JPH0220827Y2 - - Google Patents
Info
- Publication number
- JPH0220827Y2 JPH0220827Y2 JP20292585U JP20292585U JPH0220827Y2 JP H0220827 Y2 JPH0220827 Y2 JP H0220827Y2 JP 20292585 U JP20292585 U JP 20292585U JP 20292585 U JP20292585 U JP 20292585U JP H0220827 Y2 JPH0220827 Y2 JP H0220827Y2
- Authority
- JP
- Japan
- Prior art keywords
- process tube
- fixing ring
- sleeve
- sleeve hole
- key
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 49
- 238000009792 diffusion process Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000011491 glass wool Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20292585U JPH0220827Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62109443U JPS62109443U (enExample) | 1987-07-13 |
| JPH0220827Y2 true JPH0220827Y2 (enExample) | 1990-06-06 |
Family
ID=31167764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20292585U Expired JPH0220827Y2 (enExample) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220827Y2 (enExample) |
-
1985
- 1985-12-27 JP JP20292585U patent/JPH0220827Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62109443U (enExample) | 1987-07-13 |
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