JPH0217553U - - Google Patents

Info

Publication number
JPH0217553U
JPH0217553U JP9549688U JP9549688U JPH0217553U JP H0217553 U JPH0217553 U JP H0217553U JP 9549688 U JP9549688 U JP 9549688U JP 9549688 U JP9549688 U JP 9549688U JP H0217553 U JPH0217553 U JP H0217553U
Authority
JP
Japan
Prior art keywords
revolving
revolving member
axis
jig
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9549688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0734928Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988095496U priority Critical patent/JPH0734928Y2/ja
Publication of JPH0217553U publication Critical patent/JPH0217553U/ja
Application granted granted Critical
Publication of JPH0734928Y2 publication Critical patent/JPH0734928Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988095496U 1988-07-19 1988-07-19 処理物保持装置 Expired - Lifetime JPH0734928Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Publications (2)

Publication Number Publication Date
JPH0217553U true JPH0217553U (ru) 1990-02-05
JPH0734928Y2 JPH0734928Y2 (ja) 1995-08-09

Family

ID=31320164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988095496U Expired - Lifetime JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Country Status (1)

Country Link
JP (1) JPH0734928Y2 (ru)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005290425A (ja) * 2004-03-31 2005-10-20 Tdk Corp スパッタ蒸着装置における基板の回転機構
CN112964277A (zh) * 2021-03-05 2021-06-15 中国电子科技集团公司第四十八研究所 一种石英谐振子修平设备的多工位工件台

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10109517B1 (en) 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
WO2019210135A1 (en) * 2018-04-28 2019-10-31 Applied Materials, Inc. In-situ wafer rotation for carousel processing chambers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (ja) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド 真空蒸着装置の基体保持装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190359A (ja) * 1983-01-19 1984-10-29 マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド 真空蒸着装置の基体保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005290425A (ja) * 2004-03-31 2005-10-20 Tdk Corp スパッタ蒸着装置における基板の回転機構
CN112964277A (zh) * 2021-03-05 2021-06-15 中国电子科技集团公司第四十八研究所 一种石英谐振子修平设备的多工位工件台

Also Published As

Publication number Publication date
JPH0734928Y2 (ja) 1995-08-09

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