JPH02195629A - Rotary coating method for cathode-ray tube panel face processing liquid - Google Patents

Abstract

PURPOSE:To restrain a foreign matter from being spattered and stuck to an objective surface to be processed by fixing, in the inner wall of a booth, an easily-exchangeable inside member to which glycerine or an alcohol solution of glycerine for catching and absorbing the splash of processing liquid, and exchanging the inside member in a predetermined operation cycle. CONSTITUTION:A spongy sheet is immersed in glycerine or adhesive liquid containing glycerine solved in alcohol or the like. The sheet, the surface of which has come to have adhesiveness in the above manner, is stuck in the inner wall of a booth. A droplet 6 is caught by a glycerine solution stored on the adhesive sheet, and it is neither solved nor dried so that a dried solid material is not spattered even if it is deposited in the inner wall. Glycerine or alcohol solution of glycerine has a remarkably low drying speed and excellent adhesiveness, and accordingly, its effectiveness can be maintained for a week at the shortest. The sheet immersed in the solution may be exchanged in a predetermined cycle. An inside member is exchanged in a predetermined operation cycle, and thus, a processing liquid stuck to a wall surface during an operation can be restrained from being dried and solidified tn be spattered and stuck as a foreign matter to an objective surface to be processed from the inner wall of the booth.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an anti-glare film that prevents reflection of external light by spin-coating a processing liquid on the glass panel surface or glass substrate surface of a cathode ray tube, and an anti-static coating. When forming functional thin films such as transparent conductive films and colored films that prevent the formation of these functional thin films, the processing liquid itself, which is the raw material for these functional thin films, dries and solidifies on the wall surface to which it has spattered and adhered. This invention relates to a method for spin-coating a cathode ray tube panel surface treatment liquid, which prevents it from being blown off and scattered by the wind generated during spin-coating from the inner wall surface of a commercial booth and from adhering to the object to be treated, such as the panel glass surface.

[Prior art] Functional thin films such as anti-glare films to prevent reflection of external light and transparent conductive films to prevent static electricity charging have been formed on the glass panel surfaces of cathode ray tubes. ing. Among the methods for forming these thin films, there is a method of spin-coating a treatment liquid whose main component is an alcoholic solution of a metal alkoxide.

It is a very effective method because both the equipment and method are simple and the cost is low. The spin coating work is carried out in a booth that surrounds the work area to prevent the processing liquid from scattering around, but wind is generated due to the rotation to perform one spin coating, and the spray of the processing liquid is carried by this wind. adheres to the inner wall of the booth. The processing liquid deposited on the inner wall surface of the booth dries and solidifies over time to form a rather large solid object. During mass production, a large amount of such solid objects are formed on the inner wall surface of the booth and become attached and deposited. During the subsequent work, the adhered solid objects generated on the inner wall of the booth are peeled off from the wall, scattered, and floated by the wind generated by the above-mentioned rotational coating, and are scattered onto the rotating processing target, i.e. It adheres as foreign matter to the panel surface of cathode ray tubes, causing defects in the treated film and reducing yield.

In order to solve the above problem, the inventors of the present invention filed a patent application in 1983.
No. 152282 proposed a method of installing an air curtain in the upper part of the booth and water running means on the side wall of the booth to block the entry of the floating foreign matter and collecting the scattered liquid with water.

[Problems to be Solved by the Invention] However, in the above-mentioned conventional method, the flow of air aimed at the air curtain is disturbed by the wind accompanying spin coating.
In addition, it is difficult to obtain certain conditions, and water droplets are formed due to water splashing by the water flow itself or water splashing by the wind accompanying the rotation of the spin coating, and these water droplets can cause defects in the film of the object to be treated. There was a problem that the film could become damaged or the film could be deteriorated.

The present invention is a cathode ray tube panel surface treatment that reliably absorbs scattered foreign objects and liquids and prevents them from being re-released, regardless of the wind or vibration that occurs through spin coating. The object of the present invention is to provide a method for spin coating a liquid.

[Means for Solving the Problems] In order to achieve the above object, the present invention provides an easy-to-replace product that is coated with glycerin or its alcohol solution that captures and adsorbs processing liquid droplets on the inner wall of the booth used for spin coating work. By installing the lining material and replacing the lining material every predetermined work period, it is possible to prevent the processing liquid that adheres to the wall surface during work from drying and solidifying and scattering and adhering as foreign matter from the inner wall surface of the booth to the surface to be processed. I tried to suppress it.

[Function] Since glycerin or its alcohol solution has adhesive properties, it steadily adsorbs dust, dirt, fiber debris, etc. that have entered the booth and prevents them from being released again. In addition, the processing liquid is
Since the main component is an alcohol solution of ethyl silicate, glycerin or its alcohol solution easily dissolves and captures the processing liquid. Glycerin or its alcohol solution does not dry for more than a week at room temperature (approximately 25° C.), so the treatment liquid attached to the wall will not dry and leave solid matter. Therefore, it is completely possible to prevent solid matter adhering to the inner wall from being peeled off and rolled up by the wind, as in the conventional case.

An easy-to-replace lining material made of a sponge-like plastic sheet impregnated with glycerin or its solution as described above.
It is attached to the inner wall of a booth for spin coating work, and is used for a predetermined work period, for example, every 2 or 3 days.

If it is replaced, accidents such as foreign matter adhering to the panel surface after treatment will not occur when the cathode ray tube panel surface treatment liquid is applied by rotation.

[Example] FIG. 1 is a sectional side view of a main part of an embodiment of the present invention.

A rotary coating device for forming a functional thin film 5 such as an antireflection film or an antistatic film on the panel surface of a cathode ray tube 4 (the position of the functional thin film 5) is a well-known device that holds and rotates a cathode ray tube. It is equipped with a rotational drive means (not shown) and a nozzle 2 for dropping a treatment liquid disposed above the booth 1.

When a processing liquid containing an alcoholic solution of ethyl silicate as a main component is dropped from a nozzle 2 onto the surface to be processed of a rotating cathode ray tube, the liquid spreads over the surface to a uniform thickness. At that time, some of the liquid is blown outward from the periphery,
The liquid becomes droplets 6 and scatters inside the booth. On the other hand, fiber waste and other foreign matter 7 that have entered the booth are also scattered.

In the present invention, a sponge-like sheet is impregnated with glycerin or a sticky liquid obtained by dissolving glycerin in alcohol, so that the surface of the sheet becomes sticky, and the sheet is pasted on the inner wall of a booth.

Since the droplets 6 are captured by the glycerin solution on the sticky sheet and do not dissolve and dry, there is no possibility that dried solids will accumulate on the inner wall and re-splatter as in the conventional case. Glycerin or its alcohol solution has a very slow drying rate and is sticky, so it can maintain its effectiveness for at least a week, and a sheet impregnated with this solution can last for up to a week. It should be replaced every cycle.

Furthermore, any other foreign matter that has entered the booth should be treated in the same manner as above.
Glycerin, which is captured by the adhesive sheet and will not scatter again, may be used as a commercially available product or may be diluted to 50% with ethanol, isopropyl alcohol, etc. Furthermore, the material is not limited to glycerin, but any liquid that is similarly sticky and slow to dry and can dissolve alkyl silicates may of course be used.

As described above, the treated membrane produced using the method of the present invention had a good product rate of 95% without membrane defects.

[Effects of the Invention] As explained above, according to the present invention, almost all foreign matter in the booth can be eliminated, and the surface of the cathode ray tube panel can be left with a normal anti-reflection film, anti-static film, etc. free of dust or foreign matter. A functional thin film can be formed at low cost.

Although the above description has been limited to a cathode ray tube and a spin coating method, the present invention is not limited thereto, and it goes without saying that the present invention can be applied to all coating methods that meet the gist of the present invention.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram of main parts of an embodiment of the present invention.

Claims (1)

[Claims] 1. When spin-coating a processing solution to form an anti-glare film or a transparent conductive film on the glass panel surface of a cathode ray tube, the inner wall of the booth used for the spin-coating operation is coated with glycerin or other glycerin that captures and adsorbs droplets of the processing solution. By installing an easy-to-replace lining material coated with an alcohol solution and replacing this lining material every predetermined work period, the processing solution that adheres to the wall surface during work dries and solidifies, allowing the processing target to be removed from the inner wall surface of the booth. A method for spin coating a cathode ray tube panel surface treatment liquid, characterized in that scattering and adhesion of foreign matter to the surface is suppressed.