JPH0217831U - - Google Patents
Info
- Publication number
- JPH0217831U JPH0217831U JP9595688U JP9595688U JPH0217831U JP H0217831 U JPH0217831 U JP H0217831U JP 9595688 U JP9595688 U JP 9595688U JP 9595688 U JP9595688 U JP 9595688U JP H0217831 U JPH0217831 U JP H0217831U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- plasma processing
- frequency power
- plasma
- processes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9595688U JPH0217831U (en:Method) | 1988-07-20 | 1988-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9595688U JPH0217831U (en:Method) | 1988-07-20 | 1988-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217831U true JPH0217831U (en:Method) | 1990-02-06 |
Family
ID=31320737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9595688U Pending JPH0217831U (en:Method) | 1988-07-20 | 1988-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217831U (en:Method) |
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1988
- 1988-07-20 JP JP9595688U patent/JPH0217831U/ja active Pending