JPH02192011A - Magnetic recording medium and production thereof - Google Patents
Magnetic recording medium and production thereofInfo
- Publication number
- JPH02192011A JPH02192011A JP23262389A JP23262389A JPH02192011A JP H02192011 A JPH02192011 A JP H02192011A JP 23262389 A JP23262389 A JP 23262389A JP 23262389 A JP23262389 A JP 23262389A JP H02192011 A JPH02192011 A JP H02192011A
- Authority
- JP
- Japan
- Prior art keywords
- film
- amorphous carbon
- carbon film
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 82
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 58
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000000945 filler Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 9
- 229920006254 polymer film Polymers 0.000 claims abstract description 9
- 239000010408 film Substances 0.000 claims description 91
- 239000010409 thin film Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 36
- 239000010687 lubricating oil Substances 0.000 claims description 13
- 239000011241 protective layer Substances 0.000 claims description 13
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 10
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- 239000011737 fluorine Substances 0.000 claims description 10
- 125000004432 carbon atom Chemical group C* 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 33
- 229910052799 carbon Inorganic materials 0.000 abstract description 23
- 229910002804 graphite Inorganic materials 0.000 abstract description 10
- 239000010439 graphite Substances 0.000 abstract description 10
- 229910045601 alloy Inorganic materials 0.000 abstract description 6
- 239000000956 alloy Substances 0.000 abstract description 6
- 229910020630 Co Ni Inorganic materials 0.000 abstract description 5
- 229910002440 Co–Ni Inorganic materials 0.000 abstract description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 5
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 4
- -1 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000004642 Polyimide Substances 0.000 abstract description 2
- 229920001721 polyimide Polymers 0.000 abstract description 2
- 239000004952 Polyamide Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 229920002647 polyamide Polymers 0.000 abstract 1
- 229920000728 polyester Polymers 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 13
- 239000007789 gas Substances 0.000 description 12
- 230000001050 lubricating effect Effects 0.000 description 10
- 230000007797 corrosion Effects 0.000 description 9
- 238000005260 corrosion Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- 238000007598 dipping method Methods 0.000 description 3
- 238000005566 electron beam evaporation Methods 0.000 description 3
- 229910021385 hard carbon Inorganic materials 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229920006125 amorphous polymer Polymers 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012767 functional filler Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
(イ)産業上の利用分野
本発明は強磁性金属薄膜を磁性層とする磁気記録媒体及
びその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a magnetic recording medium having a magnetic layer made of a ferromagnetic metal thin film and a method for manufacturing the same.
(ロ)従来の技術
近年高密度磁気記録の要求の高まりに対応して真空蒸着
、イオンブレーティング、スパッタリング等の方法によ
り非磁性基板上に強磁性金属からなる薄膜を形成した金
属薄膜型の磁気記録媒体の開発が進められている。この
金属薄膜型の媒体の中でも最も実用化に近いものとして
は、Co−Ni系金属を非磁性基板上に真空蒸着する事
により形成したCo−Ni系の磁気記録媒体が良く知ら
れている。このCo−Ni系の磁気記録媒体は真空蒸着
によって磁性層を形成する際に酸素を導入することによ
り、磁気特性が改善されると同時に、膜硬度も改善され
る。(b) Conventional technology In response to the increasing demand for high-density magnetic recording in recent years, metal thin film type magnetism is created by forming a thin film of ferromagnetic metal on a non-magnetic substrate using methods such as vacuum evaporation, ion blating, and sputtering. Development of recording media is underway. Among these metal thin film type media, the one closest to practical use is a Co--Ni based magnetic recording medium formed by vacuum-depositing a Co--Ni based metal on a non-magnetic substrate. In this Co--Ni magnetic recording medium, by introducing oxygen when forming the magnetic layer by vacuum deposition, the magnetic properties are improved and at the same time the film hardness is also improved.
しかし乍ら、上述のように酸素を導入して形成されたC
o−Ni系の磁気記録媒体は潤滑性に欠け、安定したテ
ープ走行が困難である。そこで、磁性層表面に液体潤滑
剤を塗布して、上述の欠点を解消した磁気記録媒体が多
く提案されている。However, as mentioned above, C formed by introducing oxygen
O-Ni magnetic recording media lack lubricity, making stable tape running difficult. Therefore, many magnetic recording media have been proposed in which the above-mentioned drawbacks are solved by applying a liquid lubricant to the surface of the magnetic layer.
また、最近炭素のもつ潤滑性を活かして、金属薄膜型磁
気記録媒体表面にアモルファスカーボン(α−C)膜を
形成して潤滑作用を持たせる事が提案されている。この
アモルファスカーボン膜の形成方法としては、主にスパ
ッタリング法とCVD法があり、その製法及び薄膜形成
条件の変化によりアモルファスカーボン膜の膜特性(硬
度、潤滑性、透明度、比抵抗等)が大きく異なり、それ
に従って磁気記録媒体の潤滑保護膜としての性能も大き
く異なる。例えばスパッタリングによりアモルファスカ
ーボン膜形成では、ターゲットにグラファイトを用いて
Arガスを導入した場合は潤滑性が優れているが膜硬度
が低いため、ヘッドとの摩擦により媒体に摩耗が生じる
。同じくグラファイトターゲットを用い、A r +H
,混合ガスを導入してスパッタリングを行った場合は膜
硬度は高いが潤滑性の低い膜が形成され、摩擦力が大き
くなるため、やはりヘッドとの摩擦により媒体に傷が入
りやすい。Furthermore, recently it has been proposed to take advantage of the lubricating properties of carbon and form an amorphous carbon (α-C) film on the surface of a metal thin film type magnetic recording medium to provide a lubricating effect. The main methods for forming this amorphous carbon film are sputtering and CVD, and the film properties (hardness, lubricity, transparency, specific resistance, etc.) of the amorphous carbon film vary greatly depending on the manufacturing method and thin film formation conditions. Accordingly, the performance as a lubricating protective film for magnetic recording media also differs greatly. For example, when forming an amorphous carbon film by sputtering, using graphite as a target and introducing Ar gas provides excellent lubricity, but the film has low hardness, causing wear on the medium due to friction with the head. Similarly, using a graphite target, A r +H
When sputtering is performed by introducing a mixed gas, a film with high film hardness but low lubricity is formed, and the frictional force increases, so that the medium is likely to be scratched by friction with the head.
上述の様な硬質カーボンと潤滑性カーボンの欠点を互い
に解消したものとしては例えば特開昭62−1.092
20号公報(G11B5/66)等に示されているよう
に硬質カーボンの上に潤滑性カーボンを形成した磁気記
録媒体が提案されている。しかし乍ら、上記構造の磁気
記録媒体では、アモルファスカーボン膜が多層構造であ
るため、量産性に適しておらず、また、アモルファスカ
ーボン膜中にAr原子等が入り込み、それが構造欠陥と
なり耐久性が低下する。For example, Japanese Patent Application Laid-Open No. 62-1.092 eliminates the disadvantages of hard carbon and lubricating carbon as described above.
As shown in Publication No. 20 (G11B5/66), a magnetic recording medium in which lubricating carbon is formed on hard carbon has been proposed. However, in the magnetic recording medium with the above structure, since the amorphous carbon film has a multilayer structure, it is not suitable for mass production.Also, Ar atoms etc. enter the amorphous carbon film, which causes structural defects and reduces durability. decreases.
一方、CVD法によるアモルファスカーボン膜の形成で
は、CH* Hz混合ガスによるプラズマCVD法に
よって形成されるダイヤモンドライクカーボン(D L
C’)保護膜はアモルファスダイヤモンドと呼ばれる
ほど硬度が高く、従って引っかきテスト等による耐久性
も非常に高い事が知られている反面、硬度が高すぎるた
め蒸着テープ等のフレキシブル媒体へ応用した時に、表
面にクラック等が生じやすく、テープ走行中に膜剥れが
生じ易い。さらにCVD法で潤滑性アモルファスカーボ
ン膜を得るのは難しく現在の所アモルファス高分子炭化
水素膜(α−C−H重合膜)となり、この膜はある程度
の潤滑性は有するものの耐久性に劣っているため、スパ
ッタ法と同様に硬質カーボンと組み合わせた2層構造の
ものを用いる事になり量産性に問題がある。On the other hand, in the formation of an amorphous carbon film by the CVD method, diamond-like carbon (D L
C') The hardness of the protective film is so high that it is called amorphous diamond, and therefore it is known to have very high durability in scratch tests, etc. However, because the hardness is too high, when applied to flexible media such as vapor-deposited tape Cracks etc. are likely to occur on the surface, and film peeling is likely to occur during tape running. Furthermore, it is difficult to obtain a lubricating amorphous carbon film using the CVD method, and at present it is an amorphous polymer hydrocarbon film (α-C-H polymer film), and although this film has some lubricity, it is inferior in durability. Therefore, like the sputtering method, a two-layer structure combined with hard carbon is used, which poses a problem in mass production.
また、特開昭61−233412号公報(GlI B
5 / 66 )には、磁性層上に比抵抗が102〜
10’Ω・cmのアモルファス状炭素よりなる保護層を
スパッタリングにより被着形成して、潤滑性及び耐摩耗
性を向上させた磁気記録媒体が示されている。Also, Japanese Patent Application Laid-Open No. 61-233412 (GlI B
5/66), the specific resistance on the magnetic layer is 102~
A magnetic recording medium is disclosed in which a protective layer made of amorphous carbon of 10' Ω·cm is deposited by sputtering to improve lubricity and wear resistance.
しかし乍ら、この磁気記録媒体においても、保護層中に
はスパッタリング工程中のArガス等が不純物ガスとし
て含まれているため、保護層の比抵抗を1O−2〜10
2Ω・Cmと小さくすることは非常に難しく、製造が困
難である。また、上記公報に示されている磁気記録媒体
は、アルミニウム合金よりなる非磁性基板を用いたハー
ドディスクであり、上述のアモルファス状炭素よりなる
保護層を、ポリエチレンテレフタレート、ポリイミド等
よりなる高分子フィルムを非磁性基板とする磁気テープ
に用いた場合、必ずしも上記公報に示されているような
効果は得られなかった。However, even in this magnetic recording medium, the protective layer contains impurity gas such as Ar gas during the sputtering process, so the resistivity of the protective layer is reduced to 1O-2 to 10.
It is very difficult to reduce the resistance to 2Ω·Cm, and manufacturing is difficult. Furthermore, the magnetic recording medium disclosed in the above publication is a hard disk using a nonmagnetic substrate made of an aluminum alloy, and the protective layer made of the above-mentioned amorphous carbon is covered with a polymer film made of polyethylene terephthalate, polyimide, etc. When used in a magnetic tape having a non-magnetic substrate, the effects shown in the above publication were not necessarily obtained.
(ハ)発明が解決しようとする課題
本発明は上記従来例の欠点に鑑み為されたものであり、
高分子フィルムよりなる非磁性基板を用いた場合におい
ても、耐久性及び潤滑性に優れた強磁性金属薄膜型の磁
気記録媒体及びその製造方法を提供することを目的とす
るものである。(c) Problems to be Solved by the Invention The present invention has been made in view of the drawbacks of the above-mentioned conventional examples.
The object of the present invention is to provide a ferromagnetic metal thin film type magnetic recording medium that has excellent durability and lubricity even when a nonmagnetic substrate made of a polymer film is used, and a method for manufacturing the same.
(ニ)課題を解決するための手段
本発明の磁気記録媒体は、フィラーを含有しない高分子
フィルムよりなる非磁性基板上に強磁性金属薄膜を形成
し、該強磁性金属薄膜上に比抵抗が0,1Ω−cm以下
のアモルファスカーボン膜を形成したことを特徴とする
。(d) Means for Solving the Problems The magnetic recording medium of the present invention has a ferromagnetic metal thin film formed on a nonmagnetic substrate made of a polymer film containing no filler, and a specific resistance on the ferromagnetic metal thin film. It is characterized by forming an amorphous carbon film of 0.1 Ω-cm or less.
更に、本発明の磁気記録媒体は、前記アモルファスカー
ボン膜の炭素原子間の結合状態がSP2混成軌道の共有
結合を主体とすることを特徴とする。Furthermore, the magnetic recording medium of the present invention is characterized in that the bonding state between carbon atoms of the amorphous carbon film is mainly a covalent bond of an SP2 hybrid orbital.
更に、本発明の磁気記録媒体は、前記アモルファスカー
ボン膜が不純物ガスを含有しないことを特徴とする。Furthermore, the magnetic recording medium of the present invention is characterized in that the amorphous carbon film does not contain impurity gas.
更に、本発明の磁気記録媒体は、前記アモルファスカー
ボン膜上にフッ素系の液体潤滑剤からなる保護層を塗布
形成したことを特徴とする。Furthermore, the magnetic recording medium of the present invention is characterized in that a protective layer made of a fluorine-based liquid lubricant is coated on the amorphous carbon film.
また、本発明の磁気記録媒体の製造方法は、フィラーを
含有しない高分子フィルムよりなる非磁性基板上に強磁
性金属薄膜を形成し、該強磁性金属薄膜」二に真空蒸着
により炭素原子を被着してアモルファスカーボン膜を形
成することを特徴とする。Further, the method for producing a magnetic recording medium of the present invention includes forming a ferromagnetic metal thin film on a nonmagnetic substrate made of a polymer film containing no filler, and coating carbon atoms on the ferromagnetic metal thin film by vacuum evaporation. It is characterized in that it is deposited to form an amorphous carbon film.
(ホ)作用
フィラーを含有しない非磁性基板上に強磁性金属薄膜を
介してアモルファスカーボン膜を形成した磁気記録媒体
では、大幅に耐久性が向上する。(e) A magnetic recording medium in which an amorphous carbon film is formed on a nonmagnetic substrate that does not contain a functional filler via a ferromagnetic metal thin film has significantly improved durability.
更に、アモルファスカーボン膜内に不純物ガスを含有し
ない場合、前記アモルファスカーボン膜は比抵抗が小さ
くなり潤滑性が向上する。Furthermore, when the amorphous carbon film does not contain an impurity gas, the amorphous carbon film has a small resistivity and improved lubricity.
更に、アモルファスカーボン膜上にフッ素系の液体潤滑
剤からなる保護層を塗布形成した場合、前記アモルファ
スカーボン膜表面に存在する多数の空孔に極性基を保有
する前記液体潤滑剤が入り込むことにより、磁気記録媒
体中に酸素、水分等が侵入するのが防止され、耐食性が
向上する。Furthermore, when a protective layer made of a fluorine-based liquid lubricant is applied and formed on an amorphous carbon film, the liquid lubricant having a polar group enters into the large number of pores existing on the surface of the amorphous carbon film. This prevents oxygen, moisture, etc. from entering the magnetic recording medium, and improves corrosion resistance.
また、上記製造方法に依れば、アモルファス力ボン膜は
不純物ガスを含有せず、SP’混成軌道の共有結合が主
体であるアモルファスカーボン膜が形成される。Further, according to the above manufacturing method, an amorphous carbon film containing no impurity gas and mainly composed of covalent bonds of SP' hybrid orbitals is formed.
(−・)実施例
以下、図面を参照しつつ本発明の一実施例を詳細に説明
する。(-.) Example Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
第1図は本実施例の磁気テープの構造を示す要部断面図
である。FIG. 1 is a sectional view of a main part showing the structure of the magnetic tape of this embodiment.
本実施例の磁気テープは、フィラー(非磁性粒子)を含
有しないPET(ポリエチレンテレフタレート)、ポリ
エステル、ポリイミド、ポリアミド等の高分子フィルム
よりなる非磁性基板(1〕上にCo−Ni系合金(Co
−Cr系合金、FeN)等の強磁性金属薄膜(2)が形
成されており、該強磁性金属薄膜(2)上にはアモルフ
ァスカーボン膜(3)が形成されている。前記アモルフ
ァスカーボン膜(3)は高真空中でカーボンソースを主
1ビーム等により加熱蒸発する真空蒸着法によって形成
され、その膜質はグラファイトと同様にSP2混成軌道
での共有結合が主体であり、比抵抗が0.1Ω−cm以
下である。The magnetic tape of this example is made of a Co-Ni alloy (Co
A ferromagnetic metal thin film (2) such as -Cr alloy, FeN) is formed, and an amorphous carbon film (3) is formed on the ferromagnetic metal thin film (2). The amorphous carbon film (3) is formed by a vacuum evaporation method in which a carbon source is heated and evaporated with a main beam in a high vacuum, and its film quality is similar to graphite, with covalent bonds mainly in the SP2 hybrid orbital, and it has a comparatively The resistance is 0.1 Ω-cm or less.
本実施例では、フィラーを含有しないP E TよI)
なる厚さ9Ωm、最大表面粗さRmaxlOO人の非磁
性フィルム基板上に酸素雰囲気中で斜め蒸着を行うこと
によりCo−Ni合令(Co−80w t%、Ni:2
Ωwt%)よりなる厚さ2000人の強磁性金属薄膜を
形成し、その@l×10−’Torr以下の高真空中で
グラファイトソースを用いて電子ビーム蒸着を行うこと
により前記強磁性金属薄膜、]−に厚さ100人のアモ
ルファスカーボン膜を形成して試料1の磁気テープを形
成した。前記アモルファスカーボン膜の形成は、基板温
度100℃以下、電子銃の出力4KW以上で行う。尚、
電子銃の出力が4KW未濃の場合、アモルファスカーボ
ンの被着力が不十分である。In this example, PET (I) containing no filler was used.
Co-Ni composite (Co-80 wt%, Ni:2
The ferromagnetic metal thin film is formed by forming a ferromagnetic metal thin film with a thickness of 2,000 Ωwt%) and performing electron beam evaporation using a graphite source in a high vacuum of @l×10-' Torr or less, A magnetic tape of Sample 1 was formed by forming an amorphous carbon film with a thickness of 100 mm. The amorphous carbon film is formed at a substrate temperature of 100° C. or less and an electron gun output of 4 KW or more. still,
If the output of the electron gun is less than 4KW, the adhesion force of the amorphous carbon is insufficient.
また、比較例として、以下に示す試料2〜5を作成した
。In addition, as comparative examples, Samples 2 to 5 shown below were created.
試料2
アモルファスカーボン膜の代りに厚さ100人のダイヤ
モンドライクカーボン膜を形成した以外は試料1と同様
にして磁気テープを作成した。前記ダイヤモンドカーボ
ン膜の形成はRFスパッタ装置によりA r+Ht (
1: 1)ガスを5mT。Sample 2 A magnetic tape was prepared in the same manner as Sample 1 except that a diamond-like carbon film with a thickness of 100 mm was formed instead of the amorphous carbon film. The diamond carbon film is formed using an RF sputtering device using A r+Ht (
1: 1) Gas at 5mT.
rr導入し、グラファイトカーボンのターゲットを用い
て行った。rr was introduced and a graphite carbon target was used.
試料2
アモルファスカーボン膜の代りに厚さ100人の潤潮性
カーボン膜を形成した以外は試料1と同様にして磁気テ
ープを作成した。前記潤滑性カーボン膜の形成はRFス
パッタ装置によりArガスを5mTo r r導入し、
グラファイトカーボンのターゲットを用いて行った。Sample 2 A magnetic tape was prepared in the same manner as Sample 1, except that a 100-layer thick wettable carbon film was formed instead of the amorphous carbon film. The lubricating carbon film was formed by introducing Ar gas at 5 mTorr using an RF sputtering device.
This was done using a graphite carbon target.
試料4
アモルファスカーボン膜の代りに厚さ50人のダイヤモ
ンドライクカーボン膜を形成し、該ダイヤモンドライク
カーボン膜上に厚さ50人の潤滑性カーボン膜を形成し
た以外は試料1と同様にして磁気テープを作成した。前
記ダイヤモンドライクカーボン膜及び前記潤滑性カーボ
ン膜の形成は夫々試料2、試料3と同じである。Sample 4 A magnetic tape was prepared in the same manner as Sample 1, except that a diamond-like carbon film with a thickness of 50 μm was formed instead of the amorphous carbon film, and a lubricating carbon film with a thickness of 50 μm was formed on the diamond-like carbon film. It was created. The formation of the diamond-like carbon film and the lubricating carbon film was the same as in Sample 2 and Sample 3, respectively.
試料5
アモルファスカーボン膜の代りに、強磁性金属薄膜」−
に液体潤滑剤を厚さ100人程度量布した以外は試料1
と同様にして磁気テープを作成した。Sample 5 Ferromagnetic metal thin film instead of amorphous carbon film
Sample 1 except that liquid lubricant was applied to a thickness of about 100 mm.
A magnetic tape was made in the same way.
次に、上述の試料1〜5の磁気テープの摩擦係数、比抵
抗、スチル耐久性、出力変動及びへ・ンド目づまりにつ
いて測定し、その結果を下記の第1表に示す。尚、スチ
ル耐久性は出力が急激に低下し、媒体に傷が入るまでの
時間を示し、出力変動は100回の繰り返し再生を行っ
た時の7 M H2の再生出力の最大値と最小値の差か
ら求めた値を示し、ヘッド目づまりは100回の繰り返
し再生中に7 M Hzの再生出力が6dB以上低下し
た回数を示している。Next, the friction coefficient, specific resistance, still durability, output fluctuation, and head clogging of the magnetic tapes of Samples 1 to 5 described above were measured, and the results are shown in Table 1 below. In addition, still durability indicates the time until the output suddenly decreases and scratches appear on the medium, and output fluctuation is the maximum and minimum value of the playback output of 7 MH2 when repeated playback is performed 100 times. The value obtained from the difference is shown, and head clogging indicates the number of times the 7 MHz playback output has decreased by 6 dB or more during 100 repeated playbacks.
第 1 表
上記第1表から判るように、ダイヤモンドライクカーボ
ン膜を形成した試料2では摩擦係数が大きいため、出力
変動が大きく出力安定性に欠け、スチル耐久性も悪い、
また、ダイヤモンドライクカーボン膜と潤滑性カーボン
膜とを設けた試料4はスチル耐久性が180m1n以−
ヒと良いが、出力変動がやや悪い。また、ヘッド目づま
りに関しては比較例の試料2〜5全てで発生したのに対
し、実施例の試料1では全く発生しなかった。以上のよ
うに本実施例の磁気テープのアモルファスカーボン膜は
表面潤滑性及び耐久性に優れており、媒体保護膜に非常
に適している。Table 1 As can be seen from Table 1 above, Sample 2, which had a diamond-like carbon film, had a large friction coefficient, resulting in large output fluctuations, poor output stability, and poor still durability.
In addition, sample 4, which was provided with a diamond-like carbon film and a lubricating carbon film, had a still durability of 180 m1n or more.
It's good, but the output fluctuation is a little bad. In addition, while head clogging occurred in all samples 2 to 5 of the comparative example, it did not occur at all in sample 1 of the example. As described above, the amorphous carbon film of the magnetic tape of this example has excellent surface lubricity and durability, and is very suitable as a medium protective film.
尚、試料1〜3の磁気テープのカーボン膜についてX線
回折を行った結果、試料1〜3のカーボン膜は全て回折
ピークが見られず、アモルファス構造であることが確認
した。Incidentally, as a result of performing X-ray diffraction on the carbon films of the magnetic tapes of Samples 1 to 3, it was confirmed that all of the carbon films of Samples 1 to 3 had an amorphous structure, with no diffraction peaks observed.
次に、試料1と同様にして非磁性フィルム基板上にCo
−Ni合金の強磁性金属薄膜を形成した後、第2図に示
す装置を用いて前記強磁性金属薄膜上にアモルファスカ
ーボン膜を形成した。Next, in the same manner as Sample 1, Co was placed on the nonmagnetic film substrate.
After forming a ferromagnetic metal thin film of -Ni alloy, an amorphous carbon film was formed on the ferromagnetic metal thin film using the apparatus shown in FIG.
第2図中、(4)は排気系(5)により内部1×10−
”Torr以下の高真空に保たれた真空槽で、該真空槽
(4)の内部にはるつぼ(6)、冷却ローラ(7)、送
出しローラ(8)、巻取りローラ(9)、カウフマン型
のイオン源(10)が配設されている。前記るつぼ(6
)内には蒸発源である純度99.9%のグラファイトソ
ース(11)が収納されている。(12)は開口部(1
3)を備える遮へい板であり、蒸発角度θ1を規定する
。(14)は前述の工程で非磁性フィルム基板上にCo
−Ni合金の強磁性金属薄膜が形成された磁性フィルム
であり、該磁性フィルム(14)は送出しローラ(8)
から送出され冷却ローラ(7)を介して巻取りローラ(
9)に巻取られる。前記イオン源(10)はガス導入管
(15)からの純度99.999%のArガスをイオン
化し、Arイオン(16)を前記遮へい板(12)の開
口部(13)を通して磁性フィルム(14)に照射する
。尚、Arイオン照射中の真空槽(4)内の真空度は8
X10−’T。In Figure 2, (4) is internally 1×10-
``A vacuum chamber maintained at a high vacuum of Torr or less. A type ion source (10) is disposed in the crucible (6).
) contains a graphite source (11) with a purity of 99.9%, which is an evaporation source. (12) is the opening (1
3) and defines the evaporation angle θ1. (14) is coated with Co on a non-magnetic film substrate in the above process.
- A magnetic film on which a ferromagnetic metal thin film of Ni alloy is formed, and the magnetic film (14) is attached to the feed roller (8).
It is sent out from the winding roller (
9). The ion source (10) ionizes Ar gas with a purity of 99.999% from the gas introduction tube (15), and sends Ar ions (16) through the opening (13) of the shielding plate (12) to the magnetic film (14). ). The degree of vacuum in the vacuum chamber (4) during Ar ion irradiation is 8.
X10-'T.
rrである。It is rr.
この真空蒸着装置によるアモルファスカーボン膜の形成
は、先ず前記イオン源(10)からArイオンを引き出
し前記磁性フィルム(14)に向けて照射した状態で、
グラファイトソース(11)を昇華させ、炭素の気体(
17)を前記遮へい板(12)の開口部(13)を通し
て前記冷却ローラ(7)上の磁性フィルム(14)の強
磁性金属薄膜上に炭素原子を蒸着することにより行われ
る。To form an amorphous carbon film using this vacuum evaporation apparatus, first, Ar ions are extracted from the ion source (10) and irradiated toward the magnetic film (14).
The graphite source (11) is sublimated to produce carbon gas (
17) is carried out by depositing carbon atoms onto the ferromagnetic metal thin film of the magnetic film (14) on the cooling roller (7) through the opening (13) of the shielding plate (12).
本実施例では、上記製造装置において、成膜速度200
人/m i n、 A rイオン電圧がIKVの条件下
でArイオンのイオン電流密度を色々と変えて厚さ10
0人のアモルファスカーボン膜を形成して試料を作成し
、これら試料の比抵抗、スチル耐久性及びヘッド目づま
りについて測定評価した。その結果を第3図に示す。尚
、これらの測定評価基準は上述の試料1〜5の時と同じ
である。In this example, in the above manufacturing apparatus, the film formation rate was 200.
person/min, Ar ion voltage is IKV, the ion current density of Ar ions is changed variously, and the thickness is 10.
Samples were prepared by forming an amorphous carbon film, and the specific resistance, still durability, and head clogging of these samples were measured and evaluated. The results are shown in FIG. Note that these measurement and evaluation criteria are the same as those for Samples 1 to 5 described above.
第3図から判るように、イオン電流密度がOmA /
cm ”、即ちArイオンを照射せず、電子ビムによる
蒸着のみでCo−Ni合金のアモルファスカーボン膜を
形成した比抵抗O11Ω−cm以下の試料はヘッド目づ
まりが発生せず、スチル耐久性が最も良好である。As can be seen from Figure 3, the ion current density is OmA/
cm'', that is, a sample with a resistivity of 011Ω-cm or less, in which an amorphous carbon film of Co-Ni alloy was formed only by electron beam evaporation without Ar ion irradiation, does not cause head clogging and has the best still durability. It is.
第4図は各アモルファスカーボン膜の比抵抗値を示す図
である。FIG. 4 is a diagram showing the specific resistance value of each amorphous carbon film.
この第4図から判るようにSP2混成軌道の結合性が高
い程、比抵抗は小さくなる。本発明の真空蒸着法で形成
されたアモルファスカーボン膜の比抵抗は10−1〜1
0−Ω−cmの範囲内にある。As can be seen from FIG. 4, the higher the connectivity of the SP2 hybrid orbital, the lower the specific resistance. The specific resistance of the amorphous carbon film formed by the vacuum evaporation method of the present invention is 10-1 to 1
It is within the range of 0-Ω-cm.
次に、比較例として以下に示す試料6.7を作成した。Next, Sample 6.7 shown below was prepared as a comparative example.
試料6
平均粒径1000人の酸化シリコンよりなるフィラーを
密度20000個/cm ’で含有するPETよりなる
厚さ9μm、最大表面粗さ250人、平均表面粗さ14
0Aの非磁性フィルム基板上に上述の実施例(試料l)
と同様にしてCo−N1合金の強磁性金属薄膜及びアモ
ルファス力ボン膜を形成して試料6の磁気テープを作成
した。Sample 6 Made of PET containing filler made of silicon oxide with an average particle size of 1000 particles at a density of 20000 particles/cm', thickness 9 μm, maximum surface roughness 250 particles, average surface roughness 14
The above example (sample 1) was deposited on a 0A nonmagnetic film substrate.
A magnetic tape of sample 6 was prepared by forming a ferromagnetic metal thin film of Co--N1 alloy and an amorphous magnetic film in the same manner as described above.
試料7
アモルファスカーボン膜の代りに強磁性金属薄膜上にフ
ッ素系の液体潤滑剤よりなる厚さ100人程度量保護層
を塗布形成した以外は試料6同様にして磁気テープを作
成した。Sample 7 A magnetic tape was prepared in the same manner as Sample 6, except that instead of the amorphous carbon film, a protective layer made of a fluorine-based liquid lubricant and having a thickness of approximately 100 mm was coated on a ferromagnetic metal thin film.
次に、上述の試料1.5.6.7の磁気テープをスチル
再生した時の再生出力のスチル再生時間による変化を測
定し、その結果を第5図〜第8図に夫々示す。尚、上記
試料1.5.6.7の非磁性基板と保護層との組み合せ
は下記の第2表に示す通りである。Next, when the above-mentioned sample 1.5.6.7 magnetic tape was still reproduced, changes in the reproduction output depending on the still reproduction time were measured, and the results are shown in FIGS. 5 to 8, respectively. The combinations of the nonmagnetic substrate and the protective layer of Sample 1.5.6.7 are as shown in Table 2 below.
第 2 表
第5図〜第8図から判るように試料1はスチル再生時間
が180分経過しても再生出力は低下しなかったのに対
し、試料5は110分前後、試料7は120分前後で再
生出力はほとんど0になった。また、試料6においては
スチル再生時間が4分程で再生出力はほとんどOになっ
た。As can be seen from Table 2, Figures 5 to 8, the playback output of sample 1 did not decrease even after the still playback time of 180 minutes passed, whereas the playback output of sample 5 remained around 110 minutes and that of sample 7 after 120 minutes. The playback output was almost 0 before and after. In addition, in sample 6, the reproduction output almost reached O when the still reproduction time was about 4 minutes.
即ち、以上の結果がらアモルファスカーボン膜は非磁性
基板としてフィラーを含有しない基板を用いた時に、ス
チル耐久性を向上させるものであり、フィラーを含有す
る基板を用いた時には、却ってスチル耐久性を悪化させ
ることが判る。In other words, from the above results, the amorphous carbon film improves the still durability when a non-magnetic substrate that does not contain filler is used, but it actually worsens the still durability when a substrate containing filler is used. It turns out that it does.
次に、本実施例(試料1)において、アモルファスカー
ボン膜の膜厚を150人(試料A)、250A(試料B
)、350人(試料C)と変えて3種類の磁気テープを
形成し、各磁気テープのスチル再生出力のスチル時間に
よる変化及び記録周波数7 M Hz、10MHzにお
ける最大再生出方を測定した。また、比較例としてフィ
ラーを含有するPET基板上にCo−Ni合金よりなる
膜厚が約200 OAの強磁性金属薄膜を被着形成し、
更にその上にフッ素系の液体潤滑剤よりなる厚さ約30
人の保護層を塗布形成して磁気テープ(試料1))を作
成し、該磁気テープのスチル再生出方のスチル時間によ
る変化及び記録周波数7MHz、10MH2における最
大再生出力を測定した。以上の測定結果を下記の第3表
に示す。尚、上記スチル再生出方は温度25℃、温度6
5%の環境条件下で規定し、その値は初期出力に対して
の低下率である。また、上記最大再生出力は比較例(試
料D)を基準とした値である。Next, in this example (sample 1), the film thickness of the amorphous carbon film was changed to 150 mm (sample A) and 250 mm (sample B).
), 350 people (sample C) were used to form three types of magnetic tapes, and the change in the still playback output of each magnetic tape depending on the still time and the maximum playback output at recording frequencies of 7 MHz and 10 MHz were measured. In addition, as a comparative example, a ferromagnetic metal thin film made of a Co-Ni alloy with a thickness of about 200 OA was deposited on a PET substrate containing filler.
Furthermore, on top of that is a layer of approximately 30 mm thick made of fluorine-based liquid lubricant.
A magnetic tape (sample 1) was prepared by coating a protective layer on the magnetic tape, and the change in the still playback appearance of the magnetic tape depending on the still time and the maximum playback output at recording frequencies of 7 MHz and 10 MHz were measured. The above measurement results are shown in Table 3 below. In addition, the above still playback is performed at a temperature of 25℃ and a temperature of 6.
It is defined under an environmental condition of 5%, and the value is the rate of decrease with respect to the initial output. Further, the above maximum reproduction output is a value based on a comparative example (sample D).
第 3 表
上記第3表から判るようにアモルファスカーボン膜を形
成した場合、その膜厚には関係なくスチル再生出力の低
力は抑えられる。また、アモルファスカーボン膜の膜厚
が15OAと薄い場合は10MI−(2の短波長領域で
の最大再生出力が3.6dBと大幅に向上する。しかし
乍ら、アモルファスカーボン膜の膜厚が350人と厚く
なると、最大再生出力は低下する。Table 3 As can be seen from Table 3 above, when an amorphous carbon film is formed, the low power of the still reproduction output can be suppressed regardless of the film thickness. Furthermore, if the thickness of the amorphous carbon film is as thin as 15OA, the maximum reproduction output in the short wavelength region of 10MI-(2) will be significantly improved to 3.6dB. As the thickness increases, the maximum playback output decreases.
次に、本発明の他の実施例の磁気テープについて説明す
る。Next, a magnetic tape according to another embodiment of the present invention will be described.
この他の実施例では、フィラーを含有しないPETより
なる厚さ9.4μmの非磁性フィルム基板上に、真空度
lXl0−’Torrの条件下でC0N1合金(Co:
80wt%、N i : 20 w t%)よりなる厚
さ1500〜2000人の強磁性金属薄膜を形成し、そ
の後真空度lXl0−”T。In another example, a C0N1 alloy (Co:
A ferromagnetic metal thin film with a thickness of 1,500 to 2,000 layers was formed, and the vacuum was then reduced to lXl0-''T.
rrの条件ト“でグラファイトソースを用いて電子ビー
ム蒸着法(加電力4KW)を行うことにより前記強磁性
金属薄膜トに厚さ80〜100Aのアモルファスカーボ
ン膜を形成し、更にその上にパーフルオロアルキルカル
ボン酸よりなるフッ素系の液体潤溺剤をデイピング法に
より]、5X 10mg / C+11 j4ダーして
保護層を形成して試料8の磁気テープを作成した。An amorphous carbon film with a thickness of 80 to 100 A is formed on the ferromagnetic metal thin film by performing electron beam evaporation (applying power: 4 KW) using a graphite source under the conditions of RR, and further perfluorocarbon film is formed on the ferromagnetic metal thin film. A magnetic tape of Sample 8 was prepared by dipping a fluorine-based liquid lubricant made of alkyl carboxylic acid into a protective layer by dipping 5×10 mg/C+11 j4.
また、比較例として、試料8の磁気テープにおいてCo
−Ni合金の強磁性金属薄膜」−にアモルファスカーボ
ン膜を形成せず、直接パーフルオロアルキルカルボン酸
よりなるフッ素系の液体潤滑剤をデイピング法により1
.5X 10−”m g / Cm2付与して保護層を
形成して試料9の磁気テープを作成した。In addition, as a comparative example, Co
A fluorine-based liquid lubricant made of perfluoroalkylcarboxylic acid is directly applied to the Ni alloy ferromagnetic metal thin film by the dipping method without forming an amorphous carbon film.
.. A magnetic tape of Sample 9 was prepared by applying 5×10-” mg/Cm2 to form a protective layer.
次に、上記試料8.9の磁気テープ及び上述の実施例の
試料lの磁気テープのスチル耐久性、動摩擦係数及び耐
食性について調べ、その結果を下記の第4表に示す。尚
、スチル耐久性については磁気テープをスチル再生して
その時の再生出力が初期値から3dB低下するまでの時
間を測定し、動摩擦係数については走行安定性を評価す
る指標であり、VTR装置のシリンダ前後における磁気
テープの張力により測定し、耐食性については温度60
℃、湿度90%の状況下で磁気テープを20日間放置し
た後の磁気テープ表面の腐食状況を光学顕微鏡で観察し
た。Next, the still durability, coefficient of dynamic friction, and corrosion resistance of the magnetic tape of Sample 8.9 and the magnetic tape of Sample 1 of the above-mentioned Example were investigated, and the results are shown in Table 4 below. Regarding still durability, the time required for the reproduction output to decrease by 3 dB from the initial value after still reproduction of a magnetic tape is measured, and the coefficient of dynamic friction is an index for evaluating running stability. Corrosion resistance is measured by the tension of the magnetic tape at the front and back.
After the magnetic tape was left for 20 days at a temperature of 90% humidity, the state of corrosion on the surface of the magnetic tape was observed using an optical microscope.
第 4 表
上記第4表から判るように、強磁性金属薄膜、J二にア
モルファスカーボン膜を形成し、その上にフッ素系の液
体潤滑剤からなる保護層を形成した試料8の磁気テープ
は、スチル耐久性及び走行性に優れ、且つ耐食性にも優
れている。これに対して、強磁性金属薄膜−Lにアモル
ファスカーボン膜のみを形成した試料1の磁気テープは
、スチル耐久性及び走行性は向上するが、耐食性につい
ては向上しない。上記試料1においては耐食性が向上し
ない理由は、アモルファスカーボン膜表面に多数の空孔
が生じているためであると考えられる。Table 4 As can be seen from Table 4 above, the magnetic tape of Sample 8 had an amorphous carbon film formed on the ferromagnetic metal thin film J2, and a protective layer made of a fluorine-based liquid lubricant formed thereon. Excellent still durability and running properties, as well as excellent corrosion resistance. On the other hand, the magnetic tape of Sample 1 in which only the amorphous carbon film was formed on the ferromagnetic metal thin film -L improved in still durability and running performance, but did not improve in corrosion resistance. The reason why the corrosion resistance of Sample 1 is not improved is considered to be that a large number of pores are formed on the surface of the amorphous carbon film.
これに対して、試料8において、耐食性が向上した理由
は、前記アモルファスカーボン膜表面の空孔に極性基を
保有するフッ素系の液体潤滑剤が入り込むことにより、
磁気テープ中への酸素、水分等の侵入を防止したためで
あると考えられる。On the other hand, the reason why the corrosion resistance of Sample 8 improved is that the fluorine-based liquid lubricant having polar groups entered the pores on the surface of the amorphous carbon film.
This is thought to be due to the prevention of oxygen, moisture, etc. from entering the magnetic tape.
尚、上述の実施例では、フッ素の液体潤滑剤としてパー
フルオロアルキルカルボン酸を用いたが、それ以外にも
分子量が500〜20,000であり、分子中に極性基
−OH,−COOH。In the above examples, perfluoroalkylcarboxylic acid was used as the fluorine liquid lubricant, but it also has a molecular weight of 500 to 20,000 and polar groups -OH, -COOH in the molecule.
0COC)i、、−NH2等を保有するものであればよ
い。0COC)i, -NH2, etc. may be used.
(1・)発明の効果
本発明に依れば、耐久性及び潤滑性に優れた強磁性金属
薄膜型の磁気記録媒体を提供し得る。(1.) Effects of the Invention According to the present invention, a ferromagnetic metal thin film type magnetic recording medium having excellent durability and lubricity can be provided.
更に、本発明に依れば、耐食性をも向上した磁気記録媒
体を提供し得る。Furthermore, according to the present invention, it is possible to provide a magnetic recording medium with improved corrosion resistance.
また、発明に依れば、上記磁気記録媒体を量産性良く製
造することが出来る金属薄膜型の磁気記録媒体の製造方
法を提供し得る。Further, according to the invention, it is possible to provide a method for manufacturing a metal thin film type magnetic recording medium, which allows the above-mentioned magnetic recording medium to be manufactured with good mass productivity.
第1図は本発明の磁気テープの構造を示す要部断面図、
第2図は磁気テープの製造装置を示す概略断面図、第3
図は磁気テープの特性を示す図、第4図はアモルファス
カーボン膜の抵抗値を示す図、第5図、第6図、第7図
及び第8図は夫々スチル再生出力のスチル時間による変
化を示す図である。
(1)・・・非磁性基板、(2)・・・強磁性金属薄膜
、(3)・・・アモルファスカーボン膜。FIG. 1 is a sectional view of the main part showing the structure of the magnetic tape of the present invention;
Figure 2 is a schematic cross-sectional view showing a magnetic tape manufacturing device;
Figure 4 shows the characteristics of the magnetic tape, Figure 4 shows the resistance value of the amorphous carbon film, and Figures 5, 6, 7, and 8 show the changes in the still playback output depending on the still time. FIG. (1)...Nonmagnetic substrate, (2)...Ferromagnetic metal thin film, (3)...Amorphous carbon film.
Claims (5)
磁性基板上に強磁性金属薄膜を形成し、該強磁性薄膜上
に比抵抗が0.1Ω−cm以下のアモルファスカーボン
膜を形成したことを特徴とする磁気記録媒体。(1) A ferromagnetic metal thin film is formed on a nonmagnetic substrate made of a polymer film containing no filler, and an amorphous carbon film with a specific resistance of 0.1 Ω-cm or less is formed on the ferromagnetic thin film. magnetic recording media.
状態はSP^2混成軌道の共有結合が主体であることを
特徴とする請求項(1)記載の磁気記録媒体。(2) The magnetic recording medium according to claim 1, wherein the bonding state between carbon atoms of the amorphous carbon film is mainly a covalent bond of an SP^2 hybrid orbital.
しないことを特徴とする請求項(1)又は(2)記載の
磁気記録媒体。(3) The magnetic recording medium according to claim (1) or (2), wherein the amorphous carbon film does not contain impurity gas.
潤滑剤からなる保護層を塗布形成したことを特徴とす請
求項(1)、(2)又は(3)記載の磁気記録媒体。(4) The magnetic recording medium according to claim (1), (2) or (3), wherein a protective layer made of a fluorine-based liquid lubricant is coated on the amorphous carbon film.
磁性基板上に強磁性金属薄膜を形成し、該強磁性金属薄
膜上に真空蒸着により炭素原子を被着してアモルファス
カーボン膜を形成することを特徴とする磁気記録媒体の
製造方法。(5) A ferromagnetic metal thin film is formed on a non-magnetic substrate made of a polymer film containing no filler, and carbon atoms are deposited on the ferromagnetic metal thin film by vacuum evaporation to form an amorphous carbon film. A method for manufacturing a magnetic recording medium.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23262389A JP2703359B2 (en) | 1988-10-03 | 1989-09-07 | Magnetic recording medium and method of manufacturing the same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24932688 | 1988-10-03 | ||
JP63-249326 | 1988-10-03 | ||
JP23262389A JP2703359B2 (en) | 1988-10-03 | 1989-09-07 | Magnetic recording medium and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02192011A true JPH02192011A (en) | 1990-07-27 |
JP2703359B2 JP2703359B2 (en) | 1998-01-26 |
Family
ID=26530563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23262389A Expired - Fee Related JP2703359B2 (en) | 1988-10-03 | 1989-09-07 | Magnetic recording medium and method of manufacturing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2703359B2 (en) |
-
1989
- 1989-09-07 JP JP23262389A patent/JP2703359B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2703359B2 (en) | 1998-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5589263A (en) | Magnetic recording medium having a ferromagnetic metal thin film, a dry etched layer, a carbonaceous film, and a lubricant film | |
JP3419045B2 (en) | Manufacturing method of magnetic recording medium | |
JPH02192011A (en) | Magnetic recording medium and production thereof | |
JPH0223926B2 (en) | ||
US7214436B2 (en) | Magnetic recording medium and process for producing same | |
JPH09320031A (en) | Magnetic recording medium | |
JPH0559570B2 (en) | ||
JP2874419B2 (en) | Method and apparatus for manufacturing magnetic recording medium | |
JP2594380B2 (en) | Magnetic recording media | |
JPH04134623A (en) | Tape-shaped magnetic recording medium | |
JPH0457213A (en) | Magnetic recording medium | |
JPH06176342A (en) | Magnetic recording medium and its production | |
JPH044648B2 (en) | ||
JPH02110828A (en) | Production of magnetic recording medium | |
JPH02282919A (en) | Magnetic recording medium | |
JPH0479043B2 (en) | ||
JP2003085742A (en) | Method of manufacturing magnetic recording medium | |
JPH03134819A (en) | Magnetic recording medium and its production | |
JPH04168626A (en) | Manufacture of magnetic recording medium | |
JPH06333230A (en) | Magnetic recording medium | |
JPH09167327A (en) | Magnetic recording medium | |
JPS6326815A (en) | Magnetic recording medium | |
JPH0991666A (en) | Magnetic recording medium | |
JPH02141927A (en) | Production of magnetic recording medium | |
JPH09167326A (en) | Magnetic recording medium |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |