JPH02191931A - Adhering method for vacuum contact system printing frame device - Google Patents

Abstract

PURPOSE:To prevent a squeezing roller from getting over an air reservoir and preceding and to rapidly accomplish a required contact state by stopping or decelerating the squeezing roller before the vicinity of the trailing edge of a film negative in the course of the stroke when the roller goes. CONSTITUTION:When the film negative 31 and a photosensitive material 32 are superposed and placed on a printing table 4 and a printing frame device is started, an exhaust means 10 is actuated to exhaust air in a space formed between a light transmissive plate 6 and an elastic sheet 1 through an air tight seal 2 and the elastic sheet 1 previously adheres from a circumferential part. After a sheet supporting plate 1a descends, the squeezing roller 11 starts going, press-contacts with the sheet 1 and is turned. Then, the roller 11 temporarily stops before the vicinity of the trailing edge of the negative 31 and travels slowly thereafter. Thus, the roller 11 is prevented from getting over the air reservoir 33 and preceding and the exhaust in the air reservoir 33 is accelerated.

Description

Detailed Description of the Invention (Field of Industrial Application) This invention is a vacuum adhesion method in which a film original plate for photolithography is printed in close contact with a photosensitive material (hereinafter simply referred to as a photosensitive material) such as a photosensitive film or PS plate. The present invention relates to a type of printing frame apparatus, and particularly to a method of promoting close contact between a film original plate and a sensitive material.

(Prior Art) As this type of vacuum contact type baking frame apparatus, for example, the one shown in FIG. 5 is known. In this figure, reference numeral 4 is a printing table, 6 is a light-transmitting plate such as a glass plate, 7 is a light-transmitting plate provided with the light-transmitting plate 6 and is provided so as to be openable and closable, and 30 is a light source for printing.

In order to faithfully and clearly print the pattern of the original plate, this type of printing frame apparatus has a structure in which the original plate and the sensitive material are brought into close contact with each other under vacuum. The one disclosed in the above publication is known.

It consists of a printing stand 4 made of a rubber sheet 1 stretched over a lower frame, an upper frame 7 provided with a light-transmitting plate 6 on the lower surface of the edge frame 5, which can be opened and closed with respect to the cradle 4, and a rubber sheet. 1 and the transparent plate 6 via the airtight seal 2; It is equipped with a squeezing roller 11 that rolls in the direction of the arrow in pressure contact.Prior to exposure, an original plate 31 and a sensitive material 32 are superimposed between a rubber sheet 1 and a transparent plate 6,
The space is evacuated, and the ironing row 21
1, the rubber sheet 1 is squeezed from its lower surface to promote close contact between the film original plate 31 and the photosensitive material 32.

(Problems to be Solved by the Invention) As mentioned above, the squeezing roller is effective in eliminating air pockets that tend to occur between the original plate and the photosensitive material, and between the photosensitive material and the transparent plate, and promoting vacuum adhesion. However, in the conventional example described above, the squeezing roller has a structure in which it rolls in pressure contact with the rubber sheet at a constant speed over the entire travel stroke during forward movement, and the problem is that it takes a relatively long time to reach the desired state of contact. There is a point.

This is considered to be due to the following reasons. Here, FIG. 4 is a sectional view of a main part for explaining the operating state of the squeezing roller.

FIG. 4(A) shows the initial operating state of the squeezing roller 11, in which the peripheral portion of the rubber sheet 1 comes into close contact with the transparent plate 6 before the central portion. This is because, as shown in FIG. 5, the exhaust port 9 is provided near the periphery of the rubber sheet 1, and the periphery of the sealed space formed through the airtight seal 2 is depressurized first. be. Therefore, in this state, an air pocket 33 is generated between the film original plates 3, 1 and the photosensitive material 32.

FIG. 4(B) shows the operating state of the squeezing roller 211 in the middle, and in this state, the air pocket 33 pushed away by the squeezing roller 11 moves toward the rear end side of the film original plate 31.

FIG. 4(C) shows the final operating state of the squeezing roller 11. In this state, the air pocket 33 pushed away by the squeezing roller 11 is not completely eliminated, but remains partially. This is because the peripheral portion of the rubber sheet 1 is in close contact with the transparent plate 6, so that movement of the air pocket 33 is suppressed.

That is, since the rolling speed of the squeezing roller 11 is faster than the speed at which the air in the air puddle 33 moves toward the exhaust port 9, the squeezing roller 11 overcomes the air puddle 33 and moves ahead. Therefore, in order to eliminate the air pocket 33 so as not to cause burnt blur, a considerable amount of exhaust time is required after the rubbing roller has finished running.

The present invention was made in view of these circumstances, and
The technical challenge is to quickly achieve the required adhesion state.

(Means for Solving the Problems) In order to solve the above problems, the present invention improves the conventional contact method as follows.

That is, a film original plate and a photosensitive material are stacked and sandwiched between a transparent plate and an elastic sheet of a vacuum contact type baking frame device, and while the space between the transparent plate and the elastic sheet is evacuated, air is evacuated to the bottom surface of the elastic sheet. In the adhesion method of the vacuum adhesion type printing frame device, in which the film original plate and the photosensitive material are brought into close contact by pressing and rolling the ironing roller, when the pressing roller moves forward in its pressing and rolling motion, the ironing roller moves its travel stroke. This is a close contact method characterized by stopping or decelerating before the rear edge of the film original plate located in the middle of the film.

(Function) In the present invention, when the squeezing roller moves forward, it stops or decelerates before the trailing edge of the film original plate located in the middle of its travel stroke. In other words, by maintaining the operating state in the middle of FIG. promote the elimination of

(Example) Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 1 is a longitudinal sectional side view of a vacuum contact type baking frame apparatus according to the present invention.

This baking frame device includes a pedestal 4 made of an elastic sheet 1 stretched over the upper surface of a lower frame 3, and a transparent plate 6 on the lower surface of an edge frame 5, which can be opened and closed with respect to the pedestal 4. an upper frame 7, an exhaust means 9,
A squeezing roller 1 that rolls in pressure contact with the lower surface of the elastic sheet 1
1, and is configured to hold the original plate and the photosensitive material in close contact between the elastic sheet 1 and the transparent plate 6.

The elastic sheet 1 is a rubber sheet, has a bank-like airtight seal 2 around its upper surface, and is attached to the upper surface of a lower frame 3 constituting a printing table 4. Further, the elastic sheet 1 is supported from below by a sheet support plate 1a which is provided so as to be movable up and down, so that the elastic sheet 1 does not sag downward when the original plate and the photosensitive material are placed in a superimposed manner. Note that the sheet support plate 1a is configured to descend and retreat to the position shown by the imaginary line when the squeezing roller 11 runs.

The exhaust means 10 communicates with an intake port 9 attached to the elastic sheet 1, and is configured to forcibly exhaust the space formed between the elastic sheet 1 and the transparent plate 6 through the airtight seal 2. .

The squeezing roller 11 is supported by a pair of left and right columns 12, and each column 12 is supported by a traveling frame 13 so as to be movable and movable up and down. When moving forward, the squeezing roller 11 is moved toward the rear edge of the film original plate 31 located in the middle of its travel stroke (B
) and then run very slowly, and the roller lifting means 20 to be described later.
By raising and lowering the pillar 12, the squeezing roller 11
The elastic sheet 1 is configured to be pressed against and separated from the elastic sheet 1.

In FIG. 1, reference numeral 15 is an idle roller that is installed on the traveling frame 13 and rolls along the guide rail 14, and 18 is fixedly installed on the traveling frame 13 and elastically presses the squeezing roller 11 through a biasing spring 17. This is a roller support plate that supports the lower surface of the sheet 1 so as to be able to be pressed against it.

The roller lifting means 20 includes a plate cam 21 which is movably provided on the roller support plate 18, a cam 7 lower 22 which is provided at the lower end of the support column 12 and engages with a cam surface 21a of the plate cam 21, and At the origin position A of the squeezing roller shown by the solid line in FIG. It is provided with an end point side abutment 24 for moving the cam 21 to the pressure release side, and an origin side cam plate 25 for maintaining the pressure release state by transferring the cam 7 lower 22 from the cam plate 21 when returning to the home position A. The cam 7 is configured so that the squeezing roller 11 is pressed against the elastic sheet 1 during forward movement, and the cam 7 lower 22 is pushed down by the cam surface 21a of the plate cam 21 during the backward movement to release the squeezing roller 11 from the pressure contact. There is.

The close contact operation of the printing frame device having the above-mentioned configuration will be explained below.
place it on top, close the upper frame 7, and start the baking frame apparatus. Then, the exhaust means 10 is activated and the transparent plate 6 and the elastic sheet 1 are
The space formed between them through the airtight seal 2 is evacuated, and the elastic sheet 1 is brought into close contact with the periphery first.

Next, after the sheet support plate 1a is lowered, the squeezing roller 11 starts to move forward, comes into pressure contact with the elastic sheet 11, and rolls at a speed of, for example, 209 mm/see (FIG. 4(A)).
), and the squeezing roller 11 is moved in front of the rear edge of the film original plate 31 located in the middle of the travel stroke (Fig. 4B (
For example, the vehicle stops (for about 3 seconds) at a point just before 50 m/see, and then runs very slowly, for example at a speed of 15+ m/see. In this state, the state shown in FIG. 4(B) at - time is maintained.

Immediately, since the peripheral portion of the elastic sheet 1 is already in close contact with the transparent plate 6, exhaustion of the air pocket 33 pushed to the exhaust side by the strainer a-ra 11 is suppressed. However, by continuing to press this air pocket 33 toward the exhaust port 9 side with the squeezing roller 11, the exhaust of the air pocket 33 can be promoted.

In this example, the same size, e.g.
Compared to the 60 seconds required to bring the original film 31 (20×1140) and the photosensitive material 32 into close contact using the conventional method, the time required to bring them into close contact can be reduced by about 20 seconds.

Note that the squeezing roller may only be stopped midway during forward movement, or may be decelerated to an extremely low speed without being stopped.

If the squeezing roller is stopped halfway, it is moved forward for the remaining stroke after the film original plate and the photosensitive material are completely in contact with each other.

When the forward movement of the squeezing roller 11 is completed, almost the required close contact state is obtained, and soon the light source 30 is turned on and printing is started.

On the other hand, the squeezing roller 11 is released from pressure contact with the elastic sheet 1 at the forward movement end position C, and returns to the origin position (A) in the pressure release state.
and prepare for the next contact operation.

FIG. 2 is a perspective view of the upper part of the baking table for explaining the embodiment of the printing frame device in more detail.

In order to stop the straining roller 11 before the rear edge of the film original plate 31, the stopping position B of the straining roller 11 is set in advance according to the size of the film original plate 31 or photosensitive material 32 (hereinafter referred to as film original plate, etc.). .

That is, in FIG. 2, a scale 34 is drawn on the top surface of the elastic sheet 1 so that the position of the rear edge of the film original plate, etc. can be read, and the corresponding scale position is input using the keys on the operation panel 35. This makes it possible to set the stop position B of the squeezing roller 11.i The position of the rear edge of the film original plate, etc., needs only to be approximately readable.
The pitch of the scale 34 may be any suitable pitch. The symmetry of the dimension 134 is not limited to the elastic sheet 1, but may be any suitable position on the upper surface of the printing table 4.

Further, instead of inputting the position of the rear edge of the film original plate etc. from the operation panel 35, it may be read by a detector indicated by the title 36 in FIG.
is attached to a running strip 37 that is installed so as to be able to run in the front-rear direction, and is configured to detect the position of the rear edge of the film original plate or the like prior to the forward movement of the squeezing roller 11. As this detector 36, a reflective optical sensor, COD, which uses light in a wavelength range to which the sensitive material 32 is not sensitive is used.

In addition, in FIG. 2, M1 is a reciprocating drive motor for the ladder roller 11, M2 is a drive motor for running the running strip 37, 38
1 is a control circuit for both motors M, , M2, and a pulse counter (not shown) detects the position of the rear edge of the film original plate and controls the stop position of the squeezing roller 11.

FIG. 3 is a flowchart illustrating the operation of the baking frame apparatus according to the above embodiment, and this flowchart will be briefly described below.

First, in step S1, the position of the rear edge of the film original plate, etc.
The stop time of the squeezing roller 11 is set and inputted as a time lag. In step S2, the drive motor M is rotated forward to move the squeezing roller 11 forward, and in step S, it is determined that the required stop position has been reached. In step S, the ironing roller 11 is stopped, and after a required time lag has elapsed in S5, the ironing roller 11 is moved forward again in S6. Thereafter, operations similar to those in the embodiment described above are performed from 87 to S11.

Incidentally, in this embodiment, the squeezing roller 11 stops about 50 Im before the rear edge of the film original plate, etc., a time lag of about 3 to 5 seconds is set as the stopping time, and the forward movement speed of the squeezing roller 11 is Approximately 200 ron-/s before stopping
ea, and is set to approximately 51111/see after stopping. This makes it possible to arbitrarily set the stopping position according to the size of the film original plate or photosensitive material, which is very convenient.

In the above embodiment, a printing frame device in which the printing light source is located above has been described, but the present invention is not limited to this, and the same can be applied to a printing frame device in which the light source is located below.

(Effects of the Invention) As is clear from the above description, in the present invention, the squeezing roller stops or decelerates during the forward movement and continues to press the air pocket toward the exhaust side, so that the elimination of the air pocket is promoted. A desired state of close contact can be quickly achieved. This makes it possible to improve the printing efficiency.

[Brief explanation of the drawing]

Fig. 1 is a vertical sectional side view of a vacuum-adhesive baking frame device showing an embodiment of the present invention, Fig. 2 is a perspective view showing the upper part of the baking table of the baking frame device, and Fig. 3 shows the operation of this embodiment. Flowchart, Figure 4. Cross-sectional view of main parts showing the operating state of the laddering roller, Figure 5.
The figure is a perspective view of a known baking frame device. DESCRIPTION OF SYMBOLS 1... Elastic sheet, 6... Transparent plate, 7... Upper Azusa, 9... Exhaust port, 10... Exhaust means, 11... Straightening roller, 31... Original film plate, 32 ...Photosensitive material.

Claims (1)

[Claims] 1. A film original plate and a photosensitive material are stacked and sandwiched between a transparent plate and an elastic sheet of a vacuum contact type baking frame device, and the space between the transparent plate and the elastic sheet is evacuated. , in a method of adhering a film original plate and a photosensitive material in a vacuum adhesion type printing frame apparatus, in which a pressing roller is pressed and rolled against the back side of an elastic sheet, when the pressing roller moves forward in the pressing and rolling motion, A contact method for a vacuum contact type baking frame device, characterized in that the pressing roller stops or decelerates before the rear edge of the film original plate located in the middle of its travel stroke.