JPH0217834U - - Google Patents
Info
- Publication number
- JPH0217834U JPH0217834U JP9637788U JP9637788U JPH0217834U JP H0217834 U JPH0217834 U JP H0217834U JP 9637788 U JP9637788 U JP 9637788U JP 9637788 U JP9637788 U JP 9637788U JP H0217834 U JPH0217834 U JP H0217834U
- Authority
- JP
- Japan
- Prior art keywords
- shaft body
- hole
- semiconductor substrate
- fixed plate
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9637788U JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9637788U JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217834U true JPH0217834U (cs) | 1990-02-06 |
Family
ID=31321267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9637788U Pending JPH0217834U (cs) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217834U (cs) |
-
1988
- 1988-07-22 JP JP9637788U patent/JPH0217834U/ja active Pending
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