JPH0217639U - - Google Patents

Info

Publication number

JPH0217639U

JPH0217639U JP9512088U JP9512088U JPH0217639U JP H0217639 U JPH0217639 U JP H0217639U JP 9512088 U JP9512088 U JP 9512088U JP 9512088 U JP9512088 U JP 9512088U JP H0217639 U JPH0217639 U JP H0217639U

Authority

JP

Japan

Prior art keywords

pressure

thin

diaphragm portion

sensor chip

sensor

Prior art date

1988-07-20

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims 2
• 230000002093 peripheral effect Effects 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 229910052581 Si3N4 Inorganic materials 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
• 229910052814 silicon oxide Inorganic materials 0.000 description 1