JPH0216458B2 - - Google Patents
Info
- Publication number
- JPH0216458B2 JPH0216458B2 JP56020177A JP2017781A JPH0216458B2 JP H0216458 B2 JPH0216458 B2 JP H0216458B2 JP 56020177 A JP56020177 A JP 56020177A JP 2017781 A JP2017781 A JP 2017781A JP H0216458 B2 JPH0216458 B2 JP H0216458B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- detector
- polarizer
- component
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010287 polarization Effects 0.000 claims description 31
- 238000005259 measurement Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 15
- 238000000691 measurement method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 2
- 238000000572 ellipsometry Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017781A JPS57135329A (en) | 1981-02-16 | 1981-02-16 | Polarization analyzing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017781A JPS57135329A (en) | 1981-02-16 | 1981-02-16 | Polarization analyzing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57135329A JPS57135329A (en) | 1982-08-20 |
JPH0216458B2 true JPH0216458B2 (de) | 1990-04-17 |
Family
ID=12019890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017781A Granted JPS57135329A (en) | 1981-02-16 | 1981-02-16 | Polarization analyzing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57135329A (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59107271A (ja) * | 1982-12-10 | 1984-06-21 | Mitsubishi Electric Corp | 光フアイバ応用センサ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036257A (de) * | 1973-05-25 | 1975-04-05 | ||
JPS51111372A (en) * | 1975-03-26 | 1976-10-01 | Masaki Yamamoto | Analyser of polarized light |
JPS5265489A (en) * | 1975-11-26 | 1977-05-30 | Sony Corp | Double refraction meter |
-
1981
- 1981-02-16 JP JP2017781A patent/JPS57135329A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5036257A (de) * | 1973-05-25 | 1975-04-05 | ||
JPS51111372A (en) * | 1975-03-26 | 1976-10-01 | Masaki Yamamoto | Analyser of polarized light |
JPS5265489A (en) * | 1975-11-26 | 1977-05-30 | Sony Corp | Double refraction meter |
Also Published As
Publication number | Publication date |
---|---|
JPS57135329A (en) | 1982-08-20 |
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