JPH0220329U - - Google Patents

Info

Publication number

JPH0220329U

JPH0220329U JP9741988U JP9741988U JPH0220329U JP H0220329 U JPH0220329 U JP H0220329U JP 9741988 U JP9741988 U JP 9741988U JP 9741988 U JP9741988 U JP 9741988U JP H0220329 U JPH0220329 U JP H0220329U

Authority

JP

Japan

Prior art keywords

base

suction hole

wafer box

reduced pressure

pressure suction

Prior art date

1988-07-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 4
• 238000002347 injection Methods 0.000 claims 1
• 239000007924 injection Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 230000005611 electricity Effects 0.000 description 1
• 238000006386 neutralization reaction Methods 0.000 description 1
• 238000012856 packing Methods 0.000 description 1
• 230000003068 static effect Effects 0.000 description 1

Cited By (1)