JPH02180703A - Ozonizer - Google Patents
OzonizerInfo
- Publication number
- JPH02180703A JPH02180703A JP14189A JP14189A JPH02180703A JP H02180703 A JPH02180703 A JP H02180703A JP 14189 A JP14189 A JP 14189A JP 14189 A JP14189 A JP 14189A JP H02180703 A JPH02180703 A JP H02180703A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- discharge electrode
- electrode
- dielectric
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- 230000006698 induction Effects 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims abstract description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004659 sterilization and disinfection Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000004042 decolorization Methods 0.000 description 2
- 238000004332 deodorization Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 1.0mm Inorganic materials 0.000 description 1
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/24—Composition of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/34—Composition of the dielectrics
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は誘電体を介して対向する電極間に高周波高電圧
を印加し、酸素の存在下でコロナ放電を生じさせてオゾ
ンを発生させ、オゾンによる殺菌、消毒、脱色、脱臭等
の効果を利用するオゾナイザに関し、特に、放電電極を
所定径の金属線とすることによりオゾン発生効率を改善
し、さらにはこの放電電極にセラミックスをコーティン
グしてその消耗を抑制により高電圧の印加を可能にして
オゾン発生量の増大を図ったオゾナイザに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention applies a high frequency high voltage between electrodes facing each other via a dielectric, generates corona discharge in the presence of oxygen, and generates ozone. Regarding ozonizers that utilize the sterilization, disinfection, decolorization, and deodorization effects of ozone, in particular, the ozone generation efficiency is improved by making the discharge electrode a metal wire of a predetermined diameter, and furthermore, the discharge electrode is coated with ceramics. The present invention relates to an ozonizer that can increase the amount of ozone generated by suppressing its consumption and making it possible to apply a high voltage.
［従来の技術］
近年、公害防止や生活環境保全上の必要性から、化学薬
品等を使用しない物理化学的手段による殺菌、消毒、脱
臭、脱色の効果を利用することが行なわれるようになり
、その−手段として、放電現象により発生するオゾンの
効果を利用するオゾナイザが多方面に用いられるように
なってきた。このようなオゾナイザのうちの１つとして
、セラミック誘電体の一方の面に誘導電極、他方の面に
放電電極を形成し、両電極間に高周波高電圧を印加する
ことによって放電電極とセラミック誘電体との間にいわ
ゆる沿面コロナ放電を発生させ、この放電によって酸素
含有ガス中の酸素をオシンに変換するオゾナイザが知ら
れている。そして、これに使用される放電電極は、従来
、誘電体へのパターン焼付等、例えばタングステンのメ
タライズにより形成されている。[Prior Art] In recent years, due to the need to prevent pollution and preserve the living environment, the effects of sterilization, disinfection, deodorization, and decolorization by physical and chemical means that do not use chemicals have been utilized. As a means for achieving this, ozonizers that utilize the effect of ozone generated by discharge phenomena have come to be used in a wide variety of fields. One such ozonizer is to form an induction electrode on one surface of a ceramic dielectric and a discharge electrode on the other surface, and apply a high frequency high voltage between the two electrodes to separate the discharge electrode and the ceramic dielectric. An ozonizer is known that generates a so-called creeping corona discharge between the two and converts oxygen in an oxygen-containing gas into osine by this discharge. The discharge electrode used for this has conventionally been formed by pattern baking on a dielectric material, for example, by metallizing tungsten.
［発明が解決しようとする課題］
しかしながら、このような従来技術によれば、必然的に
、焼付られた電極パターンの細部、あるいは周縁部の形
状は滑らかさを欠き、比較的鋭角的な部分と比較的鈍角
的な部分を生ずるため、高電圧印加時には鋭角的な部分
に電界が集中し、その部分から放電が開始してオゾン発
生が起こる。[Problems to be Solved by the Invention] However, according to such conventional technology, the details of the printed electrode pattern or the shape of the peripheral part inevitably lack smoothness and have relatively sharp parts. Since a relatively obtuse angle portion is generated, when a high voltage is applied, the electric field is concentrated on the acute angle portion, and discharge starts from that portion, causing ozone generation.
したがって、鋭角的部分以外の他の部分は、逆にオゾン
を生ずる放電に効果的には寄与しなくなるため、総合的
なオゾン発生効率が低下し、また、鋭角的部分がダメー
ジを受けやすくて放電電極の寿命が短縮することになる
。Therefore, parts other than the acute-angled part do not effectively contribute to the discharge that produces ozone, reducing the overall ozone generation efficiency, and the sharp-angled part is easily damaged and discharged. This will shorten the life of the electrode.
本発明の目的は、このような従来技術の問題点に鑑み、
オゾナイザにおいて、放電電極への部分的な電界集中を
防いで比較的低電圧でも安定し平均化したコロナ放電が
行なわれるようにし、さらに放電電極のダメージを抑制
しより高電圧を印加可能にして、オゾン発生効率を改善
しオゾン発生量の増大を図ることにある。In view of the problems of the prior art, an object of the present invention is to
In the ozonizer, it is possible to prevent local electric field concentration on the discharge electrode, so that a stable and averaged corona discharge can be performed even at a relatively low voltage, and to suppress damage to the discharge electrode, so that higher voltage can be applied. The objective is to improve ozone generation efficiency and increase the amount of ozone generated.
［課題を解決するための手段］
上記問題点を解決するため本発明では、８電体を介して
対向する放電電極ならびに誘導電極間に高周波高電圧を
印加して沿面コロナ放電を生じさせることによりオゾン
を発生するオゾナイザにおいて、該放電電極として、断
面の直径が３０μｍ以上かつ２００μｍ未満のタングス
テン線等の金属線を用い、これを該誘電体表面に接する
ように配置している。また、放電電極に無機ガラスを含
むセラミック、例えば５ｉｎ２ガラス、Ａｄ２０３、Ｔ
ｉＯ２、Ｔｉ Ｂ２ 、ＬａＢ、、Ｎｉ３ Ｂ、Ｓｉ３
Ｈａ 、ＳｉＣ等のコーティングを施すようにしてい
る。[Means for Solving the Problems] In order to solve the above problems, the present invention applies a high frequency high voltage between a discharge electrode and an induction electrode facing each other via an 8-electrode to generate a creeping corona discharge. In an ozonizer that generates ozone, a metal wire such as a tungsten wire having a cross-sectional diameter of 30 μm or more and less than 200 μm is used as the discharge electrode, and is arranged so as to be in contact with the dielectric surface. In addition, ceramics containing inorganic glass, such as 5in2 glass, Ad203, T
iO2, TiB2, LaB, Ni3B, Si3
A coating of Ha, SiC, etc. is applied.
［作用］
この構成において、放電電極と誘導電極間に高周波高電
圧を印加すると、誘電体表面と放電電極間で沿面コロナ
放電を生じ、これが酸素ガス存在下で行なわれた場合に
オゾンが発生するが、放電電極が所定半径の均一な線状
タングステン等の金属線であり、例えば板状の誘電体あ
るいは誘導電極を完全に横切った状態で誘電体に接して
いるため、放電電極と誘電体間に形成される電界は均一
なものとなる。したが、って、印加する電圧が比較的低
電圧であっても安定し平均化された放電が行なわれる。[Operation] In this configuration, when a high frequency high voltage is applied between the discharge electrode and the induction electrode, a creeping corona discharge occurs between the dielectric surface and the discharge electrode, and when this occurs in the presence of oxygen gas, ozone is generated. However, since the discharge electrode is a linear metal wire such as tungsten with a uniform radius and is in contact with the dielectric in a state where it completely crosses, for example, a plate-shaped dielectric or an induction electrode, there is a gap between the discharge electrode and the dielectric. The electric field formed is uniform. Therefore, even if the applied voltage is relatively low, a stable and averaged discharge is performed.
また、より高電圧においても、電界集中部分のストリー
マ電流を生じることがなく放電は平均化されるため、オ
ゾン発生効率が向上するとともに電極のダメージが防止
される。さらに放電電極がセラミックでコーティングさ
れている場合、放電によるスパッタが抑制されるため、
より高電圧の印加が可能になりオゾン発生量の増大が図
られるとともに、放電電極劣化によるオゾン発生量の低
減がなく耐用期間が延びてより長期の使用に供される。Furthermore, even at higher voltages, discharge is averaged without generating streamer current in areas where the electric field is concentrated, so that ozone generation efficiency is improved and damage to the electrodes is prevented. Furthermore, if the discharge electrode is coated with ceramic, spatter caused by discharge is suppressed.
It is possible to apply a higher voltage to increase the amount of ozone generated, and there is no reduction in the amount of ozone generated due to deterioration of the discharge electrode, so the service life is extended and the device can be used for a longer period of time.
［実施例１ 以下、図面を用いて本発明の詳細な説明する。[Example 1 Hereinafter, the present invention will be explained in detail using the drawings.
第１図（ａ）および（ｂ）は本発明の一実施例に係るオ
ゾナイザの正面図および側面図である。同図に示すよう
にこのセラミックオゾナイザは、セラミック製で板状の
誘電体１、および誘電体１を介して対向する放電電極２
ならびに誘導電極３を備え、放電電極２と誘導電極３間
に高周波高圧電源４によって高周波高電圧を印加して放
電電極２と誘電体１表面間で沿面コロナ放電を生じさせ
るように構成されている。FIGS. 1(a) and 1(b) are a front view and a side view of an ozonizer according to an embodiment of the present invention. As shown in the figure, this ceramic ozonizer includes a plate-shaped ceramic dielectric 1 and a discharge electrode 2 facing each other with the dielectric 1 interposed therebetween.
and an induction electrode 3, and is configured to apply a high frequency high voltage between the discharge electrode 2 and the induction electrode 3 by a high frequency high voltage power supply 4 to generate creeping corona discharge between the discharge electrode 2 and the surface of the dielectric 1. .
誘電体１は２０ｘ４０ｘＯ，３ｍｍのサイズのＡｌｘ（
窒化アルミニウム）製であり、誘導電極３は、この表面
にスクリーン印刷でＡｇペーストを印刷しベーキングし
て密着させることにより形成し、さらにその上に樹脂コ
ートを施しベーキングしである。放電電極２は直径７０
μｍのＷ（タングステン）線で、必要に応じ電界研摩等
により均質で平滑な表面に加工されており、その面に、
５ｉ０２ガラス、Ａ１２０３．Ｔｉ０２ＴｉＢ２ 、Ｌ
ａＢａ、Ｎｉ３ Ｂ、Ｓ１３ Ｎ４、ＳｉＣ等のコーテ
ィングが施こされ、誘電体３の表面に接するように取り
付けである。Dielectric 1 is Alx (20x40xO, 3mm size)
The induction electrode 3 is formed by printing Ag paste on the surface by screen printing and baking it to make it adhere, and then applying a resin coat thereon and baking it. Discharge electrode 2 has a diameter of 70
It is made of μm W (tungsten) wire and processed to have a homogeneous and smooth surface by electric field polishing etc. as necessary.
5i02 glass, A1203. Ti02TiB2, L
It is coated with aBa, Ni3B, S13N4, SiC, etc., and is attached so as to be in contact with the surface of the dielectric 3.
この構成において、放電電極２と誘導電極３間に、例え
ば周波数２〜２０ ＫＨｚ、電圧２〜１０ＫＶの適当な
高周波高電圧を印加すると、その周波数に応じた高周波
沿面コロナ放電が放電電極２と誘電体１表面間で発生す
る。したがって、その放電部分に酸素ガスを供給するこ
とによりオゾンを発生させることができる。その際、上
述したように、発生するコロナ放電は、印加電圧が比較
的低電圧であっても放電電極表面や誘電体表面の構造が
均一なため安定した均一なものとなり、比較的高電圧に
おいてもストリーマ電流を生じることなく平均化されて
いる。従来に比べ放電電極２のダメージを防止しつつ効
率よくオゾンの発生が行なわれる。さらに、放電室８ｉ
２は上記無機ガラスを含むセラミックによフてコーティ
ングされている場合、放電によるスパッタリングが抑制
され、より長期に渡って高い電圧下でも使用可能である
印加する高周波高電圧の周波数を２ＫＨｚ、電圧を４Ｋ
Ｖとし、放電室＆２をコーティングせずに径を３０〜５
００μｍの間で変化させてオゾン発生量を測定したとこ
ろ、第２図のグラフに示す結果が得られた。この結果に
よれば、放電電極２の径が１００μｍのときをピークと
してほぼ３０〜３００μｍの範囲でオゾン発生量が顕著
に多くなることがわかる。In this configuration, when a suitable high frequency high voltage of, for example, a frequency of 2 to 20 KHz and a voltage of 2 to 10 KV is applied between the discharge electrode 2 and the induction electrode 3, a high frequency creeping corona discharge corresponding to the frequency is generated between the discharge electrode 2 and the dielectric Occurs between body surfaces. Therefore, ozone can be generated by supplying oxygen gas to the discharge portion. At that time, as mentioned above, the corona discharge generated is stable and uniform even when the applied voltage is relatively low because the structure of the discharge electrode surface and dielectric surface is uniform, and even when the applied voltage is relatively low, the corona discharge is stable and uniform. is also averaged without producing streamer current. Ozone is generated more efficiently while preventing damage to the discharge electrode 2 than in the past. Furthermore, the discharge chamber 8i
2 is coated with ceramic containing the above-mentioned inorganic glass, sputtering due to discharge is suppressed, and it can be used for a longer period of time even under high voltage. 4K
V, and the diameter is 30 to 5 without coating the discharge chamber &2.
When the amount of ozone generated was measured by varying the thickness between 00 μm and 0.00 μm, the results shown in the graph of FIG. 2 were obtained. According to the results, it can be seen that the amount of ozone generated peaks when the diameter of the discharge electrode 2 is 100 μm, and increases significantly in the range of about 30 to 300 μm.
この傾向は、誘電体１の厚さおよび材質をそれぞれ０．
３ｍｍ 、Ａｌ１２０３ （ＡＪＺ２０３含有量９６
ｗｔ％）、０．５ｍｍ、ＴｉＯ２，１，０ｍｍ、Ｚｒ０
ｚとしたいずれの場合も同様であった。This tendency can be seen when the thickness and material of the dielectric 1 are set to 0.
3mm, Al1203 (AJZ203 content 96
wt%), 0.5mm, TiO2, 1.0mm, Zr0
The same was true in all cases where z was used.
また、放電電極２に約１．０μｍ厚の５ｉＯｚを均一に
コーティングした場合、および約０．２μｍ厚のＴｉＢ
ｚを均一にコーティングした場合も第２図と同様の傾向
を示した。Moreover, when the discharge electrode 2 is uniformly coated with 5iOz with a thickness of about 1.0 μm, and when the discharge electrode 2 is coated with 5iOz with a thickness of about 0.2 μm,
The same tendency as shown in FIG. 2 was also observed when z was uniformly coated.
［発明の効果］
以上説明したように本発明によれば、放電電極を限定さ
れた径の金属線としたため、より低い電圧から放電開始
でき、高電圧に至るまで全体的に安定した均一な放電が
生じてオゾン発生効率が向上する。また、比較的低電圧
電源の使用が可能となり、装置や運転のコストが減少す
る。さらに、放電電極をセラミックでコーティングする
ことにより、放電の均一化とあいまって放電電極はより
高電圧下での使用にも長期間耐えてオゾン発生量を増大
させることができる。[Effects of the Invention] As explained above, according to the present invention, since the discharge electrode is made of a metal wire with a limited diameter, discharge can be started from a lower voltage, and an overall stable and uniform discharge can be achieved up to a high voltage. occurs, improving ozone generation efficiency. It also allows the use of relatively low voltage power supplies, reducing equipment and operating costs. Furthermore, by coating the discharge electrode with ceramic, the discharge becomes uniform, the discharge electrode can withstand use under higher voltage for a longer period of time, and the amount of ozone generated can be increased.
第１図（ａ）および（ｂ）は、本発明の一実施例に係る
オゾナイザの正面図および側面図、そして、第２図は、
第１図の装置による放電電極の径変化に対するオゾン発
生量変化のグラフである。
１：誘電体、
２：放電電極、
３：電導電極、
４：高周波高圧電源。
第１図FIGS. 1(a) and (b) are a front view and a side view of an ozonizer according to an embodiment of the present invention, and FIG. 2 is a
2 is a graph of changes in the amount of ozone generated with respect to changes in the diameter of the discharge electrode by the apparatus shown in FIG. 1; 1: dielectric, 2: discharge electrode, 3: conductive electrode, 4: high frequency high voltage power supply. Figure 1
Claims (1)
らびに誘導電極を備え、この両極間に高周波高電圧を印
加して沿面コロナ放電を生じさせることによりオゾンを
発生するオゾナイザにおいて、該放電電極は断面の直径
が３０μｍ以上かつ２００μｍ未満の金属線を該誘電体
表面に接するように配置したものであることを特徴とす
るオゾナイザ。 ２、前記放電電極に無機ガラスを含む、セラミックをコ
ーティングした、請求項１記載のオゾナイザ。[Claims] 1. A dielectric, a discharge electrode and an induction electrode facing each other through the dielectric, and generating ozone by applying a high frequency and high voltage between these two electrodes to generate a creeping corona discharge. An ozonizer characterized in that the discharge electrode is a metal wire having a cross-sectional diameter of 30 μm or more and less than 200 μm arranged so as to be in contact with the dielectric surface. 2. The ozonizer according to claim 1, wherein the discharge electrode is coated with a ceramic containing inorganic glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14189A JPH02180703A (en) | 1989-01-05 | 1989-01-05 | Ozonizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14189A JPH02180703A (en) | 1989-01-05 | 1989-01-05 | Ozonizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02180703A true JPH02180703A (en) | 1990-07-13 |
Family
ID=11465747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14189A Pending JPH02180703A (en) | 1989-01-05 | 1989-01-05 | Ozonizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02180703A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0864338A (en) * | 1994-08-26 | 1996-03-08 | Agency Of Ind Science & Technol | Discharge electrode, discharge device, exciting device utilizing discharge, and chemical reaction device |
| EP0720205A1 (en) * | 1994-12-26 | 1996-07-03 | Canon Kabushiki Kaisha | Deposited film forming apparatus and electrode for use in it |
| JPH09301704A (en) * | 1996-05-09 | 1997-11-25 | Ngk Spark Plug Co Ltd | Ozone generating element and ozone generator |
| WO2001002291A3 (en) * | 1999-07-07 | 2001-05-17 | T E M Tech Entwicklung Und Man | Device for preparing a plasma for the production of ozone and/or oxygen ions in the air |
-
1989
- 1989-01-05 JP JP14189A patent/JPH02180703A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0864338A (en) * | 1994-08-26 | 1996-03-08 | Agency Of Ind Science & Technol | Discharge electrode, discharge device, exciting device utilizing discharge, and chemical reaction device |
| EP0720205A1 (en) * | 1994-12-26 | 1996-07-03 | Canon Kabushiki Kaisha | Deposited film forming apparatus and electrode for use in it |
| US5961726A (en) * | 1994-12-26 | 1999-10-05 | Canon Kabushiki Kaisha | Deposited film forming apparatus and electrode for use in it |
| JPH09301704A (en) * | 1996-05-09 | 1997-11-25 | Ngk Spark Plug Co Ltd | Ozone generating element and ozone generator |
| WO2001002291A3 (en) * | 1999-07-07 | 2001-05-17 | T E M Tech Entwicklung Und Man | Device for preparing a plasma for the production of ozone and/or oxygen ions in the air |
| US7008596B1 (en) | 1999-07-07 | 2006-03-07 | Automotive Ag | Device for preparing a plasma for the production of ozone and/or oxygen ions in the air |
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