JPH0217687A - Coaxial type he-ne laser tube - Google Patents

Coaxial type he-ne laser tube

Info

Publication number
JPH0217687A
JPH0217687A JP16812688A JP16812688A JPH0217687A JP H0217687 A JPH0217687 A JP H0217687A JP 16812688 A JP16812688 A JP 16812688A JP 16812688 A JP16812688 A JP 16812688A JP H0217687 A JPH0217687 A JP H0217687A
Authority
JP
Japan
Prior art keywords
capillary
tube
cathode
package
thin tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16812688A
Other languages
Japanese (ja)
Inventor
Hiroo Hara
原 博雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16812688A priority Critical patent/JPH0217687A/en
Publication of JPH0217687A publication Critical patent/JPH0217687A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/032Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H01S3/0323Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube by special features of the discharge constricting tube, e.g. capillary

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To improve the accuracy of an optical axis, vibrationproofness and shock resistance by fitting both ends of a capillary to mirror supporters and forming a through-hole to the insulating partition wall of an anode chamber at the end section of a package and a discharge hole to a side face oppositely faced to a cylindrical type cold cathode. CONSTITUTION:The capillary 7 of an He-Ne laser is fitted to mirror supporters 2 and 3 installed at both ends of a package 5 with high accuracy. A cylindrical type cathode 11 is arranged on the same axis in the supporter 3, and welded and joined. A through-hole 8 is bored on the anode side of the capillary 7, and communicated with an anode chamber 9 surrounded by an insulating partition wall 6 extended from the package 7 to the outside diameter of the capillary 7, a sealing pan 4 and the package 5. A discharge hole 10 is bored on the cathode side of the capillary 7, and oppositely faced to the cathode 11. The capillary is supported by both ends, eccentricity and an inclination are prevented by self-jigging, and the accuracy of an optical axis is improved while vibrationproofness and shook resistance are enhanced owing to two-point support.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、同軸型He−Neレーザ管に関する。より詳
細には、細管支持構造を改良した同軸型HeNeレーザ
管に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a coaxial He--Ne laser tube. More specifically, the present invention relates to a coaxial HeNe laser tube with an improved capillary support structure.

従来の技術 第2図を参照して従来の同軸型He−Neレーザ管の構
造を説明する。第2図に示す従来のHe  Neレーザ
管は、外囲器5の両端の封入皿4.4°にそれぞれ取り
つけられ、互いに対向するミラー1.1゛をそれぞれ備
えたミラー支持体2.3と、ミラー1.1′の間の同軸
上に配設された細管7および円筒形冷陰極カソード11
とを具備している。
BACKGROUND OF THE INVENTION The structure of a conventional coaxial He--Ne laser tube will be described with reference to FIG. The conventional He Ne laser tube shown in FIG. 2 includes a mirror support 2.3 and a mirror support 2.3 each having mirrors 1.1' facing each other and mounted on enclosure plates 4.4° at both ends of an envelope 5, respectively. , a capillary tube 7 and a cylindrical cold cathode 11 arranged coaxially between mirrors 1.1'
It is equipped with.

細管7は、アノード側の一端を、外囲器5から延長した
絶縁を兼ねたガラス壁12により片持て支持されていた
One end of the thin tube 7 on the anode side was supported in a cantilevered manner by a glass wall 12 extending from the envelope 5 and also serving as an insulator.

発明が解決しようとする課題 従来の同軸型He−Neレーザ管は、上記のように細管
が一端のみで支持されている構造なので、支持されてい
ない側の端が自重で下がり、傾斜し易かった。
Problems to be Solved by the Invention Conventional coaxial He-Ne laser tubes have a structure in which the thin tube is supported at only one end as described above, so the unsupported end falls under its own weight and tends to tilt. .

一方、同軸型He −Neレーザ管においては、光軸の
偏心を防いだり、光軸の傾き精度を向上させるために、
細管が、両端のミラーまたはミラーと同軸のミラー支持
体と同軸上に高精度で取りつけられていることが重要で
ある。しかしながら、従来の同軸型He−Neレーザ管
の場合、上記した細管の同軸性を実際に保つことは極め
て困難であった。
On the other hand, in a coaxial He-Ne laser tube, in order to prevent optical axis eccentricity and improve optical axis tilt accuracy,
It is important that the capillary tube is mounted with high precision coaxially with the mirrors at both ends or with the mirror supports coaxial with the mirrors. However, in the case of the conventional coaxial type He-Ne laser tube, it is extremely difficult to actually maintain the coaxiality of the thin tube described above.

すなわち、従来は細管の内径に基準芯を挿入し、基準芯
を中心軸に保持しながら組立てる方法が採られていたが
、通常の小出力He −Neレーザ管の場合は、細管内
径が0.6〜1.5+++mと細いため、基準芯が曲り
易く、細管の同軸性確保には限界があった。
That is, conventionally, a reference core was inserted into the inner diameter of a thin tube and assembled while holding the reference core on the central axis, but in the case of a normal low-output He-Ne laser tube, the inner diameter of the thin tube is 0. Since the diameter is as thin as 6 to 1.5+++ m, the reference core is easily bent, and there is a limit to ensuring coaxiality of the thin tube.

一方、従来の同軸型He−Neレーザ管は、振動や衝撃
を受けた時に支持されていない側の端がたわみ易かった
。そのため、振動、衝撃を受けている時の出力が大きく
低下したり、振動、衝撃のため細管が折損したりするこ
とがあった。また、細管の共振周波数が、複数の位置で
支持するのに比べて低くなるなどの欠点もあった。
On the other hand, in the conventional coaxial type He-Ne laser tube, the unsupported end tends to bend when subjected to vibration or impact. As a result, the output when subjected to vibrations or shocks may drop significantly, or the thin tubes may break due to the vibrations or shocks. Another disadvantage is that the resonant frequency of the thin tube is lower than that when the tube is supported at multiple positions.

課題を解決するための手段 本発明に従うと、外囲器の一部を閉塞し、アノードルー
ムを形成する絶縁隔壁と、外囲器の両端に配置されたミ
ラー支持体で保持された一対のミラーと、該ミラー間に
前記絶縁隔壁を貫通して配設された細管と、該細管と同
軸に配置された、円筒形冷陰極カソードと、を有する同
軸型He−Neレーザ管において、細管の両端がそれぞ
れミラー支持体に嵌合され、前記細管の、前記アノード
ルーム内の部分の側面に貫通孔が、前記円筒形冷陰極カ
ソードと対向する側面に放電孔が、それぞれ設けられて
いることを特徴とする同軸型He−Neレーザ管が提供
される。
Means for Solving the Problems According to the present invention, an insulating partition wall that closes a part of an envelope and forms an anode room, and a pair of mirrors held by mirror supports disposed at both ends of the envelope. a coaxial He-Ne laser tube having a thin tube extending through the insulating partition between the mirrors, and a cylindrical cold cathode disposed coaxially with the thin tube; are each fitted into a mirror support, a through hole is provided on a side surface of a portion of the thin tube inside the anode room, and a discharge hole is provided on a side surface facing the cylindrical cold cathode. A coaxial He-Ne laser tube is provided.

作用 本発明の同軸型He−Neレーザ管では、細管の両端が
、それぞれ外囲器の両端のミラー支持体に嵌合して支持
されている。また、細管側面のアノードルーム内の部分
に貫通孔が、円筒型冷陰極カソードと対向する部分に放
電孔が設けられている。
Function: In the coaxial type He--Ne laser tube of the present invention, both ends of the thin tube are fitted and supported by mirror supports at both ends of the envelope, respectively. Further, a through hole is provided in a portion of the side surface of the thin tube inside the anode room, and a discharge hole is provided in a portion facing the cylindrical cold cathode.

従来の同軸型He−Neレーザ管の細管は、絶縁を兼ね
ているガラス隔壁によって片持支持されていたので、振
動、衝撃により出力が低下したり、細管が折損すること
があった。
Since the thin tube of a conventional coaxial He--Ne laser tube is cantilever-supported by a glass partition wall that also serves as an insulator, the output may decrease or the thin tube may break due to vibration or impact.

それに対し、本発明のtie−Neレーザ管では、細管
の両端が支持されているため、耐振動性および耐衝撃性
が向上するとともに、細管の組立精度も向上するもので
ある。
In contrast, in the tie-Ne laser tube of the present invention, since both ends of the thin tube are supported, vibration resistance and impact resistance are improved, and the assembly precision of the thin tube is also improved.

実施例 次に、本発明について図面を参照して説明する。Example Next, the present invention will be explained with reference to the drawings.

第1図に、本発明の同軸型He−Neレーザ管の一例の
縦断面図を示す。第1図に示したHe−Neレーザ管に
おいて、外囲器5の両端に取付けられた封入皿4および
4”にミラー支持体2.3がそれぞれロウ付けされてい
る。ミラー支持体2.3には、ミラー1.1°がいわゆ
るハードシールによって気密接合されるとともに細管7
が、ミラー1.1゜ミラー支持体2および3と同軸上に
配されるように、細管7の両端が高精度に嵌合されてい
る。また、ミラー支持体3には、やはりミラー支持体3
と同軸上に配されるように円筒型カソード11が溶接等
で接合されている。
FIG. 1 shows a longitudinal sectional view of an example of a coaxial type He-Ne laser tube of the present invention. In the He-Ne laser tube shown in FIG. 1, mirror supports 2.3 are brazed to the enclosure plates 4 and 4'' attached to both ends of the envelope 5, respectively.Mirror supports 2.3 In this case, the mirror 1.1° is hermetically sealed by a so-called hard seal, and the capillary tube 7
Both ends of the thin tube 7 are fitted with high precision so that the mirror 1.1° is coaxial with the mirror supports 2 and 3. Further, the mirror support 3 also includes a mirror support 3.
A cylindrical cathode 11 is joined by welding or the like so as to be disposed coaxially with.

細管7のアノード側には貫通孔8が開けられ、外囲器5
から細管7の外径に延びている絶縁隔壁6、封入皿4お
よび外囲器5で囲まれたアノードルーム9と通じている
。一方、細管7のカソード側には、放電孔10が開けら
れ、カソード11と対向している。
A through hole 8 is made on the anode side of the thin tube 7, and the envelope 5
It communicates with an anode chamber 9 surrounded by an insulating partition 6 , a containment dish 4 and an envelope 5 extending from the outer diameter of the capillary tube 7 . On the other hand, a discharge hole 10 is formed on the cathode side of the thin tube 7 and faces the cathode 11 .

本発明の同軸型He−Neレーザ管は、細管が両端で支
持されているので、いわゆるセルフジギングにより偏心
や傾きが防止され、光軸精度が向上するとともに、2点
支持のため耐振、耐衝撃性も改善される。
In the coaxial type He-Ne laser tube of the present invention, since the thin tube is supported at both ends, eccentricity and inclination are prevented by so-called self-jigging, and optical axis precision is improved. Sexuality is also improved.

発明の詳細 な説明したように、本発明のHe−Neレーザ管は、製
造時にミラー支持体およびそれと同軸のミラーの中心軸
と同軸上に細管を配置できるため、極めて光軸精度が向
上すると共に、耐振、耐衝撃性にすぐれ、細管の共振周
波数も上昇させることができる。
As described in detail, the He-Ne laser tube of the present invention has a thin tube that can be arranged coaxially with the central axis of the mirror support and the mirror that is coaxial with the mirror support during manufacturing. , has excellent vibration resistance and impact resistance, and can also increase the resonant frequency of the capillary.

これは、本発明のHe−Neレーザ管に独特な細管の両
端をミラー支持体中に嵌合し、支持させた構成によるも
のである。
This is due to the He--Ne laser tube of the present invention having a structure in which both ends of the thin tube are fitted into and supported by a mirror support.

12・ ・絶縁を兼ねたガラス隔壁12・ ・Glass partition wall that also serves as insulation

Claims (1)

【特許請求の範囲】[Claims] 外囲器の一部を閉塞し、アノードルームを形成する絶縁
隔壁と、外囲器の両端に配置されたミラー支持体で保持
された一対のミラーと、該ミラー間に前記絶縁隔壁を貫
通して配設された細管と、該細管と同軸に配置された、
円筒形冷陰極カソードと、を有する同軸型He−Neレ
ーザ管において、細管の両端がそれぞれミラー支持体に
嵌合され、前記細管の、前記アノードルーム内の部分の
側面に貫通孔が、前記円筒形冷陰極カソードと対向する
側面に放電孔が、それぞれ設けられていることを特徴と
する同軸型He−Neレーザ管。
an insulating partition that closes a part of the envelope to form an anode room; a pair of mirrors held by mirror supports disposed at both ends of the enclosure; a thin tube arranged coaxially with the thin tube;
In a coaxial He-Ne laser tube having a cylindrical cold cathode, both ends of the thin tube are fitted into mirror supports, and a through hole is formed in a side surface of a portion of the thin tube inside the anode room. A coaxial type He-Ne laser tube characterized in that discharge holes are provided on each side surface facing a shaped cold cathode cathode.
JP16812688A 1988-07-06 1988-07-06 Coaxial type he-ne laser tube Pending JPH0217687A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16812688A JPH0217687A (en) 1988-07-06 1988-07-06 Coaxial type he-ne laser tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16812688A JPH0217687A (en) 1988-07-06 1988-07-06 Coaxial type he-ne laser tube

Publications (1)

Publication Number Publication Date
JPH0217687A true JPH0217687A (en) 1990-01-22

Family

ID=15862326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16812688A Pending JPH0217687A (en) 1988-07-06 1988-07-06 Coaxial type he-ne laser tube

Country Status (1)

Country Link
JP (1) JPH0217687A (en)

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