電圧の変動はIC基板上に形成された
電源ラインのレベル変化となって現れ、これがスイッチ
ングノイズとして動作不良等の障害を引き起こすことと
なる。
First, the mechanism of occurrence of malfunctions due to switching noise in large-scale ICs will be explained. An increase in integration density inevitably leads to an increase in the number of input/output signals, and therefore, signals often change simultaneously due to switching operations of each element. Particularly, in synchronous circuits, pass line receivers, drivers, etc., a large number of signals change simultaneously. Higher operating speeds further increase the frequency with which this signal change occurs. Simultaneous changes in a large number of signals cause fluctuations in the power supply voltage, making it impossible to maintain the voltage at a constant level. This voltage fluctuation appears as a level change in the power supply line formed on the IC substrate, which causes troubles such as malfunctions as switching noise.

かかる問題に対し、従来では、電源ライン、GNDライ
ンの強化(パターン面積増大による電流容量の増大)を
図ったり、あるいは電源パッドやGNDバッドの配置間
隔を狭めることにより信号パッドの近くに電源パッド、
GNDパッドを置くようにして電流路を長く引き回すこ
とを極力避けるよう配慮している。
To solve this problem, conventional methods have been to strengthen the power supply line and GND line (increase current capacity by increasing the pattern area), or to narrow the spacing between power supply pads and GND pads to place power supply pads or GND pads near the signal pads.
Care has been taken to avoid long current paths as much as possible by placing GND pads.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述のようにスイッチングノイズの量に見合った電源ラ
イン、GNDラインの強化や電源パッド、GNDパッド
の増設はノイズ低減に有効な手段ではある。
As mentioned above, strengthening the power supply line and GND line and adding power supply pads and GND pads in accordance with the amount of switching noise are effective means for reducing noise.

しかしながら、かかる手段を講することは、ICの大規
模化とは逆行することとなり、チップサイズの大形化を
招くこととなる。消極的な方法としては、信号線の入出
力本数を制限したり、信号の同時変化総数を制限するこ
とも考えられるが、この方法はICの信号処理能力の低
下につながるものであり、使いにくさも手伝って得策で
はない。
However, taking such measures would go against the trend of increasing the scale of ICs and would lead to an increase in chip size. As a negative method, it is possible to limit the number of input/output signal lines or to limit the total number of simultaneous signal changes, but these methods lead to a decrease in the signal processing ability of the IC and are not useful. It is not a good idea to help the grass.

このように、従来ではチップサイズ等の外形寸法の面お
よび処理能力の面からスイッチングノイズの低減に限界
があった。
As described above, in the past, there was a limit to the reduction of switching noise due to external dimensions such as chip size and processing capacity.

本発明は、特に電源ラインの幅を広げたり、電源パッド
の増設をすることなく、スイッチングノイズの低減化を
図りうる電源ラインを備えた半導体集積回路装置を提供
することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor integrated circuit device equipped with a power supply line that can reduce switching noise without particularly increasing the width of the power supply line or adding additional power supply pads.

〔課題を解決するための手段〕[Means to solve the problem]

上記従来の課題を解決するために、本発明は、半導体集
積回路基板(1)上に設けられた複数の電源用パッド(
3)と、該パッド間を接続する電源配線(4)を有する
半導体集積回路装置において、該電源配線(4)領域内
の隣接する電源用パッド(3)間に、該電源配線(4)
の長手方向に平行にスリット状の間隙領域(5a〜5f
)を形成するように構成する。
In order to solve the above conventional problems, the present invention provides a plurality of power supply pads (1) provided on a semiconductor integrated circuit board (1).
3) and a power supply wiring (4) connecting the pads, the power supply wiring (4) is connected between adjacent power supply pads (3) in the power supply wiring (4) region.
Slit-shaped gap area (5a to 5f) parallel to the longitudinal direction of
).

〔作用〕[Effect]

上記本発明の構成によれば、スリット状の間隙領域(5
a〜5f)は絶縁体として作用する。電源ライン(4)
中に本発明所定の絶縁体を置くことは、ノイズ伝搬経路
の長距離化を図ることとなる。したがって、ノイズはこ
の間隙領域を迂回しなければならず、その分だけノイズ
が減衰することとなる。
According to the configuration of the present invention, the slit-shaped gap region (5
a to 5f) act as insulators. Power line (4)
By placing the insulator specified by the present invention inside, the noise propagation path becomes longer. Therefore, the noise has to bypass this gap region, and the noise is attenuated accordingly.

〔実施例〕〔Example〕

次に、本発明の実施例を図面に基づいて説明する。 Next, embodiments of the present invention will be described based on the drawings.

可」」S昼型 第1図に本発明の第1の実施例を示す。第1図において
、IC基板1の周縁部には、複数の信号パッド2が形成
されており、それらのいくつかごとにGNDパッド3が
形成されている。各GNDパッド3は共通のGNDライ
ン4に接続されている。
A first embodiment of the present invention is shown in FIG. In FIG. 1, a plurality of signal pads 2 are formed on the periphery of an IC substrate 1, and a GND pad 3 is formed for each of the signal pads 2. Each GND pad 3 is connected to a common GND line 4.

GNDライン4には、その長手方向に沿って、適当な間
隔を置いてスリット状の間隙領域5a。
The GND line 4 is provided with slit-shaped gap regions 5a at appropriate intervals along its longitudinal direction.

5b、5cが形成されている。これらの間隙領域5a、
5b、5cの間隙幅δは絶縁性を保持できる大きさでよ
く、任意に当該GNDライン4に要求される電流容量に
合わせて設定する。このGNDライン4からは所要の個
所で分岐配線4a。
5b and 5c are formed. These gap areas 5a,
The gap width δ between 5b and 5c may be any size that can maintain insulation, and is arbitrarily set according to the current capacity required of the GND line 4. Branch wiring 4a is branched from this GND line 4 at required locations.

4b、・・・4nが施され、チップ内の所要個所に延在
されている。
4b, . . . 4n are applied and extended to required locations within the chip.

なお、このようにして形成されるスリット状の開領域5
a、5b、5cは配線材料(例えば、A、Q配線)に対
してのみ形成するもので、IC基板の角部にクラッキン
グ防止用に設けられるスリットとはその性質が全く異な
るものである。
Note that the slit-shaped open area 5 formed in this way
The slits a, 5b, and 5c are formed only for the wiring material (for example, the A and Q wirings), and have completely different properties from the slits provided at the corners of the IC board to prevent cracking.

以上の構成において、ノイズ発生源を■1とすると、発
生したノイズは、例えば間隙領域5bに沿って伝搬し、
この間隙領域5bを迂回して分岐配線4a、4b、・・
・4nに伝搬される。この長い伝搬経路においてノイズ
が大幅に減衰することとなる。また、この伝搬したノイ
ズは、途中GNDバッドにて著しく減少されるので、ノ
イズがGNDパッド近くを伝搬するようにすることは非
常に望ましい。これに対し、従来の構成ではノイズ発生
源Aと分岐配線4a、4b、・・・4nとが鼓短距離で
結ばれるため、ノイズの減衰がほとんどなく、IC内の
信号に直接的に混入するものであった。
In the above configuration, if the noise source is 1, the generated noise propagates, for example, along the gap region 5b,
Branch wiring 4a, 4b, . . . bypasses this gap region 5b.
・Propagated to 4n. Noise is significantly attenuated in this long propagation path. Furthermore, since this propagated noise is significantly reduced at a GND pad on the way, it is highly desirable to allow the noise to propagate near the GND pad. In contrast, in the conventional configuration, the noise generation source A and the branch wirings 4a, 4b, ... 4n are connected over short distances, so there is almost no attenuation of the noise, and the noise is directly mixed into the signal within the IC. It was something.

なお、上記実施例は、GND配線について述べたが、本
発明は他の電源配線についても全く同様の効果を有する
ものである。
Although the above embodiment has been described with respect to the GND wiring, the present invention has exactly the same effect on other power supply wiring.

瓜ユn遡 第2図に本発明の第2実施例を示す、この第2図におい
て第1図と重複する部分には同一の符号を14f して
その詳細な説明は省略する。
A second embodiment of the present invention is shown in FIG. 2. In FIG. 2, parts that overlap with those in FIG.

この第2実施例と第1実施例とで異なる点は、スリット
状の間隙領域をGNDラインの幅方向に複数並列(第2
図では、2水平行)に配置した点である。すなわち、第
2図に示すように、2本のスリット状の間隙領域5a〜
5fが互に所定間隔を置いて形成されている。第1図に
おいて、■においてスイッチングノイズが発生したとす
ると、このノイズは直接分岐配線4a、4b、・・・4
nに達してしまうが、第2図に示すようにスリット状の
間隔領域とGNDラインに設けておければ、前記問題点
が生ずることがなくなる。
The difference between the second embodiment and the first embodiment is that a plurality of slit-shaped gap regions are arranged in parallel in the width direction of the GND line (second
In the figure, these are points arranged in two horizontal lines). That is, as shown in FIG. 2, two slit-shaped gap regions 5a to
5f are formed at predetermined intervals. In FIG. 1, if switching noise occurs in (■), this noise will be directly transmitted to the branch wirings 4a, 4b, . . .
However, if the slit-shaped interval region and the GND line are provided as shown in FIG. 2, the above-mentioned problem will not occur.

各スリット状間隔領IJIU5a〜5fのGNDライン
4の長手方向における長さ」、相対的間隔WおよびGN
Dライン4の幅方向における間隔dは、当該ICが要求
する電流容量等に合わせて適宜設定する。スリット状間
隙領域自体の間隙幅δも同様である。
The length of each slit-like interval region IJIU5a to 5f in the longitudinal direction of the GND line 4, the relative interval W and GN
The interval d in the width direction of the D line 4 is appropriately set according to the current capacity required by the IC. The same applies to the gap width δ of the slit-like gap region itself.

このように、スリット状間隙領域5a〜5fを多重配置
することにより、ノイズ伝搬経路長が長くなり、−層の
ノイズ低減効果を確保することができる。
By arranging the slit-like gap regions 5a to 5f in multiple layers in this way, the length of the noise propagation path becomes longer, and the noise reduction effect of the negative layer can be ensured.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、本発明によれば、電源ライン上にス
リット状間隙領域を形成したことにより、ノイズ伝搬経
路長を多くとることができ、その分だけノイズ到達距離
が長くなるので従来のように電源ラインの幅を広げたり
、電源パッドの増設を行うことなく、ノイズの低減を図
ることができる。
As described above, according to the present invention, by forming the slit-like gap region on the power supply line, it is possible to increase the length of the noise propagation path, and the distance that the noise reaches is correspondingly longer. Noise can be reduced without increasing the width of the power supply line or adding additional power supply pads.

3・・・GNDパッド、 4・・・GNDライン、 4a〜4n・・・分岐配線、 5a〜5f・・・スリット間隙領域。3...GND pad, 4...GND line, 4a to 4n...branch wiring, 5a to 5f...Slit gap area.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1実施例を示ず部分拡大平面図、 第2図は本発明の第2実施例を示す部分拡大平面図であ
る。 1・・・IC基板、 2・・・信号パッド、 本発明の第1実施例を示す拡大平面図 呈1図 本発明の第2実施例色示す拡大平面図
FIG. 1 is a partially enlarged plan view showing a first embodiment of the present invention, and FIG. 2 is a partially enlarged plan view showing a second embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... IC board, 2... Signal pad, An enlarged plan view showing the first embodiment of the present invention. 1. An enlarged plan view showing the color of the second embodiment of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 半導体集積回路基板(1)上に設けられた複数の電源用
パッド(3)と、該パッド間を接続する電源配線(4)
を有する半導体集積回路装置において、該電源配線(4
)領域内の隣接する電源用パッド(3)間に、該電源配
線(4)の長手方向に平行にスリット状の間隙領域(5
a〜5f)を形成したことを特徴とする半導体集積回路
装置。
A plurality of power supply pads (3) provided on a semiconductor integrated circuit board (1) and power supply wiring (4) connecting the pads.
In the semiconductor integrated circuit device having the power supply wiring (4
) A slit-shaped gap region (5) is provided between adjacent power supply pads (3) in the region parallel to the longitudinal direction of the power supply wiring (4).
A semiconductor integrated circuit device characterized in that a to 5f) are formed.
JP14653688A 1988-06-14 1988-06-14 Semiconductor integrated circuit Pending JPH022122A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14653688A JPH022122A (en) 1988-06-14 1988-06-14 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14653688A JPH022122A (en) 1988-06-14 1988-06-14 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPH022122A true JPH022122A (en) 1990-01-08

Family

ID=15409869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14653688A Pending JPH022122A (en) 1988-06-14 1988-06-14 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPH022122A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729048A (en) * 1993-09-17 1998-03-17 Fujitsu Limited Cmos ic device suppressing spike noise
JP2016092061A (en) * 2014-10-30 2016-05-23 株式会社東芝 Semiconductor device and solid state image pickup device
US10978392B2 (en) 2019-08-30 2021-04-13 Fujitsu Limited Electrical chip and optical module

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5729048A (en) * 1993-09-17 1998-03-17 Fujitsu Limited Cmos ic device suppressing spike noise
JP2016092061A (en) * 2014-10-30 2016-05-23 株式会社東芝 Semiconductor device and solid state image pickup device
US10978392B2 (en) 2019-08-30 2021-04-13 Fujitsu Limited Electrical chip and optical module

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