JPH0220322U - - Google Patents
Info
- Publication number
- JPH0220322U JPH0220322U JP9728488U JP9728488U JPH0220322U JP H0220322 U JPH0220322 U JP H0220322U JP 9728488 U JP9728488 U JP 9728488U JP 9728488 U JP9728488 U JP 9728488U JP H0220322 U JPH0220322 U JP H0220322U
- Authority
- JP
- Japan
- Prior art keywords
- setting section
- mask setting
- light source
- optical system
- wafer chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9728488U JPH0220322U (ru) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9728488U JPH0220322U (ru) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220322U true JPH0220322U (ru) | 1990-02-09 |
Family
ID=31322613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9728488U Pending JPH0220322U (ru) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220322U (ru) |
-
1988
- 1988-07-25 JP JP9728488U patent/JPH0220322U/ja active Pending