JPH0217832U - - Google Patents
Info
- Publication number
- JPH0217832U JPH0217832U JP9623188U JP9623188U JPH0217832U JP H0217832 U JPH0217832 U JP H0217832U JP 9623188 U JP9623188 U JP 9623188U JP 9623188 U JP9623188 U JP 9623188U JP H0217832 U JPH0217832 U JP H0217832U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- furnace core
- diffusion
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9623188U JPH0217832U (en, 2012) | 1988-07-20 | 1988-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9623188U JPH0217832U (en, 2012) | 1988-07-20 | 1988-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217832U true JPH0217832U (en, 2012) | 1990-02-06 |
Family
ID=31321087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9623188U Pending JPH0217832U (en, 2012) | 1988-07-20 | 1988-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217832U (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425665A (en) * | 1977-07-28 | 1979-02-26 | Nec Corp | Reactor core tube |
| JPS6150330A (ja) * | 1984-08-20 | 1986-03-12 | Oki Electric Ind Co Ltd | 拡散炉の洗浄方法 |
-
1988
- 1988-07-20 JP JP9623188U patent/JPH0217832U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5425665A (en) * | 1977-07-28 | 1979-02-26 | Nec Corp | Reactor core tube |
| JPS6150330A (ja) * | 1984-08-20 | 1986-03-12 | Oki Electric Ind Co Ltd | 拡散炉の洗浄方法 |