JPH021993B2 - - Google Patents
Info
- Publication number
- JPH021993B2 JPH021993B2 JP58054424A JP5442483A JPH021993B2 JP H021993 B2 JPH021993 B2 JP H021993B2 JP 58054424 A JP58054424 A JP 58054424A JP 5442483 A JP5442483 A JP 5442483A JP H021993 B2 JPH021993 B2 JP H021993B2
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- vacuum
- vacuum pump
- pump device
- hydride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003463 adsorbent Substances 0.000 claims description 32
- 229910045601 alloy Inorganic materials 0.000 claims description 16
- 239000000956 alloy Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 15
- 238000001179 sorption measurement Methods 0.000 claims description 15
- 229910052987 metal hydride Inorganic materials 0.000 claims description 14
- 150000004681 metal hydrides Chemical class 0.000 claims description 14
- 150000004678 hydrides Chemical class 0.000 claims description 11
- 238000006356 dehydrogenation reaction Methods 0.000 claims description 5
- 229910052748 manganese Inorganic materials 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 238000007872 degassing Methods 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 229910000914 Mn alloy Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000000344 soap Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000005984 hydrogenation reaction Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000013543 active substance Substances 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 208000016253 exhaustion Diseases 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442483A JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442483A JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59180081A JPS59180081A (ja) | 1984-10-12 |
| JPH021993B2 true JPH021993B2 (it) | 1990-01-16 |
Family
ID=12970325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5442483A Granted JPS59180081A (ja) | 1983-03-29 | 1983-03-29 | 真空ポンプ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59180081A (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002065653A1 (fr) * | 2001-02-13 | 2002-08-22 | Nec Corporation | Recepteur radio |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0721389B2 (ja) * | 1986-04-01 | 1995-03-08 | 石川島播磨重工業株式会社 | 熱処理炉 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124538A (en) * | 1979-02-05 | 1980-09-25 | Getters Spa | Method of absorbing water* steam and other gas by using nonnvaporizing threeedimensional getter alloy |
| JPS5753235A (en) * | 1980-06-04 | 1982-03-30 | Getters Spa | Getter composition and structure particularly available at low temperature and their use in manufacture of vessel enclosing vacuum or rare gas |
-
1983
- 1983-03-29 JP JP5442483A patent/JPS59180081A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55124538A (en) * | 1979-02-05 | 1980-09-25 | Getters Spa | Method of absorbing water* steam and other gas by using nonnvaporizing threeedimensional getter alloy |
| JPS5753235A (en) * | 1980-06-04 | 1982-03-30 | Getters Spa | Getter composition and structure particularly available at low temperature and their use in manufacture of vessel enclosing vacuum or rare gas |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002065653A1 (fr) * | 2001-02-13 | 2002-08-22 | Nec Corporation | Recepteur radio |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59180081A (ja) | 1984-10-12 |
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