JPH02203207A - Measuring instrument for optical axis of reflection - Google Patents

Abstract

PURPOSE:To easily take a high-accuracy measurement by making the lengthwise direction of a CCD line sensor cross the deflection direction of a reflecting mirror to be measured between a position pattern for measurement and a lens for pattern image formation at right angles. CONSTITUTION:The position pattern 14 for measurement is imaged on the CCD line sensor 18 by a lens 17 through the mirror 21 to be measured. The sensor 18 is arranged having its lengthwise direction at right angles to the deflection direction of the mirror 21, and also has marked lines 27 drawn in the deflection direction. The marked lines 27 are arrayed at right angles to the deflection direction of the mirror 21 and one end position of each marked line 27 is shifted stepwise in the deflection direction at right angles to the deflection direction of the mirror 21. The sensor 18 reads the pattern 14 to measure the inclination of the optical axis of the mirror 21 directly.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a reflection optical axis 791 determining device for accurately measuring the inclination of a reflecting mirror provided in the device.

(Prior Art) Generally, in facsimile machines, copying machines, and the like, reflective optical systems are often adopted because of the need to downsize the entire device. Conventionally, the accuracy of the reflecting mirror in this reflective optical system has been measured by measuring the mechanical angle of the surface of the optical frame on which the reflecting mirror is attached using a three-dimensional measuring machine or the like.

(Problems to be Solved by the Invention) However, in the conventional method described above, it is not possible to directly confirm the optical axis of the reflecting mirror, so errors are likely to occur, and the accuracy is particularly low in the case of a narrow reflecting mirror. There was a problem that it was easy to decrease. Furthermore, if the reflecting mirror is mounted deep within the optical frame, there is also the problem that mechanical measurement itself becomes difficult.

On the other hand, there are measurement methods that use parallel light beams such as laser beams, and the NJ standard method using a collimator, but these methods have the disadvantage that they require care in measurement and handling of the laser beam, and that the measurement equipment itself is large-scale. there were.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above problems and provide an easy and highly accurate reflection optical axis measuring device.

[Structure of the invention]

(Means for Solving the Problems) The present invention has been made to solve the above problems, and includes a 1llll standard position pattern, a lens for forming an image of this measurement position pattern, and a lens for forming an image of the measurement position pattern. a CCD line sensor disposed at the imaging position of the measurement position pattern, and the CCD line sensor has a longitudinal direction that extends toward the object to be measured, which is disposed between the lens and the I#l fixed position pattern. The measuring position pattern is arranged in a direction perpendicular to the direction of deflection of the reflecting mirror, and the measuring position pattern has a marked line drawn in the photographing direction of the reflecting mirror, and this marked line is arranged in a direction perpendicular to the deflecting direction of the reflecting mirror. A plurality of markers are arranged in a direction perpendicular to the direction, and the position of one end of each of the markers changes stepwise in the direction of deflection of the reflector as one moves in a direction perpendicular to the direction of deflection of the reflector. It is said to be composed of

(Function) In the present invention, the measurement position pattern and all
A lens for imaging a fixed position pattern, and a CCD line sensor disposed at a position where the lens forms an image of the measurement position pattern, the CCD line sensor having a longitudinal direction that is aligned with the lens and the hpj setting. The measuring position pattern is arranged in a direction perpendicular to the deflection direction of the reflecting mirror, which is the object to be measured, which is arranged between the measurement fixed position patterns, and the measuring position pattern is arranged so that the measurement position pattern is arranged in a direction perpendicular to the deflection direction of the reflecting mirror, which is the object to be measured. A plurality of the marked lines are arranged in a direction perpendicular to the deflection direction of the reflecting mirror, and one end position of each marked line is arranged in a direction perpendicular to the deflecting direction of the reflecting mirror. Since the deflection direction is changed stepwise, the inclination of the optical axis of the reflecting mirror can be directly measured by reading the measurement position pattern with a CCD line sensor. Therefore, the inclination of the optical axis can be easily measured with high accuracy, and even when the reflecting mirror is located deep inside the housing, it can be easily measured. Furthermore, since a CCD line sensor and a measurement position pattern with a wide width are used, it is possible to simultaneously measure the left and right inclinations of a horizontally long reflecting mirror.

(Example) An example of the present invention will be described below with reference to FIGS. 1 to 4.

FIG. 1 is a diagram showing a reflection optical axis measuring device according to the present invention. In this figure, reference numeral 11 indicates a structure.

This structure 11 is formed in a substantially U-shape, and a reference position pattern 12 is attached to the inner wall of one end thereof. A fluorescent lamp 13 is provided in the vicinity of this reference position pattern 12, and is adapted to illuminate the reference position pattern 12. A 1lll fixed position pattern 14 is mounted on the inner wall of the other end of the structure 11. A fluorescent lamp 15 is also provided near the (1) fixed position pattern 14 to illuminate the measurement position pattern 14. In addition, measurement position pattern 1
A detection unit 16 is provided above 4. This detection unit 16 has an imaging lens 17 at its tip.
and a CCD line sensor 1 at the rear end.
8 is provided, and is arranged toward the U-applicable position pattern 12.

A CCD line sensor controller 19 is connected to the CCD line sensor 18, and this CCD line sensor controller 19 drives the CCD line sensor 18 and extracts an image signal from the CCD line sensor 18. . An oscilloscope 20 that visually captures image signals is connected to this CCD line sensor controller 19. An optical housing 22 having a mirror 21 as an object to be measured is positioned in the center of the structure by guides 23, 23.

In such a configuration, the optical arrangement is such that mirror 2
The detection unit 16 is disposed on the extension of the optical axis 24 on the incident side of the mirror 21, and the measurement position pattern 14 is disposed on the extension of the theoretical optical axis 25 on the reflection side of the mirror 21. Furthermore, mirror 21
When there is no detection unit 1 on the incident extension optical axis 26,
A reference position pattern 12 is provided for confirmation of No. 6.

Further, the lengths of the incident extension optical axis 26 and the reflection side optical axis 25 are set to be equal, and the two position patterns are: /12, 1.
4 and the detection unit 16 are set to have the same optical distance. Also, when the measurement position pattern 14 is read by the CCD line sensor 18, it is in focus.

On the other hand, the CCD line sensor 18 is fixed at a position where it is in focus with respect to the lens 17 so that it can read the reference of the reference position pattern 12 fixed on the incident extension optical axis 26. In addition, the CCD line sensor 18
are arranged substantially horizontally in a direction whose longitudinal direction is perpendicular to the deflection direction of the mirror 21.
1 is for maintaining the positional relationship among the detection unit 16, the reference position pattern 12, the measurement position pattern 14, and the optical system housing 22, and is provided with sufficient rigidity.

FIG. 2 is a diagram showing the reference position pattern 12.1111 and the regular position pattern 14. These patterns 12.1
4 is arranged so that its longitudinal direction is substantially horizontal in a direction perpendicular to the deflection direction of the mirror 21. In this pattern 12.14, a plurality of marked lines 27 drawn in the vertical direction, that is, in the deflection direction of the mirror 21, are symmetrically drawn on both ends thereof. The lower ends of these marked lines 27 are arranged in a step-like manner so as to move downward from the center of the pattern toward both ends. Reference numeral 28 is a left optical axis determination pattern, and reference numeral 29 is a right optical axis determination pattern. Further, in the center of the pattern, a reference line 30 is drawn in the horizontal direction, that is, in a direction perpendicular to the deflection direction of the mirror 21.

This reference line 30 is positioned to coincide with the lower end of the sixth marked line from the outside.

In this figure, when the CCD line sensor 18 reads the reading position 31, the image signal is as shown in Figure 3, and when the reading position 32 is read, the image signal is as shown in Figure 4. Become. In this way, the optical axis position n1 in the vertical direction can be determined by the image signal scanned and read in the horizontal direction by the CCD line sensor 18.

In such a configuration, in order to measure the reflected optical axis of the mirror 21, the CCD line sensor 18 of the detection unit 16 is used.
While reading the reference line 30 of the reference position pattern 12, the mirror 21 of the object to be measured is inserted, and the measurement position pattern 14 is read by the CCD line sensor 18. Then, a change in the optical axis is detected based on the difference between the reading of the position pattern and the reference.

As described above, in the above embodiment, the measurement position pattern 14, the CCD line sensor 18, and the lens 17 for imaging the measurement position pattern 14 on the CCD line sensor 18 are provided. The sensor 18 is disposed so that its longitudinal direction is perpendicular to the deflection direction of the mirror 21, and a marked line 27 is drawn in the measuring position pattern 14 in the deflection direction of the mirror 21. A plurality of lines 27... are arranged in a direction perpendicular to the deflection direction of the mirror 21, and the lower end positions of these marked lines 27...
Since the deflection direction of the mirror 21 changes stepwise in the direction perpendicular to the deflection direction of the mirror 21, the optical axis of the mirror 21 can be directly determined by reading the measurement position pattern 14 with the CCD line sensor 18. The slope of can be measured. Therefore, it is possible to determine the optical axis n1 with high accuracy, and it is also possible to easily measure the mirror even if it is located deep inside the housing.

Furthermore, since the CCD line sensor 18 and measurement position pattern 14 are long in the horizontal direction, it is possible to simultaneously determine the left and right inclinations of even a wide mirror.

Further, a reference position pattern 12 is placed on the incident extension optical axis 26.
is provided, and this reference position pattern 12 and mirror 21
Since the distance between the measurement position pattern 14 and the mirror 21 is made equal to the distance between the measurement position pattern 14 and the mirror 21, the optical axis of the CCD line sensor 18 can be aligned before the mirror 21 is installed, and the mirror 21 can also be installed. When you do,
The measurement position pattern 14 can be brought into focus.

Furthermore, since the output of the CCD line sensor 18 can be obtained as an electrical signal, the a#j constant value can be recorded and determined easily and quickly.

Furthermore, since a small detection unit using the CCD line sensor 18 is used, the apparatus itself can be made small.

Note that such a reflection optical axis measuring device is most suitable for evaluating optical casings in which the casing is molded from resin and whose dimensions change depending on the molding conditions.

〔Effect of the invention〕

As explained above, in the present invention, it is possible to directly measure the inclination of the reflecting mirror, and therefore the inclination of the optical axis can be easily determined with high accuracy, and the inclination of the reflecting mirror is Even when the sensor is located deep inside the housing, it is possible to easily measure the sensor.

[Brief explanation of the drawing]

1 to 4 are diagrams showing one embodiment of the present invention, the first factor is a front view showing the outline, FIG. 2 is a diagram showing a measurement position pattern and a reference position pattern, and FIG. Figure 3 is a diagram showing an image signal when the optical axis position indicated by numeral 31 in Fig. 2 is read by a CCD line sensor, and Fig. 4 is a diagram showing an image signal when the optical axis position indicated by numeral 32 in Fig. 2 is read by a CCD line sensor. FIG. 3 is a diagram showing an image signal when 14...Measurement position pattern, 17...Lens, 1
8... CCD line sensor, 21... Mirror 27.
...marked line.

Claims (1)

[Claims] The CCD line sensor includes a measurement position pattern, a lens for forming an image of the measurement position pattern, and a CCD line sensor disposed at a position where the measurement position pattern is imaged by the lens. The measurement position pattern is arranged such that the direction is perpendicular to the deflection direction of a reflecting mirror, which is an object to be measured, disposed between the lens and the measurement position pattern, and the measurement position pattern A plurality of marked lines are arranged in a direction perpendicular to the deflection direction of the reflecting mirror, and one end position of each marked line is arranged in a direction perpendicular to the deflecting direction of the reflecting mirror. A reflection optical axis measuring device characterized in that the deflection direction of the reflecting mirror changes stepwise as the deflection direction increases.