JPH02210784A - Ceramics heater furnace - Google Patents
Ceramics heater furnaceInfo
- Publication number
- JPH02210784A JPH02210784A JP2972689A JP2972689A JPH02210784A JP H02210784 A JPH02210784 A JP H02210784A JP 2972689 A JP2972689 A JP 2972689A JP 2972689 A JP2972689 A JP 2972689A JP H02210784 A JPH02210784 A JP H02210784A
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- ceramic heater
- heater element
- rod
- holders
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 52
- 239000000463 material Substances 0.000 abstract description 14
- 238000010438 heat treatment Methods 0.000 abstract description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 12
- 239000011247 coating layer Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 2
- 239000011226 reinforced ceramic Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000012783 reinforcing fiber Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
１産業上の利用分野］
本発明は、セラミックスヒータ炉に関し、特に焼成炉、
熱間静水圧プレス装置（ＨＩＰ）用炉、超高温試験測定
炉、単結晶溶解炉等の発熱体としてセラミツ２スヒータ
を使用するセラミックスヒータ炉に関する。[Detailed Description of the Invention] 1. Field of Industrial Application] The present invention relates to a ceramic heater furnace, particularly a firing furnace,
The present invention relates to a ceramic heater furnace that uses a ceramic 2-s heater as a heating element for a hot isostatic press (HIP) furnace, an ultra-high temperature test and measurement furnace, a single crystal melting furnace, and the like.
１従来の技術］
従来のセラミックスヒータ炉に使用されているセラミッ
クスヒータは、第３図に示すように、セラミックスヒー
タエレメント１の上下部に電極、５．５が捲装された給
電部２，４と、これらの給電部２，４間の発熱部３とか
らなっている。なお、この電極５．５にはリード＃ａ６
．６が接続されている。1. Prior Art] As shown in FIG. 3, a ceramic heater used in a conventional ceramic heater furnace has a power supply section 2, 4 in which electrodes 5.5 are wound around the upper and lower parts of a ceramic heater element 1. and a heat generating section 3 between these power feeding sections 2 and 4. Note that lead #a6 is attached to this electrode 5.5.
．． 6 is connected.
このセラミックスヒータエレメント１のセラミックス材
料は、第５図に示すように、その特性上、常温下及び１
０００℃以下の温度領域で比抵抗値が高いので、本来、
発熱部３の太さがあればよい給電部２．４を発熱部３よ
り太（して、抵抗値を低く抑えるようにしている。すな
わち、抵抗値を低く抑えるために、セラミックスヒータ
エレメント１の線径を太くするようにしている。As shown in FIG. 5, the ceramic material of this ceramic heater element 1 is
Since the specific resistance value is high in the temperature range below 000℃, originally,
The power supply part 2.4 is made thicker than the heat generating part 3 so that the resistance value can be kept low.In other words, in order to keep the resistance value low, the power supply part 2.4 is made thicker than the heat generating part 3.In other words, in order to keep the resistance value low, I'm trying to make the wire diameter thicker.
このように、抵抗値を低くするために給電部２゜４を発
熱部３より太くしている第３図に示す従来のセラミック
スヒータでは、給電部２．４に印加する電圧を高くする
必要があり、この通電により給電部２，４が発熱し熱膨
張して熱応力が発生し、早期に破損すると言う問題があ
った。In this way, in the conventional ceramic heater shown in FIG. 3, in which the power supply part 2.4 is made thicker than the heat generating part 3 in order to lower the resistance value, it is necessary to increase the voltage applied to the power supply part 2.4. This energization causes the power supply parts 2 and 4 to generate heat and expand thermally, generating thermal stress, which causes early damage.
この問題を解決すべく、本発明者らは、先に棒状セラミ
ックスヒータエレメントの両端部に給電部を設け、同給
電部の外周面に電極を取付けたセラミックスヒータにお
いて、該給電部の外周面に前記電極の幅よりも広い金属
被覆層を形成したヒータエレメントを提案した（特願昭
６２−２５６３１６号）ｍ第４図はこの先願のヒータエ
レメントの構造を示す図である。In order to solve this problem, the present inventors first provided a power feeding part at both ends of a rod-shaped ceramic heater element, and installed an electrode on the outer peripheral surface of the power feeding part in a ceramic heater. A heater element in which a metal coating layer was formed that was wider than the width of the electrode was proposed (Japanese Patent Application No. 1982-256316). Fig. 4 is a diagram showing the structure of the heater element of this earlier application.
第４図１こおいて、Ｕ字形の棒状セラミックスヒータエ
レメント１０において、Ｉ＋が発熱部で、１２がセラミ
ックスヒータニレメントロの両端部に設けられた給電部
であり、該給電部１２の外周面に電気抵抗の低い（電気
伝導性の良好な）金属被覆層１３゜１３が形成され、該
金属被覆層１３．１３の外周面に電極１４．１４が取付
けられ、該電極１４．１４にリード線１５゜１５が取付
けられている。In FIG. 4, in the U-shaped rod-shaped ceramic heater element 10, I+ is a heat generating part, 12 is a power supply part provided at both ends of the ceramic heater element, and the outer circumferential surface of the power supply part 12 is A metal coating layer 13.13 with low electrical resistance (good electrical conductivity) is formed on the metal coating layer 13.13, an electrode 14.14 is attached to the outer peripheral surface of the metal coating layer 13.13, and a lead wire is connected to the electrode 14.14. 15°15 is installed.
なお、金属被覆層１３．１３の幅はフ［４１４，１４の
幅よりも広（なっている。Note that the width of the metal coating layer 13.13 is wider than the width of the metal coating layer 13.13.
−ｌユ記の棒状セラミックスヒータエレメントＵの材料
には、例几ば純度が９９．５％以上のジルコニア（Ｚｒ
Ｏ＊）が使用される。このジルコニア（ＺｒＯ＊）は、
６〜１０モル％のイツトリア（Ｙ＊Ｏ＊）か、１０〜１
５モル％のカルシニア（Ｃａｂ）又はマグネシア（口０
）を添加して安定化させたもので、成形前は粉末状にな
っている。For example, the material of the rod-shaped ceramic heater element U in the above-mentioned section is zirconia (Zr) with a purity of 99.5% or more.
O*) is used. This zirconia (ZrO*) is
6-10 mol% of ittria (Y*O*) or 10-1
5 mol% carcinia (Cab) or magnesia (mouth 0
) is added to stabilize it, and it is in powder form before being molded.
また、９〜１４モル％のイツトリア（ｙｔｏＪとカルシ
ニア（Ｃａｂ）を添加した粉末状のものであってもよい
が、その場合には、高価なイツトリア（Ｙ＊Ｏ＊）の世
を２〜６モル％程度に少な（することができる。It may also be a powder containing 9 to 14 mol% of ittria (ytoJ and carcinia (Cab)), but in that case, the world of expensive ittria (Y*O*) can be reduced by 2 to 6 mol%. It can be as small as mol%.
以上の材料を棒状に成形するには、押出成形法、静水圧
プレス法、鋳込成形法を採用し、成形後所望のヒータ形
状に加工することができる。その際、焼結は、１５００
〜１８５０℃の温度に数時間以上保持して１行う。In order to form the above-mentioned material into a rod shape, an extrusion molding method, a hydrostatic press method, or a casting molding method can be employed, and after molding, it can be processed into a desired heater shape. At that time, sintering was performed at 1500
This is carried out by holding the temperature at ~1850°C for several hours or more.
また、棒状セラミックスヒータニレメントロには、冷却
時の熱衝撃や熱膨張時の熱応力による破損を防止するた
めに、図示省略のスリットを軸方向及び円周方向に設け
てもよい。In addition, slits (not shown) may be provided in the axial direction and circumferential direction of the rod-shaped ceramic heater Nilementro in order to prevent damage due to thermal shock during cooling or thermal stress during thermal expansion.
上記の金属被覆層１３の材料には、白金、白金−ロジウ
ム合金、金等が使用され、これらのペーストによる塗布
、ディッピング、メツキ、溶射により棒状セラミックス
ヒータエレメント■の給電部１２の外周面に層状に金属
被覆層１３が形成される。Platinum, platinum-rhodium alloy, gold, etc. are used as the material for the metal coating layer 13, and a layered layer is formed on the outer circumferential surface of the power supply part 12 of the rod-shaped ceramic heater element (2) by coating, dipping, plating, or thermal spraying with these pastes. A metal coating layer 13 is formed thereon.
その厚さは、５〜５０μ議とすることが好ましい。The thickness is preferably 5 to 50 microns.
電極１４及びリード線１５の材料には、白金ロジウム線
や白金線が使用され、これらの線が金属被覆層１３の端
部に近い部分に数回巻付けられて電極１４が構成される
。Platinum-rhodium wire or platinum wire is used as the material for the electrode 14 and the lead wire 15, and the electrode 14 is constructed by winding these wires several times around a portion near the end of the metal coating layer 13.
なお、第４図のものは、各給電部１２にテーパを付して
いるが、その理由は各給電部１２の径を発熱部１１の径
よりも太（して、各電極１４の金属被覆層１３に対する
接触面積を増大させるためである。In the case shown in FIG. 4, each power supply part 12 is tapered. This is to increase the contact area with the layer 13.
１：発明が解決しようとする［１１
」；記の棒状セラミックスヒータニレメントロは、１５
００〜２０００℃程度の超高温領域で使用するのに適し
たものであるがζ本発明者等の実験により、実際には、
このような超高温域で使用すると、ヒータエレメント材
料（ジルコニア焼結体）の高温強面が低下して変形（ク
リープ）が生じるため、ヒータエレメントを自立型にし
てヒータを構成することは困難であることが明らかにな
った。1: The invention aims to solve [11];
Although it is suitable for use in the ultra-high temperature range of about 00 to 2000 degrees Celsius, the inventors' experiments have shown that in reality,
When used in such an ultra-high temperature range, the high-temperature strength of the heater element material (zirconia sintered body) decreases and deformation (creep) occurs, making it difficult to construct a heater with a self-supporting heater element. It became clear.
そこで、本発明では、」二記の゛ような超高温領域でも
安定して使用することのできるセラミックスヒータエレ
メントの構成を考案し、このセラミ、２クスヒータエレ
メントを用いたセラミックスヒータ炉を提案することを
目的とする。Therefore, in the present invention, we have devised a configuration of a ceramic heater element that can be used stably even in the ultra-high temperature range as described in ``2'', and proposed a ceramic heater furnace using this ceramic 2x heater element. The purpose is to
〔課題を解決するための手段］
本発明は、上記の目的を、棒状（中実、中空いずれでも
良い）セラミックスヒータエレメントの発熱部及び給電
部の表面を覆い、かつ組立て自在に分割されたエレメン
ト支持体を具備し、１５００℃以上の超高温領域で使用
することを特徴とするセラミックスヒータ炉により達成
するものである。[Means for Solving the Problems] The present invention has achieved the above object by providing an element that covers the surfaces of the heat generating part and the power supply part of a rod-shaped (either solid or hollow) ceramic heater element and is divided into parts that can be freely assembled. This is achieved by a ceramic heater furnace that is equipped with a support and is used in an ultra-high temperature range of 1500° C. or higher.
このエレメント支持体の材料としては、繊維強化セラミ
ックス多孔質体で、気孔率が２０〜５０％のものを使用
することが好ましく、該多孔質体の母材としては、マグ
ネシア、カルシア、イツトリア等で安、電化させたジル
コニア、マグネシア、アルミナ等の高温用酸化物や複合
酸化物が適しており、強化用繊維としては、母材と同材
質か、これらと反応しない熱的に安定な酸化物のウィス
カや短又は長繊維が適している。As the material for this element support, it is preferable to use a fiber-reinforced ceramic porous body with a porosity of 20 to 50%, and the base material of the porous body is magnesia, calcia, ittria, etc. High-temperature oxides and composite oxides such as cheap and electrified zirconia, magnesia, and alumina are suitable, and the reinforcing fibers should be made of the same material as the base material or thermally stable oxides that do not react with these materials. Whiskers and short or long fibers are suitable.
［作用］
本発明セラミックスヒータ炉においては、該炉を１５０
０℃を超える超高温領域で運転し、棒状セラミックスヒ
ータエレメントが変形を生じたとしても、′該エレメン
トがエレメント支持体で支持されているため、太き（変
形することはない。[Function] In the ceramic heater furnace of the present invention, the furnace is
Even if the bar-shaped ceramic heater element is deformed during operation in an ultra-high temperature range exceeding 0°C, it will not be deformed because the element is supported by the element support.
従って、」二記のような超高温領域での連続した運転が
可能となり、同時に・セラミックスヒータの寿命が飛躍
的に向上する。Therefore, it is possible to operate continuously in the ultra-high temperature range as described in 2. At the same time, the life of the ceramic heater is dramatically improved.
また、エレメント支持体に使用される」二記の繊維強化
セラミックス多孔質体は、熱衝撃応力を緩和する作用を
有する。この多孔質体の気孔率は、この熱衝撃応力を効
果的に緩和し得る最適な範囲が、」二記の２０〜５０％
である。Furthermore, the fiber-reinforced ceramic porous body described in "2" used for the element support has the effect of relieving thermal shock stress. The optimum range of the porosity of this porous body for effectively alleviating this thermal shock stress is 20 to 50% as specified in 2.
It is.
なお、エレメント支持体は、母材粉末と強化用ｍ維とを
所定の割合で混合した後、鋳込み成形等で必要な形状に
加コーシ、１５００〜１９００℃で焼成等してＸ１ｌｉ
２される。The element support is made by mixing base material powder and reinforcing m-fibers in a predetermined ratio, molding it into the required shape by casting, etc., and baking it at 1,500 to 1,900°C to form X1li.
2 will be given.
このエレメント支持体の比抵抗値は、棒状のセラミ、ク
スヒータエレメントの１０倍以上であるため、もし上記
のような超高温領域で運転中にセラミックスヒータエレ
メントとエレメント支持体が接触したとしても、この棒
状セラミックスヒータエレメントからエレメント支持体
への短絡は起こらない。The specific resistance value of this element support is more than 10 times that of the rod-shaped ceramic heater element, so even if the ceramic heater element and the element support come into contact during operation in the ultra-high temperature range mentioned above, No short circuit occurs from this rod-shaped ceramic heater element to the element support.
［実施例］
第１図は本発明セラミックスヒータ炉の一実施例を示す
縦断面図、第２図は第１図のＡ−Ａ線断面矢視図である
。[Example] FIG. 1 is a longitudinal cross-sectional view showing an example of the ceramic heater furnace of the present invention, and FIG. 2 is a cross-sectional view taken along line A--A in FIG. 1.
第１．２図において、且が本発明に係るセラミ。In FIG. 1.2, the ceramic according to the present invention is shown.
クスヒータであり、棒状（中実父は中空）のセラミック
スヒータエレメント１０．これを支持するための内側エ
レメント支持体２１と外側エレメント支持体２２、内側
エレメント支持体２１の上端部に嵌合する炉室上ｆＬ２
３、断熱シェル２４及び被加熱材料を載せるための炉床
２６から構成される炉室２８を持つ。10. A ceramic heater element that is a ceramic heater and is rod-shaped (the solid body is hollow). Inner element support 21 and outer element support 22 for supporting this, furnace chamber upper fL2 that fits into the upper end of inner element support 21
3. It has a furnace chamber 28 consisting of a heat insulating shell 24 and a hearth 26 for placing the material to be heated.
内側エレメント支持体２１と外側エレメント支持体２°
２は、棒状セラミックスヒータエレメント１ｏの周囲を
囲むように、該棒状セラミックスヒータエレメントＬσ
の形状に合った溝を有し、接円・外側エレメント２１．
２２に分割、組立て可能に構成されている。Inner element support 21 and outer element support 2°
2 is a rod-shaped ceramic heater element Lσ so as to surround the rod-shaped ceramic heater element 1o.
It has a groove that matches the shape of the tangential circle/outer element 21.
It is constructed so that it can be divided into 22 parts and assembled.
また、上記の炉室２８の温度は、炉室２８内に配置され
た側温センサ２５により検出し、これにより炉室２８内
の温度を制御する。Further, the temperature of the furnace chamber 28 is detected by a side temperature sensor 25 disposed inside the furnace chamber 28, and the temperature inside the furnace chamber 28 is thereby controlled.
更に、上記のセラミックスヒータ■は炉架台２９」二に
セットされ、周囲を予熱ヒータ２７で囲まれたセラミッ
クスヒータ炉（加熱炉） ３０として構成される。Furthermore, the above ceramic heater (1) is set on a furnace mount 29'2, and is configured as a ceramic heater furnace (heating furnace) 30 surrounded by a preheater 27.
このセラミックスヒータ炉且は、上蓋３Ｊ、円筒胴３３
、下Ｍ３２よりなる高圧容器ｕ内にセットされ、高圧、
高温下での酸素ガスを数ｖｏ１％から数＋ｖｏ１％含有
する熱間静水圧成形（旧Ｐ）処理等に使用される。This ceramic heater furnace also includes an upper lid 3J and a cylindrical body 33.
, is set in a high-pressure container u consisting of a lower M32, and the high pressure,
It is used for hot isostatic pressing (formerly P) processing, etc. containing oxygen gas of several vol% to several +vol% of oxygen gas at high temperatures.
棒状セラミックスヒータエレメント１０及び予熱ヒータ
２７への給電は、それぞれ高圧容器Ｕ下ｉ３２を貫通し
て配された給電ケーブル３４．３５により行う。Power is supplied to the rod-shaped ceramic heater element 10 and the preheating heater 27 by power supply cables 34 and 35, respectively, which are arranged to pass through the lower i32 of the high-pressure vessel U.
内・外側ヒータ支持体２１．２２及び炉室２８上蓋２３
は、棒状セラミックスヒータエレメントｌＯにより超高
温（１５００〜２０００℃）に加熱されるので、耐熱性
が有り、超高温域において強度劣化が少ない材質を選ぶ
必要がある。Inner/outer heater supports 21, 22 and furnace chamber 28 upper lid 23
is heated to an extremely high temperature (1,500 to 2,000°C) by a rod-shaped ceramic heater element IO, so it is necessary to select a material that is heat resistant and exhibits little strength deterioration in the extremely high temperature range.
１’Ｔ１．２図の例では、ジルコニアファイバで強化し
たジルコニア複合材からなる多孔質体（空孔率３０〜５
０％）を使用した。In the example shown in Figure 1'T1.2, a porous body (porosity 30-5) is made of a zirconia composite material reinforced with zirconia fibers.
0%) was used.
本例の構造を持つセラミックスヒータ炉Ｕで昇温試験を
実施した。A temperature increase test was conducted using a ceramic heater furnace U having the structure of this example.
運転条件は、予熱ヒータ２７の温度； １３００℃、炉
室２８内の温度； ２１００℃、圧力；２００にｇ／ｃ
ｍ”、圧力媒体ガス；酸素・アルゴン混合ガス（酸素ガ
ス濃度５％）とした。The operating conditions are: temperature of preheater 27: 1300°C, temperature inside furnace chamber 28: 2100°C, pressure: 200g/c
m'', pressure medium gas; oxygen/argon mixed gas (oxygen gas concentration 5%).
この結果、運転中は電気系の短絡もなく 、２１００℃
の保持が良好にできた。As a result, there is no short circuit in the electrical system during operation, and the temperature is 2100℃.
was successfully retained.
また、運転後の各部材の状況は良好であり、破損等もな
く、連続運転における耐久性が大きく向上したことが確
認された。In addition, the condition of each member after operation was good, with no damage or the like, and it was confirmed that the durability during continuous operation was greatly improved.
棒状セラミックスヒータエレメント１０は、多少変形が
認められたが、内・外側エレメント支持体２１．２２に
より支持され、大きな変形は生じなかった。Although the rod-shaped ceramic heater element 10 was slightly deformed, it was supported by the inner and outer element supports 21 and 22, and no major deformation occurred.
［発明の効果］
以上のように、本発明セラミックスヒータ炉によれば、
棒状セラミックスヒータエレメントの超高温域での高温
強度低下に伴う変形を、床持体を設けることによって防
止乃至は局所的な変形に止めることができるため、超高
温域での性能（保温性、断熱効果、熱効率）の向上及び
寿命の延長を図ることができる。[Effects of the Invention] As described above, according to the ceramic heater furnace of the present invention,
The deformation of rod-shaped ceramic heater elements due to a decrease in high-temperature strength in the ultra-high temperature range can be prevented or limited to local deformation by providing a floor support. effect, thermal efficiency) and extend the service life.
第１図は本発明炉の一実施例を示す縦断面図、第２図は
第１図の八−入線横断面図、第３図は従来のセラミック
スヒータ炉を示す一部縦断面図、第４図は先願に係る棒
状セラミックスヒータエレメントを示す一部縦断面図、
第５図はセラミックスの温度と比抵抗値特性を示すグラ
フである。
！Ｏ：棒状（中実父は中空）セラミックスヒータエレメ
ント
２１、２２ ：内・外側エレメント支持体３０：セラミ
ックスヒータ炉
第２図
第４図
第５図
温度じＣ）
３／６４
７７１９−３に
０発
明
者
伊
藤
俊
明
滋賀県大津市園山１丁目１番１号
所内
東し株式会社滋賀事業Fig. 1 is a longitudinal cross-sectional view showing an embodiment of the furnace of the present invention, Fig. 2 is a cross-sectional view taken along the line 8 in Fig. 1, and Fig. 3 is a partial longitudinal cross-sectional view showing a conventional ceramic heater furnace. FIG. 4 is a partial vertical sectional view showing a rod-shaped ceramic heater element according to the prior application;
FIG. 5 is a graph showing the temperature and resistivity characteristics of ceramics. ! O: Rod-shaped (solid body is hollow) Ceramic heater elements 21, 22: Inner/outer element support 30: Ceramic heater furnace Toshiaki Ito 1-1-1 Sonoyama, Otsu City, Shiga Prefecture Shiga Business Co., Ltd.
Claims (1)
の表面を覆い、かつ組立て自在に分割されたエレメント
支持体を具備し、１５００℃以上の超高温領域で使用す
ることを特徴とするセラミックスヒータ炉。A ceramic heater furnace comprising an element support that covers the surfaces of a heat generating part and a power supply part of a rod-shaped ceramic heater element and is divided into parts so as to be freely assembled, and is used in an ultra-high temperature region of 1500° C. or higher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1029726A JP2820423B2 (en) | 1989-02-10 | 1989-02-10 | Ceramic heater furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1029726A JP2820423B2 (en) | 1989-02-10 | 1989-02-10 | Ceramic heater furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02210784A true JPH02210784A (en) | 1990-08-22 |
| JP2820423B2 JP2820423B2 (en) | 1998-11-05 |
Family
ID=12284111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1029726A Expired - Lifetime JP2820423B2 (en) | 1989-02-10 | 1989-02-10 | Ceramic heater furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2820423B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103940244A (en) * | 2014-04-03 | 2014-07-23 | 鞍山星源达科技有限公司 | Method for constructing heating element embedded type hearth for instrument device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5696127A (en) * | 1979-12-12 | 1981-08-04 | Vdo Schindling | Valve gear for controlling number of idling revolution of otto engine |
| JPS6348789A (en) * | 1986-08-15 | 1988-03-01 | 三菱重工業株式会社 | Ceramic heater |
| JPS6391988A (en) * | 1986-10-03 | 1988-04-22 | 日本化学陶業株式会社 | Electric furnace |
-
1989
- 1989-02-10 JP JP1029726A patent/JP2820423B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5696127A (en) * | 1979-12-12 | 1981-08-04 | Vdo Schindling | Valve gear for controlling number of idling revolution of otto engine |
| JPS6348789A (en) * | 1986-08-15 | 1988-03-01 | 三菱重工業株式会社 | Ceramic heater |
| JPS6391988A (en) * | 1986-10-03 | 1988-04-22 | 日本化学陶業株式会社 | Electric furnace |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103940244A (en) * | 2014-04-03 | 2014-07-23 | 鞍山星源达科技有限公司 | Method for constructing heating element embedded type hearth for instrument device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2820423B2 (en) | 1998-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3388306B2 (en) | Electric furnace | |
| US5850073A (en) | Electric heating element and heater assembly | |
| JP3658770B2 (en) | Ceramic glow plug | |
| JPH02210784A (en) | Ceramics heater furnace | |
| JP2664977B2 (en) | Ceramic heater furnace | |
| JP3128325B2 (en) | Small electric furnace for optical fiber processing | |
| JP2004125202A (en) | Electric resistance furnace | |
| US6741632B1 (en) | Ultra high temperature rapid cycle induction furnace | |
| JP4053277B2 (en) | Electric furnace | |
| JPH0443588A (en) | Ceramic heater furnace | |
| CA2384211A1 (en) | Refractory nozzle | |
| GB2099670A (en) | Furnace elements and furnaces | |
| JPS6323732A (en) | Oxidizing atmosphere oven | |
| JP2580216B2 (en) | Heater heater | |
| JPH0782911B2 (en) | Pressure heating furnace | |
| JP2649295B2 (en) | Ultra high temperature electric resistance furnace | |
| EP0434839B1 (en) | Oxidizing atmosphere hot isotropic press | |
| JP2779124B2 (en) | Zirconia heating structure | |
| JP4927433B2 (en) | Electric furnace | |
| JP2003314970A (en) | Tubular electric furnace | |
| RU2098780C1 (en) | Method for manufacturing thermocouple protective cover | |
| US20040084441A1 (en) | Resistance-heating element, and electric resistance furnace using the same | |
| JPH076745B2 (en) | Hot isostatic pressing equipment | |
| JPH04370689A (en) | Heater for gas sensor | |
| JPS59100269A (en) | Element for vacuum deposition |