JPH02176389A - Sintering of inorganic substance and crucible for sintering - Google Patents
Sintering of inorganic substance and crucible for sinteringInfo
- Publication number
- JPH02176389A JPH02176389A JP33246488A JP33246488A JPH02176389A JP H02176389 A JPH02176389 A JP H02176389A JP 33246488 A JP33246488 A JP 33246488A JP 33246488 A JP33246488 A JP 33246488A JP H02176389 A JPH02176389 A JP H02176389A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- oxidizing atmosphere
- sintered
- sintering
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005245 sintering Methods 0.000 title claims abstract description 11
- 239000000126 substance Substances 0.000 title 1
- 239000012298 atmosphere Substances 0.000 claims abstract description 48
- 230000001590 oxidative effect Effects 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 22
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 17
- 239000011147 inorganic material Substances 0.000 claims abstract description 17
- 238000010304 firing Methods 0.000 claims description 12
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 14
- 239000007789 gas Substances 0.000 description 12
- 229910052786 argon Inorganic materials 0.000 description 7
- 239000011324 bead Substances 0.000 description 3
- 238000007872 degassing Methods 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 239000006253 pitch coke Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、元来酸化性雰囲気中では焼成することが出来
ない材料、例えば、炭素材、非酸化物系セラミックスな
どの無機材料を酸化性雰囲気炉中で焼成する方法および
そのために使用する坩堝に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is directed to the use of an oxidizing atmosphere furnace to process materials that cannot originally be fired in an oxidizing atmosphere, such as inorganic materials such as carbon materials and non-oxide ceramics. The present invention relates to a method for firing in a crucible and a crucible used therefor.
従来技術とその問題点
従来高温での無機材料の焼成に際して素H自体および焼
結助剤を酸化性雰囲気から遮断する必要がある場合には
、真空状態または不活性ガス雰囲気中で焼成を行なって
いる。この様な方法としては、下記の如きものが知られ
ている。Conventional technology and its problems Conventionally, when firing inorganic materials at high temperatures, if it is necessary to shield the elementary H itself and the sintering aid from an oxidizing atmosphere, firing is performed in a vacuum or in an inert gas atmosphere. There is. The following methods are known as such methods.
(1)窒素雰囲気中で焼結する方法(特公昭57−46
897号公報)。(1) Method of sintering in a nitrogen atmosphere (Special Publication No. 57-46
Publication No. 897).
(2)アルゴン気流中で焼結する方法(特開昭60−8
6074号公報)。(2) Method of sintering in an argon stream (Japanese Patent Application Laid-Open No. 60-8
6074).
(3)アルゴン雰囲気中で焼結する方法(特開昭62−
45344号公報)。(3) Method of sintering in an argon atmosphere (JP-A-62-
45344).
(4)減圧中でホットプレス法により焼結する方法゛(
特公昭63−1268号公報)。(4) Method of sintering by hot press method under reduced pressure
(Special Publication No. 63-1268).
しかしながら、上記の各方法においては、−殻内に使用
されているガス炉などの酸化性雰囲気炉をそのまま利用
することは出来ず、新たに真空炉または不活性ガス雰囲
気炉を設置しなければならないという不利益が存在する
。However, in each of the above methods, the oxidizing atmosphere furnace such as the gas furnace used in the shell cannot be used as is, and a new vacuum furnace or inert gas atmosphere furnace must be installed. There is a disadvantage.
問題点を解決するための手段
本発明者は、上記の如き技術の現状に鑑みて、鋭意研究
を重ねた結果、特定の構造を有する坩堝を使用すること
により、既存の酸化性雰囲気炉をそのまま利用して、元
来酸化性雰囲気中では焼成することが出来ない無機材料
を焼成することに成功した。Means for Solving the Problems In view of the current state of the technology as described above, the inventor of the present invention has conducted intensive research and found that by using a crucible with a specific structure, an existing oxidizing atmosphere furnace can be used as is. Using this method, we succeeded in firing inorganic materials that cannot originally be fired in an oxidizing atmosphere.
すなわち、本発明は、下記の方法および装置を提供する
ものである:
■非酸化性雰囲気中で焼成すべき無機材料を酸化性雰囲
気炉内において焼成する方法であって、(a)内側空間
と外側空間とを有する二重構造の坩堝を使用し、
[b]内側空間に焼結すべき無機材料を収容し、(c)
外側空間に還元性雰囲気形成材料を充填し、[d]坩堝
を酸化性雰囲気炉内に配置して、焼成を行なう
ことを特徴とする無機材料の焼成方法。That is, the present invention provides the following method and apparatus: ■ A method for firing an inorganic material to be fired in a non-oxidizing atmosphere in an oxidizing atmosphere furnace, the method comprising: (a) an inner space and A crucible with a double structure having an outer space is used, [b] an inorganic material to be sintered is housed in the inner space, and (c)
A method for firing an inorganic material, characterized in that the outer space is filled with a reducing atmosphere forming material, [d] the crucible is placed in an oxidizing atmosphere furnace, and firing is performed.
■非酸化性雰囲気中で焼成すべき無機材料を酸化性雰囲
気炉内において焼成するに瀕し使用する坩堝であって、
焼結すべき無機材料を収容するための内側坩堝と還元性
雰囲気形成材料および内側坩堝を収容するための耐酸化
性材料製の外側坩堝とを備えていることを特徴とする二
重構造坩堝。■A crucible for use when an inorganic material to be fired in a non-oxidizing atmosphere is about to be fired in an oxidizing atmosphere furnace,
A double structure crucible, characterized in that it comprises an inner crucible for accommodating an inorganic material to be sintered, and an outer crucible made of an oxidation-resistant material for accommodating a reducing atmosphere forming material and the inner crucible.
以下図面に示す実施態様を参照しつつ本発明をより詳細
に説明する。The present invention will be described in more detail below with reference to embodiments shown in the drawings.
第1図に断面図として示す本発明の二重構造坩堝は、外
蓋(1)を備えた外側坩堝(3)と内蓋(5)を供えた
内側坩堝(7)により構成されている。外側坩堝(3)
の材質は、特に限定されるものではないが、酸化性雰囲
気との接触、取扱い時の強度などを配慮して、アルミナ
などの高強度耐酸化性材料を使用することがより好まし
い。また、内側坩堝(7)の材質も、特に限定されない
が、外側坩堝と同様の上記材料に加えて、黒鉛、などの
耐酸化性に劣る材料を使用することも可能である。The double structure crucible of the present invention, shown as a sectional view in FIG. 1, is composed of an outer crucible (3) with an outer lid (1) and an inner crucible (7) with an inner lid (5). Outer crucible (3)
Although the material is not particularly limited, it is more preferable to use a high-strength oxidation-resistant material such as alumina in consideration of contact with an oxidizing atmosphere and strength during handling. Further, the material of the inner crucible (7) is not particularly limited, but in addition to the above-mentioned materials similar to those of the outer crucible, it is also possible to use a material with poor oxidation resistance, such as graphite.
第2図に本発明の二重構造坩堝の他の例の断面図を示す
。この形式の坩堝においては、外蓋(21)を供えた外
側坩堝(23)内に内蓋(25)を設けることにより、
二重構造を形成させている。この場合、外蓋(21)と
内蓋(25)と外側坩堝(23)とで囲まれた空間に還
元性雰囲気形成材料(27)を収容し、内蓋(25)と
外側坩堝(23)とで囲まれた空間に焼結すべき無機材
料(29)を収容する。FIG. 2 shows a sectional view of another example of the double structure crucible of the present invention. In this type of crucible, by providing an inner lid (25) inside an outer crucible (23) provided with an outer lid (21),
A double structure is formed. In this case, the reducing atmosphere forming material (27) is accommodated in a space surrounded by the outer lid (21), the inner lid (25), and the outer crucible (23), and The inorganic material (29) to be sintered is housed in the space surrounded by.
外蓋(21)と外側坩堝(23)の材質は、やはり高強
度耐酸化性材料であることを要するが、内蓋(25)の
材質は、特に限定されない。The material of the outer lid (21) and the outer crucible (23) must be high-strength, oxidation-resistant materials, but the material of the inner lid (25) is not particularly limited.
第3図に第2図に示す形式の二重構造坩堝の改良例を示
す。この坩堝においては、内蓋(25)に外i!k (
21)にまで達する程度の長いつまみ部(2G)を設け
ているので、焼結終了後に該つまみ部(26)の先端部
(28)を引き上げることにより、空間(27)に収容
した還元性雰囲気形成材料を内蓋(25)とともに取り
出すことが出来る。FIG. 3 shows an improved example of the double structure crucible of the type shown in FIG. In this crucible, the inner lid (25) has an outer i! k (
21), the reducing atmosphere contained in the space (27) can be removed by pulling up the tip (28) of the knob (26) after sintering. The forming material can be removed together with the inner lid (25).
本発明の坩堝においては、焼結すべき材料を装入した坩
堝を酸化性雰囲気炉内に配置するまでの待ち時間中の空
気の洩れ込み、酸化性雰囲気炉内での酸化性ガスの混入
などを防止するために、坩堝本体と蓋との接触を非平面
的に行なうことが好ましい。より具体的には、第4図乃
至第6図に示す如く、坩堝と蓋との接触部の断面を波形
、楔形、櫛形などとして、空気または酸化性ガスの進入
方向が直線とならない様な構造とすることが好ましい。In the crucible of the present invention, air leakage occurs during the waiting time until the crucible charged with the material to be sintered is placed in the oxidizing atmosphere furnace, and oxidizing gas is mixed in the oxidizing atmosphere furnace. In order to prevent this, it is preferable that the crucible body and the lid contact each other in a non-planar manner. More specifically, as shown in FIGS. 4 to 6, the cross section of the contact area between the crucible and the lid is wave-shaped, wedge-shaped, comb-shaped, etc., so that the direction of entry of air or oxidizing gas is not in a straight line. It is preferable that
第4図乃至第6図では、外蓋(1)と外側坩堝(3)と
の接触状態を示しているが、内蓋(5)と内側坩堝(7
)との接触部、内蓋(25)と外側坩堝(23)との接
触部などにおいても、同様な構造とすることが望ましい
。4 to 6 show the state of contact between the outer lid (1) and the outer crucible (3), but the inner lid (5) and the inner crucible (7) are shown in contact with each other.
), and the contact portion between the inner lid (25) and the outer crucible (23), etc., preferably have a similar structure.
本発明方法は、以下のようにして実施される。The method of the present invention is carried out as follows.
例えば、第1図に示す二重構造坩堝の内側坩堝(7)内
の空間に焼成すべき材料(9)を収容した後、内蓋(5
)を閉じる。次いで、外側坩堝(3)内の空間に黒鉛粉
、コークス粉などの還元性雰囲気形成材料[すなわち、
万−空気或いは酸化性雰囲気ガスなどが混入した場合に
、その酸化性成分と反応してこれを取除くための祠料]
(11)を充填し、この中に内側坩堝(7)を埋設
させ、第7図および第8図に示す容器(41)内に坩堝
全体を入れ、バルブ(43)を閉じた状態でバルブ(4
5)から脱気を行ない、バルブ(45)を閉じた状態で
、バルブ(43)からアルゴンガス、窒素ガスなどの不
活性ガスを容器(41)内に導入し、二重構造坩堝の全
体に不活性ガスを充満させることが好ましい。この脱気
および不活性ガスによる置換は、必要ならば、繰返し行
なっても良い。また、焼成すべき材料がバインダーを含
んでいて、その除去を必要とする場合には、脱脂炉で脱
脂を予め行った後、脱気および不活性性ガスの導入を行
っても良い。還元性雰囲気形成材料を充填することによ
り、坩堝内の空気量が少なくなっているので、この不活
性ガス導入は、必須ではないが、不滑性ガスの導入置換
は行なうことが好ましい。次いで、二重構造坩堝を酸化
性雰囲気炉(図示せず)に入れ、焼成を行えば良い。酸
化性雰囲気炉および焼成条件などは常法で採用するもの
と異なるところはないので、詳述しない。For example, after storing the material (9) to be fired in the space inside the inner crucible (7) of the double structure crucible shown in FIG.
) close. Next, a reducing atmosphere forming material such as graphite powder or coke powder [i.e.
10,000 - An abrasive that reacts with and removes oxidizing components when air or oxidizing atmosphere gases are mixed in]
(11), embed the inner crucible (7) therein, place the whole crucible in the container (41) shown in FIGS. 7 and 8, and close the valve (43). 4
5), and with the valve (45) closed, inert gas such as argon gas or nitrogen gas is introduced into the container (41) from the valve (43), and the entire double structure crucible is heated. Preferably, it is filled with inert gas. This degassing and replacement with inert gas may be repeated if necessary. Further, if the material to be fired contains a binder and it is necessary to remove the binder, degreasing may be performed in advance in a degreasing furnace, and then degassing and inert gas may be introduced. Since the amount of air in the crucible is reduced by filling with the reducing atmosphere forming material, the introduction of this inert gas is not essential, but it is preferable to introduce and replace the non-slip gas. Next, the double structure crucible may be placed in an oxidizing atmosphere furnace (not shown) and fired. The oxidizing atmosphere furnace, firing conditions, etc. are the same as those used in conventional methods, so they will not be described in detail.
発明の効果
本発明によれば、二重構造の坩堝の中に還元性雰囲気形
成材料が配置されているので1、酸化性雰囲気炉におい
ても、非酸化性雰囲気中で焼成すべき無機材料の焼成を
行うことが出来る。すなわち、蓋と坩堝との隙間、坩堝
の亀裂などから酸化性ガスが混入したとしても、還元性
雰囲気形成材料と酸化性成分とが反応してこれを取除く
ので、焼結製品に対する悪影響は実質上ない。Effects of the Invention According to the present invention, since the reducing atmosphere forming material is placed in the double-structured crucible, the inorganic material to be fired in the non-oxidizing atmosphere can be fired even in an oxidizing atmosphere furnace. can be done. In other words, even if oxidizing gas gets mixed in through the gap between the lid and the crucible or cracks in the crucible, the reducing atmosphere forming material and the oxidizing component react to remove it, so there is virtually no negative effect on the sintered product. Nothing better.
実施例
以下に実施例を示し、本発明の特徴とするところをより
一層明確にする。EXAMPLES Examples will be shown below to further clarify the features of the present invention.
実施例1
第1図に示す形式の二重構造の坩堝を使用して炭化珪素
焼結製品を製造した。Example 1 A silicon carbide sintered product was produced using a double-structured crucible of the type shown in FIG.
先ず、金属珪素とピッチコークスの粉末を直径約4mm
のビーズ状に造粒し、内側坩堝である黒鉛製坩堝に収容
した。First, powder of metallic silicon and pitch coke was made into a powder with a diameter of about 4 mm.
The mixture was granulated into beads and placed in a graphite crucible as an inner crucible.
次いで、外側坩堝であるより大型のアルミナ製坩堝の底
部に黒鉛粉を薄く敷き、その上に上記内側坩堝を配置し
た後、両坩堝間の空間に更に黒鉛粉を充填した。Next, a thin layer of graphite powder was spread on the bottom of a larger alumina crucible, which was the outer crucible, and the inner crucible was placed thereon, and then the space between the two crucibles was further filled with graphite powder.
次いで、蓋に真空ポンプが接続されたデシケータ−に上
記の二重構造坩堝を入れ、デシケータ−内部を減圧した
後、アルゴンガスを導入した。この減圧およびアルゴン
ガスの導入を3回繰返して、二重構造坩堝内をアルゴン
ガスに置換した。Next, the double structure crucible was placed in a desiccator whose lid was connected to a vacuum pump, and after reducing the pressure inside the desiccator, argon gas was introduced. This pressure reduction and introduction of argon gas were repeated three times to replace the inside of the double structure crucible with argon gas.
この二重構造坩堝を1500℃に昇温させた電気炉に入
れ、空気自然流通下に3時間焼成を行なった。This double structure crucible was placed in an electric furnace heated to 1500° C. and fired for 3 hours under natural air circulation.
焼成後に両坩堝間に充填した黒鉛が僅かに減少している
ことが見出されたが、焼結製品の外観および性能は、優
れたものであった。Although it was found that the graphite filled between both crucibles was slightly reduced after firing, the appearance and performance of the sintered product were excellent.
比較例1
実施例1で使用したと同様の金属珪素−ピッチビーズを
蓋付の窒化ホウ素製坩堝に入れ、真空操作可能な電気炉
に入れた。Comparative Example 1 Metallic silicon-pitch beads similar to those used in Example 1 were placed in a boron nitride crucible with a lid, and placed in an electric furnace capable of vacuum operation.
次いで、10−2トールまで減圧した後、アルゴンガス
にて1.02気圧として炉内をアルゴンガスで置換した
。Next, the pressure was reduced to 10 −2 Torr, and then the pressure was set to 1.02 atm with argon gas, and the inside of the furnace was replaced with argon gas.
次に、同圧力を保持しつつ、アルゴンガスの流通下に5
00℃で1時間脱脂した後、60℃/分の速度で150
0℃まで昇温させ、ビーズを20分間焼結した。Next, while maintaining the same pressure, the
After degreasing for 1 hour at 00°C, 150°C at a rate of 60°C/min.
The temperature was raised to 0° C. and the beads were sintered for 20 minutes.
焼結製品の外観および性能は、やはり優れたものであっ
た。The appearance and performance of the sintered products were again excellent.
実施例1および比較例1で得られた焼結体をX線回折に
供したところ、どちらの場合にも、SfCのピーク以外
に、若干過剰に使用した炭素のピークが検出されたが、
5i02とSi3N4のピークは、検出されず、両者が
同一組成であることが確認された。When the sintered bodies obtained in Example 1 and Comparative Example 1 were subjected to X-ray diffraction, in both cases, in addition to the SfC peak, a slightly excessive carbon peak was detected.
The peaks of 5i02 and Si3N4 were not detected, confirming that both had the same composition.
このことから、本発明によれば、高価な真空炉或いは不
活性ガス雰囲気炉を使用することなく、既存の酸化性雰
囲気炉を使用して、酸化性雰囲気を嫌う材料の焼成を行
なうことが出来ることが明らかである。Therefore, according to the present invention, materials that dislike an oxidizing atmosphere can be fired using an existing oxidizing atmosphere furnace without using an expensive vacuum furnace or an inert gas atmosphere furnace. That is clear.
第1図は、本発明による二重構造坩堝の一例を示す断面
図、第2図は、本発明による坩堝の他の一例を示す断面
図、第3図は、本発明による坩堝のさらに他の一例を示
す断面図、第4図乃至第6図は、本発明による坩堝の外
蓋(1)と外側坩堝(3)との接触状態を示す断面図、
第7図および第8図は、本発明方法における脱気工程及
び不活性ガスの置換工程を示す断面図である。
(1)・・・外蓋
(3)・・・外側坩堝
(5)・・・内蓋
(7)・・・内側坩堝
(9)・・・焼成すべき材料
(11)・・・還元性雰囲気形成材料
(21)・・・外蓋
(23)・・・外側坩堝
・・・内蓋
・・・内蓋つまみ部
・・・還元性雰囲気形成材料
・・・外側坩堝つまみ部
・・・焼成すべき材料
・・・つまみ部
・・・容器
・・・バルブ
・・・バルブ
予
第7図
(以 上)
第
図
第
図
第
図FIG. 1 is a cross-sectional view showing an example of a double structure crucible according to the present invention, FIG. 2 is a cross-sectional view showing another example of a crucible according to the present invention, and FIG. 3 is a cross-sectional view showing another example of a crucible according to the present invention. 4 to 6 are cross-sectional views showing an example, and FIGS. 4 to 6 are cross-sectional views showing a contact state between the outer lid (1) of the crucible and the outer crucible (3) according to the present invention,
7 and 8 are cross-sectional views showing the degassing step and the inert gas replacement step in the method of the present invention. (1)...Outer lid (3)...Outer crucible (5)...Inner lid (7)...Inner crucible (9)...Material to be fired (11)...Reducibility Atmosphere forming material (21)... Outer lid (23)... Outer crucible... Inner lid... Inner lid knob... Reducing atmosphere forming material... Outer crucible knob... Firing Materials to be used...Knobs...Container...Valve...Valve Preliminary Figure 7 (and above) Figure Figure Figure Figure
Claims (2)
雰囲気炉内において焼成する方法であって、 [a]内側空間と外側空間とを有する二重構造のの坩堝
を使用し、 [b]内側空間に焼結すべき無機材料を収容し、 [c]外側空間に還元性雰囲気形成材料を充填し、 [d]坩堝を酸化性雰囲気炉内に配置して、焼成を行な
う ことを特徴とする無機材料の焼成方法。(1) A method of firing an inorganic material to be fired in a non-oxidizing atmosphere in an oxidizing atmosphere furnace, the method comprising: [a] using a double-structured crucible having an inner space and an outer space; b) The inner space is filled with an inorganic material to be sintered, [c] the outer space is filled with a reducing atmosphere forming material, and [d] the crucible is placed in an oxidizing atmosphere furnace to perform sintering. Characteristic firing method for inorganic materials.
雰囲気炉内において焼成するに際し使用する坩堝であっ
て、焼結すべき無機材料を収容するための内側坩堝と還
元性雰囲気形成材料および内側坩堝を収容するための耐
酸化性材料製の外側坩堝とを備えていることを特徴とす
る二重構造坩堝。(2) A crucible used when an inorganic material to be sintered in a non-oxidizing atmosphere is sintered in an oxidizing atmosphere furnace, including an inner crucible for accommodating the inorganic material to be sintered and a reducing atmosphere forming material. and an outer crucible made of an oxidation-resistant material for accommodating the inner crucible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33246488A JPH02176389A (en) | 1988-12-28 | 1988-12-28 | Sintering of inorganic substance and crucible for sintering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33246488A JPH02176389A (en) | 1988-12-28 | 1988-12-28 | Sintering of inorganic substance and crucible for sintering |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02176389A true JPH02176389A (en) | 1990-07-09 |
Family
ID=18255268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33246488A Pending JPH02176389A (en) | 1988-12-28 | 1988-12-28 | Sintering of inorganic substance and crucible for sintering |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02176389A (en) |
Cited By (3)
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---|---|---|---|---|
JP2011505536A (en) * | 2007-11-14 | 2011-02-24 | チャン、チュン−チエ | Method and apparatus for manufacturing an air sensitive electrode material for application in a lithium ion battery |
US8158071B2 (en) * | 2006-04-29 | 2012-04-17 | Chun-Chieh Chang | Method and devices for producing air sensitive electrode materials for lithium ion battery applications |
JP2013537615A (en) * | 2010-07-30 | 2013-10-03 | エルジー イノテック カンパニー リミテッド | Heat treatment container for vacuum heat treatment equipment |
-
1988
- 1988-12-28 JP JP33246488A patent/JPH02176389A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8158071B2 (en) * | 2006-04-29 | 2012-04-17 | Chun-Chieh Chang | Method and devices for producing air sensitive electrode materials for lithium ion battery applications |
US8414856B2 (en) | 2006-04-29 | 2013-04-09 | Chun-Chieh Chang | Method and devices for producing air sensitive electrode materials for lithium ion battery applications |
JP2011505536A (en) * | 2007-11-14 | 2011-02-24 | チャン、チュン−チエ | Method and apparatus for manufacturing an air sensitive electrode material for application in a lithium ion battery |
EP2209925A4 (en) * | 2007-11-14 | 2017-11-22 | Chun-Chieh Chang | Method and devices for producing air sensitive electrode materials for lithium ion battery applications |
JP2013537615A (en) * | 2010-07-30 | 2013-10-03 | エルジー イノテック カンパニー リミテッド | Heat treatment container for vacuum heat treatment equipment |
US10267564B2 (en) | 2010-07-30 | 2019-04-23 | Lg Innotek Co., Ltd. | Heat treatment container for vacuum heat treatment apparatus |
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