JPH02184090A - Vibrating mechanism apparatus - Google Patents

Abstract

PURPOSE:To support an inner frame with high rigidity and to vibrate it at a high frequency by forming the inner frame in a structure for supporting with a leaf spring, and altering only the leaf spring to freely regulate the supporting rigidity of the inner frame. CONSTITUTION:An inner frame 37 is provided inside an intermediate frame 33 through a leaf spring 36. This intermediate frame 33 is coupled at its upper and lower ends to outer frame 23 to oscillate together with the outer frame 23. The upper end of the leaf spring 36 is clamped with a screw to the lower surface of the upper part of the intermediate frame 33, the upper part of the inner frame 27 is superposed on the lower side face of the leaf spring 36, and clamped with screws 38, 38. The inner frame 37 is so elastically supported via the leaf spring 36 as to be displaced in a direction of an arrow (s). The supporting rigidity of the inner frame 37 can be freely altered by altering the material, thickness size, shape, etc., of the leaf spring 36. Thus, when only the leaf spring 36 is altered in response to the required wavelength selecting performance, the vibrating frequency of the inner frame 37 can be easily regulated.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Field of Application) The present invention is directed to a method of maintaining an etalon in a laser optical path, which is used when, for example, narrowing the wavelength width of a dye laser oscillation device. The present invention relates to a vibrating mechanical device that vibrates.

(Prior Art) In order to narrow the wavelength band of laser light in a dye laser or the like, an etalon is inserted into the optical path of the laser light.

Dye laser oscillation devices have the property that even if the cavity length is always constant, the oscillation mode and oscillation frequency of the laser beam change over time. This is because even if the transmission frequency of the etalon and the axial mode of the laser beam initially match, they gradually become inconsistent due to disturbances. In order to prevent this, it is necessary to control and stabilize the inclination of the etalon so that the transmission frequency of the etalon always matches the axial mode.

For this purpose, a vibration mechanism device 1 as shown in FIGS. 3 and 4 is used. This vibration mechanism device 1 includes a base 4 having two vertical columns 2.3 on the left and right sides, and an outer frame 5 provided between the two vertical columns 2.3. A support shaft 6.7 having a horizontal axis extends from the left and right sides of the outer frame 5, and is pivotally supported by the vertical column 2.3 via a bearing 8.9.10. .

An inner frame body 11 is provided inside the outer frame body 5,
It is rotatably supported by a pivot shaft 12.13 which projects inside the outer frame 5 and is concentric with the support shaft portion 6.7. An etalon 14 is attached to the center of the inner frame 11.

Two bearings 9.1 provided on one vertical column portion 3
An arm 15 is provided at the outer end of the support shaft portion 7 that is penetrated through the shaft portion 7 . By rotating this arm 15, the angle of the outer frame 5 can be adjusted. The bearing portions 9 and 10 of the one vertical column portion 3 are angular contact ball bearings, and a nut 16 is screwed onto the outer circumferential surface of the support shaft portion 7 for tightening from the outside.

Further, the other support shaft portion 6 is formed into a tubular shape, and a pivot shaft 12 is inserted through the support shaft portion 6 .

The outer end of the pivot shaft 6 is elastically pressed by a coil spring 17.

The inner frame 11, which is thus held inside the outer frame 5 with a predetermined pressing force (rigidity), has the vibrating part of the vibrator 18 in contact with one side of the upper end. This vibrator 18 is fixed to the outer frame 5 side, and vibrates the inner frame 11 relative to the outer frame 5. Furthermore, one end of a coil spring 18a is in contact with the lower end of the inner frame 11, and the other end is fixed so that the inner frame 11 is always elastically abutted against the vibrator 18. It has become. The biasing of the coil spring 18a improves the responsiveness of the inner frame 11 to the vibrator 18.

Such a vibration mechanism device 1 can more effectively narrow the band of laser light by increasing the vibration frequency of the inner frame 11. For this reason, the pivot shaft 12 that supports the inner frame body
．． It was necessary to increase the pressing force (rigidity) of No. 13.

However, in order to increase the support rigidity, it is necessary not only to change the coil spring 18a but also to change the design of each part, and it has been difficult to change the wavelength selectivity of the etalon 14.

(Problems to be Solved by the Invention) A vibration mechanism device that uses a vibrator to vibrate an inner frame holding an etalon relative to an outer frame has a low pressing force (rigidity) supporting the inner frame, and easily vibrates. I couldn't raise the frequency.

An object of the present invention is to provide a vibration mechanism device that can vibrate up to a high frequency range by changing some parts.

[Structure of the invention]

(Means for solving the problem) Two vertical pillars are provided on the base, a rotatable outer frame body having a horizontal support shaft is provided between these vertical pillars, and inside this outer frame body, An intermediate frame is provided so as to be rotatable about an axis in the vertical direction, an inner frame is connected to the intermediate frame via a replaceable leaf spring, and an object to be vibrated is provided on the inner frame, The present invention provides a vibration mechanism device including a vibrator that vibrates the surface of the leaf spring material in the depth direction.

(Function) By changing the leaf spring that connects the inner frame to the outer frame, the support rigidity of the inner frame can be changed according to the required vibration frequency.

(Example) An example of the present invention will be described with reference to FIGS. 1 and 2. The vibration mechanism device 19 shown in the figure has two vertical columns 21.22 connected to a base 20, and an outer frame 23 is provided between these vertical columns 21.22. . Support shafts 24.25 are provided coaxially in the horizontal direction on the left and right sides of the outer frame 23, and these support shafts 24.25 are connected via bearings 26, 27, 28, and 29, respectively. It is rotatably supported. Here, these bearing parts 26, - 29 are deep groove ball bearings, and use a fixed position preload method. Further, on the end side of the support shaft portion 24, the support shaft portion 24 is attached to the outer frame body 2 as shown in the conventional structure.
A suppressing structure (not shown) that elastically presses the third side is provided.

Furthermore, an arm 30 is provided at the end of the support shaft portion 25 . For example, an aluminum plate 31 is connected to the distal end of the arm 30 so as to swing together with the arm 30. Here, the material provided on the arm 30 is not limited to the aluminum plate 31, but any metal that generates an eddy current when crossing a magnetic field may be used. Permanent magnets 32 having a U-shaped cross section are provided over the swing range so as to sandwich the arm 30 with a predetermined gap, and the aluminum plate 31 and the permanent magnets 32 damp the swing of the arm 30. Consists of a magnetic damper.

Further, an intermediate frame 33 is provided inside the outer frame 23. The intermediate frame 33 is pivoted at its upper and lower center portions by support shafts 34 and 35, each having an axis in the vertical direction.
．． It rotates around 35. An inner frame body 37 is provided further inside the intermediate frame body 33 via a leaf spring 36.
is provided. The intermediate frame body 33 has an upper end portion and a lower end portion each connected to the outer frame body 23.
It is designed to oscillate along with 3.

The upper end of a leaf spring 36 is connected to the lower side of the upper part of the intermediate frame 33 by a screw connection, and the upper part of the inner frame 37 is overlapped with the lower side of the leaf spring 36,
8.38. And this leaf spring 3
6, the inner frame body 37 is elastically supported so that it can be displaced in the direction of arrow S shown in the figure. Note that the inner frame body 37 indicated by a chain line in the figure shows an exaggerated vibration state. An etalon 37a is attached to the center of the inner frame 37 so that the wavelength width of the laser light transmitted in the thickness direction can be narrowed.

Further, a support structure 39 extending in the swinging direction S of the inner frame 37 is formed on the upper part of the outer frame 23. A holding member 40 is connected to the lower part of the support structure 39 by bolts, and a vibrator 41 made of a piezoelectric element is held in the holding member 40. Here, the vibrating part of the vibrator 41 is in contact with the surface of the leaf spring 36, and is configured to vibrate in the direction of arrow S.

In the vibration mechanism device 19 configured in this manner, the supporting rigidity of the inner frame body 37 can be freely changed by changing the material, plate thickness, shape, etc. of the leaf spring 36. Accordingly, the vibration frequency of the inner frame body 37 can be easily adjusted by changing only the leaf spring 36 according to the required wavelength selection performance.

Note that the present invention is not limited to the above embodiment. For example, in the above embodiment, the object to be vibrated is the etalon 37a.
However, it can also be applied to drive mechanisms such as vibrating mirrors. Furthermore, although deep groove ball bearings are used in the bearing portions 26 and 29 using a fixed position preload method, they may also be used using a low pressure F pressure method.

〔Effect of the invention〕

By adopting a structure in which the inner frame is supported by leaf springs, the support rigidity of the inner frame can be freely adjusted as necessary by changing only the leaf springs without changing other parts. This allows the inner frame to be supported with higher rigidity than in the past, making it easier to vibrate at a higher frequency.

[Brief explanation of the drawing]

FIG. 1 and FIG. 2 are one embodiment of the present invention,
Figure 1 is a front view of the vibration mechanism, Figure 2 is a sectional view taken along the line ■-■ in Figure 1, Figures 3 and 4 are conventional structures, and Figure 3 is the vibration mechanism. The front view and FIG. 4 are side views showing the vibration mechanism of the inner frame of the vibration mechanism device in FIG. 3. 20...Base, 21.22...Vertical column part, 23...
・Outer frame body, 24.25... Support shaft portion, 33... Intermediate frame body, 36... Leaf spring, 37... Inner frame body, 41...
Vibrator, 37a... etalon (excited object). Applicant's Representative Patent Attorney Takehiko Suzue

Claims (1)

[Claims] A base, two vertical columns erected on the base,
A pair of support shafts provided opposite to each other on these vertical columns, an outer frame pivotally supported by these support shafts, and a vertical axis centered on the inner side of the outer frame. an intermediate frame body that rotates, a leaf spring replaceably provided inside the intermediate frame body, an inner frame body supported inside the intermediate frame body via the leaf spring, and this inner frame. A vibration mechanism device comprising: an object to be vibrated provided on a body; and a vibrator that vibrates the leaf spring in the depth direction of the surface and vibrates the inner frame body.