JPH02190680A - Branch valve for vacuum - Google Patents

Abstract

PURPOSE:To improve the switching operability of a pipeline and miniaturize a piping system by rotating a shaft pivotally supported on a valve box branched with passages in three directions to close the connection between the first and third passages and open the connection between the first and second passages or vice versa. CONSTITUTION:A handle 21 is rotated in the direction X and a shaft 22 is lowered to keep the connection between the first passage 4 and the second passage 5 opened and the connection between the first passage 4 and the third passage 6 closed. Stoppers 23 and 24 fixed to the shaft 22 are moved downward, the stopper 23 presses a valve body 26 to separate it from the valve body receiving face 25a of a branch pipe 25, and the connection between the passages 4 and 5 is opened. The handle 21 is rotated in the direction X' and the shaft 22 is raised to open the connection between the passages 4 and 6 and close the connection between the passages 4 and 5. The stoppers 23 and 25 fixed to the shaft 22 are moved upward, the stopper 24 presses the lower face of a valve body 27 to separate it from the valve body receiving face 29a of a branch pipe 29, and the connection between the passages 4 and 6 is opened. The valve body 26 is pressed to the valve body receiving face 25a by a spring 28 and closes the connection between the passages 4 and 5.

Description

[Detailed Description of the Invention] [Summary] Regarding a vacuum branch valve that switches the flow path of a trigonal branch pipe, this vacuum branch makes it possible to make the piping system of a vacuum device more compact and to improve the operability of the vacuum valve. For the purpose of providing a valve, there is a valve box in which the 1st, 2nd, and 3rd channels are connected to external piping and are branched into three directions, which serve as gas passages; A movably supported shaft, a locking member protruding from the shaft within the valve box, and one end of each fixed to the tip of the locking member so as to bias each other through the tip. The 1.2 elastic member is fixed to the other end of each of the 1.2 elastic member, and the opening of the second flow path and the opening of the third flow path in the valve box are fixed by rotation of the shaft. A first and second valve member is provided to open or close the section.

[Industrial application field]

The present invention relates to a vacuum branch valve that switches the wave paths of a trigonal branch pipe.

As vacuum devices become larger and more sophisticated, the piping systems that make up the vacuum devices become more complex, and the number of vacuum valves used also increases significantly.

For this reason, there has been a strong demand for the development of a vacuum branch valve that can improve the operability of switching pipe lines in vacuum equipment and make the piping system more compact.

[Conventional technology]

FIG. 3 is a sectional side view of a main part showing an example of the configuration of a conventional vacuum valve for switching the flow paths of a trigonal branch pipe.

It should be noted that the same members are given the same symbols throughout the drawings.

In the figure, 1 is a three-way branch pipe, 2 is a first vacuum valve, and 3 is a second vacuum valve, and between the first flow path 4 and the second flow path 5 is the valve of the first vacuum valve 2. The second vacuum pulp 3 is closed by the body 2a, and the space between the first flow path 4 and the third flow path 6 is
This shows a state in which the valve body 3a is closed.

The flow path between the first flow path 4 and the second flow path 5 is opened when the operation screw 2b of the first vacuum valve 2 is rotated to move the valve body 2a to the position indicated by the dotted line.

Similarly, the flow path between the first flow path 4 and the third flow path 6 is opened when the operation screw 3b of the second vacuum valve 3 is rotated to move the valve body 3a to the position indicated by the dotted line.

[Problem to be solved by the invention]

Therefore, as is clear from the above description, two vacuum valves are required to switch the flow paths of the trigonal branch pipe.

Therefore, as the piping of vacuum equipment becomes more complex and the number of three-way branch pipes increases, the number of vacuum valves used in the vacuum equipment also increases significantly. This was also a factor that worsened operability.

The present invention is intended to solve the above-mentioned problems, and its purpose is to provide a vacuum branch valve that makes it possible to make the piping system of a vacuum device more compact and to improve the operability of the vacuum valve.

[Means for solving problems]

As shown in FIG. 1, the above problem is solved by a valve box 10 in which the L2 and 3 flow paths (4, 5, 6), which are connected to external piping and serve as gas passages, are branched into three directions, and A shaft 11 whose tip is inserted and rotatably supported by the valve box 10, and the valve box 10.
a locking member 12 protruding from the shaft 11 within, and a first and second elastic member having one end fixed to the tip of the locking member (12) so as to urge each other through the tip. members (13, 14) and the 1.2nd elastic member (13°14)
The opening 5a of the second flow path 5 and the opening 6a of the third flow path 6 in the valve box 10 are opened or closed by the rotation of the shirt 11. This problem is solved by a vacuum branch valve characterized in that two valve members (15, 16) are provided.

[For production]

When the shaft starts rotating in the A direction, the tips of the locking members that lock the first elastic member and the second elastic member also start moving in the B direction so as to draw an arc around the shaft.

Then, the elastic force of the second elastic member, which was locking the second valve member and pressing the second valve member against the opening of the third flow path, gradually weakens, and finally the second valve member is pushed against the opening of the third flow path. This acts as a force to pull the second valve member away from the opening of the passage, and the second valve member is pulled away from the opening of the third passage, thereby opening the first passage and the third passage.

On the other hand, the first elastic member that was pressing the first valve member against the opening of the second flow path absorbs the displacement of the locking member in the B direction, and moves the first valve member toward the opening of the second flow path. Although the opening is pressed more and more strongly, the closed state between the first flow path and the second flow path remains unchanged.

Therefore, by rotating the shaft by a predetermined angle in the A direction, the first
The flow path and the third flow path can be opened, and the first flow path and the third flow path can be closed.

Also, by rotating the shaft by a predetermined angle in the A′ direction,
By moving the locking member in the C direction, it becomes possible to close the first flow path and the third flow path and open the first flow path and the third flow path.

Furthermore, by positioning the locking member approximately midway between the opening of the second flow path and the opening of the third flow path, the first elastic member presses the first valve member against the opening of the second flow path. In addition, the second elastic member presses the second valve member against the opening of the third flow path to close the first flow path and the second flow path and to close the first flow path and the third flow path. .

〔Example〕

Second embodiment of the vacuum branch valve according to the present invention
This will be explained using figures.

In this embodiment, the opening between the first flow path 4 and the second flow path 5, and the opening between the first flow path 4 and the second flow path 5,
Blockage between the flow path and the third flow path, or blockage between the first flow path 4 and the second flow path 5, and opening between the first flow path and the third flow path 6, or the first flow path 4 and the second flow path. Closing between the two flow paths 5 and between the first flow path and the third flow path is performed by one vacuum branch valve according to the present invention.

In the figure, 21 is a handle, 22 is a shaft, 23 is a first stopper, 24 is a second stopper, 25 is a second branch pipe, 25a is a valve body receiving surface of the second branch pipe 25, 26 is a third valve body, 27 is the fourth valve body, 28 is the spring spring, and 29 is the third valve body.
The branch pipe 29a is a valve body receiving surface of the third branch pipe 29,
The spring spring 28 inserted through the shaft 22 presses the third valve body 26 against the valve body receiving surface 25a of the second branch pipe 25, closing the space between the first flow path 4 and the second flow path 5, and closing the space between the first flow path 4 and the second flow path 5. Valve body 2
7 against the valve body receiving surface 29a of the third branch pipe 29, and
The space between the flow path 4 and the third flow path 6 is also in a closed state.

The first flow path 4 and the second flow path 5 are opened, and the first flow path and the third flow path are opened.
In order to keep the flow paths closed, the handle 21 is rotated in the X direction to lower the shaft 22.

Then, the first stopper 23 and the second stopper 24 fixed to the shaft 22 also move downward, but the first stopper 23
presses the third valve body 26 and separates the third valve body 26 from the valve body receiving surface 25a of the second branch pipe 25, thereby opening the first flow path 4 and the second flow path 5.

The fourth valve body 27, which is pressed against the valve body receiving surface 29a of the third branch pipe 29 and which blocks the first flow path and the third flow path, presses the valve body receiving surface 29a more and more strongly, but the first The closed states of the flow path and the third flow path remain unchanged.

Next, the first flow path and the third flow path are opened, and the first flow path 4
To close the space between the first and second flow paths 5, the handle 21 is rotated in the X' force direction to raise the shaft 22.

Then, the first stopper 23 and the second stopper 24 fixed to the shaft 22 also move upward, but the second stopper 24
presses the lower surface of the fourth valve body 27 and separates the fourth valve body 27 from the valve body receiving surface 29a of the third branch pipe 29, thereby opening the first flow path 4 and the third flow path 6.

On the other hand, the second branch pipe 2 is pressed by the first stopper 23.
The third valve body 2 had moved downward from the valve body receiving surface 25a of No.5.
6 is pressed against the valve body receiving surface 25a of the second branch pipe 25 by the spring 28, and the space between the first flow path 4 and the second flow path 5 is closed.

Blockage between the first flow path 4 and the second flow path 5, and the first flow path and the third flow path
To block the passages, rotate the handle 21 so that the first stopper 23 releases the pressure on the third valve body 26, and the second stopper 23 releases the pressure on the third valve body 26.
4 releases the pressure of the fourth valve body 27.
, the spring spring 28 presses the third valve body 26 against the valve body receiving surface 25a of the second branch pipe 25 to close the space between the first flow path 4 and the second flow path 5, and the fourth valve body 27 is also pressed by the valve body receiving surface 29a of the third branch pipe 29, and the space between the first flow path and the third flow path is also closed.

Therefore, according to the vacuum branch valve according to the present invention, one vacuum branch valve can open the first flow path 4 and the second flow path 5 and close or close the first flow path and the third flow path. 1st
Closure between the flow path 4 and the second flow path 5 and opening between the first flow path and the third flow path 6, or obstruction between the first flow path 4 and the second flow path 5, and the first flow path It becomes possible to close the third flow path, making it possible to downsize the piping system of the vacuum device and improve the operability of the vacuum valve.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, it is possible to provide a vacuum branch valve that makes it possible to make the piping system of a vacuum device more compact and to improve the pulp operability of flow path switching.

[Brief explanation of the drawing]

Fig. 1 is a side sectional view for explaining the principle of the vacuum branch valve of the present invention, Fig. 2 is a crushed side sectional view of an embodiment of the vacuum branch pulp of the present invention, and Fig. 3 is a flow diagram of a trigonal branch pipe. FIG. 2 is a diagram showing an example of the use of a conventional vacuum valve that switches paths. In the figure, 4 is the first wave path, 5 is the second flow path, 6 is the third flow path, 5a and 6a are openings, 10 is the valve box, 11 is the shaft, 12 is the locking member, 13 is the first elastic 14 is a second elastic member, 15 is a first elastic member. Valve member: 16 indicates a second valve member. This departure -/l calculation...minute musu I (・) ref - left theory August m
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Claims (1)

[Scope of Claims] A valve box (10) in which first, second, and third flow paths (4, 5, 6) that are connected to external piping and serve as gas passages are branched into three directions; and the valve box (10). a shaft (11) having its tip inserted therein and rotatably supported by the valve box (10); and a locking member (12) protruding from the shaft (11) within the valve box (10). ), and a first member whose one end is fixed to the distal end of the locking member (12) so as to urge each other through the distal end.
, two elastic members (13, 14), which are fixed to the other ends of the first and second elastic members (13, 14), and are fixed to the other ends of the first and second elastic members (13, 14), so that when the shaft (11) rotates, the inside of the valve box (10) is fixed. Second
It is characterized by providing first and second valve members (15, 16) that open or close the opening (5a) of the flow path (5) and the opening (6a) of the third flow path (6). Vacuum branch valve.