JPH0220798U - - Google Patents

Info

Publication number
JPH0220798U
JPH0220798U JP1988098332U JP9833288U JPH0220798U JP H0220798 U JPH0220798 U JP H0220798U JP 1988098332 U JP1988098332 U JP 1988098332U JP 9833288 U JP9833288 U JP 9833288U JP H0220798 U JPH0220798 U JP H0220798U
Authority
JP
Japan
Prior art keywords
disks
siegbahn
stationary
rotating
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988098332U
Other languages
English (en)
Japanese (ja)
Other versions
JP2501275Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988098332U priority Critical patent/JP2501275Y2/ja
Publication of JPH0220798U publication Critical patent/JPH0220798U/ja
Application granted granted Critical
Publication of JP2501275Y2 publication Critical patent/JP2501275Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP1988098332U 1988-07-27 1988-07-27 ジ―グバ―ン形真空ポンプ Expired - Lifetime JP2501275Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988098332U JP2501275Y2 (ja) 1988-07-27 1988-07-27 ジ―グバ―ン形真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988098332U JP2501275Y2 (ja) 1988-07-27 1988-07-27 ジ―グバ―ン形真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0220798U true JPH0220798U (enrdf_load_stackoverflow) 1990-02-13
JP2501275Y2 JP2501275Y2 (ja) 1996-06-12

Family

ID=31324499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988098332U Expired - Lifetime JP2501275Y2 (ja) 1988-07-27 1988-07-27 ジ―グバ―ン形真空ポンプ

Country Status (1)

Country Link
JP (1) JP2501275Y2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6353195B2 (ja) 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
JP6616560B2 (ja) 2013-11-28 2019-12-04 エドワーズ株式会社 真空ポンプ用部品、および複合型真空ポンプ
JP6228839B2 (ja) 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP6586275B2 (ja) 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
JP6692635B2 (ja) 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100608A (enrdf_load_stackoverflow) * 1973-01-29 1974-09-24
JPS60153494A (ja) * 1984-01-20 1985-08-12 Hitachi Ltd ねじ溝分子ポンプ
JPS60182394A (ja) * 1984-02-29 1985-09-17 Shimadzu Corp タ−ボ分子ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100608A (enrdf_load_stackoverflow) * 1973-01-29 1974-09-24
JPS60153494A (ja) * 1984-01-20 1985-08-12 Hitachi Ltd ねじ溝分子ポンプ
JPS60182394A (ja) * 1984-02-29 1985-09-17 Shimadzu Corp タ−ボ分子ポンプ

Also Published As

Publication number Publication date
JP2501275Y2 (ja) 1996-06-12

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