JPH0220340U - - Google Patents
Info
- Publication number
- JPH0220340U JPH0220340U JP9801288U JP9801288U JPH0220340U JP H0220340 U JPH0220340 U JP H0220340U JP 9801288 U JP9801288 U JP 9801288U JP 9801288 U JP9801288 U JP 9801288U JP H0220340 U JPH0220340 U JP H0220340U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thin film
- film material
- holding member
- holding surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9801288U JPH0220340U (fr) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9801288U JPH0220340U (fr) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220340U true JPH0220340U (fr) | 1990-02-09 |
Family
ID=31323897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9801288U Pending JPH0220340U (fr) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220340U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06288047A (ja) * | 1993-03-31 | 1994-10-11 | Shintaro Sato | ブロック覆工構造 |
| JP2009238869A (ja) * | 2008-03-26 | 2009-10-15 | Ulvac Japan Ltd | 搬送トレー及びこの搬送トレーを用いた真空処理装置 |
-
1988
- 1988-07-22 JP JP9801288U patent/JPH0220340U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06288047A (ja) * | 1993-03-31 | 1994-10-11 | Shintaro Sato | ブロック覆工構造 |
| JP2009238869A (ja) * | 2008-03-26 | 2009-10-15 | Ulvac Japan Ltd | 搬送トレー及びこの搬送トレーを用いた真空処理装置 |