JPH0220129U - - Google Patents

Info

Publication number
JPH0220129U
JPH0220129U JP9893488U JP9893488U JPH0220129U JP H0220129 U JPH0220129 U JP H0220129U JP 9893488 U JP9893488 U JP 9893488U JP 9893488 U JP9893488 U JP 9893488U JP H0220129 U JPH0220129 U JP H0220129U
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
temperature fluid
pressure
force transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9893488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0619068Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988098934U priority Critical patent/JPH0619068Y2/ja
Priority to US07/384,817 priority patent/US4993266A/en
Priority to DE89113807T priority patent/DE68905967T2/de
Priority to EP89113807A priority patent/EP0352773B1/en
Publication of JPH0220129U publication Critical patent/JPH0220129U/ja
Application granted granted Critical
Publication of JPH0619068Y2 publication Critical patent/JPH0619068Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1988098934U 1988-07-26 1988-07-26 高温流体用の圧力センサ Expired - Lifetime JPH0619068Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1988098934U JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ
US07/384,817 US4993266A (en) 1988-07-26 1989-07-25 Semiconductor pressure transducer
DE89113807T DE68905967T2 (de) 1988-07-26 1989-07-26 Piezoresistiver Si Einkristall Druckwandler.
EP89113807A EP0352773B1 (en) 1988-07-26 1989-07-26 Piezoresistive si single crystal pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988098934U JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ

Publications (2)

Publication Number Publication Date
JPH0220129U true JPH0220129U (cs) 1990-02-09
JPH0619068Y2 JPH0619068Y2 (ja) 1994-05-18

Family

ID=31325634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988098934U Expired - Lifetime JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ

Country Status (1)

Country Link
JP (1) JPH0619068Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009122076A (ja) * 2007-11-19 2009-06-04 Nippon Soken Inc 圧力センサの取付構造
JP2011163915A (ja) * 2010-02-09 2011-08-25 Toyota Central R&D Labs Inc 圧力センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857287A (en) * 1972-05-08 1974-12-31 Kistler Instrumente Ag Pressure transducers
JPS6327845U (cs) * 1986-08-05 1988-02-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857287A (en) * 1972-05-08 1974-12-31 Kistler Instrumente Ag Pressure transducers
JPS6327845U (cs) * 1986-08-05 1988-02-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009122076A (ja) * 2007-11-19 2009-06-04 Nippon Soken Inc 圧力センサの取付構造
JP2011163915A (ja) * 2010-02-09 2011-08-25 Toyota Central R&D Labs Inc 圧力センサ

Also Published As

Publication number Publication date
JPH0619068Y2 (ja) 1994-05-18

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