JPH02199280A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPH02199280A JPH02199280A JP1016695A JP1669589A JPH02199280A JP H02199280 A JPH02199280 A JP H02199280A JP 1016695 A JP1016695 A JP 1016695A JP 1669589 A JP1669589 A JP 1669589A JP H02199280 A JPH02199280 A JP H02199280A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- vacuum pump
- control valve
- pump
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 239000010724 circulating oil Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は容器内を減圧して処理する半導体製造装置や食
料品の真空乾燥機などに用いられ、特に処理圧力を一定
に保つ排気系に使用される真空ポンプに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is used in semiconductor manufacturing equipment and vacuum dryers for food products that process the inside of a container by reducing the pressure, and is particularly applicable to an exhaust system that maintains a constant processing pressure. Regarding the vacuum pump used.
従来、この種の真空ボンダは排気する機能だけしか持っ
ておらず、圧力を一定にして処理する装置においては、
装置本体内に容器と、真空ポンプの中間に圧力制御弁と
を備え、容器内の圧力を測定した結果から電気的に前記
圧力制御弁の開度を調節する方法を取っていた。Conventionally, this type of vacuum bonder only had the function of evacuation, and in equipment that processes at a constant pressure,
A method has been adopted in which a pressure control valve is provided between a container and a vacuum pump in the main body of the device, and the opening degree of the pressure control valve is electrically adjusted based on the result of measuring the pressure inside the container.
上述した従来の真空ポンプは単に排気する機能だけのた
め、循環オイルの劣化や機構部品の損傷などによる排気
性能の低下に対して無防備であり、処理圧力を一定にす
べき装置においては■装置側で一定圧力を制御する機構
を持つ、■定期的に真空ポンプの排気性能を管理し、異
常時は交換する、
というどちらかの方法を取る必要があり、装置側での制
御機構を持たない■の場合は、真空ポンプの性能を常に
一定の最高値に維持するか、または吸気口側配管に手動
弁を組込み、排気性能に応じてその弁を操作する方法し
かなく、圧力安定性の低下及び管理工数が多くなるとい
う欠点がある。Since the conventional vacuum pump mentioned above only has the function of exhausting air, it is vulnerable to deterioration of exhaust performance due to deterioration of circulating oil or damage to mechanical parts. It has a mechanism to control a constant pressure with the pump.It is necessary to periodically manage the exhaust performance of the vacuum pump and replace it when an abnormality occurs.There is no control mechanism on the equipment side.■ In this case, the only options are to maintain the vacuum pump performance at a constant maximum value, or to incorporate a manual valve into the intake port side piping and operate the valve according to the exhaust performance, which may lead to a decrease in pressure stability and The disadvantage is that it requires a lot of management time.
本発明の目的は前記課題を解決した真空ボンダを提供す
ることにある。An object of the present invention is to provide a vacuum bonder that solves the above problems.
上述した従来の真空ポンプに対し、本発明はポンプ本体
に圧力制御ユニットを組込み、吸気側圧力をあらかじめ
設定した圧力で安定させるという相違点を有する。The present invention differs from the conventional vacuum pump described above in that a pressure control unit is incorporated into the pump body, and the suction side pressure is stabilized at a preset pressure.
前記目的を達成するため、本発明は容器内を低圧に減圧
する真空ボンダにおいて、ポンプ本体に吸気側の圧力を
設定・制御するための圧力コントローラと、吸気側の圧
力を測定するための圧力センサ及び圧力を変化させるた
めの制御弁を持つ圧力制御ユニットとを有するものであ
る。In order to achieve the above object, the present invention provides a vacuum bonder that reduces the pressure inside a container to a low pressure, and includes a pressure controller for setting and controlling the pressure on the suction side of the pump body, and a pressure sensor for measuring the pressure on the suction side. and a pressure control unit having a control valve for changing the pressure.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
（実施例１） 第１図は本発明の実施例１を示す構成図である。(Example 1) FIG. 1 is a configuration diagram showing a first embodiment of the present invention.
１は圧力制御ユニットで油回転真空ポンプのポンプ本体
３の上部に搭載されている。２はボンブゲースである。1 is a pressure control unit mounted on the upper part of the pump body 3 of the oil rotary vacuum pump. 2 is Bomb Game.
５は排気口である。吸気口４の圧力は圧力センサ６によ
り測定され、圧力コントローラ７であらかじめ設定され
た値と比較され、差がある場合は不活性ガス流量制御弁
８を調節し、Ｎ２供給口９からの吸気側へのガス流量を
増減して吸気口４の圧力を一定にする。5 is an exhaust port. The pressure at the intake port 4 is measured by a pressure sensor 6 and compared with a preset value by a pressure controller 7. If there is a difference, the inert gas flow rate control valve 8 is adjusted and the pressure from the intake side from the N2 supply port 9 is adjusted. The pressure at the intake port 4 is kept constant by increasing or decreasing the gas flow rate.
（実施例２） 第２図は本発明の実施例２を示す構成図である。(Example 2) FIG. 2 is a configuration diagram showing a second embodiment of the present invention.
本実施例では圧力コントローラ７で設定した値に対して
圧力センサ６からの値が同じになるように圧力制御弁１
０の開度を調節する。この実施例では、圧力制御弁１０
を使用してメカニカルブースター真空ポンプ１１の吸気
側圧力を調節するが、不活性ガスを導入する方法と同じ
ように排気側圧力を一定に維持できるという利点がある
。In this embodiment, the pressure control valve 1 is configured so that the value from the pressure sensor 6 is the same as the value set by the pressure controller
Adjust the opening degree of 0. In this embodiment, the pressure control valve 10
is used to adjust the intake side pressure of the mechanical booster vacuum pump 11, but it has the advantage that the exhaust side pressure can be maintained constant, similar to the method of introducing an inert gas.
以上説明したように本発明は真空ポンプに圧力制御ユニ
ットを組込むことにより、処理装置本体での圧力制御や
ポンプ性能維持のための管理が不要となる効果がある。As explained above, the present invention has the advantage that by incorporating a pressure control unit into a vacuum pump, there is no need for pressure control in the main body of the processing apparatus or management for maintaining pump performance.
第１図は本発明の実施例１を示す構成図、第２図は本発
明の実施例２を示す構成図である。
１・・・圧力制御ユニット ２・・・ボンダケース３・
・・ポンプ本体（油回転真空ポンプ）４・・・吸気口
５・・・排気口６・・・圧力センサ
７・・・圧力コントローラ８・・・不活性ガス流量制御
弁
９・・・Ｎ１供給口 １０・・・圧力制御弁１１
・・・メカニカルブースター真空ポング第１図
第２図FIG. 1 is a block diagram showing a first embodiment of the present invention, and FIG. 2 is a block diagram showing a second embodiment of the present invention. 1... Pressure control unit 2... Bonder case 3.
...Pump body (oil rotary vacuum pump) 4...Intake port
5...Exhaust port 6...Pressure sensor
7... Pressure controller 8... Inert gas flow rate control valve 9... N1 supply port 10... Pressure control valve 11
...Mechanical booster vacuum pump Figure 1 Figure 2
Claims (1)
ンプ本体に吸気側の圧力を設定・制御するための圧力コ
ントローラと、吸気側の圧力を測定するための圧力セン
サ及び圧力を変化させるための制御弁を持つ圧力制御ユ
ニットとを有することを特徴とする真空ポンプ。(1) In a vacuum pump that reduces the pressure inside a container to a low pressure, the pump body is equipped with a pressure controller for setting and controlling the pressure on the intake side, a pressure sensor for measuring the pressure on the intake side, and a pressure sensor for changing the pressure. A vacuum pump comprising a pressure control unit having a control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1016695A JPH02199280A (en) | 1989-01-26 | 1989-01-26 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1016695A JPH02199280A (en) | 1989-01-26 | 1989-01-26 | Vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02199280A true JPH02199280A (en) | 1990-08-07 |
Family
ID=11923431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1016695A Pending JPH02199280A (en) | 1989-01-26 | 1989-01-26 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02199280A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58124079A (en) * | 1982-01-20 | 1983-07-23 | Furukawa Electric Co Ltd:The | Pressure regulating method in vacuum pump |
| JPS6255484A (en) * | 1985-09-02 | 1987-03-11 | Yuken Kogyo Kk | Variable capacity type pump |
-
1989
- 1989-01-26 JP JP1016695A patent/JPH02199280A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58124079A (en) * | 1982-01-20 | 1983-07-23 | Furukawa Electric Co Ltd:The | Pressure regulating method in vacuum pump |
| JPS6255484A (en) * | 1985-09-02 | 1987-03-11 | Yuken Kogyo Kk | Variable capacity type pump |
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