JPH02197271A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH02197271A JPH02197271A JP1014828A JP1482889A JPH02197271A JP H02197271 A JPH02197271 A JP H02197271A JP 1014828 A JP1014828 A JP 1014828A JP 1482889 A JP1482889 A JP 1482889A JP H02197271 A JPH02197271 A JP H02197271A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- stator
- nickel
- elastic body
- thermal expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 33
- 150000002739 metals Chemical class 0.000 claims description 12
- 238000005253 cladding Methods 0.000 claims description 11
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 10
- 239000000853 adhesive Substances 0.000 abstract description 10
- 230000001070 adhesive effect Effects 0.000 abstract description 10
- 229910001369 Brass Inorganic materials 0.000 abstract description 9
- 239000010951 brass Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 229920001187 thermosetting polymer Polymers 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 229910020279 Pb(Zr, Ti)O3 Inorganic materials 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 238000005336 cracking Methods 0.000 description 5
- 229910001374 Invar Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002551 Fe-Mn Inorganic materials 0.000 description 1
- 229910000914 Mn alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910001245 Sb alloy Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- WBWJXRJARNTNBL-UHFFFAOYSA-N [Fe].[Cr].[Co] Chemical compound [Fe].[Cr].[Co] WBWJXRJARNTNBL-UHFFFAOYSA-N 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- -1 aluminum-antimony Chemical compound 0.000 description 1
- 239000002140 antimony alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- BCDWXIPZSYBYCG-UHFFFAOYSA-N chromium iron manganese Chemical compound [Mn][Cr][Fe] BCDWXIPZSYBYCG-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 description 1
- SORXVYYPMXPIFD-UHFFFAOYSA-N iron palladium Chemical compound [Fe].[Pd] SORXVYYPMXPIFD-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は進行性振動波により駆動する超音波モータに関
するもので、特にステータを構成する弾性体が二種の異
なった金属から成るクラッド材で作られた超音波モータ
に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to an ultrasonic motor driven by progressive vibration waves, and in particular, the present invention relates to an ultrasonic motor driven by progressive vibration waves, and in particular, the elastic body constituting the stator is a clad material made of two different metals. Regarding the ultrasonic motor made.
（従来の技術）
超音波モータは第１図に示すように圧電セラミックス１
を弾性体２に接着したステータと、回転体３をライニン
グ材４に接着したロータとからなっており、分割された
圧電セラミックスの電極群に位相が互いに１八周期ずれ
た２相の交流電源を印加することにより、弾性体にたわ
み振動による進行波を発生させ、ロータを回転させるし
くみになっている。(Prior art) Ultrasonic motors are made of piezoelectric ceramics 1 as shown in Figure 1.
It consists of a stator in which a rotating body 3 is bonded to an elastic body 2, and a rotor in which a rotating body 3 is bonded to a lining material 4.A two-phase AC power source whose phase is shifted by 18 periods from each other is connected to a group of divided piezoelectric ceramic electrodes. By applying this force, a traveling wave is generated by bending vibration in the elastic body, and the rotor is rotated.
ステータの振動による回転力はステータとロータとの接
触面での摩擦力により伝えられるため、ロータはステー
タに適当な圧力で押付けられた構造になっている。Since the rotational force caused by the vibration of the stator is transmitted by the frictional force at the contact surface between the stator and the rotor, the rotor is pressed against the stator with an appropriate pressure.
弾性体２と圧電セラミックスｌは、圧電セラミックスの
振動を確実に弾性体に伝えるため、強固に接着されてい
る。この強固な接着力を得るには、一般に熱硬化性接着
剤が使用され、高温状態（９０〜１５０°Ｃ）で接着さ
れる。ところが、圧電セラミックスの材質と弾性体の材
質とではかなり熱膨張率が異なる。即ち、圧電セラミッ
クスの熱膨張率αは１〜４Ｘ１０−’／’Ｃであるのに
対し、弾性体である金属の熱膨張率は９〜１７ｘｌＯ−
’／’ｃとかなり大きい。そのため、接着後室温にもど
すと反りが発生するという問題と残留熱応力が発生ずる
という問題があり、駆動効率低下の原因となる。また、
３０°Ｃといった低温雰囲気下で使用される場合には、
−層の駆動効率の低下を引き起こし、接着面の剥離、セ
ラミックスの割れが発生する場合もあった。The elastic body 2 and the piezoelectric ceramic l are firmly bonded to each other in order to reliably transmit the vibrations of the piezoelectric ceramic to the elastic body. To obtain this strong adhesive force, a thermosetting adhesive is generally used and bonding is performed at high temperatures (90 to 150° C.). However, the thermal expansion coefficients of the piezoelectric ceramic material and the elastic body material are considerably different. That is, the coefficient of thermal expansion α of piezoelectric ceramics is 1 to 4×10-'/'C, while the coefficient of thermal expansion of metal, which is an elastic body, is 9 to 17×10-'/'C.
'/'c is quite large. Therefore, there is a problem that warping occurs when the bonding is returned to room temperature after adhesion, and residual thermal stress is generated, which causes a decrease in driving efficiency. Also,
When used in a low temperature atmosphere such as 30°C,
- This caused a decrease in the driving efficiency of the layer, and sometimes caused peeling of the adhesive surface and cracking of the ceramic.
上記の問題点に対処するため、弾性体の材料として圧電
セラミックスと同等の熱膨張率を有するものを使用する
という提案がなされている（特開昭６０−６２８８３公
報、同６１−２７７３８５公報）。ところが、圧電セラ
ミックスと同程度の熱膨張率を有する弾性体を使用する
とすれば、熱膨張率として１〜４ＸＩＯ−６／’Ｃの範
囲のものが必要となる。弾性体としては金属を使用する
必要があるが、単一元素からなる純金属ではこの条件を
満たすものがなく、利用できるのは鉄ニツケル系あるい
はＣｒ−Ｆｅ−Ｍｎ系といったインバー合金に限られる
。また、４〜６ Ｘｌ０−６／’Ｃの範囲で見てもタン
グステン、ジルコニウム、モリブデン、ゲルマニウムと
いったものしかない。しかしこれらの金属は一般に難加
工性で、かつ非常に高価である。In order to deal with the above-mentioned problems, it has been proposed to use a material having a coefficient of thermal expansion equivalent to that of piezoelectric ceramics as the material for the elastic body (Japanese Patent Laid-Open Nos. 60-62883 and 61-277385). However, if an elastic body having a coefficient of thermal expansion comparable to that of piezoelectric ceramics is used, the coefficient of thermal expansion must be in the range of 1 to 4XIO-6/'C. Although it is necessary to use a metal as the elastic body, there is no pure metal consisting of a single element that satisfies this condition, and the only ones that can be used are invar alloys such as iron-nickel or Cr-Fe-Mn. Furthermore, in the range of 4 to 6 Xl0-6/'C, there are only tungsten, zirconium, molybdenum, and germanium. However, these metals are generally difficult to process and are very expensive.
弾性体は、第２図に示すようにロータと接する側に溝が
切られた形状をしている。これは印加電圧により発生す
るたわみ振動の振幅を最大限に大きくするためである。As shown in FIG. 2, the elastic body has a shape in which a groove is cut on the side that contacts the rotor. This is to maximize the amplitude of the deflection vibration generated by the applied voltage.
したがって、上記のような熱膨張率が低くても難加工性
の材料を使用すると、材料費だけでなく加工費も嵩み、
モータの製造コストは著しく高くなってしまう。Therefore, if a material with a low coefficient of thermal expansion but difficult to process as described above is used, not only the material cost but also the processing cost will increase.
The manufacturing cost of the motor increases significantly.
（発明が解決しようとする課題）
本発明の課題は、超音波モータのステータを構成する弾
性体と圧電セラミックスの熱膨張率の違いに起因する駆
動効率の低下、接着面の剥離、圧電セラミックスの割れ
等の問題を解消することにあり、特にその目的は、弾性
体として比較的安価で加工の容易な材料を使用した製造
コストの嵩まない超音波モータを提供することにある。(Problems to be Solved by the Invention) The problems to be solved by the present invention are a decrease in drive efficiency due to the difference in thermal expansion coefficient between the elastic body and piezoelectric ceramics that constitute the stator of an ultrasonic motor, peeling of the adhesive surface, and The object of the present invention is to solve problems such as cracking, and in particular, to provide an ultrasonic motor that is inexpensive to manufacture and uses a relatively inexpensive and easily processable material as an elastic body.
（課題を解決するための手段）
材料を使用する場合、単体で用いれば使用限界が狭いも
のであっても２種類以上の材料をうまく組合わせ、それ
ぞれの長所を利用しながら、個々の材料単体では得るこ
とのできない特性を発揮させる方法がある。異種金属を
圧延、接着などで接合したクラッド材がその一例であり
、近年種々のクラッド材が各方面で実用化されつつある
。(Means for solving the problem) When using materials, even if the usage limit is narrow if used alone, two or more types of materials can be skillfully combined, and each material can be used as a single unit while utilizing the strengths of each. There is a way to bring out characteristics that cannot be obtained otherwise. One example is a clad material made of dissimilar metals joined by rolling, adhesive, etc., and in recent years, various clad materials have been put into practical use in various fields.
本発明者は、超音波モータにおける弾性体と圧電セラミ
ックスとの熱膨張率の差に起因する問題点の解決に、こ
のようなりラッド材を利用することが有効であることを
確認した。The present inventor has confirmed that the use of such a rad material is effective in solving problems caused by the difference in thermal expansion coefficient between the elastic body and the piezoelectric ceramic in an ultrasonic motor.
本発明の要旨は、「ステータの弾性体が２種類の金属か
らなるクラッド材で構成され、そのクラッド材の圧電セ
ラミックスと接着される側の金属が該圧電セラミックス
と同程度の熱膨張率を有することを特徴とする超音波モ
ータ」にある。The gist of the present invention is that ``the elastic body of the stator is composed of a cladding material made of two types of metals, and the metal on the side of the cladding material bonded to the piezoelectric ceramic has a coefficient of thermal expansion comparable to that of the piezoelectric ceramic. ``An ultrasonic motor characterized by the following characteristics.''
本発明の超音波モータの特徴は、第２図に示すようなス
テータの弾性体２を、第３図に拡大して示すように２種
の金属５および６から成るクラッド材にしたことにある
。なお、第３図は、第２図のＡ−Ａ線断面拡大図である
。The feature of the ultrasonic motor of the present invention is that the elastic body 2 of the stator as shown in FIG. 2 is made of a cladding material made of two types of metals 5 and 6 as shown in an enlarged view in FIG. 3. . Note that FIG. 3 is an enlarged cross-sectional view taken along the line A-A in FIG. 2.
第３図において、圧電セラミックス１と接する側の金属
５は、熱膨張率がこの圧電セラミックスと同程度のもの
である。このような金属としては、鉄・ニッケル合金（
Ｆｅ−３６％Ｎｉ）、鉄・ニッケル・コバル） 合金（
Ｆｅ −３２％Ｎｉ−５％Ｇｏ）、鉄・コバルト・クロ
ム合金（Ｆｅ−５４％Ｃｏ−９，５％Ｃｒ）、鉄・パラ
ジウム合金（Ｐｅ−４３％Ｐｄ）、クロム・鉄・マンガ
ン系合金（Ｃｒ−５，５％Ｆｅ−０，５％Ｍｎ）、アル
ミニウム・アンチモン合金（Ａｆｆｉ−Ｓｂ８２％）な
どが使用できる。In FIG. 3, the metal 5 on the side in contact with the piezoelectric ceramic 1 has a coefficient of thermal expansion comparable to that of the piezoelectric ceramic. Such metals include iron-nickel alloys (
Fe-36%Ni), iron/nickel/cobal) alloy (
Fe-32%Ni-5%Go), iron-cobalt-chromium alloy (Fe-54%Co-9,5%Cr), iron-palladium alloy (Pe-43%Pd), chromium-iron-manganese alloy (Cr-5,5% Fe-0,5% Mn), aluminum-antimony alloy (Affi-Sb82%), etc. can be used.
第３図のもう一つの金属６は、熱膨張係数が高いもので
あっても差し支えない。加工性に冨み比較的安価な金属
として、例えば、ステンレス鋼、黄銅、銅、青銅、アル
ミニウム、アルミ青銅などが利用できる。The other metal 6 in FIG. 3 may have a high coefficient of thermal expansion. Examples of metals that are highly workable and relatively inexpensive include stainless steel, brass, copper, bronze, aluminum, and aluminum bronze.
２種の金属５と６は、圧延その他任意の方法で接合して
クラッド材とすればよい。ステータの製造方法としては
、予め２種の金属を接合しておき、第２図に示したよう
な形状に機械加工する方法や、金属５と金属６を予め製
品に近い形に加工して接合したのちに仕上の機械加工を
を行う方法などがある。溝を切る方の金属が上記のよう
に加工性に冨む材料であるから、加工コストが嵩むこと
ばな上記のクラッド材からなる弾性体と圧電セラミック
スとの接合は、通常の方法、例えば熱硬化性樹脂による
接着、で行うことができる。The two metals 5 and 6 may be joined by rolling or any other method to form a cladding material. The stator can be manufactured by joining two types of metal in advance and machining it into the shape shown in Figure 2, or by machining metal 5 and metal 6 into a shape similar to the product in advance and joining them together. There are methods to perform finishing machining after that. Since the metal used to cut the groove is a material with high workability as mentioned above, the processing cost increases.The joining of the elastic body made of the above-mentioned cladding material and the piezoelectric ceramic is done by a normal method, such as thermosetting. This can be done by adhesion using adhesive resin.
この接着の際の加熱や、使用環境の温度変化によって、
クラッド材の金属５と６の熱膨張率の相違に起因する反
りや残留応力の発生が予想されるが、クラッド材の両金
属は強固な金属結合であるから剥離することはない。残
留応力の発生も弾性体内部におけるものであり、セラミ
ックス内部に発生する残留応力は、従来の単一金属弾性
体とセラミックスとの組合せの場合に較べると格段に小
さくなる。Due to the heating during this bonding and temperature changes in the usage environment,
Although it is expected that warpage and residual stress will occur due to the difference in thermal expansion coefficient between the metals 5 and 6 of the cladding material, the two metals of the cladding material have a strong metallic bond and will not separate. Residual stress is also generated inside the elastic body, and the residual stress generated inside the ceramic is much smaller than in the case of a conventional combination of a single metal elastic body and ceramic.
（作用）
弾性体の材料として２種の金属からなるクラッドを用い
ることにより、単一の低熱膨張率の材料を使用する場合
の雛点、即ち、材料費および加工費が高くなること、を
回避できる。(Function) By using a cladding made of two types of metals as the material of the elastic body, it is possible to avoid the high cost of materials and processing costs that would occur when using a single material with a low coefficient of thermal expansion. can.
例えば、圧電セラミックスと接着する側の金属にはＦｅ
−Ｎｉ系インバー合金のような熱膨張率の低い金属（１
〜４ Ｘ １０−６／’Ｃ）を用い、反対側には黄銅（
１６Ｘ１０−６／’Ｃ）あるいはステンレス鋼（１７Ｘ
ＩＯ−６／’Ｃ）のような熱膨張率は高いが、安価な金
属を用いたクラッド材とすれば、弾性体を黄銅やステン
レス鋼で作る場合に比べてセラミックスに発生する熱応
力を小さくすることが可能となり、セラミックスと弾性
体との接着面の剥離やセラミックスの割れを防止するこ
とができる。また、黄銅やステンレス鋼はインバー合金
に比べて価格が約１／１０と安いため、弾性体を全てイ
ンバー合金で作る場合に比べて、加工コストも含めてコ
スト低減が実現できる。For example, the metal on the side to be bonded to the piezoelectric ceramics may contain Fe.
-Metals with low coefficient of thermal expansion such as Ni-based invar alloys (1
~4 x 10-6/'C) and brass (
16X10-6/'C) or stainless steel (17X
Although the coefficient of thermal expansion is high, such as IO-6/'C), if the clad material is made of an inexpensive metal, the thermal stress generated in the ceramic can be reduced compared to when the elastic body is made of brass or stainless steel. This makes it possible to prevent the adhesive surface between the ceramic and the elastic body from peeling off and the ceramic from cracking. Furthermore, since brass and stainless steel are about 1/10 cheaper than invar alloy, costs including processing costs can be reduced compared to when the elastic body is made entirely of invar alloy.
なお、本発明の超音波モータに使用する圧電セラミック
ス（第３図の１）としては、Ｐｂ（Ｚｒ、Ｔｉ）Ｏ＋（
ＰＺＴ）系、その他この種のモータに使用されている圧
電セラミックスが使用できる。The piezoelectric ceramics (1 in Fig. 3) used in the ultrasonic motor of the present invention include Pb(Zr, Ti)O+(
PZT) type and other piezoelectric ceramics used in this type of motor can be used.
（実施例） 以下、本発明の実施例について説明する。(Example) Examples of the present invention will be described below.
第３図に示すような、弾性体として２層の金属を接合し
たものを作製した。圧電セラミックス１としては厚さ１
ｍｍのＰＺＴを使用し、金属５には３９％ニッケルー鉄
合金（熱膨張率： ３．ｌＸ１０−ｂ／”Ｃ）を、金属
６には黄銅（熱膨張率： １６Ｘ１０−６／’Ｃ）を使
用した。黄銅とニッケルー鉄合金とは冷間圧接法により
接合し、厚さ１．６闘の黄銅と厚さ０６４ｍｍのニッケ
ルー鉄合金のクラッド材に仕上げた後、ニッケルー鉄合
金側を圧電セラミックスと接着した。接着は、熱硬化性
接着剤を使用し、１２０°Ｃ×６０分の加熱によって行
った。その後、ニッケル鉄合金６に溝加工を施し、外径
７０πｍ、内径５０ｍｍのステータを作製した。An elastic body made of two metal layers bonded together was fabricated as shown in FIG. Thickness 1 for piezoelectric ceramic 1
mm PZT was used, metal 5 was made of 39% nickel-iron alloy (coefficient of thermal expansion: 3.1 x 10-b/'C), and metal 6 was made of brass (coefficient of thermal expansion: 16 x 10-6/'C). Brass and nickel-iron alloy were joined by cold welding to create a cladding material of brass with a thickness of 1.6mm and nickel-iron alloy with a thickness of 0.64mm, and then the nickel-iron alloy side was bonded with piezoelectric ceramics. Adhesion was performed using a thermosetting adhesive and heating at 120°C for 60 minutes.Next, nickel-iron alloy 6 was grooved to produce a stator with an outer diameter of 70πm and an inner diameter of 50mm. .
上記のステータをモータに組み立てて電圧を印加し、駆
動させて温度変動に対する特性の変化を調査した。−３
０から＋８０″Ｃまでの各温度において回転数１１００
ｒｐでのトルクは３．０〜３．５ｋｇｃｍと変動幅にし
て±１０％以内の極めて安定した特性が得られた。また
、圧電セラミックスと弾性体の接着面の剥離やセラミッ
クスの割れなどの問題も発生しなかった。The above stator was assembled into a motor, voltage was applied, and the motor was driven to investigate changes in characteristics with respect to temperature fluctuations. -3
1100 rotations at each temperature from 0 to +80″C
The torque at rp was 3.0 to 3.5 kgcm, and extremely stable characteristics were obtained with a fluctuation range of within ±10%. Further, problems such as peeling of the adhesive surface between the piezoelectric ceramic and the elastic body and cracking of the ceramic did not occur.
（発明の効果）
本発明は、従来の超音波モータにおけるステータを構成
する弾性体と圧電セラミックスの熱膨張率の違いに起因
する駆動効率の低下、接着面の剥離、圧電セラミックス
の割れ等の問題を解消するものである。しかも、ステー
タの弾性体として高価で加工性に劣る単一材料を使用す
る場合に較べて、経済的にもはるかに有利な超音波モー
タを提供するものである。(Effects of the Invention) The present invention solves problems in conventional ultrasonic motors, such as a decrease in driving efficiency, peeling of the adhesive surface, and cracking of the piezoelectric ceramic due to the difference in thermal expansion coefficient between the elastic body and the piezoelectric ceramic that make up the stator. This is to eliminate the problem. Moreover, the present invention provides an ultrasonic motor that is far more economically advantageous than the case where a single material, which is expensive and has poor workability, is used as the elastic body of the stator.
第１図は、超音波モータのロータとステータの構造を示
す斜視図、
第２図は、ステータの斜視図、
第３図は、本発明のモータのステータの構造を説明する
第２図のＡ−Ａ線断面拡大図、である。FIG. 1 is a perspective view showing the structure of the rotor and stator of an ultrasonic motor, FIG. 2 is a perspective view of the stator, and FIG. 3 is A of FIG. 2 illustrating the structure of the stator of the motor of the present invention. -A cross-sectional enlarged view.
Claims (1)
ステータに接触するロータを備えた超音波モータであっ
て、上記ステータの弾性体が二種類の金属からなるクラ
ッド材で構成され、そのクラッド材の圧電セラミックス
と接着される側の金属が該圧電セラミックスと同程度の
熱膨張率を有することを特徴とする超音波モータ。An ultrasonic motor comprising a stator made of an elastic body and piezoelectric ceramics and a rotor in contact with the stator, wherein the elastic body of the stator is composed of a cladding material made of two types of metals, and the cladding material is made of piezoelectric ceramics. An ultrasonic motor characterized in that a metal on the side to be bonded to the piezoelectric ceramic has a coefficient of thermal expansion comparable to that of the piezoelectric ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1014828A JPH02197271A (en) | 1989-01-24 | 1989-01-24 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1014828A JPH02197271A (en) | 1989-01-24 | 1989-01-24 | Ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02197271A true JPH02197271A (en) | 1990-08-03 |
Family
ID=11871901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1014828A Pending JPH02197271A (en) | 1989-01-24 | 1989-01-24 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02197271A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0730877A1 (en) * | 1995-03-06 | 1996-09-11 | Fisons Corporation | Nebulizing element and device |
-
1989
- 1989-01-24 JP JP1014828A patent/JPH02197271A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0730877A1 (en) * | 1995-03-06 | 1996-09-11 | Fisons Corporation | Nebulizing element and device |
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